CN218465948U - Acid concentration stabilizing and adjusting device of liquid crystal panel aluminum etching machine - Google Patents

Abstract

The utility model provides an acid concentration stabilizing and adjusting device of a liquid crystal panel aluminum etching machine, which comprises an etching chamber, a liquid medicine groove, two single acid grooves and a control device; a coarse exhaust pipeline and a fine exhaust pipeline are communicated with the top of the etching chamber, a first regulating valve is arranged on the coarse exhaust pipeline, and a second regulating valve is arranged on the fine exhaust pipeline; the liquid medicine tank is communicated with the etching chamber through a spraying pipeline, a pump body is arranged on the spraying pipeline, a return pipeline and an exhaust pipeline are arranged between the liquid medicine tank and the etching chamber, and a third regulating valve is arranged on the exhaust pipeline; the control device comprises a concentration control device and a sampling detection device, the sampling detection device is connected with the liquid medicine tank through a sampling pipeline, and the concentration control device adjusts the liquid medicine supply amount of the single acid tank to the liquid medicine tank through the measurement result of the sampling detection device. The utility model discloses simple structure, convenient operation, adjustable each unit sour gas is balanced, reduces the amount of extraction of each monoacid, makes triacid concentration more steady, and can reduce monoacid supply volume.

Description

Acid concentration stabilizing and adjusting device of liquid crystal panel aluminum etching machine

Technical Field

The utility model relates to an etching machine, in particular to a stable adjusting device for acid concentration of an aluminum etching machine for a liquid crystal panel.

Background

In the prior art, a dipping method and a spraying method are generally adopted to process and manufacture a glass substrate of a liquid crystal display, the spraying method is to etch the glass substrate in an etching machine, liquid medicine is pumped by a pump to form a certain spraying pressure to carry out spraying etching on a product, and nitric acid and acetic acid are volatilized along with exhaust of an etching chamber in the etching process, so that the concentrations of the nitric acid, the phosphoric acid and the acetic acid in a mixed acid solution are constantly changed, the etching speed is changed, a liquid medicine sample is regularly drawn to carry out titration measurement on the contents of the nitric acid, the phosphoric acid and the acetic acid in the mixed acid solution, the fluctuation value of the concentration of triacid is recorded, and the needed monoacid is supplemented by a concentration control device to stabilize the concentration of the monoacid. Because the glass substrate is etched in the etching chamber, the exhaust pipe is arranged for balancing the airflow flow field of the etching chamber, but the existing exhaust pipe is large in exhaust amount and cannot realize fine exhaust, so that the content fluctuation of acid concentration in liquid medicine is within the range of +/-10% to +/-5%, the fluctuation range is large, the stability of the characteristic value of an etching product is poor, and the dosage of supplemented monoacid is high.

Disclosure of Invention

The to-be-solved technical problem of the utility model lies in providing a liquid crystal panel aluminium etching machine acid concentration stabilization adjusting device, its simple structure, convenient operation, adjustable each unit acid gas is balanced, reduces the air exhaust volume of each monoacid, makes three acid concentration more steady, and can reduce the monoacid supply volume.

The utility model discloses a realize like this: an acid concentration stabilizing and adjusting device of a liquid crystal panel aluminum etching machine comprises an etching chamber, a liquid medicine tank, two single acid tanks (a nitric acid tank and an acetic acid tank respectively) and a control device; the top of the etching chamber is communicated with a coarse exhaust pipeline and a fine exhaust pipeline, the coarse exhaust pipeline and the fine exhaust pipeline are both communicated with an air extraction pipeline, the coarse exhaust pipeline is provided with a first regulating valve, and the fine exhaust pipeline is provided with a second regulating valve; the liquid medicine tank is communicated with the etching chamber through a spraying pipeline, a pump body is arranged on the spraying pipeline, a return pipeline and an exhaust pipeline are arranged between the liquid medicine tank and the etching chamber, and a third regulating valve is arranged on the exhaust pipeline; the two monoacid tanks are connected with the liquid medicine tank through a supply pipeline; the control device comprises a sampling detection device and a concentration control device, the sampling detection device is connected with the liquid medicine tank through a sampling pipeline, and the concentration control device adjusts the liquid medicine replenishing amount of the single acid tank to the liquid medicine tank through the measuring result of the sampling detection device.

