CN218469437U

CN218469437U - Movable door for double-cavity wafer drying machine

Info

Publication number: CN218469437U
Application number: CN202121210030.7U
Authority: CN
Inventors: 欧阳小泉
Original assignee: Quanxin Semiconductor Technology Wuxi Co ltd
Current assignee: Quanxin Semiconductor Technology Wuxi Co ltd
Priority date: 2021-06-01
Filing date: 2021-06-01
Publication date: 2023-02-10
Anticipated expiration: 2031-06-01

Abstract

The utility model discloses a double-chamber wafer floating gate for drier, including drier main part, floating gate main part and observation window, the symmetry is equipped with the floating gate main part in the drier main part, be equipped with the observation window in the floating gate main part, connect through the bull stick between the floating gate main part, fixed cover is equipped with the rotation wheel in the middle of the bull stick, install the mount in the middle of drier main part outer wall one side, driving motor is installed at the mount top, driving motor's output stretches into in the mount with the actuating shaft, fixed cover is equipped with the action wheel in the actuating shaft, it installs from the driving wheel through the fixed axle to lie in rotation wheel one side on the drier main part, and from driving wheel and rotation wheel and action wheel intermeshing, the back of floating gate main part is located observation window one side and is equipped with the screw rod, the utility model discloses, the floating gate is opened conveniently, makes things convenient for placing and taking out of wafer, can clear up the residual water droplet at the floating gate back, convenient observation.

Description

Movable door for double-cavity wafer spin dryer

Technical Field

The utility model relates to a drier floating gate technical field specifically is a two-chamber wafer floating gate for drier.

Background

In the wet cleaning and spin-drying process of the advanced semiconductor wafer-level manufacturing process, the moisture on the surface of a raw material is generally dehydrated by a double-cavity wafer spin dryer, water for spin-drying operation of a spin-drying drum in the spin dryer needs to be protected by a movable door, when the movable door in the conventional double-cavity wafer spin dryer is opened or closed, the movable door of an upper cavity and a lower cavity needs to be manually opened by an operator, so that the wafer is inconvenient to place and take out, and residual water drops on the back of the movable window on the movable door cannot be cleaned to influence observation, therefore, the movable door for the double-cavity wafer spin dryer is necessary to be designed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a double-chamber wafer is floating gate for drier to solve the problem that proposes among the above-mentioned background art.

In order to solve the technical problem, the utility model provides a following technical scheme: the utility model provides a double-chamber wafer is floating gate for drier, includes drier main part, floating gate main part and observation window, the symmetry is equipped with the floating gate main part in the drier main part, be equipped with the observation window in the floating gate main part, connect through the bull stick between the floating gate main part, fixed cover is equipped with the runner in the middle of the bull stick, install the mount in the middle of drier main part outer wall one side, driving motor is installed at the mount top, driving motor's output stretches into in the mount and is connected with the actuating shaft, fixed cover is equipped with the action wheel in the actuating shaft, it installs from the driving wheel through the fixed axle to lie in runner one side on the drier main part, and from driving wheel and runner and action wheel intermeshing, the back of floating gate main part lies in observation window one side and is equipped with the screw rod, screw rod one end is connected with step motor's output, screw rod other end sliding sleeve is equipped with the slider, the slider passes through the connecting block and wipes the board to be connected, drives the drive shaft through the driving motor and rotates for the action wheel drives the driving from the driving wheel rotation, makes the driving wheel, and rotates, makes the opening and shutting the angle of moving gate main part of floating gate main part open and then makes things convenient for the remaining water droplet of observation window is convenient to place and take out and is cleaned through the observation window, and is convenient.

In a further embodiment, the connecting block both ends have been seted up respectively with the slider with wipe board matched with spread groove, the connecting block both ends have all run through the fitting pin, and have seted up on the slider with wipe the board with fitting pin matched with pinhole, and the setting through the spread groove makes things convenient for the connecting block to fix with the installation of slider with wiping the board, and the fitting pin cooperatees with the pinhole, guarantees to make things convenient for the connecting block and wipe the dismantlement of board when fixed stable.

