CN218481365U

CN218481365U - Electron chemicals particle test feed arrangement

Info

Publication number: CN218481365U
Application number: CN202221822496.7U
Authority: CN
Inventors: 姚玲; 魏浩
Original assignee: Jianghuawei Zhenjiang Electronic Material Co ltd
Current assignee: Jianghuawei Zhenjiang Electronic Material Co ltd
Priority date: 2022-07-15
Filing date: 2022-07-15
Publication date: 2023-02-14
Anticipated expiration: 2032-07-15

Abstract

The utility model discloses an electronic chemicals particle test feed arrangement, including the buffer tank, feeding conveyor constructs, pressurization bubble removal mechanism, feeding conveyor constructs the outside of locating the buffer tank, feeding conveyor constructs including the connecting pipe, the outside of buffer tank is equipped with cooling coil, one side that the connecting pipe was kept away from to the buffer tank is connected with the discharging pipe, pressurization bubble removal mechanism locates one side that the discharging pipe was kept away from to the buffer tank, pressurization bubble removal mechanism is including carrying the forcing pipe, one side that the buffer tank was kept away from to the carrying the forcing pipe is connected with air entrainment control valve body, be equipped with the valve plate that admits air in the air entrainment control valve body, one side of the valve plate that admits air is rotated and is connected with the valve plate control lever. The utility model discloses a set up corresponding electronic chemicals particle test feed arrangement, through pressurize and cooling down the cooling to electronic chemicals, reduced the bubble that produces in the electronic chemicals feed process, improved the accuracy that carries out particle test to electronic chemicals.

Description

Electron chemicals particle test feed arrangement

Technical Field

The utility model belongs to the technical field of the electronic chemicals particle test feeding, concretely relates to electronic chemicals particle test feed arrangement.

Background

The electronic chemicals are also called electronic chemical raw materials, generally refer to special chemicals and chemical materials used in the electronic industry, and can be divided into the following components according to different purposes: substrates, photoresists, plating chemicals, packaging materials, high purity reagents, specialty gases, solvents, pre-cleaning dopants, and auxiliary materials.

The particle testing equipment is used for detecting particles of the electronic chemicals in the production and processing process of the electronic chemicals, the particles of the electronic chemicals are important indexes of the electronic chemicals and have important influence on the manufacturing yield of subsequent semiconductors, the currently common particle testing equipment irradiates lasers such as infrared rays to the electronic chemicals in the using process, and the granularity of the electronic chemicals is judged according to the reflection state of the irradiated lasers by the light scattering laser photometer.

The existing electronic chemicals lack a corresponding feeding device when particle testing is carried out, more bubbles are contained in electronic chemical materials, and the bubbles can refract irradiation laser emitted by particle testing equipment of the electronic chemicals, so that the particle testing equipment of the electronic chemicals easily misjudges the bubbles contained in liquid electronic chemicals as particles, and the accuracy of particle testing on the electronic chemicals is reduced.

Therefore, in view of the above technical problems, there is a need to provide an electronic chemical particle testing and feeding device.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an electron chemicals particle test feed arrangement to solve among the prior art electron chemicals particle test process lack corresponding feed arrangement's problem.

In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:

an e-chemical particle testing and feeding device, comprising: the device comprises a buffer tank, a feeding and conveying mechanism and a pressurizing and defoaming mechanism;

the feeding and conveying mechanism is arranged on the outer side of the buffer tank and comprises a connecting pipe, a cooling coil is arranged on the outer side of the buffer tank, and a discharging pipe is connected to one side, away from the connecting pipe, of the buffer tank;

the pressurization removes bubble mechanism and locates one side that the discharging pipe was kept away from to the buffer tank, pressurization removes bubble mechanism is including carrying the forcing pipe, carry one side that the buffer tank was kept away from to the forcing pipe and be connected with the air entrainment control valve body, be equipped with the valve plate that admits air in the air entrainment control valve body, one side of admitting air valve plate is rotated and is connected with the valve plate control lever.

Further, one side that the surge tank was kept away from to the connecting pipe is equipped with the inlet pipe, is convenient for add the electronic chemicals that need carry out the test in to the surge tank through the inlet pipe, be connected with electronic chemicals and carry the valve body between inlet pipe and the connecting pipe, electronic chemicals carries the valve body to play the effect of intercommunication inlet pipe and connecting pipe, is convenient for carry the conducting state of valve body to the conducting state of inlet pipe and connecting pipe through control electronic chemicals and play the control action, be equipped with the control valve plate in the electronic chemicals carries the valve body, be convenient for carry the conducting state of valve body to electronic chemicals through the removal of control valve plate and play the control action, one side of control valve plate is rotated and is connected with adjusting screw, adjusting screw and electronic chemicals carry valve body threaded connection are convenient for play the effect of mobile control to the control valve plate through the mode of rotatory adjusting screw.