Furthermore, the front end of the etching chamber is provided with a drying unit, the tail end of the etching chamber is provided with a water washing unit, and an isolation unit is respectively arranged between the drying unit and the water washing unit and between the etching chamber and the etching chamber.

Furthermore, the two liquid medicine tanks are respectively connected with the pump body, and return pipelines are respectively connected between the liquid medicine tanks and the etching chamber.

The utility model has the advantages of: the fine exhaust pipe and the second regulating valve are additionally arranged at the top of the etching chamber, so that the exhaust amount can be more finely regulated, and the concentration of acid gas in the etching chamber is more stable; the third regulating valve is arranged on the exhaust pipeline between the liquid medicine tank and the etching chamber, liquid medicine volatilization in the liquid medicine tank can be controlled to be balanced with cavity pressure, the air suction quantity of each monoacid can be reduced by selecting the optimal opening degree of the second regulating valve and the third regulating valve, the concentration of the triacid is more stable, the fluctuation range is reduced to +/-3%, the acid concentration is stably controlled, the corresponding monoacid supply quantity is also stable, the service cycle of the acid can be prolonged, and the effects of energy conservation and emission reduction can be realized. The utility model provides a liquid crystal panel aluminium etching machine acid concentration stable regulation device, its simple structure, convenient operation, adjustable each unit acid gas is balanced, reduces the amount of extraction of each monoacid, makes three acid concentration more steady, and can reduce the monoacid supply volume.

Drawings

The present invention will be further described with reference to the following examples and drawings.

Fig. 1 is a schematic structural diagram of the acid concentration stabilizing and adjusting device of the liquid crystal panel aluminum etching machine of the present invention.

Fig. 2 is a schematic structural diagram of a first embodiment of the present invention.

FIG. 3 is a comparison graph of the concentrations of nitric acid, acetic acid and phosphoric acid in the liquid medicine tank before and after the improvement of the utility model.

FIG. 4 is a comparison graph of the amounts of nitric acid, acetic acid and phosphoric acid before and after the improvement of the present invention.

Fig. 5 is a schematic structural diagram of a second embodiment of the present invention.

The reference numbers illustrate: the device comprises an etching chamber 1, a coarse exhaust pipeline 11, a first regulating valve 111, a fine exhaust pipeline 12, a second regulating valve 121, an air pumping pipeline 13, a liquid medicine tank 2, a spraying pipeline 21, a pump body 22, a return pipeline 23, an exhaust pipeline 24, a third regulating valve 241, a monoacid tank 3, a supply pipeline 31, a control device 4, a sampling detection device 41, a sampling pipeline 411 and a concentration control device 42.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example one

Referring to fig. 1 to 4, the acid concentration stabilizing and adjusting device of an aluminum etching machine for liquid crystal panels of the present invention comprises an etching chamber 1, a chemical solution tank 2, two single acid tanks 3 and a control device 4; the etching chamber 1 is provided with a drying unit (not shown) at the front end of the etching chamber, a water washing unit (not shown) at the tail end of the etching chamber, an isolation unit (not shown) is respectively arranged between the drying unit and the etching chamber and between the water washing unit and the etching chamber, and the isolation unit can prevent the cross influence between the drying unit and the etching chamber and between the water washing unit and the etching chamber. The top of the etching chamber 1 is communicated with a coarse exhaust pipeline 11 and a fine exhaust pipeline 12, the coarse exhaust pipeline 11 and the fine exhaust pipeline 12 are both communicated with an air extraction pipeline 13, the coarse exhaust pipeline 11 is provided with a first regulating valve 111, and the fine exhaust pipeline 12 is provided with a second regulating valve 121, so that fine exhaust can be realized, and the concentration of acid in the liquid medicine can be stably controlled; the liquid medicine tank 2 is communicated with the etching chamber 1 through a spraying pipeline 21, a pump body 22 is arranged on the spraying pipeline 21, a return pipeline 23 and an exhaust pipeline 24 are also arranged between the liquid medicine tank 2 and the etching chamber 1, and a third adjusting valve 241 is arranged on the exhaust pipeline 24 and can control the liquid medicine in the liquid medicine tank 2 to volatilize and balance the cavity pressure; the two monoacid tanks 3 are connected with the liquid medicine tank 2 through a supply pipeline 31; the control device 4 comprises a sampling detection device 41 and a concentration control device 42, the sampling detection device 41 is connected with the liquid medicine tank 2 through a sampling pipeline 411, and the concentration control device 42 adjusts the liquid medicine replenishment amount of the monoacid tank 3 to the liquid medicine tank 2 according to the measurement result of the sampling detection device 41.

