CN218469759U - Disc surface measuring tool - Google Patents

Disc surface measuring tool Download PDF

Info

Publication number
CN218469759U
CN218469759U CN202222834677.8U CN202222834677U CN218469759U CN 218469759 U CN218469759 U CN 218469759U CN 202222834677 U CN202222834677 U CN 202222834677U CN 218469759 U CN218469759 U CN 218469759U
Authority
CN
China
Prior art keywords
flat plate
measuring
disc
flat board
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202222834677.8U
Other languages
Chinese (zh)
Inventor
王海军
薛佳伟
薛佳勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin Zhongjing Semiconductor Material Co ltd
Original Assignee
Tianjin Zhongjing Semiconductor Material Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin Zhongjing Semiconductor Material Co ltd filed Critical Tianjin Zhongjing Semiconductor Material Co ltd
Priority to CN202222834677.8U priority Critical patent/CN218469759U/en
Application granted granted Critical
Publication of CN218469759U publication Critical patent/CN218469759U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

The disc surface measuring tool comprises a measuring frame, wherein the measuring frame comprises a back plate (1) and a flat plate (2), the bottom of the back plate (1) is connected with one side of the flat plate (2), two adjustable screws (3) are embedded at one end of the flat plate (2), one adjustable screw (3) is embedded at the other end of the flat plate (2), the three adjustable screws (3) are not in a straight line, a dial indicator (4) is installed on the flat plate (2), and a measuring rod of the dial indicator (4) penetrates through the flat plate (2); the five dial indicators (4) are uniformly arranged on the flat plate (2). The detection of the surface of the grinding disc is realized, so that the surface of the grinding disc can be trimmed in time, and the yield of the monocrystalline silicon wafer is kept at a higher level in the grinding process.

Description

Disc surface measuring tool
Technical Field
The utility model relates to a tooling device, more specifically the utility model relates to a frock is measured to disc that says so.
Background
During the grinding process of the monocrystalline silicon wafer, the local unevenness of the disc surface of the grinding disc can be caused, and the local unevenness of the disc surface of the grinding disc can cause the conditions of yield reduction or fragmentation and the like of the monocrystalline silicon wafer in the grinding process. However, currently, there is no measuring tool for detecting the disk surface; therefore, a testing tool is needed to measure the quality of the disc surface so as to facilitate timely surface modification of the grinding disc.
Disclosure of Invention
An object of the utility model is to provide a frock is measured to disc to the above-mentioned problem that exists among the prior art.
To achieve the above purpose, the technical solution of the present invention is: the utility model provides a frock is measured to disc, includes the measuring rack, the measuring rack include backplate and flat board, backplate bottom and flat board one side connect, dull and stereotyped one end inlayed two screws that can reconcile, the flat board other end has inlayed a screw that can reconcile, and these three screws that can reconcile are not on a straight line, the flat board on install the percentage table, the measuring stick of percentage table passes dull and stereotyped 2.
The measuring frame is made of angle iron, and the thickness of the back plate and the plate is about 12 cm.
The five dial indicators are uniformly arranged on the flat plate.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a to the detection of grinding disc quotation to in time maintain the surface of grinding disc, thereby guaranteed that monocrystalline silicon piece becomes the product rate and keeps at higher level in the grinding process.
Drawings
Fig. 1 is a schematic structural view of the present invention.
In the figure: the back plate 1, the flat plate 2, the screws 3 and the dial indicator 4.
Detailed Description
The invention is described in further detail below with reference to the following description of the drawings and the detailed description.
Referring to fig. 1, the disc surface measuring tool comprises a measuring frame, wherein the measuring frame comprises a back plate 1 and a flat plate 2, and the bottom of the back plate 1 is connected with one side of the flat plate 2. Two adjustable screws 3 are embedded at one end of the flat plate 2, one adjustable screw 3 is embedded at the other end of the flat plate 2, and the three adjustable screws 3 are not in the same straight line. The flat plate 2 is provided with a dial indicator 4, and a measuring rod of the dial indicator 4 penetrates through the flat plate 2.
Referring to fig. 1, the measuring rack is made of angle iron, and the thickness of the back plate 1 and the thickness of the flat plate 2 are both about 12 cm.
Referring to fig. 1, five dial indicators 4 are uniformly arranged on the flat plate 2.
Referring to fig. 1, during manufacturing, firstly, an angle iron with the length of 1.2m is manufactured as a measuring frame; the thickness of the angle iron is chosen to be 12cm, so that the strength is large enough not to deform. Two adjustable screws 3 are embedded at one end of a flat plate 2 of a measuring frame made of angle iron, one adjustable screw 3 is embedded at the other end of the flat plate 2, and the principle that three points determine a plane is utilized, so that the measuring frame is stably placed on a processed marble table board. The plate 2 was then equally divided into six equal parts, the middle five points were punched with holes 6mm in diameter, and the measuring rod of the dial indicator 4 was passed through the plate 2, thereby securing the dial indicator 4 to the plate 2.
Referring to fig. 1, before measurement, the measurement tool is placed on a marble table with excellent flatness, and three screws 3 are adjusted. Then, the dial indicators 4 are sequentially adjusted, each dial indicator 4 needs to be adjusted to be at the position of 0, the operation is stable for 10 minutes, and if each dial indicator 4 is unchanged, the measurement preparation requirements can be met; if the change occurs, the adjustment is continued to a steady state. Finally, the measuring tool is placed on a grinding disc to be detected, the disc shape is judged according to the corresponding reading of each dial indicator 4, then each point is gradually moved to measure, the record is well made or the corresponding mark is well made on the grinding disc, and then the grinding disc is trimmed according to the measured condition. The detection of the surface of the grinding disc is realized, so that the surface of the grinding disc can be trimmed timely.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments shown and described. To the utility model belongs to the technical field of ordinary technical personnel, do not deviate from the utility model discloses under the prerequisite of design, can also make a plurality of simple deductions or replacement, above-mentioned structure should all be regarded as belonging to the utility model discloses a protection scope.