Furthermore, one side of the discharging pipe, which is far away from the buffer tank, is provided with a guide pipe, so that the electronic chemicals in the buffer tank can be conveyed and guided out through the guide pipe, a particle feeding instrument valve body is connected between the guide pipe and the discharging pipe, the particle feeding instrument valve body can be communicated with the guide pipe and the discharging pipe, a plugging valve plate is arranged in the particle feeding instrument valve body, so that the conduction state of the particle feeding instrument valve body can be controlled through the plugging valve plate, the material output state of the guide pipe can be controlled, one side of the plugging valve plate is rotatably connected with a control screw rod, the control screw rod is in threaded connection with the particle feeding instrument valve body, and the plugging valve plate can be controlled in a moving mode through rotating the control screw rod.

Furthermore, a filter is connected between the gas filling control valve body and the conveying pressurization pipe, the filter plays a role in supporting and limiting the gas filter screen, and the gas filter screen is arranged in the filter, so that the gas conveyed in the filter can be conveniently filtered through the gas filter screen.

Furthermore, one side of the gas filling control valve body, which is far away from the filter, is connected with a pressure reducing valve body, the pressure reducing valve body plays a role in communicating the gas inlet connecting pipe with the gas filling control valve body, a valve core is arranged in the pressure reducing valve body, the valve core is convenient to move to control the conducting and conveying state of the pressure reducing valve body, a supporting spring is connected between the valve core and the pressure reducing valve body, the supporting spring plays a role in connecting the valve core with the pressure reducing valve body, and the supporting spring is convenient to shrink and reset to support the valve core in a limiting manner.

Further, one side that supporting spring was kept away from to the case is equipped with the pressure regulating spring, is convenient for play the control effect to the decompression state of decompression valve body through the compression state of control pressure regulating spring, be connected with the pressure reducing valve membrane between pressure regulating spring and the case, play pressure balance's effect to the decompression valve body through the mode that the pressure reducing valve membrane removed under the fluidic effect in the decompression valve body, one side that the pressure reducing valve membrane was kept away from to the pressure regulating spring is connected with the pressure regulating valve rod, pressure regulating valve rod and decompression valve body threaded connection are convenient for play the control effect to the compression state of pressure regulating spring through the rotation of control pressure regulating valve rod, the one end that the air entrainment control valve body was kept away from to the decompression valve body is connected with the connecting pipe that admits air, is convenient for carry pressurized gas to the decompression valve body through the connecting pipe.

Compared with the prior art, the utility model has the advantages of it is following:

the utility model discloses a set up corresponding electron chemicals particle test feed arrangement, through pressurizeing and cooling down the cooling to the electron chemicals, reduced the bubble that produces in the electron chemicals feed process, improved the accuracy that carries out the particle test to the electron chemicals.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a perspective view of an electronic chemical particle testing and feeding device according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a part of an electronic chemical particle testing and feeding device according to an embodiment of the present invention;

FIG. 3 is a schematic view of the structure at A in FIG. 2;

fig. 4 is a schematic structural diagram at B in fig. 2.

In the figure: 1. the device comprises a buffer tank, 2 parts of a feeding and conveying mechanism, 201 parts of a connecting pipe, 202 parts of a cooling coil pipe, 203 parts of a discharging pipe, 204 parts of a feeding pipe, 205 parts of an electronic chemical conveying valve body, 206 parts of a control valve plate, 207 parts of an adjusting screw rod, 208 parts of a guiding pipe, 209 parts of a particle feeding instrument valve body, 210 parts of a blocking valve plate, 211 parts of a control screw rod, 3 parts of a pressurizing and defoaming mechanism, 301 parts of a conveying and pressurizing pipe, 302 parts of a gas filling control valve body, 303 parts of a gas inlet valve plate, 304 parts of a valve plate control rod, 305 parts of a filter, 306 parts of a gas filtering net, 307 parts of a pressure reducing valve body, 308 parts of a valve core, 309 parts of a supporting spring, 310 parts of a pressure regulating spring, 311 parts of a pressure reducing valve film, 312 parts of a pressure regulating valve rod, 313 parts of a gas inlet connecting pipe.