Preferably, the etching chamber 1 is divided into three etching units, namely, a first etching unit, a second etching unit and a third etching unit, each etching unit is provided with a pump body 22 for supplying soaking and spraying liquid medicine to the first etching unit, the second etching unit and the third etching unit, and the coarse exhaust pipeline 11 and the fine exhaust pipeline 12 are arranged above each etching unit.

The working principle is as follows: the glass substrate enters the etching chamber 1 from the drying unit, then the liquid medicine is pumped from the liquid medicine tank 2 through the pump body 22 to form a certain spraying pressure, the glass substrate is sprayed and etched by the nozzle, the pressure in the etching chamber 1 is usually kept lower than the pressure outside the etching chamber 1, the rough exhaust pipeline 11 and the fine exhaust pipeline 12 are pumped by arranging the air pumping pipeline 13, the air pumping amount can be controlled by adjusting the first regulating valve 111 and the second regulating valve 121, the nitric acid and the acetic acid are volatilized along with the air pumping of the etching chamber 1 in the etching process, therefore, the concentrations of the nitric acid, the acetic acid and the phosphoric acid in the liquid medicine can be changed continuously, the etching speed is changed, therefore, the sampling detection device 41 performs automatic titration measurement on the contents of the nitric acid, the phosphoric acid and the acetic acid in the liquid medicine tank 2 through the sampling pipeline 411 at regular time, the fluctuation value of the concentration of the triacid is recorded, if the value is lower than the preset value, the concentration control device 42 controls the monoacid in the monoacid tank 3 to supplement the liquid medicine in the liquid medicine tank 2 through the supply pipeline 31, and stabilize the acid concentration. As shown in fig. 3, (a) is a concentration fluctuation chart before the improvement of the triacid concentration, and (b) is a concentration fluctuation chart after the improvement of the triacid concentration. As shown in fig. 4, (a 1) is a graph of the amount of nitric acid before improvement, and (a 2) is a graph of the amount of nitric acid after improvement; (b1) The dosage of acetic acid before improvement, (b 2) the dosage of acetic acid after improvement; (c1) The dosage of phosphoric acid before improvement, (c 2) the dosage of phosphoric acid after improvement; before improvement, the exhaust amount of the crude exhaust pipeline 11 is large, fine exhaust cannot be achieved, the content fluctuation of acid concentration in liquid medicine is within a range of +/-10% to +/-5%, the fluctuation range is large, the stability of characteristic values of etching products is poor, and the dosage of supplemented monoacid is high. After improvement, the fine exhaust pipeline 12 and the second regulating valve 121 are additionally arranged at the top of the etching chamber 1, so that the exhaust amount can be finely regulated, the content fluctuation of the acid concentration in the liquid medicine is about +/-3%, the stability of the acid concentration in the liquid medicine is higher, the supply amount of the monoacid is reduced, the acid concentration is stably controlled, the corresponding supply amount of the monoacid is also stable, the service cycle of the acid can be prolonged, and the effects of energy conservation and emission reduction can be realized. A return pipeline 23 is arranged between the liquid medicine tank 2 and the etching chamber 1, so that liquid medicine sprayed into the etching chamber 1 can return to the liquid medicine tank 2, and the cost is saved by recycling the liquid medicine; and then the etched glass substrate enters a water washing unit to wash the residues of the glass substrate.

