CN218435122U

CN218435122U - Ultrapure water filter for semiconductor

Info

Publication number: CN218435122U
Application number: CN202222609531.3U
Authority: CN
Inventors: 李京; 沈健明; 马兵; 李敏
Original assignee: Chongqing Molecular Water System Co ltd
Current assignee: Chongqing Molecular Water System Co ltd
Priority date: 2022-09-30
Filing date: 2022-09-30
Publication date: 2023-02-03
Anticipated expiration: 2032-09-30

Abstract

The utility model discloses an ultrapure water filter for semiconductors, which comprises a shell, a shell cover and a shell seat, wherein the shell cover and the shell seat are detachably connected with the shell, the shell cover and the shell seat surround to form a cavity structure, the shell seat is provided with a water inlet pipe and a water outlet pipe, the water inlet pipe penetrates through the shell seat and is communicated with the cavity structure, a filter core pipe is inserted into the cavity structure, and the water outlet end of the filter core pipe is communicated with the water outlet pipe; PVDF films are coated on the inner side walls of the shell body, the shell cover and the shell base and the insertion end of the water inlet pipe. The utility model discloses establish the components of a whole that can function independently structure to detachable connection to the filter, be convenient for paint the PVDF membrane, also be convenient for in time change the filter core pipe, can effectively guarantee the granule requirement after the ultrapure water filters, simple structure is compact, and it is convenient to use.

Description

Ultrapure water filter for semiconductor

Technical Field

The utility model relates to a water treatment technical field, in particular to ultrapure water filter for semiconductor.

Background

The semiconductor industry and the electronic industry have strict requirements on the residual particulate matters in the ultrapure water, the existing process for removing the particulate matters in the ultrapure water in the semiconductor industry and the electronic industry usually adopts a polishing bed and a terminal filter, and the terminal filter generally adopts a filter element type particulate filter and mainly depends on the filtration of a filter element to remove the particulate matters; in addition, the ultrapure water has high water quality requirement, and cannot react with a contacted carrier material in the filtering process so as to avoid the ultrapure water from losing efficacy, so the filtering effect of actual particles is limited, and the national standard specified value is difficult to achieve, so the contact needs to be cut off in the filter, but because the whole filter is huge, the arrangement of a protective film and the maintenance are not easy.

SUMMERY OF THE UTILITY MODEL

To the not enough of above-mentioned prior art, the utility model aims to solve the technical problem that: provided is an ultrapure water filter for a semiconductor, which can ensure the particle filtering requirement of ultrapure water and is convenient for maintaining the ultrapure water circulation environment.

In order to solve the technical problem, the utility model discloses a technical scheme be: the ultrapure water filter for the semiconductor comprises a shell, a shell cover and a shell seat, wherein the shell cover and the shell seat are detachably connected with the shell, the shell cover and the shell seat surround to form a cavity structure, a water inlet pipe and a water outlet pipe are arranged on the shell seat, the water inlet pipe penetrates through the shell seat and is communicated with the cavity structure, a filter core pipe is inserted into the cavity structure, and the water outlet end of the filter core pipe is communicated with the water outlet pipe; PVDF films are coated on the inner side walls of the shell, the shell cover and the shell base and the insertion end of the water inlet pipe.

By adopting the structure, the whole filter is divided into the shell, the shell cover and the shell seat which are detachably connected, so that a PVDF film is convenient to coat, the ultrapure water is prevented from reacting with the materials of the shell, the shell cover and the shell seat, and the stability of particle standard of the ultrapure water in the filtering process is ensured; meanwhile, when the particle standard of the ultrapure water is changed and needs to be checked, after the water is drained, the filter can be conveniently disassembled to respectively check the three parts, including the penetrating position of the water inlet pipe, if the PVDF membrane is found to fall off or be damaged, remedial measures can also be timely carried out, the filtration and the use can be recovered as soon as possible, and the filter core pipe can be conveniently replaced; the filter core pipe is arranged in a cavity formed by surrounding the shell body, the shell cover and the shell seat, ultrapure water injected by the water inlet pipe is filled in the cavity, namely, the filter core pipe is fully contacted with the ultrapure water, the ultrapure water filtered by the filter core pipe flows into the shell seat and is discharged through the water outlet pipe, the structure is simple and compact, and the stability required by ultrapure water particles is ensured while the filtering effect is ensured.