Detailed Description

The present invention will be described in detail below with reference to embodiments shown in the drawings. However, the present invention is not limited to the embodiments, and structural, method, or functional changes that can be made by those skilled in the art according to the embodiments are all included in the scope of the present invention.

The utility model discloses an electron chemicals particle test feed arrangement, refer to fig. 1-4 and show, including buffer tank 1, feeding conveying mechanism 2, pressurization bubble removal mechanism 3.

Specifically, the inboard of buffer tank 1 is equipped with the polytetrafluoroethylene inside lining, sets up the polytetrafluoroethylene inside lining through the inner wall at buffer tank 1 and can improve buffer tank 1's safety in utilization, and simultaneously, polytetrafluoroethylene has the very low condition of coefficient of friction, can reduce the condition that buffer tank 1 is stained with the electron chemicals material on the inner wall in the use through setting up the polytetrafluoroethylene inside lining.

Preferably, explosion-proof tank is selected for use as buffer tank 1, is convenient for improve the feeding stability of electron chemicals.

Referring to fig. 1, the feeding and conveying mechanism 2 is disposed outside the buffer tank 1, and the feeding and conveying mechanism 2 includes a connecting pipe 201, so that the connecting pipe 201 can facilitate the addition of the electrochemical chemical into the buffer tank 1.

Referring to fig. 1, a cooling coil 202 is arranged outside the buffer tank 1, the buffer tank 1 is cooled by conveying cooling fluid into the cooling coil 202, and the electronic chemical material stored in the buffer tank 1 is cooled by cooling the buffer tank 1, so that the mobility of molecules of the electronic chemical material is reduced, and the generation of electronic chemical bubbles in the buffer tank 1 is reduced.

Referring to fig. 1, a discharge pipe 203 is connected to a side of the buffer tank 1 away from the connection pipe 201, so that the electronic chemicals in the buffer tank 1 can be conveniently discharged and conveyed through the discharge pipe 203.

Specifically, the discharging pipe 203 is connected to a particle testing device, the particle testing device actively extracts the material in the discharging pipe 203 during the use process, and the active extraction of the material by the particle testing device is common knowledge of a person skilled in the art, and is not described herein again.

Referring to fig. 2, a feeding pipe 204 is disposed on a side of the connecting pipe 201 away from the buffer tank 1, so that the electronic chemicals to be tested can be added into the buffer tank 1 through the feeding pipe 204.

Specifically, during the actual use, a feeding pump is connected to a side of the feeding pipe 204 away from the buffer tank 1, and the feeding pump is used for pressurizing and conveying the conveyed materials, and the conveying of the materials by the feeding pump is common knowledge of those skilled in the art.

Referring to fig. 2, an e-chemical delivery valve 205 is connected between the feeding pipe 204 and the connecting pipe 201, and the e-chemical delivery valve 205 plays a role in communicating the feeding pipe 204 with the connecting pipe 201, so as to control the communication state of the feeding pipe 204 and the connecting pipe 201 by controlling the communication state of the e-chemical delivery valve 205.

Referring to fig. 2, a control valve plate 206 is disposed in the electrochemical delivery valve body 205, so that the conductive state of the electrochemical delivery valve body 205 can be controlled by the movement of the control valve plate 206.

Referring to fig. 2, an adjusting screw 207 is rotatably connected to one side of the control valve plate 206, and the adjusting screw 207 is in threaded connection with the e-chemistry conveying valve body 205, so that the control valve plate 206 is controlled to move by rotating the adjusting screw 207.

Referring to fig. 2, a guide tube 208 is disposed on a side of the discharge tube 203 away from the buffer tank 1, so that the electronic chemicals in the buffer tank 1 can be transported and discharged through the guide tube 208.

Referring to fig. 2, a particle inlet valve 209 is connected between the guide tube 208 and the discharge tube 203, and the particle inlet valve 209 functions to communicate the guide tube 208 and the discharge tube 203.

Referring to fig. 2, a blocking valve plate 210 is arranged in the particle feeder valve body 209, so that the blocking valve plate 210 can control the conduction state of the particle feeder valve body 209, and thus the material output state of the guide tube 208 can be controlled.

Referring to fig. 2, one side of the blocking valve plate 210 is rotatably connected with a control screw 211, and the control screw 211 is in threaded connection with the particle feeding instrument valve body 209, so that the blocking valve plate 210 is controlled to move by rotating the control screw 211.

Referring to fig. 1, the pressurizing and defoaming mechanism 3 is disposed on one side of the buffer tank 1 away from the discharge pipe 203, and the pressurizing and defoaming mechanism 3 exerts a pressurizing effect on the buffer tank 1, so that when the pressure in the buffer tank 1 is increased, the external force exerted on the electronic chemical material stored in the buffer tank 1 is increased, and the defoaming effect on the electronic chemical in the buffer tank 1 is exerted.

Referring to fig. 2-3, the pressure bubble removing mechanism 3 includes a delivery pressure pipe 301, and the delivery pressure pipe 301 is used for communicating the filter 305 with the buffer tank 1, so that the gas in the filter 305 is delivered to the buffer tank 1 under the action of the delivery pressure pipe 301.

Wherein, the side of the conveying pressurizing pipe 301 far away from the filter 305 is connected with an emptying valve, which is convenient for emptying the conveying pressurizing pipe 301 and improves the use safety of the conveying pressurizing pipe 301.

Referring to fig. 2-3, an air-entrapping control valve body 302 is connected to a side of the delivery pressurization pipe 301 away from the buffer tank 1, and the air-entrapping control valve body 302 serves to communicate the pressure reduction valve body 307 with the filter 305.

Referring to fig. 2 to 3, a gas inlet valve plate 303 is arranged in the gas filling control valve body 302, and the gas inlet valve plate 303 controls the plugging state of the gas filling control valve body 302, so that the control of the conducting state of the gas filling control valve body 302 is facilitated by controlling the movement of the gas inlet valve plate 303.

Referring to fig. 2 to 3, a valve plate lever 304 is rotatably connected to one side of the intake valve plate 303, and the movement state of the intake valve plate 303 is controlled by the rotation of the valve plate lever 304.

Referring to fig. 2-3, a filter 305 is connected between the gas filling control valve body 302 and the delivery pressurization pipe 301, and the filter 305 plays a role in supporting and limiting a gas filter screen 306.

Referring to fig. 2-3, a gas filter 306 is disposed in the filter 305, so that the gas delivered from the filter 305 is filtered by the gas filter 306.

Referring to fig. 2-4, a pressure reducing valve body 307 is connected to a side of the aeration control valve body 302 away from the filter 305, and the pressure reducing valve body 307 is used for communicating the air inlet connecting pipe 313 with the aeration control valve body 302.

Referring to fig. 2-4, a valve core 308 is disposed in the pressure reducing valve body 307, so that the conducting and conveying state of the pressure reducing valve body 307 can be controlled by the movement of the valve core 308.

Referring to fig. 2-4, a support spring 309 is connected between the valve element 308 and the pressure reducing valve body 307, and the support spring 309 plays a role in connecting the valve element 308 and the pressure reducing valve body 307, so that the valve element 308 is supported and limited by the contraction and return of the support spring 309.

As shown in fig. 2-4, a pressure regulating spring 310 is disposed on a side of the valve core 308 away from the supporting spring 309, so as to control a pressure reducing state of the pressure reducing valve body 307 by controlling a compression state of the pressure regulating spring 310.

Referring to fig. 2-4, a pressure reducing valve film 311 is connected between the pressure regulating spring 310 and the valve core 308, the pressure reducing valve 307 is pressure balanced by the way that the pressure reducing valve film 311 moves under the action of fluid in the pressure reducing valve 307, and a pressure regulating valve rod 312 is connected to one side of the pressure regulating spring 310 away from the pressure reducing valve film 311.

Referring to fig. 2 to 4, the pressure-regulating valve rod 312 is threadedly coupled to the pressure-reducing valve body 307, so that the compression state of the pressure-regulating spring 310 is controlled by controlling the rotation of the pressure-regulating valve rod 312.

As shown in fig. 2 to 4, an inlet connection pipe 313 is connected to an end of the pressure reducing valve body 307 away from the gas filling control valve body 302, so as to deliver the pressurized gas into the pressure reducing valve body 307 through the inlet connection pipe 313.

Wherein, the leading-in pressurized gas of air inlet connection pipe 313 department is nitrogen gas, and nitrogen gas has the stable advantage of chemical property, and through the mode of carrying nitrogen gas to buffer tank 1, can play the effect of supplementary cooling to the electron chemistry article material of depositing in the buffer tank 1 simultaneously.

