CN218465941U - Negative pressure roll-to-roll preparation equipment - Google Patents
Negative pressure roll-to-roll preparation equipment Download PDFInfo
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- CN218465941U CN218465941U CN202222757231.XU CN202222757231U CN218465941U CN 218465941 U CN218465941 U CN 218465941U CN 202222757231 U CN202222757231 U CN 202222757231U CN 218465941 U CN218465941 U CN 218465941U
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Abstract
The utility model provides a negative pressure volume is to rolling up preparation equipment, including pipeline, paying out machine structure, admission machine, heating mechanism, protection gas and carbon source supply mechanism, vacuum mechanism, first valve, second valve and control mechanism, the pipeline includes first buffer zone and second buffer zone, and first buffer zone is located between heating mechanism and the admission machine structure, and the second buffer zone is located between heating mechanism and the admission machine structure, and first valve is located between first buffer zone and the heating mechanism, and the second valve is located between second buffer zone and the heating mechanism. Can guarantee through first buffer, second buffer, first valve and second valve that the protective gas that is provided by protective gas and carbon source supply mechanism in the preparation process can keep corresponding to the regional pressure of heating mechanism in the pipeline, avoid not changing corresponding to the regional pressure of heating mechanism when changing the copper product on paying out machine structure and taking off the graphene copper product on the admission machine structure, improve the quality of the graphene copper product of preparing.
Description
Technical Field
The utility model belongs to the technical field of the preparation of graphite alkene film, concretely relates to negative pressure volume is to volume preparation equipment.
Background
This section provides background information related to the present disclosure only and is not necessarily prior art.
The method for improving the conductivity of copper by compounding carbon materials such as graphene is one of mainstream strategies for preparing high-conductivity copper. In the traditional scheme, the graphene copper material is prepared at extremely high temperature (higher than 1000 ℃ and close to the melting point of copper) by a static chemical vapor deposition method, but the schemes cannot realize continuous production, so that the energy consumption and the cost are very high, and the graphene copper material cannot be successfully applied in the downstream field.
When the graphene is prepared, a copper foil is generally used as a catalytic substrate, and the copper foil is rolled and uncoiled simultaneously and placed in a vacuum system, so that roll-to-roll in the production process is realized, but the existing equipment has the following defects: 1. the process temperature is generally over 1000 ℃, the sealing between chambers is difficult to realize, and the valve can be protected only by cooling through a long non-working area; 2. in order to protect components in the high vacuum system from being oxidized, after the growth of each roll of copper foil is finished, the system needs to be cooled for a long time and then the sealing cabin door needs to be opened; 3. the graphene growth speed is slow, namely the copper foil moves slowly in a vacuum system, and the production efficiency is very low; 4. hydrogen (which can cause 'hydrogen disease' to reduce the performance of copper materials in the copper processing process) is mainly used as protection, and gases such as methane and the like are used as carbon sources, and the gases belong to flammable and explosive products; 5. when a new copper material is replaced, the quality of the graphene copper material is severely influenced by the pressure change in the pipeline.
SUMMERY OF THE UTILITY MODEL
In view of the above problem, the utility model provides a negative pressure volume is to volume preparation equipment, include:
a pipeline;
the paying-off mechanism is arranged in the pipeline and is used for winding copper materials;
the paying-off mechanism is arranged in the pipeline and is used for winding the copper material on the paying-off mechanism;
the heating mechanism is positioned on the outer side of the pipeline, the pay-off mechanism and the take-up mechanism are respectively positioned on two sides of the heating mechanism, and the heating mechanism is used for heating the copper material;
the pipeline comprises a first buffer area and a second buffer area, the first buffer area is positioned between the heating mechanism and the pay-off mechanism, and the second buffer area is positioned between the heating mechanism and the take-up mechanism;
the protective gas and carbon source supply mechanism is communicated with the pipeline so as to introduce a carbon source and a protective gas into the pipeline;
the vacuum mechanism is communicated with the first buffer area, the second buffer area, the pay-off mechanism and the take-up mechanism to form vacuum negative pressure;
a first valve located between the first buffer zone and the heating mechanism;
a second valve between the second buffer zone and the heating mechanism;
the control mechanism, the wire rewinding mechanism, the heating mechanism, the protective gas and carbon source supplying mechanism, the first valve, the second valve and the vacuum mechanism are respectively connected with the control mechanism to execute actions.