In a further embodiment, the sliders are symmetrically provided with clamping blocks, the inner sides of the clamping blocks are attached to the surfaces of the connecting blocks, the locking pins penetrate through the two clamping blocks, and the clamping blocks are matched with the locking pins to fix the connecting blocks, so that the fixing stability is ensured.

In a further embodiment, the back of floating gate main part is located the observation window opposite side and installs the mounting bracket, install the rotating electrical machines in the mounting bracket, the output and the flabellum of rotating electrical machines are connected, mounting bracket one side is equipped with the water conservancy diversion storehouse, set up a plurality of hole of airing exhaust on the water conservancy diversion storehouse, drive the flabellum through the rotating electrical machines and rotate, blow off through the hole of airing exhaust in water conservancy diversion storehouse, air-dry the observation window back for the evaporation of water droplet.

In a further embodiment, still install the heating pipe in the water conservancy diversion storehouse, the draw-in groove has all been seted up at the heating pipe both ends, the bayonet lock is all installed at water conservancy diversion storehouse both ends, and draw-in groove one end is fixed in the draw-in groove, and the heater strip work through in the heating pipe produces the heat, and it is hot-blast with the wind action formation, further accelerates the evaporation of water droplet, and the bayonet lock cooperatees with the draw-in groove, makes things convenient for the installation of heating pipe fixed.

In a further embodiment, a groove is formed in one end of the back face of the moving door main body, a rack is arranged in the groove, a limiting gear is installed at one end of the sliding block through a rotating shaft and meshed with the rack, and the sliding block moves up and down to drive the limiting gear to roll on the rack, so that the sliding block moves stably.

Compared with the prior art, the utility model discloses the beneficial effect who reaches is:

1. the driving shaft is driven to rotate by the driving motor, and is matched with the driving wheel, the driven wheel and the rotating wheel to drive the rotating rod to rotate, so that the opening and closing angle of the movable door main body is adjusted, and the wafer is convenient to place and take out;

2. the screw rod is driven to rotate through the stepping motor, the sliding block drives the wiping plate to move up and down through the connecting block, residual water drops on the back face of the observation window are conveniently wiped and cleaned, observation is facilitated, the fan blades are driven to rotate through the rotating motor, air is blown, the back face of the observation window is air-dried, heat is generated by working of the heating wires in the heating pipe, hot air is formed through the heating wires in the heating pipe, and evaporation of the water drops is further accelerated.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic view of the back structure of the observation window of the present invention;

the reference signs are: the drying machine comprises a drying machine main body 1, a movable door main body 2, an observation window 3, a rotating rod 4, a rotating wheel 5, a fixed frame 6, a driving motor 7, a driving shaft 8, a driving wheel 9, a fixed shaft 10, a driven wheel 11, a stepping motor 12, a screw 13, a sliding block 14, a connecting block 15, a wiping plate 16, a clamping block 17, a locking pin 18, a mounting frame 19, a rotating motor 20, fan blades 21, a diversion bin 22, a heating pipe 23 and an exhaust hole 24.

Detailed Description

In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art, that the present invention may be practiced without one or more of these specific details. In other instances, well-known features have not been described in order to avoid obscuring the invention.

