CN218435925U

CN218435925U - Detachable anti-sticking plate structure suitable for PVD machine

Info

Publication number: CN218435925U
Application number: CN202222334433.3U
Authority: CN
Inventors: 张炎
Original assignee: Suzhou Baishengkang Precision Machinery Co ltd
Current assignee: Suzhou Baishengkang Precision Machinery Co ltd
Priority date: 2022-09-02
Filing date: 2022-09-02
Publication date: 2023-02-03
Anticipated expiration: 2032-09-02

Abstract

The utility model relates to a prevent board technical field's a but be applicable to PVD machine split type and prevent board structure, including preventing board and No. two preventing boards, the surface of preventing board and No. two preventing boards all is equipped with the installation component for one number, the installation component includes a fixed screw section of thick bamboo, two the inside at fixed screw section of thick bamboo both ends is threaded connection has a clamping screw and No. two clamping screw, two the equal fixedly connected with fastening components of one end of a clamping screw and No. two clamping screw. Drive fastening assembly through fixed barrel, clamping screw, no. two clamping screw and step up and loosen the both sides of preventing the board and preventing the board No. two to can just with prevent the board and prevent the board No. two with a plurality of one and prevent the effect of going on fixing and dismantling, can be convenient for further prevent the board and prevent the effect of being convenient for connect between the board through fixed recess, connection slat, fixed screw and fixing bolt.

Description

Detachable anti-sticking plate structure suitable for PVD machine

Technical Field

The utility model relates to a prevent board technical field, especially relate to a but be applicable to PVD machine split type and prevent board structure.

Background

PVD is a technique of arc discharge with low voltage and large current under vacuum, wherein a target is evaporated by gas discharge, evaporated material and gas are ionized, and the evaporated material and reaction product thereof are deposited on a workpiece by acceleration of an electric field, so that the surface of the workpiece is damaged by residual material on the surface of the workpiece except the workpiece, and the evaporated material and reaction product thereof are prevented from being deposited on a shielding plate and cannot be cleaned by the shielding plate.

The existing anti-sticking plates suitable for PVD are all glued or welded together, so that the single anti-sticking plates are not convenient to disassemble, install or replace, when the anti-sticking plates need to be replaced, the anti-sticking plates need to be integrally replaced, cost is increased, meanwhile, replacement is complex, and therefore the detachable anti-sticking plate structure suitable for the PVD machine is provided.

SUMMERY OF THE UTILITY MODEL

In view of the above problems, the utility model provides a but be applicable to PVD machine split type and prevent board structure has and carries out the effect that the split was changed to single preventing board fast.

The technical scheme of the utility model is that: the utility model provides a but be applicable to PVD machine split type prevents board structure, prevents the board including one number and prevents the board two numbers, the surface of preventing board and two numbers and preventing the board all is equipped with the installation component, the installation component includes a fixed screw section of thick bamboo, two the inside difference threaded connection at fixed screw section of thick bamboo both ends has a clamping screw and No. two clamping screw, two the equal fixedly connected with fastening component of one end of a clamping screw and No. two clamping screw, a plurality of fixed recess have all been seted up on the surface of preventing board and two numbers and preventing the board, and is a plurality of the connection slat has all been placed to the inside of fixed recess, and is a plurality of fixed screw, a plurality of fixed screw has all been seted up on fixed recess and the surface of connecting the slat, and is a plurality of the equal threaded connection in inside of fixed screw has fixing bolt.

In a further technical scheme, fastening components includes the mounting panel, the mounting groove has been seted up to the inside of mounting panel, the inside sliding connection of mounting groove has two slides, two the equal fixedly connected with extension spring in slide relative side surface, two slide one side surface difference fixedly connected with arm-tie and No. two arm-ties not relative, two a side surface of arm-tie and No. two arm-ties respectively with clamping screw and No. two clamping screw fixed connection.

In a further technical scheme, two the surface of a arm-tie, no. two arm-ties, no. one prevent that the board and No. two prevent that the board is worn has all seted up the installation screw, and is a plurality of the equal threaded connection installation screw rod in inside of installation screw hole is a plurality of the equal fixedly connected with swivel of one end of installation screw rod.

In a further technical scheme, the equal fixedly connected with spacing strip of surface of first number protection against the board, the spacing groove has all been seted up to the surface of second number protection against the board, the inside at the spacing groove is established to the one end of spacing strip.

In a further technical scheme, an arc-shaped groove is formed in one side of each limiting strip, and one end of each fixing screw cylinder is arranged inside the arc-shaped groove.