Paying out machine constructs and is used for twining the copper product, and the one end of copper product is connected on paying out machine constructs and twines many circles on paying out machine constructs, and the other end of copper product is connected on admission machine constructs, and control mechanism control admission machine constructs the action with the rolling copper product, makes the copper product constantly accomplish the graphite alkene growth under the effect of heating mechanism and shielding gas and carbon source supply mechanism.
According to the preparation process, the protective gas and carbon source supply mechanism is communicated with the pipeline, so that the protective gas and the carbon source can be introduced into a region, corresponding to the heating mechanism, in the pipeline, and the protective gas can be introduced into a first buffer region, a second buffer region, a region, corresponding to the pay-off mechanism, in the pipeline, a region, corresponding to the take-up mechanism, in the pipeline and a region, corresponding to the heating mechanism, in the pipeline.
Negative pressure volume is to roll preparation equipment is in normal production process, and paying out machine constructs, first buffer, heating mechanism and is linked together each other in the region, second buffer and the admission machine that correspond to the pipeline, and the last winding of admission machine constructs has the copper product, and the preparation of graphite alkene copper product is accomplished to the region, second buffer and the admission machine that the copper product passes through first buffer, heating mechanism and corresponds to the pipeline in proper order. The control mechanism controls the first valve and the second valve to be opened, the control mechanism controls the vacuum mechanism to be opened to pump the vacuum degree in the pipeline to be less than or equal to 1000Pa, and the control mechanism controls the heating mechanism to be started to grow the graphene on the surface of the copper material. After the heating temperature of the heating mechanism reaches the set working temperature, the control mechanism controls the take-up mechanism to start, take up the copper wires while heating, and after the copper wires on the pay-off mechanism are transferred to the take-up mechanism, the control mechanism controls the take-up mechanism to stop.
When winding mechanism or paying out machine structure need be changed, control mechanism control closes first valve and second valve, through first buffer, the second buffer, the protective gas that first valve and second valve can guarantee to be provided by protective gas and carbon source supply mechanism in the preparation process can keep the regional pressure of heating mechanism in the pipeline, send into the pipeline with the carbon source through the protective gas in, avoid not changing corresponding to the regional pressure of heating mechanism when changing the copper product on paying out machine structure and taking off the graphite alkene copper product on the winding mechanism, improve the quality of the graphite alkene copper product of preparation out.
In some embodiments of the present invention, the vacuum mechanism comprises:
the first vacuum piece comprises a first interface and a second interface, the first interface is communicated with the pay-off mechanism to enable the pay-off mechanism to form vacuum, and the second interface is communicated with the first buffer area to enable the first buffer area to form vacuum;
the second vacuum piece comprises a third interface and a fourth interface, the third interface is communicated with the wire-rewinding mechanism so as to enable the wire-rewinding mechanism to form vacuum, and the fourth interface is communicated with the second buffer area so as to enable the second buffer area to form vacuum.
In some embodiments of the present invention, the negative pressure roll-to-roll preparation apparatus further comprises a third valve, the third valve is located between the pay-off mechanism and the first buffer area, the third valve and the control mechanism are connected to perform the action.
In some embodiments of the present invention, the negative pressure roll-to-roll preparation apparatus further comprises a fourth valve, the fourth valve is located between the take-up mechanism and the second buffer area, the fourth valve and the control mechanism are connected to perform the action.
In some embodiments of the present invention, the first valve, the second valve, the third valve, and the fourth valve are vacuum diaphragm valves, flapper valves, or gate valves.
In some embodiments of the present invention, the movement direction of the first valve, the second valve, the third valve and the fourth valve is perpendicular to the movement direction of the copper material.
In some embodiments of the present invention, the negative pressure roll-to-roll preparation apparatus further comprises a cooling mechanism, the cooling mechanism is disposed in the pipeline and located between the second buffer zone and the take-up mechanism.
In some embodiments of the present invention, at least one guide wheel is provided in the pipe, the guide wheel being rotatably connected to the pipe, and the copper material moves along an upper side of the guide wheel.
The utility model discloses an in some embodiments, be provided with first discharge valve and second discharge valve on the pipeline, first discharge valve is located in the first buffer, second discharge valve is located in the second buffer.
In some embodiments of the utility model, the admission machine includes spool and driving piece, the spool is connected on the drive end of driving piece, the driving piece is used for the drive the spool rotates with the rolling the copper product.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic structural view of a negative pressure roll-to-roll manufacturing apparatus according to an embodiment of the present invention;
FIG. 2 is an enlarged schematic view of the structure at A shown in FIG. 1;
FIG. 3 is an enlarged schematic view of the structure shown at B in FIG. 1;
fig. 4 is a side view of the pipe shown in fig. 1.
The reference symbols in the drawings denote the following:
1. a pipeline; 11. a first buffer area; 12. a second buffer area; 13. a guide wheel; 14. a first exhaust valve; 15. a second exhaust valve;
2. a pay-off mechanism;
3. a take-up mechanism;
4. a heating mechanism;
5. a shielding gas and carbon source supply mechanism;
6. a vacuum mechanism; 61. a first vacuum member; 62. a second vacuum member; 611. a first interface; 612. a second interface; 621. a third interface; 622. a fourth interface;
7. a first valve;
8. a second valve;
9. a third valve;
10. and a fourth valve.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only, and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof.
Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.
For convenience of description, spatially relative terms, such as "inner", "outer", "lower", "below", "upper", "above", and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" or "over" the other elements or features. Thus, the example term "in 8230 \8230; below" may include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present disclosure may repeat reference numerals and/or reference letters in the various examples for purposes of simplicity and clarity and do not in itself dictate a relationship between the various embodiments and/or arrangements discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the application of other processes and/or the use of other materials.
The preferred embodiments of the present invention will be described hereinafter with reference to the accompanying drawings, and it should be understood that the preferred embodiments described herein are merely for purposes of illustration and explanation, and are not intended to limit the present invention.
As shown in fig. 1 to fig. 4, the utility model provides a negative pressure roll-to-roll preparation equipment, include:
a pipeline 1;
the paying-off mechanism 2 is arranged in the pipeline 1 and used for winding copper materials;
the take-up mechanism 3 is arranged in the pipeline 1, and the pay-off mechanism 2 is used for winding copper materials on the pay-off mechanism 2;
the heating mechanism 4 is positioned outside the pipeline 1, the pay-off mechanism 2 and the take-up mechanism 3 are respectively positioned on two sides of the heating mechanism 4, and the heating mechanism 4 is used for heating copper materials;
the pipeline 1 comprises a first buffer area 11 and a second buffer area 12, the first buffer area 11 is positioned between the heating mechanism 4 and the paying-off mechanism 2, and the second buffer area 12 is positioned between the heating mechanism 4 and the take-up mechanism 3;
the protective gas and carbon source supply mechanism 5 is communicated with the pipeline 1 so as to introduce the carbon source and the protective gas into the pipeline 1;
the vacuum mechanism 6 is communicated with the first buffer area 11, the second buffer area 12, the pay-off mechanism 2 and the take-up mechanism 3 to form vacuum negative pressure;
a first valve 7, the first valve 7 being located between the first buffer zone 11 and the heating mechanism 4;
a second valve 8, the second valve 8 being located between the second buffer zone 12 and the heating means 4;
the control mechanism, the take-up mechanism 3, the heating mechanism 4, the protective gas and carbon source supply mechanism 5, the first valve 7, the second valve 8 and the vacuum mechanism 6 are respectively connected with the control mechanism to execute actions.
Paying out machine constructs 2 and is used for twining the copper product, and the one end of copper product is connected on paying out machine constructs 2 and twines many circles on paying out machine constructs 2, and the other end of copper product is connected on admission machine constructs 3, and 3 actions of control mechanism control admission machine structure are with the rolling copper product, make the copper product constantly accomplish the graphite alkene growth under the effect of heating mechanism 4 and protective gas and carbon source supply mechanism 5.
According to the preparation process, the protective gas and carbon source supply mechanism 5 is communicated with the pipeline 1, so that the protective gas and the carbon source can be introduced into a region, corresponding to the heating mechanism 4, in the pipeline 1, and the protective gas can be introduced into a first buffer region 11 and a second buffer region 12 in the pipeline 1, a region, corresponding to the pay-off mechanism 2, in the pipeline 1, a region, corresponding to the take-up mechanism 3, in the pipeline 1 and a region, corresponding to the heating mechanism 4, in the pipeline 1.
Negative pressure volume is to rolling up preparation equipment is in normal production process, paying out machine structure 2, first buffer 11, heating mechanism 4 correspond to the region of pipeline 1, second buffer 12 and admission machine construct 3 and communicate each other, and the winding has the copper product on the admission machine constructs 3, and the preparation of graphite alkene copper product is accomplished to the copper product through first buffer 11, heating mechanism 4 corresponding to the region of pipeline 1, second buffer 12 and admission machine construct 3 in proper order. The control mechanism controls the first valve 7 and the second valve 8 to be opened, the control mechanism controls the vacuum mechanism 6 to be opened to pump the vacuum degree in the pipeline 1 to be less than or equal to 1000Pa, and the control mechanism controls the heating mechanism 4 to be started to grow graphene on the surface of the copper material. After the heating temperature of the heating mechanism 4 reaches the set working temperature, the control mechanism controls the take-up mechanism 3 to start, the take-up mechanism is heated and takes up the copper wires, and after the copper wires on the pay-off mechanism 2 are transferred to the take-up mechanism 3, the control mechanism controls the take-up mechanism 3 to stop.
When winding mechanism 3 or paying out machine structure 2 need be changed, control mechanism control closes first valve 7 and second valve 8, through first buffer 11, second buffer 12, first valve 7 and second valve 8 can guarantee that the protective gas that is provided by protective gas and carbon source supply mechanism 5 in the preparation process can keep pipeline 1 in corresponding to the regional pressure of heating mechanism 4, send into pipeline 1 with the carbon source through the protective gas, avoid changing the copper product on paying out machine structure 2 and taking off the graphite alkene copper product on winding mechanism 3 corresponding to the regional pressure of heating mechanism 4 and not changing, improve the quality of the graphite alkene copper product of preparation.
The copper material can be copper foil, copper strip or copper wire.
In some embodiments of the present invention, as shown in fig. 1 to fig. 3, the vacuum mechanism 6 includes a first vacuum piece 61 and a second vacuum piece 62, the first vacuum piece 61 includes a first interface 611 and a second interface 612, the first interface 611 communicates with the paying out mechanism 2 to make the paying out mechanism 2 form vacuum, the second interface 612 communicates with the first buffer area 11 to make the first buffer area 11 form vacuum, according to the preparation process of copper material, the first interface 611 communicates with the paying out mechanism 2 to make the paying out mechanism 2 form vacuum and/or the second interface 612 communicates with the first buffer area 11 to make the first buffer area 11 form vacuum. The second vacuum member 62 includes a third port 621 and a fourth port 622, the third port 621 is communicated with the wire take-up mechanism 3 to form a vacuum at the wire take-up mechanism 3 and/or the fourth port 622 is communicated with the second buffer area 12 to form a vacuum at the second buffer area 12. According to the preparation process of the copper material, the third interface 621 is selectively controlled to be communicated with the take-up mechanism 3 so as to enable the take-up mechanism 3 to form vacuum and/or the fourth interface 622 is selectively controlled to be communicated with the second buffer area 12 so as to enable the second buffer area 12 to form vacuum. In one embodiment, the first vacuum member 61 and the second vacuum member 62 are both air pumps.
In some embodiments of the present invention, as shown in fig. 1 and 2, the negative pressure roll-to-roll preparation apparatus further includes a third valve 9, the third valve 9 is located between the pay-off mechanism 2 and the first buffer area 11, and the third valve 9 is connected to the control mechanism to perform the action.
In some embodiments of the present invention, as shown in fig. 1 and 3, the negative pressure roll-to-roll preparation apparatus further includes a fourth valve 10, the fourth valve 10 is located between the take-up mechanism 3 and the second buffer 12, and the fourth valve 10 is connected to the control mechanism to perform the action.
In some embodiments of the present invention, the first valve 7, the second valve 8, the third valve 9 and the fourth valve 10 are vacuum diaphragm valves, flapper valves or gate valves. Furthermore, the movement direction of the first valve 7, the second valve 8, the third valve 9 and the fourth valve 10 is perpendicular to the movement direction of the copper material. In one embodiment, the first valve 7, the second valve 8, the third valve 9 and the fourth valve 10 are all made of gate valves, so that the copper material can be deformed into flat wires when the valves are closed, but the copper material is not broken, and the influence on the copper material is minimal. Since the copper material reduces the tightness of the valve when the valve is closed, the protective gas filled in the first buffer area 11 and the second buffer area 12 can prevent air from directly entering the area of the heating mechanism 4 corresponding to the pipeline 1.
In some embodiments of the present invention, the first valve 7, the second valve 8, the third valve 9 and the fourth valve 10 are provided with a sealing ring towards one side of the pipeline 1 or the position of the pipeline 1 corresponding to the first valve 7, the second valve 8, the third valve 9 and the fourth valve 10, and the sealing ring is made of fluororubber and perfluoro ether rubber.
In some embodiments of the present invention, as shown in fig. 1 and 4, at least one guide wheel 13 is rotatably disposed in the pipe 1, and the copper material moves along the upper side of the guide wheel 13. Can inject the direction of the removal of copper product and support the copper product through guide pulley 13, make each surperficial graphite alkene of copper product grow evenly, guide pulley 13 rotates with pipeline 1 to be connected, reduces the frictional force between copper product and the guide pulley 13.
In some embodiments of the present invention, a first exhaust valve 14 and a second exhaust valve 15 are disposed on the pipeline, the first exhaust valve 14 is located in the first buffer area 11, and the second exhaust valve 15 is located in the second buffer area 12. The negative pressure in the first buffer area 11 can be recovered to the normal pressure through the first exhaust valve 14, the negative pressure in the second buffer area 12 can be recovered to the normal pressure through the second exhaust valve 15, and in the graphene growth process, the first exhaust valve 14 and the second exhaust valve 15 are in a closed state, so that the vacuum degree in the pipeline is ensured.
In some embodiments of the utility model, take-up mechanism 3 all includes spool and driving piece, and the spool is connected on the drive end of driving piece, and the driving piece is used for driving the spool rotation with the rolling copper product. The driving member is a motor.
The process of replacing the spool by the pay-off mechanism 2 is described below:
the control mechanism controls the first valve 7 to be closed, the control mechanism controls the protective gas and carbon source supply mechanism 5 to introduce protective gas into the first buffer area 11 and the area, corresponding to the pay-off mechanism 2, in the pipeline 1 to enable the air pressure to be recovered to normal pressure (the pressure difference between the first buffer area 11 and the area, corresponding to the pay-off mechanism 2, in the pipeline 1 is smaller than 1000 Pa), the control mechanism controls the third valve 9 to be closed, the cabin door of the pay-off mechanism 2 is opened, a new spool is replaced, the joint of an old spool is connected with the joint of the new spool, and the cabin door of the pay-off mechanism 2 is closed;
the control mechanism controls the first vacuum piece 61 to pump the vacuum degree in the area of the pipeline 1 corresponding to the pay-off mechanism 2 to be less than or equal to 1000Pa, controls the protective gas and carbon source supply mechanism 5 to introduce the protective gas into the area of the pipeline 1 corresponding to the pay-off mechanism 2 to restore the air pressure to the normal pressure, opens the third valve 9 between the first buffer area 11 and the pay-off mechanism 2 to ensure that the pressure communicated with the area of the first buffer area 11 and the area of the pipeline 1 corresponding to the pay-off mechanism 2 is equal, controls the first vacuum piece 61 to pump the vacuum degree in the area of the pipeline 1 corresponding to the pay-off mechanism 2 and the first buffer area 11 to be less than or equal to 1000Pa, and controls the first valve 7 to open to ensure that the pressure communicated with the area of the pipeline 1 corresponding to the heating mechanism 4, the area of the first buffer area 11 and the area of the pipeline 1 corresponding to the pay-off mechanism 2 is equal;
and (5) checking that all valves are in reasonable positions, and then starting a normal graphene preparation process.
The process of replacing the spool by the take-up mechanism 3 is described below:
the control mechanism controls the second valve 8 to be closed, the control mechanism controls the protective gas and carbon source supply mechanism 5 to introduce protective gas into the second buffer area 12 and the area, corresponding to the take-up mechanism 3, in the pipeline 1 to restore the air pressure to normal pressure (the pressure difference between the second buffer area 12 and the area, corresponding to the take-up mechanism 3, in the pipeline 1 is smaller than 1000 Pa), the control mechanism controls the fourth valve 10 to be closed, the cabin door of the take-up mechanism 3 is opened, the new spool is replaced, the joint of the old spool is connected with the joint of the new spool, and the cabin door of the take-up mechanism 3 is closed;
the control mechanism controls the first vacuum piece 61 to pump the vacuum degree in the area of the pipeline 1 corresponding to the wire rewinding mechanism 3 to be less than or equal to 1000Pa, the control mechanism controls the protective gas and carbon source supply mechanism 5 to feed protective gas into the area of the pipeline 1 corresponding to the wire rewinding mechanism 3 to restore the air pressure to normal pressure, the fourth valve 10 between the second buffer area 12 and the wire rewinding mechanism 3 is opened to ensure that the pressure communicated with the area of the second buffer area 12 corresponding to the wire rewinding mechanism 3 in the pipeline 1 is equal to the pressure communicated with the area of the pipeline 1 corresponding to the wire rewinding mechanism 3, the control mechanism controls the first vacuum piece 61 to pump the vacuum degree in the area of the pipeline 1 corresponding to the wire rewinding mechanism 3 and the area of the second buffer area 12 to be less than or equal to 1000Pa, and controls the second valve 8 to be opened to ensure that the pressure communicated with the area of the pipeline 1 corresponding to the heating mechanism 4, the area of the second buffer area 12 and the area of the pipeline 1 corresponding to the wire rewinding mechanism 3 is equal to the pressure communicated with the area of the pipeline 1;
and (5) checking that all valves are in reasonable positions, and then starting a normal graphene preparation process.
The utility model discloses an in some embodiments, shielding gas and carbon source supply mechanism 5 uses nitrogen gas, argon gas or the gas mixture that contains 10% hydrogen at most as the shielding gas, can avoid the oxide layer on copper product surface to react with hydrogen, cause the hydrogen disease and destroy the integrality of graphite alkene. In one embodiment, the shielding gas and carbon source supplying means 5 uses nitrogen as the shielding gas.
The utility model discloses an in some embodiments, the heating temperature scope of heating mechanism 4 is 200 ℃ -600 ℃, wherein, 200 ℃ is the minimum temperature of graphite alkene at the growth of copper product surface, and 600 ℃ is for preventing that the copper crystal boundary from changing too big extreme temperature, adopts low temperature growth graphite alkene can avoid the sealed difficult problem of equipment because of the temperature causes.
In some embodiments of the present invention, the negative pressure roll-to-roll preparation device has an air pressure less than or equal to 10Pa during the normal production process.
In some embodiments of the present invention, the take-up speed of the take-up mechanism 3 is less than or equal to 1m/s.
In some embodiments of the present invention, the negative pressure roll-to-roll preparation apparatus further comprises a cooling mechanism, the cooling mechanism is disposed in the pipeline 1 and located between the second buffer area 12 and the take-up mechanism 3. The cooling mechanism is a water cooling mechanism.