Claims (3)

1. The utility model provides a frock is measured to disc which characterized in that: including measuring rack, measuring rack include backplate (1) and flat board (2), backplate (1) bottom and flat board (2) one side connect, flat board (2) one end inlay two screws (3) that can adjust, flat board (2) other end inlays screw (3) that can adjust, and this three screws (3) that can adjust are not on a straight line, flat board (2) on install percentage table (4), the measuring stick of percentage table (4) passes flat board (2).
2. The disc surface measuring tool according to claim 1, characterized in that: the measuring rack is made of angle iron, and the thicknesses of the back plate (1) and the flat plate (2) are both about 12 cm.
3. The disc surface measuring tool according to claim 1, characterized in that: the five dial indicators (4) are uniformly arranged on the flat plate (2).
CN202222834677.8U 2022-10-27 2022-10-27 Disc surface measuring tool Active CN218469759U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222834677.8U CN218469759U (en) 2022-10-27 2022-10-27 Disc surface measuring tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222834677.8U CN218469759U (en) 2022-10-27 2022-10-27 Disc surface measuring tool

Publications (1)

Publication Number Publication Date
CN218469759U true CN218469759U (en) 2023-02-10

Family

ID=85147983

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222834677.8U Active CN218469759U (en) 2022-10-27 2022-10-27 Disc surface measuring tool

Country Status (1)

Country Link
CN (1) CN218469759U (en)

Similar Documents

Publication Publication Date Title
CN202622493U (en) On-line measuring instrument for crankshaft grinding machine
CN112066853B (en) Readable measurement method for profile of blade
CN218469759U (en) Disc surface measuring tool
CN205537479U (en) Large -scale ring rolling spare flatness detection instrument
CN201858971U (en) Device for measuring flatness of an inner circumference surface of a silicon wafer abrasive disk
CN214582996U (en) Flatness detection tool
CN2814329Y (en) Round disc mother disc glass substrate flatness detecting instrument
CN113702708B (en) Ring resistivity detection device and ring performance evaluation method based on resistivity
CN111590392B (en) Cutter head suitable for cyclone type turning peeling machine and same roundness detection method thereof
CN210220915U (en) Device for detecting diameter of outer circle of standard roller set embedded in window hole of conical bearing retainer
CN210452321U (en) A frock clamp for detecting product face type on polishing dish
CN219223575U (en) Support and device for measuring thickness and flatness of sheet
CN111981934A (en) Detection device for intelligent manufacturing production and processing
CN207231434U (en) Measurement and positioning device for precise electronic connector injecting products
CN111336891A (en) Detection device for port detection tool of pipe beam product
CN214010144U (en) Large-scale gadget of integrated form car examines utensil based on bluetooth transmission technology
CN210533227U (en) Static precision measuring device for guide rail pair
CN219301483U (en) Workpiece for assisting in measuring diameter of pipe fitting
CN210180359U (en) Detection tool for detecting installation distance of planetary gear of differential
CN218723757U (en) Crankshaft positioning surface and axle center distance measuring device
CN212843338U (en) Tool device for measuring end face moment of cutter handle
CN215524587U (en) Improved generation straightness detection chi that hangs down
CN210108180U (en) Glass transmission quartz roller radial run-out measuring device
CN219934851U (en) Metering auxiliary support device
CN204421793U (en) A kind of quantitative measurment calliper

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant