CN218482210U - Compatible flower basket with spool box - Google Patents

Compatible flower basket with spool box Download PDF

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Publication number
CN218482210U
CN218482210U CN202221935634.2U CN202221935634U CN218482210U CN 218482210 U CN218482210 U CN 218482210U CN 202221935634 U CN202221935634 U CN 202221935634U CN 218482210 U CN218482210 U CN 218482210U
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CN
China
Prior art keywords
side plate
front side
rear side
flower basket
compatible
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CN202221935634.2U
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Chinese (zh)
Inventor
朱荣飞
庄云娟
徐红林
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Shanghai Zhongxin Wafer Semiconductor Technology Co ltd
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Shanghai Zhongxin Wafer Semiconductor Technology Co ltd
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Priority to CN202221935634.2U priority Critical patent/CN218482210U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model relates to the technical field of machinery. The compatible type wafer box flower basket comprises a box body and is characterized in that the box body comprises a front side plate and a rear side plate which are arranged in front and at the back, and the front side plate and the rear side plate are connected through a connecting rod; the inner walls of the front side plate and the rear side plate are provided with slots for inserting the wafer box longitudinally; the front side plate and the rear side plate are detachably connected with clamping arms; the box body still includes the draw-in groove piece that sets up about, the preceding curb plate and the bottom of posterior lateral plate is seted up and is inserted the installing port of draw-in groove piece. The utility model discloses a put the spool box in the box body after, put and wash in cleaning equipment.