In a further technical scheme, the plurality of fixing grooves are respectively arranged at four corners of the first protection plate and the second protection plate.

The utility model has the advantages that:

1. the fastening assembly is driven by the fixing screw barrel, the first fixing screw rod and the second fixing screw rod to fasten and loosen two sides of the first attachment prevention plate and the second attachment prevention plate, so that the first attachment prevention plate and the second attachment prevention plate can be fixed and disassembled conveniently;

2. the pulling force through fastening components can be to preventing that board and No. two prevent that spacing and the tensioning of a direction of board are prevented, can be to preventing the further fixed effect of board and No. two preventing through installation screw and installation screw, can be convenient for dismantle the effect of changing preventing the board simultaneously.

Drawings

Fig. 1 is a schematic overall structure diagram of an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a fastener assembly according to an embodiment of the present invention;

FIG. 3 is an enlarged view of the structure A in FIG. 1 according to the embodiment of the present invention;

fig. 4 is an enlarged view of the structure at B in fig. 2 according to the embodiment of the present invention;

description of the reference numerals:

1. a first defending plate; 2. a second protection plate; 3. fixing the screw cylinder; 4. a first fixing screw; 5. a second fixing screw rod; 6. fixing the groove; 7. connecting the ribbon boards; 8. fixing screw holes; 9. mounting a plate; 10. mounting grooves; 11. a slide plate; 12. an extension spring; 13. a first pulling plate; 14. a second pulling plate; 15. mounting a screw hole; 16. installing a screw rod; 17. rotating the ring; 18. a limiting strip; 19. a limiting groove; 20. an arc-shaped groove.

Detailed Description

The embodiments of the present invention will be further explained with reference to the drawings.

The embodiment is as follows:

as shown in fig. 1-4, a detachable anti-attachment plate structure suitable for a PVD machine comprises a first anti-attachment plate 1 and a second anti-attachment plate 2, wherein the outer surfaces of the first anti-attachment plate 1 and the second anti-attachment plate 2 are respectively provided with an installation component, the installation component comprises a fixed screw cylinder 3, the insides of two ends of the two fixed screw cylinders 3 are respectively in threaded connection with a first fixed screw 4 and a second fixed screw 5, one ends of the two first fixed screw 4 and the second fixed screw 5 are respectively and fixedly connected with a fastening component, the surfaces of the first anti-attachment plate 1 and the second anti-attachment plate 2 are respectively provided with a plurality of fixed grooves 6, the insides of the fixed grooves 6 are respectively provided with a connecting strip plate 7, the surfaces of the fixed grooves 6 and the connecting strip plates 7 are respectively provided with a fixed screw hole 8, and the insides of the fixed screw holes 8 are respectively and are respectively in threaded connection with a fixing bolt;

a plurality of fixing grooves 6 are respectively arranged at the four corners of the first protection plate 1 and the second protection plate 2.

The working principle of the technical scheme is as follows:

through rotating fixed barrel 3, make a clamping screw 4 and No. two clamping screw 5 slide to the direction of difference under the effect of screw thread, the slip of clamping screw 4 and No. two clamping screw 5 has driven the fastening components at both ends and has slided, thereby fastening components keeps away from a board 1 and No. two boards 2 of preventing, make it to a board 1 and No. two boards 2 of preventing not carrying out spacing effect, then drive the fastening components through pulling fixed barrel 3 and stretch, thereby can make two fixed barrels 3 break away from the inside of spacing strip 18, then rotate fixing bolt, make fixing bolt break away from fixed recess 6 and connect inside 8 of fixed screw on slat 7 surface, connecting slat 7 and breaking away from the inside of fixed recess 6, thereby can prevent board 1 and No. two boards 2 of preventing and dismantle fast, the detached effect, be convenient for to the effect of carrying out quick replacement to a single board of preventing, avoid whole change, the production cost has been reduced.

In another embodiment, as shown in fig. 1, 2 and 4, the fastening assembly includes a mounting plate 9, a mounting groove 10 is formed in the mounting plate 9, two sliding plates 11 are slidably connected to the inside of the mounting groove 10, an extension spring 12 is fixedly connected to a surface of one side of each of the two sliding plates 11 opposite to each other, a first pulling plate 13 and a second pulling plate 14 are fixedly connected to a surface of one side of each of the two sliding plates 11 not opposite to each other, and a surface of one side of each of the two first pulling plates 13 and one side of the two second pulling plates 14 is fixedly connected to the first fixing screw 4 and the second fixing screw 5 respectively;

two No. 13, no. two arm-tie 14, no. one prevent that board 1 and No. two prevent that the surface of board 2 all has seted up installation screw 15, the equal threaded connection installation screw rod 16 of the inside of a plurality of installation screw 15, the equal fixedly connected with swivel 17 of one end of a plurality of installation screw rods 16.