Example two

Referring to fig. 5, the second embodiment is substantially the same as the first embodiment, and the difference is that two liquid medicine tanks 2 are provided, each of which is connected to the pump body 22, and a return line 23 is connected between each of the two liquid medicine tanks 2 and the etching chamber 1, when one of the liquid medicine tanks 2 is communicated with the etching chamber 1 for use, the other liquid medicine tank 2 waits for standby, when the use time of the liquid medicine in one of the liquid medicine tanks 2 expires, the liquid medicine tank 2 is switched to the other liquid medicine tank 2 for use, and the other liquid medicine tank 2 is drained, replaced with new liquid, and the temperature is ready to be maintained in a waiting state again. The two liquid medicine tanks 2 are arranged, so that uninterrupted production can be realized, halt waiting is not needed, and the production efficiency is improved.

The utility model has the advantages that: the fine exhaust pipe and the second regulating valve are additionally arranged at the top of the etching chamber, so that the exhaust amount can be more finely regulated, and the concentration of acid gas in the etching chamber is more stable; through be in the liquid medicine groove with set up the third governing valve on the blast pipe way between the etching chamber, the liquid medicine in the steerable liquid medicine groove volatilizees and the chamber pressure is balanced, through the optimum aperture of choosing second governing valve and third governing valve, can reduce the air exhaust volume of each monoacid, makes triacid concentration more steady, and the fluctuation range falls to 3%, and acid concentration control is steady, and corresponding monoacid supply volume is also stable, and the life cycle of acid also can be promoted, can realize energy saving and emission reduction effect. The utility model provides a liquid crystal panel aluminium etching machine acid concentration stable regulation device, its simple structure, convenient operation, adjustable each unit acid gas is balanced, reduces the amount of extraction of each monoacid, makes three acid concentration more steady, and can reduce the monoacid supply volume.

Although specific embodiments of the present invention have been described, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, and that equivalent modifications and variations can be made by those skilled in the art without departing from the spirit of the invention, which is to be limited only by the claims appended hereto.

Claims (3)

1. The utility model provides a liquid crystal panel aluminium etching machine acid concentration stable regulation device which characterized in that: comprises that

The top of the etching chamber is communicated with a coarse exhaust pipeline and a fine exhaust pipeline, the coarse exhaust pipeline and the fine exhaust pipeline are both communicated with an air extraction pipeline, the coarse exhaust pipeline is provided with a first regulating valve, and the fine exhaust pipeline is provided with a second regulating valve;

the liquid medicine tank is communicated with the etching chamber through a spraying pipeline, a pump body is arranged on the spraying pipeline, a return pipeline and an exhaust pipeline are arranged between the liquid medicine tank and the etching chamber, and a third regulating valve is arranged on the exhaust pipeline;

the two monoacid tanks are respectively connected with the liquid medicine tank through supply pipelines;

and the control device comprises a sampling detection device and a concentration control device, the sampling detection device is connected with the liquid medicine tank through a sampling pipeline, and the concentration control device adjusts the liquid medicine replenishment amount of the single acid tank to the liquid medicine tank through the measurement result of the sampling detection device.

2. The acid concentration stabilizing and adjusting device of the liquid crystal panel aluminum etching machine according to claim 1, characterized in that: the front end of the etching chamber is provided with a drying unit, the tail end of the etching chamber is provided with a water washing unit, and an isolation unit is respectively arranged between the drying unit and the water washing unit and between the etching chamber and the etching chamber.

3. The acid concentration stabilizing and adjusting device of the liquid crystal panel aluminum etching machine according to claim 1, characterized in that: the two liquid medicine tanks are respectively connected with the pump body, and return pipelines are respectively connected between the liquid medicine tanks and the etching chamber.

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