In some embodiments of the present invention, the pipeline 1 may be an integral pipeline 1, or may be a multi-section sub-pipeline connected by a flange. In one embodiment, the pipeline 1 comprises a plurality of sub-pipelines connected by flanges.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A negative pressure roll-to-roll preparation apparatus, comprising:
a pipeline;
the paying-off mechanism is arranged in the pipeline and is used for winding copper materials;
the paying-off mechanism is arranged in the pipeline and is used for winding the copper materials on the paying-off mechanism;
the heating mechanism is positioned on the outer side of the pipeline, the pay-off mechanism and the take-up mechanism are respectively positioned on two sides of the heating mechanism, and the heating mechanism is used for heating the copper materials;
the pipeline comprises a first buffer area and a second buffer area, the first buffer area is positioned between the heating mechanism and the pay-off mechanism, and the second buffer area is positioned between the heating mechanism and the take-up mechanism;
the protective gas and carbon source supply mechanism is communicated with the pipeline so as to introduce a carbon source and a protective gas into the pipeline;
the vacuum mechanism is communicated with the first buffer area, the second buffer area, the pay-off mechanism and the take-up mechanism to form vacuum negative pressure;
a first valve located between the first buffer zone and the heating mechanism;
a second valve between the second buffer zone and the heating mechanism;
the control mechanism, the wire rewinding mechanism, the heating mechanism, the protective gas and carbon source supplying mechanism, the first valve, the second valve and the vacuum mechanism are respectively connected with the control mechanism to execute actions.
2. The negative pressure roll-to-roll preparation apparatus of claim 1, wherein the vacuum mechanism comprises:
the first vacuum piece comprises a first interface and a second interface, the first interface is communicated with the pay-off mechanism to enable the pay-off mechanism to form vacuum, and the second interface is communicated with the first buffer area to enable the first buffer area to form vacuum;
the second vacuum piece comprises a third interface and a fourth interface, the third interface is communicated with the take-up mechanism to enable the take-up mechanism to form vacuum, and the fourth interface is communicated with the second buffer area to enable the second buffer area to form vacuum.
3. The apparatus of claim 1, further comprising a third valve between the payout mechanism and the first buffer zone, the third valve being coupled to the control mechanism for actuation.
4. The apparatus of claim 3, further comprising a fourth valve between the take-up mechanism and the second buffer, the fourth valve being connected to the control mechanism to perform an action.
5. The negative pressure roll-to-roll preparation apparatus of claim 4, wherein the first valve, the second valve, the third valve, and the fourth valve are vacuum diaphragm valves, flapper valves, or gate valves.
6. The negative pressure roll-to-roll preparation apparatus of claim 4, wherein the direction of movement of the first valve, the second valve, the third valve, and the fourth valve is perpendicular to the direction of movement of the copper material.
7. The apparatus of claim 1, further comprising a cooling mechanism disposed within the duct between the second buffer zone and the take-up mechanism.
8. The negative-pressure roll-to-roll preparation apparatus according to claim 1, wherein at least one guide wheel is provided in the conduit in rotational connection with the conduit, the copper material moving along an upper side of the guide wheel.
9. The negative pressure roll-to-roll preparation apparatus according to any one of claims 1-8, wherein the conduit is provided with a first vent valve and a second vent valve, the first vent valve being located in the first buffer zone and the second vent valve being located in the second buffer zone.
10. The negative pressure roll-to-roll preparation apparatus according to any one of claims 1-8, wherein the take-up mechanism comprises a spool connected to a drive end of a drive member and a drive member for driving the spool to rotate to take up the copper material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222757231.XU CN218465941U (en) | 2022-10-19 | 2022-10-19 | Negative pressure roll-to-roll preparation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222757231.XU CN218465941U (en) | 2022-10-19 | 2022-10-19 | Negative pressure roll-to-roll preparation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218465941U true CN218465941U (en) | 2023-02-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222757231.XU Active CN218465941U (en) | 2022-10-19 | 2022-10-19 | Negative pressure roll-to-roll preparation equipment |
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| Country | Link |
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| CN (1) | CN218465941U (en) |
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2022
- 2022-10-19 CN CN202222757231.XU patent/CN218465941U/en active Active
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