In order to facilitate installation and fixation and avoid contact reaction of ultrapure water, preferably, a fixing plate with a PVDF (polyvinylidene fluoride) film coated on the outer wall is arranged at one end in the shell, at least two connecting holes are uniformly formed in the fixing plate along the circumferential direction, and a drainage tube is sleeved in each connecting hole; the outer wall of the shell cover is coated with a mounting plate of a PVDF film, limiting holes are formed in the positions, corresponding to the connecting holes, of the mounting plate, a mounting seat is arranged in each limiting hole, a second boss is arranged on the emitting end of each mounting seat along the appearance, and a filter core pipe is sleeved between the drainage pipe at the corresponding end and the mounting seat; during the equipment, the cap lock is fixed on the casing, mounting panel, fixed plate and inner tube inner wall surround and form a cavity body, and the spacing hole of corresponding position is worn to establish and the mounting panel is emerged to the one end of mount pad, and the lower terminal surface of second boss and the terminal surface butt that the inner tube corresponds the end, and the up end of this second boss then with the lower terminal surface butt of mounting panel.

In order to avoid filtering backflow and simplify the structure, preferably, the filter core tube comprises an outer tube and an inner tube, the inner wall of the outer tube and the outer wall of the inner tube surround to form an annular cavity, and a filter medium is filled in the annular cavity; one end of the inner tube is fixedly sleeved with the mounting seat, and the other end of the inner tube is communicated with the drainage tube in a sleeved mode.

In order to facilitate the installation of the shell seat, the shell seat is preferably of an inwards concave arc-shaped shell structure, a baffle plate with the outer wall coated with a PVDF film is fixedly arranged on the shell seat, and the baffle plate and the inner side wall of the shell seat surround to form a cavity communicated with a water outlet pipe; the middle part of the baffle is provided with a fixing hole communicated with the cavity body, the positions of the baffle corresponding to the connecting holes are provided with guide holes, and the water inlet pipe penetrates through the shell seat and is inserted and fixed in the fixing hole; one end of the drainage tube protrudes out of the fixing plate, and the protruding end of the drainage tube extends into the guide hole and is communicated with the cavity.

In order to guarantee the leakproofness of mounted position, as preferred, the fixed orifices is the step hole, the inlet tube is worn to produce the aperture end of fixed orifices, has laid sealed the pad in the macropore end of this fixed orifices the sealed end that corresponds the inlet tube that stacks up is equipped with the hole of stepping down, and the end of crossing of this inlet tube stretches into in the hole of stepping down, and the outer wall of inlet tube and the aperture looks adaptation in the hole of stepping down.

In order to avoid the ultrapure water leaking in the position of the drainage tube, as the optimization, the position of the corresponding drainage tube on the sealing gasket is provided with a connecting through hole, the outer side wall of the drainage tube is provided with a first boss along the appearance, during assembly, the shell is fastened and fixed on the shell seat, the outlet end of the drainage tube extends into the guide hole, the lower end surface of the first boss is abutted to the upper end surface of the sealing gasket, and the upper end surface of the first boss is abutted to the lower end surface of the inner tube.

In order to ensure the installation sealing property between the shell and the shell seat, preferably, a first fixing ring is arranged at one end of the outer side wall of the shell, and a first groove is formed in the first fixing ring in a winding manner along the circumferential direction; the lateral wall of shell seat is equipped with the solid fixed ring of second go up along the solid fixed ring of second around being equipped with the second recess, when the solid fixed ring of first fixed ring and the solid fixed ring superpose of second, first recess surrounds with the second recess and forms a ring cylindricality cavity, is equipped with the sealing washer of shape looks adaptation in this ring cylindricality cavity.

In order to fix the shell and the shell base in an installing mode, preferably, at least two fixing grooves are formed in the first fixing ring, a position, corresponding to the fixing grooves, of the second fixing ring is provided with a yielding groove communicated with the second fixing ring, a bolt is inserted into the fixing grooves, a nut of the bolt is abutted to the upper end face of the first fixing ring, the inserting end of the bolt penetrates through the yielding groove downwards, a nut is screwed at the penetrating end of the bolt, and the nut is abutted to the lower end face of the second fixing ring to fix the two fixing rings.

Has the beneficial effects that: the utility model discloses establish the components of a whole that can function independently structure to detachable connection to the filter, be convenient for paint the PVDF membrane, also be convenient for in time change the filter core pipe, can effectively guarantee the granule requirement after the ultrapure water filters, simple structure is compact, and it is convenient to use.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is an enlarged view of a portion a in fig. 1.

Fig. 3 is an enlarged view of fig. 1 at B.

Fig. 4 is an enlarged view of fig. 1 at C.

The meaning of the reference symbols in the drawings is:

a shell body-1; a shell cover-11; a mounting plate-111; shell base-12; a fixing hole-121; a guide hole-122; a gasket-123; a fixing plate-14; a mounting seat-15; a second boss-151; a drainage tube-16; a first boss-161;

an outer tube-21; an inner tube-22; filter medium-23; a water inlet pipe-31; a water outlet pipe-32; a baffle-41; a first retaining ring-51; a first recess-511; a fixed groove-512; a second stationary ring-52; a second groove-521; and a sealing ring-53.

Detailed Description

As shown in fig. 1 to 4, the present invention includes a housing 1, a housing cover 11 and a housing base 12 detachably connected to the housing 1, the housing cover 11 and the housing base 12 form a cavity structure, and the housing base 12 is provided with a water inlet pipe 31 and a water outlet pipe 32; a fixing plate 14 with a PVDF film coated on the outer wall is arranged at one end in the shell 1, at least two connecting holes are uniformly formed in the fixing plate 14 along the circumferential direction, and a drainage tube 16 is sleeved in each connecting hole; the casing cover 11 is provided with an installation plate 111 coated with a PVDF film on the outer wall, the installation plate 111 is provided with limit holes at positions corresponding to the connection holes, each limit hole is internally provided with an installation seat 15, the emergence end of the installation seat 15 is provided with a second boss 151 along the appearance, and a filter core pipe is sleeved between the drainage pipe 16 at the corresponding end and the installation seat 15; during the equipment, 11 locks of cap are fixed on casing 1, mounting panel 111, fixed plate 14 and the 22 inner walls of inner tube surround and form a cavity body, and the spacing hole of corresponding position is worn to establish and mounting panel 111 is emerged to the one end of mount pad 15, and the terminal surface butt of the lower terminal surface of second boss 151 and the corresponding end of inner tube 22, the up end of this second boss 151 then with the lower terminal surface butt of mounting panel 111.

The filter core tube comprises an outer tube 21 and an inner tube 22, the inner wall of the outer tube 21 and the outer wall of the inner tube 22 surround to form an annular cavity, and a filter medium 23 is filled in the annular cavity; one end of the inner tube 22 is fixedly sleeved with the mounting seat 15, and the other end is communicated with the drainage tube 16.

The shell base 12 is an inward-concave arc-shaped shell structure, a baffle plate 41 with an outer wall coated with a PVDF film is fixedly arranged on the shell base 12, and the baffle plate 41 and the inner side wall of the shell base 12 are encircled to form a cavity communicated with the water outlet pipe 32; a fixing hole 121 communicated with the cavity body is formed in the middle of the baffle plate 41, guide holes 122 are formed in positions, corresponding to the connecting holes (not marked), on the baffle plate 41, and the water inlet pipe 31 penetrates through the shell base 12 and is inserted and fixed in the fixing hole 121; one end of the drainage tube 16 protrudes out of the fixing plate 14, and the protruding end of the drainage tube 16 extends into the guide hole 122 and communicates with the cavity.