Description

Compatible flower basket with spool box
Technical Field
The utility model relates to the technical field of machinery, concretely relates to spool box flower basket.
Background
The existing silicon wafer cleaning equipment can only place silicon wafer boxes with specific sizes and bearing silicon wafers in a targeted manner. For example, a cleaning device for cleaning 8-inch silicon wafers can only place a wafer box of 8-inch silicon wafers. The same equipment can not realize the cleaning of silicon wafers with two different specifications and sizes.
When silicon wafers with different sizes are processed on a production line, cleaning equipment with different specifications needs to be started for cleaning, so that the energy consumption is high and the operation is complicated.
How to realize the cleaning of silicon wafers with different specifications by one cleaning device is a problem which needs to be solved urgently. That is, there is a need for a conversion mechanism that increases the versatility of the cleaning apparatus.
SUMMERY OF THE UTILITY MODEL
To the problem that prior art exists, the utility model provides a compatible formula spool box flower basket has solved above-mentioned at least one technical problem.
The technical scheme of the utility model is that: the compatible flower basket with the wafer box comprises a box body and is characterized in that the box body comprises a front side plate and a rear side plate which are arranged in front and at the back, and the front side plate and the rear side plate are connected through a connecting rod;
the inner walls of the front side plate and the rear side plate are provided with slots for inserting the wafer box longitudinally;
the front side plate and the rear side plate are detachably connected with clamping arms;
the box body still includes the draw-in groove piece that sets up about, the front side board and the bottom of posterior lateral plate is seted up and is inserted the installing port of draw-in groove piece.
The utility model discloses a put the spool box in the box body after, put and wash in cleaning equipment. The clamping groove sheet is matched with the clamping groove at the bottom of the cleaning equipment. The support of the box body is realized. The support of the wafer box is realized through the slot. And then realized same kind of cleaning equipment, realized directly putting of the spool box of two different dimensions through this device. Specifically, for example, the bottom of an 8-inch wafer box is directly inserted into a bottom clamping groove of a cleaning device, so that 8-inch silicon wafers are cleaned. When 6 inches of silicon wafers are needed, a wafer box storing the 6 inches of silicon wafers is placed in the device, and the device is inserted into a clamping groove at the bottom of the cleaning equipment through a clamping groove sheet.
Further preferably, the clamping arms are detachably connected to both left and right ends of the top of the front side plate and both left and right ends of the top of the rear side plate.
The clamping and the gripping of the manipulator are convenient.
Further preferably, the clamping arm is of a T-shaped structure, the clamping arm comprises a clamping part which is horizontally arranged and an installation part which is vertically arranged, and the installation part and the center of the clamping part are fixedly connected to form the T-shaped structure;
one end of the clamping part and the mounting part are detachably connected with the top and the inner side of the front side plate through screws.
The fixing effect of the clamping arm is convenient to guarantee.
Further preferably, the bottom of the clamping part is provided with a limiting groove.
The mechanical arm is convenient to be embedded into the limit groove when being lifted.
Further preferably, the front side plate and the rear side plate are both provided with a socket for inserting the connecting rod;
the connecting rod is fixed on the socket through a screw.
The assembly is convenient.
Further preferably, the front side plate and the rear side plate comprise a main side plate and a support leg which are arranged up and down, and the support leg is provided with the mounting opening;
the bottom of the main side plate is a supporting part which is horizontally arranged.
The bottom that is convenient for realize the stabilizer blade with both insert cleaning equipment of draw-in groove piece, the supporting part offsets with cleaning equipment's bottom.
Further preferably, the bottom centers of the front side plate and the rear side plate are provided with notches.
Is convenient to clean.
Further preferably, the front side plate and the rear side plate are provided with water permeable holes.
Further preferably, the front side plate and the rear side plate are arranged in front-rear mirror symmetry;
the left side and the right side of the front side plate are provided with protrusions protruding backwards;
the protrusion is provided with a step protruding backwards, and the step is connected with the connecting rod.
The inner sides of the steps at the left and right sides are used for contacting the left and right sides of the sheet box. The protrusion is used for providing the reinforcing ribs on the front side and the rear side of the wafer box for abdicating.
Drawings
Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of another view angle according to embodiment 1 of the present invention.
In the figure, 1 is a front side plate, 2 is a rear side plate, 3 is a connecting rod, 4 is a clamping groove sheet, and 5 is a clamping arm.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1 and 2, in the embodiment 1, the compatible flower basket of the wafer box comprises a box body, the box body comprises a front side plate 1 and a rear side plate 2 which are arranged in front and back, and the front side plate 1 and the rear side plate 2 are connected through a connecting rod 3; the inner walls of the front side plate 1 and the rear side plate 2 are provided with slots for inserting the wafer box longitudinally; the front side plate 1 and the rear side plate 2 are detachably connected with clamping arms 5; the box body still includes the draw-in groove piece 4 that sets up about, and the installing port that inserts draw-in groove piece 4 is seted up to the bottom of preceding curb plate 1 and posterior lateral plate 2. The utility model discloses a put the spool box in the box body after, put and wash in cleaning equipment. The clamping groove sheet 4 is matched with the clamping groove at the bottom of the cleaning equipment. The support of the box body is realized. The support of the wafer box is realized through the slot. And then realized same kind of cleaning equipment, realized directly putting of the spool box of two different dimensions through this device. Specifically, for example, the bottom of an 8-inch wafer box is directly inserted into a bottom clamping groove of a cleaning device, so that the 8-inch silicon wafer is cleaned. When 6 inches of silicon wafers are needed, a wafer box storing the 6 inches of silicon wafers is placed in the device, and the device is inserted into a clamping groove at the bottom of the cleaning equipment through a clamping groove sheet 4.
The left and right ends of the top of the front side plate 1 and the left and right ends of the top of the rear side plate 2 are detachably connected with clamping arms 5. The clamping and grasping of the manipulator are facilitated. The clamping arm 5 is of a T-shaped structure, the clamping arm 5 comprises a horizontally arranged clamping part and a vertically arranged mounting part, and the mounting part is fixedly connected with the center of the clamping part to form a T-shaped structure; one end of the clamping part and the mounting part are detachably connected with the top and the inner side of the front side plate 1 through screws. The fixing effect of the holding arm 5 is facilitated to be ensured. The bottom of the clamping part is provided with a limiting groove. Embedding spacing groove when the arm of being convenient for promotes.
The front side plate 1 and the rear side plate 2 are both provided with a socket for inserting the connecting rod 3; the connecting rod 3 is fixed in the socket by a screw. The assembly is convenient.
The front side plate 1 and the rear side plate 2 comprise a main side plate and support legs which are arranged up and down, and mounting openings are formed in the support legs; the bottom of the main side plate is a supporting part which is horizontally arranged. The bottom that cleaning equipment was inserted to both stabilizer blade and draw-in groove piece 4 is convenient for realize, and the supporting part offsets with cleaning equipment's bottom. The bottom of the cleaning equipment is provided with a cushion block for supporting the supporting part. The slot clamping sheet is propped against the side wall of the cushion block. The opening of the mounting opening of the front side plate faces backwards. The opening of the mounting opening of the rear side plate faces forwards. Or the slots of the front side plate and the rear side plate penetrate through the front and the rear. Alternatively, other forms of mounting openings are used.
The centers of the bottoms of the front side plate 1 and the rear side plate 2 are provided with notches. Is convenient to clean. The front side plate 1 and the rear side plate 2 can be provided with water permeable holes. The front side plate 1 and the rear side plate 2 are arranged in a front-back mirror symmetry mode; the left side and the right side of the front side plate 1 are provided with protrusions protruding backwards; the protrusion is provided with a step protruding backwards, and the step is connected with the connecting rod 3. The inner sides of the steps at the left and right sides are used for contacting the left and right sides of the sheet box. The outline of the right side wall of the step positioned on the left side and the outline of the left side wall of the step positioned on the right side are matched with the outline of the left side wall and the outline of the right side wall of the wafer box. Facilitating the longitudinal insertion of the wafer box. The right side wall of the step on the left side comprises a vertical surface which is vertically arranged and an arc surface which is arranged in an arc shape from top to bottom. The protrusion is used for providing the strengthening rib abdicating of the front side and the rear side of the wafer box.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (9)