Drive installation screw 16 through rotating swivel 17 and rotate, under the effect of screw thread, make installation screw 16 break away from the inside of installation screw 15, then through pulling a pull plate 13 and No. two pull plates 14 after the direction pulling of difference, a pull plate 13 and No. two pull plates 14 have driven slide 11 and have slided in the inside of mounting groove 10, thereby can stretch drawing spring 12, then make the installation component at a pull plate 13 and No. two pull plates 14 both ends break away from a and prevent board 1 and No. two and prevent board 2, thereby can be convenient for to prevent the effect that the board changed the split to single.

In another embodiment, as shown in fig. 1, the outer surfaces of the first attachment preventing plate 1 are fixedly connected with limiting strips 18, the outer surfaces of the second attachment preventing plate 2 are provided with limiting grooves 19, and one ends of the limiting strips 18 are arranged inside the limiting grooves 19;

an arc-shaped groove 20 is formed in one side of each limiting strip 18, and one end of each fixing screw cylinder 3 is arranged inside the arc-shaped groove 20.

Can be convenient for make the effect that the position carried on preliminary spacing between board 1 and the No. two board 2 of preventing is prevented through spacing 18 and spacing groove 19, the effect that the installation component was placed can be convenient for through the arc wall 20 of spacing 18 one side.

The above embodiments only express the specific embodiments of the present invention, and the description thereof is specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.

Claims

1. The utility model provides a but be applicable to PVD machine split type and prevent board structure, includes a protection board (1) and No. two protection boards (2), its characterized in that: prevent that board (1) and No. two prevent that the surface of board (2) all is equipped with the installation component, the installation component includes a fixed screw section of thick bamboo (3), two the inside difference threaded connection at a fixed screw section of thick bamboo (3) both ends has fixing screw (4) and No. two fixing screw (5), two the equal fixedly connected with fastening component of one end of fixing screw (4) and No. two fixing screw (5), prevent that board (1) and No. two prevent that the surface of board (2) has all seted up a plurality of fixed recesses (6), and is a plurality of connect slat (7) have all been placed to the inside of fixed recess (6), and are a plurality of fixed screw (8) have all been seted up on the surface of fixed recess (6) and connection slat (7), and are a plurality of the equal threaded connection in inside of fixed screw (8) has fixing bolt.

2. The detachable anti-attachment plate structure of a PVD machine as recited in claim 1, wherein: fastening components includes mounting panel (9), mounting groove (10) have been seted up to the inside of mounting panel (9), the inside sliding connection of mounting groove (10) has two slide (11), two slide (11) relative a side surface equal fixedly connected with extension spring (12), two slide (11) one side surface difference fixedly connected with arm-tie (13) and No. two arm-tie (14), two not relative of slide (11) one side surface respectively No. one arm-tie (13) and No. two arm-tie (14) one side surface respectively with fixing screw (4) and No. two fixing screw (5) fixed connection.

3. The detachable anti-attachment plate structure of a PVD machine as recited in claim 2, wherein: two installation screw hole (15), a plurality of installation screw hole (16) are all seted up to the surface of a arm-tie (13), no. two arm-tie (14), a protection board (1) and No. two protection boards (2) the equal threaded connection in inside of installation screw hole (15), it is a plurality of the equal fixedly connected with swivel (17) of one end of installation screw rod (16).

4. The detachable anti-attachment plate structure of a PVD machine as recited in claim 3, wherein: the outer surface of the first protection plate (1) is fixedly connected with a limiting strip (18), the outer surface of the second protection plate (2) is provided with a limiting groove (19), and one end of the limiting strip (18) is arranged in the limiting groove (19).

5. The detachable anti-attachment plate structure of a PVD machine as recited in claim 4, wherein: arc-shaped grooves (20) are formed in one sides of the limiting strips (18), and one end of the fixed screw cylinder (3) is arranged inside the arc-shaped grooves (20).

6. The detachable anti-attachment plate structure of a PVD machine as recited in claim 1, wherein: the fixing grooves (6) are respectively arranged at the four corners of the first attachment prevention plate (1) and the second attachment prevention plate (2).