The fixing hole 121 is a stepped hole, the water inlet pipe 31 penetrates through the small hole end of the fixing hole 121, a sealing gasket 123 is laid in the large hole end of the fixing hole 121, a yielding hole is formed in the sealing gasket 123 corresponding to the penetrating end of the water inlet pipe 31, the penetrating end of the water inlet pipe 31 extends into the yielding hole, and the outer wall of the water inlet pipe 31 is matched with the aperture of the yielding hole; the position department that corresponds drainage tube 16 on sealed pad 123 is equipped with connect the through-hole drainage tube 16's lateral wall is equipped with first boss 161 along the appearance, and during the equipment, casing 1 lock is fixed on shell seat 12, and in drainage tube 16's the end of popping out stretched into guiding hole 122, and the up end butt of the lower terminal surface of first boss 161 and sealed pad 123, the up end of this first boss 161 then with the lower terminal surface butt of inner tube 22.

A first fixing ring 51 is arranged at one end of the outer side wall of the shell 1, and a first groove 511 is formed in the first fixing ring 51 in a winding mode along the circumferential direction; a second fixing ring 52 is arranged on the outer side wall of the shell base 12, a second groove 521 is arranged on the second fixing ring 52 in a surrounding manner along the circumferential direction, and when the first fixing ring 51 is overlapped with the second fixing ring 52, the first groove 511 and the second groove 521 surround to form a ring-cylindrical cavity, and a sealing ring 53 with a matched shape is arranged in the ring-cylindrical cavity; be equipped with two at least fixed slots 512 on the first solid fixed ring 51 the position department that corresponds fixed slot 512 on the second solid fixed ring 52 is equipped with the groove of stepping down that is linked together insert the bolt in the fixed slot 512, the nut of this bolt and the up end butt of first solid fixed ring 51, the groove of stepping down is worn out to put in the end of inserting of bolt, and the end spiro union of wearing out of this bolt has the nut, and this nut and the lower terminal surface butt of the solid fixed ring 52 of second to two solid fixed rings of fixed.

PVDF films are coated on the inner side walls of the shell body 1, the shell cover 11 and the shell base 12 and the insertion end of the water inlet pipe 31.

The utility model discloses a use method as follows:

as shown in fig. 1, firstly, it should be noted that, in order to prevent the ultrapure water from reacting with the material of the carrier to generate particles during the process of flowing through the filter, and to prevent the ultrapure water from filtering out of the standard, the PVDF film is coated on the position where the ultrapure water flows through, so as to realize the partition between the ultrapure water and the carrier; meanwhile, as for the filter element tube, the filter element tube is fully contacted with the ultrapure water during the whole filtering period, in order to avoid blocking the filtering channel due to smearing, the material of the filter element tube is made of PVDF material, and similarly, the filter medium 23 should also be selected as a substance which does not react with the ultrapure water, which belongs to the common knowledge in the art, and thus, the details are not described herein.

As shown in fig. 1 to 4, during installation, the housing base 12 is fixed, the water inlet pipe 31 is inserted, the baffle plate 41 is covered, the water inlet pipe 31 penetrates through the small hole end of the fixing hole 121 and extends into the abdicating hole of the sealing gasket 123, the aperture of the abdicating hole is tightly matched and sleeved with the outer wall of the water inlet pipe 31, and the sealing performance of the water inlet position is ensured; meanwhile, an upper fixing plate 14 is fixedly sleeved at one end of the shell 1, a drainage tube 16 is fixedly arranged in the connecting hole, the drainage tube 16 is fixedly sleeved with an inner tube 22 at a corresponding position, a mounting seat 15 is arranged in a limiting hole on the mounting plate 111, one end of the inner tube 22 is inserted on the mounting seat 15, the shell cover 11 is buckled, a filter core tube is mounted in the shell 1, the assembly of the filter core tube is completed, and finally, the joint between the shell cover 11 and the shell 1 is welded and fixed; it should be noted that the fixed mounting positions of the mounting seat 15 and the drainage tube 16 are mounted in a tight fit manner to ensure the sealing performance, and the specific size matching is not described herein again; meanwhile, the upper end face and the lower end face of the first boss 161 and the second boss 151 are abutted to corresponding positions, so that a sealing structure is formed, multiple sealing effects are provided by multiple installation settings (as shown in fig. 2 and 3), and thus, the sealing performance of the connecting position of the filter element pipe and the housing cover 1 is ensured, even if the sealing effect is weakened after use and leakage occurs, the inner wall of the housing cover 11 is also coated with a PVDF film, and the water body of leakage backflow does not influence the particle change of ultrapure water.