Specifically, the intake connection pipe 313 is connected to a nitrogen gas delivery tank during actual use, and nitrogen gas required for pressurization is delivered into the intake connection pipe 313 through the nitrogen gas delivery tank.

When the device is used specifically, the control valve plate 206 is controlled to move by rotating the adjusting screw 207, the feed pipe 204 and the connecting pipe 201 are communicated under the action of the electronic chemical conveying valve body 205 by controlling the movement of the valve plate 206, the electronic chemical is conveyed into the buffer tank 1 under the action of the feed pipe 204, the electronic chemical conveying valve body 205 and the connecting pipe 201, and the electronic chemical stored in the buffer tank 1 is cooled and defoamed by conveying cooling liquid into the cooling coil 202;

meanwhile, the air inlet valve plate 303 is movably controlled by controlling the rotation of the valve plate control rod 304, the conduction state of the air-entrapping control valve body 302 is controlled by the movement of the air inlet valve plate 303, the pressurized air is conveyed into the filter 305 under the action of the air inlet connecting pipe 313, the pressure reduction valve body 307 and the air-entrapping control valve body 302, the pressurized air is conveyed into the buffer tank 1 through the conveying pressurization pipe 301 after being filtered by the air filter screen 306, and the electronic chemicals are defoamed by pressurizing the electronic chemicals in the buffer tank 1, so that the accuracy of particle testing of the electronic chemicals by the particle testing equipment is improved.

According to the technical scheme provided by the utility model, the utility model discloses following beneficial effect has:

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. An electronic chemical particle testing and feeding device is characterized by comprising:

a buffer tank (1);

the feeding conveying mechanism (2) is arranged on the outer side of the buffer tank (1), the feeding conveying mechanism (2) comprises a connecting pipe (201), a cooling coil (202) is arranged on the outer side of the buffer tank (1), and a discharging pipe (203) is connected to one side, away from the connecting pipe (201), of the buffer tank (1);

pressurization bubble removal mechanism (3) are located one side of discharging pipe (203) is kept away from in buffer tank (1), pressurization bubble removal mechanism (3) are including carrying forcing pipe (301), carry one side that forcing pipe (301) kept away from buffer tank (1) and be connected with air entrainment control valve body (302), be equipped with air intake valve plate (303) in air entrainment control valve body (302), one side of air intake valve plate (303) is rotated and is connected with valve plate control lever (304).

2. The electronic chemical particle testing and feeding device as claimed in claim 1, wherein a feeding pipe (204) is arranged on one side of the connecting pipe (201) far away from the buffer tank (1), an electronic chemical conveying valve body (205) is connected between the feeding pipe (204) and the connecting pipe (201), a control valve plate (206) is arranged in the electronic chemical conveying valve body (205), an adjusting screw (207) is rotatably connected to one side of the control valve plate (206), and the adjusting screw (207) is in threaded connection with the electronic chemical conveying valve body (205).

3. The electronic chemical particle testing and feeding device of claim 1, wherein a guide pipe (208) is arranged on one side of the discharge pipe (203) far away from the buffer tank (1), a particle feeding instrument valve body (209) is connected between the guide pipe (208) and the discharge pipe (203), a blocking valve plate (210) is arranged in the particle feeding instrument valve body (209), a control screw (211) is rotatably connected to one side of the blocking valve plate (210), and the control screw (211) is in threaded connection with the particle feeding instrument valve body (209).

4. An electronic chemical particle testing and feeding device as claimed in claim 1, wherein a filter (305) is connected between the gas filling control valve body (302) and the conveying pressurization pipe (301), and a gas filter screen (306) is arranged in the filter (305).

5. The electronic chemical particle testing and feeding device of claim 4, wherein a pressure reducing valve body (307) is connected to one side of the gas filling control valve body (302) far away from the filter (305), a valve core (308) is arranged in the pressure reducing valve body (307), and a supporting spring (309) is connected between the valve core (308) and the pressure reducing valve body (307).

6. The electronic chemical particle testing and feeding device of claim 5, wherein a pressure regulating spring (310) is arranged on one side, away from a supporting spring (309), of the valve core (308), a pressure reducing valve film (311) is connected between the pressure regulating spring (310) and the valve core (308), a pressure regulating valve rod (312) is connected to one side, away from the pressure reducing valve film (311), of the pressure regulating spring (310), the pressure regulating valve rod (312) is in threaded connection with a pressure reducing valve body (307), and an air inlet connecting pipe (313) is connected to one end, away from the air-entrapping control valve body (302), of the pressure reducing valve body (307).