Referring to fig. 1-2, the present invention provides a technical solution: a movable door for a double-cavity wafer spin dryer comprises a spin dryer body 1, a movable door body 2, an observation window 3, a rotating rod 4, a rotating wheel 5, a fixing frame 6, a driving motor 7, a driving shaft 8, a driving wheel 9, a fixing shaft 10, a driven wheel 11, a stepping motor 12, a screw 13, a sliding block 14, a connecting block 15, a wiping plate 16, a clamping block 17, a locking pin 18, a mounting frame 19, a rotating motor 20, a fan blade 21, a diversion bin 22, a heating pipe 23 and an exhaust hole 24, wherein the movable door body 2 is symmetrically arranged on the spin dryer body 1, the movable door body 2 is connected through the rotating rod 4, the observation window 3 is arranged on the movable door body 2, the rotating wheel 5 is fixedly sleeved in the middle of the rotating rod 4, the fixing frame 6 is arranged in the middle of one side of the outer wall of the spin dryer body 1, the driving motor 7 is arranged at the top of the fixing frame 6, the driving shaft 8 is connected with an output end of the driving motor 7 extending into the fixing frame 6, the driving wheel 9 is fixedly sleeved on the driving shaft 8, the driven wheel 11 is arranged on the spin dryer main body 1 through a fixed shaft 10 and is positioned at one side of the rotating wheel 5, the driven wheel 11 is meshed with the rotating wheel 5 and the driving wheel 9, the screw 13 is arranged at the back of the movable door main body 2 and is positioned at one side of the observation window 3, the output end of the stepping motor 12 is connected with one end of the screw 13, the slide block 14 is slidably sleeved at the other end of the screw 13, the wiping plate 16 is connected with the slide block 14 through a connecting block 15, the driving shaft 8 is driven to rotate through the driving motor 7, the driving wheel 9 drives the driven wheel 11 to rotate, the rotating rod 4 is driven to rotate through the rotating wheel 5, the opening and closing angle of the movable door main body 2 is adjusted, the placement and the taking out of the wafer are facilitated, the screw 13 is driven to rotate through the stepping motor 12, and the slide block 14 drives the wiping plate 16 to move up and down through the connecting block 15, the residual water drops at the back of the observation window 3 are conveniently wiped and cleaned, and the observation is convenient.

Further, connecting block 15 both ends have been seted up respectively with slider 14 and have been wiped 16 matched with connecting grooves, connecting block 15 both ends have all been run through to have lockpin 18, and slider 14 with wipe and offer on the board 16 with 18 matched with pinholes of lockpin, it is fixed with

slider

14 and 16 installation of wiping board to make things convenient for connecting block 15 and through setting up of connecting groove, lockpin 18 cooperatees with the pinhole, guarantee fixed stable while make things convenient for connecting block 15 and wipe 16 dismantlements of board.

Furthermore, clamp blocks 17 are symmetrically arranged on the sliding block 14, the inner sides of the clamp blocks 17 are attached to the surface of the connecting block 15, and the locking pin 18 penetrates through the two clamp blocks 17 and is matched with the locking pin 18 to fix the connecting block 15, so that the fixing stability is ensured.

Further, the back of floating gate main part 2 is located 3 opposite sides of observation window and installs mounting bracket 19, install rotating electrical machines 20 in the mounting bracket 19, rotating electrical machines 20's output and flabellum 21 are connected, mounting bracket 19 one side is equipped with the guiding flow storehouse 22, the hole 24 of airing exhaust of a plurality of has been seted up on the guiding flow storehouse 22, drive flabellum 21 through rotating electrical machines 20 and rotate, blow, the hole 24 of airing exhaust through guiding flow storehouse 22 blows out, air-dry 3 backs of observation window for the evaporation of water droplet.

Further, still install heating pipe 23 in the diversion storehouse 22, the draw-in groove has all been seted up at heating pipe 23 both ends, and the bayonet lock is all installed at diversion storehouse 22 both ends, and draw-in groove one end is fixed in the draw-in groove, and heater strip work production of heat through in the heating pipe 23 forms hot-blastly with the wind action, further accelerates the evaporation of water droplet, and the bayonet lock cooperatees with the draw-in groove, makes things convenient for the installation of heating pipe 23 fixed.