Then, a sealing ring 53 is placed in the second groove 521, the shell 1 is connected to the shell base 12, the first fixing ring 51 is overlapped with the second fixing ring 52, the first groove 511 and the second groove 521 surround to form an annular cylindrical cavity, and the limiting sealing ring 53 is fixed; then, a bolt is inserted into the fixing groove 512, a nut of the bolt abuts against the upper end face of the first fixing ring 51, an insertion end of the bolt penetrates downwards to form a receding groove, a nut is screwed at the penetrating end of the bolt, and the nut abuts against the lower end face of the second fixing ring 52 to fix the two fixing rings, so that the shell base 12 is fixedly connected with the shell 1 on the premise of ensuring the sealing performance.

When the ultra-low particle filter is used, ultra-pure water is injected from the water inlet pipe 31, enters the shell 1 and permeates into the filter medium 23 from the outer pipe 21 of the filter core pipe to filter particles in the ultra-pure water, so that the ultra-low particle state after the ultra-pure water is filtered is ensured; the filtered ultrapure water flows into the inner tube 22, flows into a cavity formed by the shell base 12 and the baffle plate 41 through the drainage tube 16, and finally flows out through the water outlet tube 32.

If the filter element tube needs to be replaced, only the bolt between the two fixing rings needs to be disassembled, the shell body 1 is taken down from the shell seat 12, the shell cover 11 is taken down, the connecting seat 15 is taken down, the filter element tube can be replaced by taking down the shell body 1, after the replacement is finished, the shell body 1 and the shell cover 11 are sequentially buckled according to the related steps, and the filter element tube can be continuously used after the installation is finished.

In the embodiment, due to the requirement of sealing performance, tight connection with interference fit is adopted at the sleeving positions of the mounting seat 15 and the drainage tube 16, and if the assembly and disassembly are damaged, the tight connection is replaced immediately so as to avoid leakage to influence the quality of the ultrapure water; meanwhile, PVDF film should be coated on both the mount 15 and the drain tube 16 where they come into contact with ultrapure water.

In order to ensure the filtering efficiency, the number of the filter core tubes is generally set to three or five according to the diameter, which is not described herein again.

Claims

1. An ultrapure water filter for semiconductor, characterized in that: the water purifier comprises a shell body (1), a shell cover (11) and a shell seat (12) which are detachably connected with the shell body (1), wherein the shell cover (11) and the shell seat (12) surround to form a cavity structure, a water inlet pipe (31) and a water outlet pipe (32) are arranged on the shell seat (12), the water inlet pipe (31) penetrates through the shell seat (12) and is communicated with the cavity structure, a filter core pipe is inserted into the cavity structure, and the water outlet end of the filter core pipe is communicated with the water outlet pipe (32); PVDF films are coated on the inner side walls of the shell body (1), the shell cover (11) and the shell base (12) and the insertion end of the water inlet pipe (31).

2. The ultrapure water filter for semiconductor as set forth in claim 1, wherein: a fixing plate (14) with a PVDF film coated on the outer wall is arranged at one end in the shell (1), at least two connecting holes are uniformly formed in the fixing plate (14) along the circumferential direction, and a drainage tube (16) is sleeved in each connecting hole; a mounting plate (111) with a PVDF film coated on the outer wall is arranged on the shell cover (11), limiting holes are formed in the positions, corresponding to the connecting holes, of the mounting plate (111), a mounting seat (15) is arranged in each limiting hole, a second boss (151) is arranged at the emitting end of each mounting seat (15) along the appearance, and a filter core pipe is sleeved between the drainage pipe (16) at the corresponding end and the mounting seat (15); during the equipment, cap (11) lock is fixed on casing (1), mounting panel (111), fixed plate (14) surround with inner tube (22) inner wall and form a cavity body, and the spacing hole that corresponds the position is worn to establish and mounting panel (111) are emitted to the one end of mount pad (15), and the terminal surface butt that the lower terminal surface of second boss (151) and inner tube (22) correspond the end, the up end of this second boss (151) then with the lower terminal surface butt of mounting panel (111).

