CN218422595U - Chemical liquid medicine proportioning system of wafer single-chip type cleaning machine - Google Patents
Chemical liquid medicine proportioning system of wafer single-chip type cleaning machine Download PDFInfo
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- CN218422595U CN218422595U CN202222081369.2U CN202222081369U CN218422595U CN 218422595 U CN218422595 U CN 218422595U CN 202222081369 U CN202222081369 U CN 202222081369U CN 218422595 U CN218422595 U CN 218422595U
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Abstract
The utility model provides a chemical liquid medicine proportioning system of wafer monolithic formula cleaning machine, including the mixing drum of fixed mounting on the cleaning machine and through link fixed mounting in the explosive box of mixing drum top and the controller of fixed mounting on the link, the inside of mixing drum rotates and is connected with and carries out the rabbling mechanism of electricity connection between the controller, one side intercommunication of mixing drum has the transfer line that one end was provided with first solenoid valve. This chemistry liquid medicine proportioning system of wafer monolithic formula cleaning machine uses through the cooperation of controller, connecting pipe, second solenoid valve and flowmeter for the system can open through the second solenoid valve of controller control and stop the operation, and then the inside that the mixing drum was added according to predetermined proportion to the stock solution of controlling first stock solution storehouse, second stock solution storehouse, third stock solution storehouse and fourth stock solution storehouse inside mixes the stirring, realizes the automatic ratio of chemistry liquid medicine, and is very convenient.
Description
Technical Field
The utility model relates to a semiconductor package cleaning equipment liquid medicine proportioning equipment technical field specifically discloses a chemical liquid medicine proportioning system of wafer monolithic formula cleaning machine.
Background
The existing part is used for the wafer single-chip type cleaning machine, the mixed chemical liquid medicine needs to be added into the cleaning machine for use in the using process, the chemical liquid medicine needs to be manually mixed after being used and completed every time, the cleaning machine is very inconvenient, and meanwhile, the chemical liquid cannot be continuously mixed and added, so that the working efficiency of the cleaning machine is low.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned defect among the prior art or not enough, this application aims at providing a chemical liquid medicine proportioning system of wafer monolithic formula cleaning machine, including fixed mounting the mixing drum on the cleaning machine and through link fixed mounting at the explosive box of mixing drum top and the controller of fixed mounting on the link, the inside of mixing drum rotates and is connected with and carries out the rabbling mechanism of electricity connection between the controller, one side intercommunication of mixing drum has the transfer line that one end was provided with first solenoid valve, carry out the electricity between first solenoid valve and the controller and connect, the inside of explosive box is provided with first stock solution storehouse, second stock solution storehouse, third stock solution storehouse and fourth stock solution storehouse respectively, and the bottom of explosive box through with carry out the electricity between the controller and be connected and communicate with the top of mixing drum with the flow control subassembly that carries out the intercommunication between first stock solution storehouse, second stock solution storehouse, third stock solution storehouse and the fourth stock solution storehouse respectively, the seal cover of first stock solution storehouse, the seal cover of seal cover intercommunication, the top thread sealing plate has cup jointed the inlet pipe.
Preferably, the rabbling mechanism is including rotating the pivot of connection in the mixing drum inside, the outside of pivot is provided with the puddler that is located the mixing drum inboard, and the pivot extends the outside one end of mixing drum and has cup jointed the motor that fixed mounting carried out the intercommunication on the mixing drum and between the controller through the axle sleeve is fixed.
Preferably, the bottom in first stock solution storehouse, second stock solution storehouse, third stock solution storehouse and fourth stock solution storehouse all communicates there is the pressure sensor who is located flow control subassembly one side and carry out the electricity between the controller, the inside in first stock solution storehouse, second stock solution storehouse, third stock solution storehouse and fourth stock solution storehouse all is provided with perspective window.
Preferably, the flow control assembly comprises a connecting pipe communicated with the bottom of the medicine storage box, the bottom end of the connecting pipe is communicated with a flow meter communicated with the top of the mixing barrel through a second electromagnetic valve, and the second electromagnetic valve and the flow meter are electrically connected with the controller.
Preferably, an alarm is arranged inside the controller.
Preferably, the middle part of the sealing cover is provided with a dustproof breathable net.
Has the advantages that:
1. this chemistry liquid medicine proportioning system of wafer monolithic formula cleaning machine uses through the cooperation of controller, connecting pipe, second solenoid valve and flowmeter for the system can open through the second solenoid valve of controller control and stop the operation, and then the inside that the mixing drum was added according to predetermined proportion to the stock solution of controlling first stock solution storehouse, second stock solution storehouse, third stock solution storehouse and fourth stock solution storehouse inside mixes the stirring, realizes the automatic ratio of chemistry liquid medicine, and is very convenient.
2. This chemical liquid medicine proportioning system of wafer monolithic formula cleaning machine, through the controller, the cooperation of first solenoid valve and transfer line is used, make the system open through the first solenoid valve of controller control and stop, and then control the pipeline between mixing drum and the cleaning machine, be convenient for pass through the inside that the transfer line added the cleaning machine with the inside chemical liquid medicine that mixes of mixing drum, the inside chemical liquid medicine of mixing drum adds the completion back simultaneously, the accessible is closed first solenoid valve and is continued to carry out the mixture of chemical liquid medicine in the inside of mixing drum, the realization is mixed the interpolation to the continuity of chemical liquid medicine, the work efficiency of cleaning machine is improved.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic structural diagram of the present invention.