Furthermore, a groove is formed in one end of the back face of the movable door main body 2, a rack is arranged in the groove, a limiting gear is installed at one end of the sliding block 14 through a rotating shaft, the limiting gear is meshed with the rack, and the sliding block 14 moves up and down to drive the limiting gear to roll on the rack, so that the sliding block 14 moves stably.

The working principle is as follows: the driving motor 7 drives the driving shaft 8 to rotate, so that the driving wheel 9 drives the driven wheel 11 to rotate, the rotating rod 4 is driven to rotate through the rotating wheel 5, the opening and closing angle of the movable door main body 2 is adjusted, and the wafers are convenient to place and take out; step motor 12 drives screw rod 13 and rotates for slider 14 drives through connecting block 15 and wipes board 16 and reciprocates, conveniently wipes the clearance with the residual water droplet at the observation window 3 back, conveniently observes, and rotating electrical machines 20 drives flabellum 21 and rotates, bloies, blows off through the hole 24 of airing exhaust in water conservancy diversion storehouse 22, air-dries the observation window 3 back, and the heater strip work in heating pipe 23 produces the heat, and it is hot-blast with the wind effect formation, further accelerates the evaporation of water droplet.

The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the details of the above embodiments, and the technical concept of the present invention can be modified to perform various equivalent transformations, which all belong to the protection scope of the present invention.

Claims

1. The utility model provides a floating gate for two-chamber wafer drier, includes drier main part (1), floating gate main part (2) and observation window (3), its characterized in that: the symmetry is equipped with floating gate main part (2) on drier main part (1), be equipped with observation window (3) on floating gate main part (2), connect through bull stick (4) between floating gate main part (2), the fixed cover is equipped with rotation wheel (5) in the middle of bull stick (4), install mount (6) in the middle of drier main part (1) outer wall one side, driving motor (7) are installed at mount (6) top, the output of driving motor (7) stretches into in mount (6) and is connected with drive shaft (8), fixed cover is equipped with action wheel (9) on drive shaft (8), it installs from driving wheel (11) through fixed axle (10) to lie in rotation wheel (5) one side on drier main part (1), and from driving wheel (11) and rotation wheel (5) and action wheel (9) intermeshing, the back that moves gate main part (2) is located observation window (3) one side and is equipped with screw rod (13), screw rod (13) one end is connected with the output of step motor (12), screw rod (13) other end sliding sleeve is equipped with slider (14), slider (14) and connection block (15) are connected through wiping board (16).

2. The moving door of claim 1, wherein: connecting grooves matched with the sliding block (14) and the wiping plate (16) are formed in the two ends of the connecting block (15) respectively, locking pins (18) penetrate through the two ends of the connecting block (15), and pin holes matched with the locking pins (18) are formed in the sliding block (14) and the wiping plate (16).

3. The moving door of claim 2, wherein: the slider (14) is provided with clamping blocks (17) symmetrically, the inner sides of the clamping blocks (17) are attached to the surface of the connecting block (15), and the locking pin (18) penetrates through the two clamping blocks (17).

4. The moving door of claim 1, wherein: the back of floating gate main part (2) is located observation window (3) opposite side and installs mounting bracket (19), install rotating electrical machines (20) in mounting bracket (19), the output and the flabellum (21) of rotating electrical machines (20) are connected, mounting bracket (19) one side is equipped with diversion storehouse (22), a plurality of hole (24) of airing exhaust has been seted up on diversion storehouse (22).

5. The moving door of claim 4, wherein: still install heating pipe (23) in diversion storehouse (22), the draw-in groove has all been seted up at heating pipe (23) both ends, the bayonet lock is all installed at diversion storehouse (22) both ends, and draw-in groove one end is fixed in the draw-in groove.

6. The moving door of claim 1, wherein: a groove is formed in one end of the back face of the movable door main body (2), a rack is arranged in the groove, a limiting gear is installed at one end of the sliding block (14) through a rotating shaft, and the limiting gear is meshed with the rack.