3. The ultrapure water filter for semiconductor as set forth in claim 1, wherein: the filter core tube comprises an outer tube (21) and an inner tube (22), the inner wall of the outer tube (21) and the outer wall of the inner tube (22) surround to form an annular cavity, and a filter medium (23) is filled in the annular cavity; one end of the inner tube (22) is fixedly sleeved with the mounting seat (15), and the other end is communicated with the drainage tube (16).

4. The ultrapure water filter for semiconductor as set forth in claim 2, wherein: the shell seat (12) is of an inwards concave arc-shaped shell structure, a baffle (41) with the outer wall coated with a PVDF film is fixedly arranged on the shell seat (12), and the baffle (41) and the inner side wall of the shell seat (12) are encircled to form a cavity communicated with the water outlet pipe (32); a fixing hole (121) communicated with the cavity body is formed in the middle of the baffle plate (41), guide holes (122) are formed in the positions, corresponding to the connecting holes, of the baffle plate (41), and the water inlet pipe (31) penetrates through the shell base (12) and is inserted into and fixed in the fixing hole (121); one end of the drainage tube (16) protrudes out of the fixing plate (14), and the protruding end of the drainage tube (16) extends into the guide hole (122) and is communicated with the cavity.

5. The ultrapure water filter for semiconductor according to claim 4, wherein: the fixed orifices (121) are the step hole, the aperture end of fixed orifices (121) is worn to establish in inlet tube (31), has laid sealed pad (123) in the macropore end of this fixed orifices (121) the end of wearing that corresponds inlet tube (31) on sealed pad (123) is equipped with the hole of stepping down, and the end of wearing of this inlet tube (31) stretches into the hole of stepping down, and the outer wall of inlet tube (31) and the aperture looks adaptation in the hole of stepping down.

6. An ultrapure water filter for semiconductor according to claim 5, wherein: the utility model discloses a drainage tube (16) is sealed to be equipped with the connecting through hole on sealed pad (123) the lateral wall of drainage tube (16) is equipped with first boss (161) along the appearance, and during the equipment, casing (1) lock is fixed on shell seat (12), and the end of emerging of drainage tube (16) stretches into in guiding hole (122), and the up end butt of the lower terminal surface of first boss (161) and sealed pad (123), the up end of this first boss (161) then with the lower terminal surface butt of inner tube (22).

7. The ultrapure water filter for semiconductor according to claim 1, wherein: a first fixing ring (51) is arranged at one end of the outer side wall of the shell (1), and a first groove (511) is formed in the first fixing ring (51) in a winding mode along the circumferential direction; the outer side wall of the shell seat (12) is provided with a second fixing ring (52), a second groove (521) is formed in the second fixing ring (52) in a winding mode in the circumferential direction, when the first fixing ring (51) and the second fixing ring (52) are overlapped, the first groove (511) and the second groove (521) surround to form a circular cylindrical cavity, and a sealing ring (53) in a shape matched with the circular cylindrical cavity is arranged in the circular cylindrical cavity.

8. An ultrapure water filter for semiconductor according to claim 7, wherein: be equipped with two at least fixed slots (512) on first solid fixed ring (51) the position department that corresponds fixed slot (512) on the second solid fixed ring (52) is equipped with the groove of stepping down that is linked together insert the bolt in fixed slot (512), the nut of this bolt and the up end butt of first solid fixed ring (51), the groove of stepping down is worn to establish by the insertion end of bolt, and the end spiro union of wearing out of this bolt has the nut, and the lower terminal surface butt of this nut and second solid fixed ring (52) to two solid fixed rings of fixed.