1. The compatible flower basket with the wafer box comprises a box body and is characterized in that the box body comprises a front side plate and a rear side plate which are arranged in front and at the back, and the front side plate and the rear side plate are connected through a connecting rod;
the inner walls of the front side plate and the rear side plate are provided with slots for longitudinally inserting the wafer boxes;
the front side plate and the rear side plate are detachably connected with clamping arms;
the box body still includes the draw-in groove piece that sets up about, the front side board and the bottom of posterior lateral plate is seted up and is inserted the installing port of draw-in groove piece.
2. The compatible formula spool box flower basket of claim 1, characterized in that: the left end and the right end of the top of the front side plate and the left end and the right end of the top of the rear side plate are detachably connected with the clamping arms.
3. The compatible formula spool box flower basket of claim 1, characterized in that: the clamping arm is of a T-shaped structure and comprises a clamping part arranged horizontally and an installation part arranged vertically, and the installation part is fixedly connected with the center of the clamping part to form the T-shaped structure;
one end of the clamping part and the mounting part are detachably connected with the top and the inner side of the front side plate respectively through screws.
4. The compatible style wafer cassette flower basket of claim 3, wherein: the bottom of the clamping part is provided with a limiting groove.
5. The compatible style wafer cassette flower basket of claim 1, wherein: the front side plate and the rear side plate are both provided with sockets into which the connecting rods are inserted;
the connecting rod is fixed on the socket through a screw.
6. The compatible style wafer cassette flower basket of claim 1, wherein: the front side plate and the rear side plate comprise a main side plate and support legs which are arranged up and down, and the support legs are provided with the mounting openings;
the bottom of the main side plate is a supporting part which is horizontally arranged.
7. The compatible formula spool box flower basket of claim 1, characterized in that: the centers of the bottoms of the front side plate and the rear side plate are provided with notches.
8. The compatible style wafer cassette flower basket of claim 1, wherein: and the front side plate and the rear side plate are provided with water permeable holes.
9. The compatible style wafer cassette flower basket of claim 1, wherein: the front side plate and the rear side plate are arranged in a front-rear mirror symmetry mode;
the left side and the right side of the front side plate are provided with protrusions protruding backwards;
the protrusion is provided with a step protruding backwards, and the step is connected with the connecting rod.
CN202221935634.2U 2022-07-26 2022-07-26 Compatible flower basket with spool box Active CN218482210U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221935634.2U CN218482210U (en) 2022-07-26 2022-07-26 Compatible flower basket with spool box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221935634.2U CN218482210U (en) 2022-07-26 2022-07-26 Compatible flower basket with spool box

Publications (1)

Publication Number Publication Date
CN218482210U true CN218482210U (en) 2023-02-14

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ID=85164644

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221935634.2U Active CN218482210U (en) 2022-07-26 2022-07-26 Compatible flower basket with spool box

Country Status (1)

Country Link
CN (1) CN218482210U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116974141A (en) * 2023-09-22 2023-10-31 贵州华龙电子设备有限公司 Multi-specification wafer spin-drying device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116974141A (en) * 2023-09-22 2023-10-31 贵州华龙电子设备有限公司 Multi-specification wafer spin-drying device
CN116974141B (en) * 2023-09-22 2023-12-15 贵州华龙电子设备有限公司 Multi-specification wafer spin-drying device

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