In the figure: 1. a mixing drum; 2. a connecting frame; 3. a medicine storage box; 4. a controller; 5. a stirring mechanism; 51. a rotating shaft; 52. a stirring rod; 53. a motor; 6. a first solenoid valve; 7. a transfusion tube; 8. a first liquid storage bin; 9. a second liquid storage bin; 10. a third liquid storage bin; 11. a fourth liquid storage bin; 12. a flow control assembly; 121. a connecting pipe; 122. a second solenoid valve; 123. a flow meter; 13. a sealing plate; 14. a feed pipe; 15. and (7) sealing the cover.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
The embodiment of the utility model provides an in the attached drawing: the different types of hatching in the figures are not given the national standards, do not require the material of the elements, and distinguish between cross-sectional views of the elements in the figures.
Referring to fig. 1, a chemical liquid proportioning system of a wafer single-chip type cleaning machine includes a mixing drum 1 fixedly mounted on the cleaning machine, a medicine storage box 3 fixedly mounted above the mixing drum 1 through a connecting frame 2, and a controller 4 fixedly mounted on the connecting frame 2, an agitating mechanism 5 electrically connected with the controller 4 is rotatably connected inside the mixing drum 1, a liquid conveying pipe 7 with a first electromagnetic valve 6 arranged at one end is communicated with one side of the mixing drum 1, the first electromagnetic valve 6 is electrically connected with the controller 4, the medicine storage box 3 is respectively provided with a first liquid storage bin 8, a second liquid storage bin 9, a third liquid storage bin 10 and a fourth liquid storage bin 11 inside, a flow control assembly 12 communicated with the first liquid storage bin 8 and the fourth liquid storage bin 11 is electrically connected with the controller 4 at the bottom of the medicine storage box 3, the first liquid storage bin 8, the second liquid storage bin 9, the third liquid storage bin 10 is communicated with the fourth liquid storage bin 11 through a sealing cover, a feeding pipe 13 is sleeved on the top of the sealing cover 13, and a sealing plate 14 is sleeved on the top of a feeding pipe 15 communicated with the sealing cover 13.
Wherein, rabbling mechanism 5 is including rotating the pivot 51 of connecting in mixing drum 1 inside, and the outside of pivot 51 is provided with the puddler 52 that is located mixing drum 1 inboard, and the pivot 51 extends mixing drum 1 outside one end and has cup jointed the motor 53 that fixed mounting carried out the intercommunication on mixing drum 1 and between the controller 4 through the axle sleeve is fixed.
Wherein, the bottom of first stock solution storehouse 8, the second stock solution storehouse 9, third stock solution storehouse 10 and fourth stock solution storehouse 11 all communicates have be located flow control subassembly 12 one side and with controller 4 between carry out the pressure sensor of electricity connection, utilize pressure sensor can be respectively through first stock solution storehouse 8, the second stock solution storehouse 9, the capacity of the inside stock solution of third stock solution storehouse 10 and fourth stock solution storehouse 11 to pressure sensor's pressure calculation first stock solution storehouse 8, the second stock solution storehouse 9, the inside stock solution of third stock solution storehouse 10 and fourth stock solution storehouse 11, first stock solution storehouse 8, the second stock solution storehouse 9, the inside of third stock solution storehouse 10 and fourth stock solution storehouse 11 all is provided with perspective window, utilize perspective window to make things convenient for personnel to observe first stock solution storehouse 8, the second stock solution storehouse 9, the inside stock solution capacity of third stock solution storehouse 10 and fourth stock solution storehouse 11.
Wherein, flow control assembly 12 is including the connecting pipe 121 of intercommunication in the explosive box 3 bottom, the bottom of connecting pipe 121 has the flowmeter 123 of intercommunication at mixing drum 1 top through second solenoid valve 122 intercommunication, and second solenoid valve 122 and flowmeter 123 all are connected with the electricity between the controller 4, utilize flowmeter 123 to calculate the stoste capacity of adding mixing drum 1 inside, control second solenoid valve 122 through controller 4 simultaneously and open and stop, and then control the stoste capacity of adding mixing drum 1 inside, thereby realize the automatic ratio to the chemical liquid medicine.
Wherein, the inside of controller 4 is provided with the alarm, utilizes the alarm to make the system can be less when detecting the stock solution capacity of first stock solution storehouse 8, second stock solution storehouse 9, third stock solution storehouse 10 and the inside of fourth stock solution storehouse 11 through pressure sensor, can report to the police through the inside alarm of controller 4 and remind, conveniently notifies personnel to add the stock solution to the inside of first stock solution storehouse 8, second stock solution storehouse 9, third stock solution storehouse 10 and fourth stock solution storehouse 11.
Wherein, the middle part of sealed lid 15 is provided with dustproof ventilative net, utilizes dustproof ventilative net can prevent that external dust granule from getting into when the inside of explosive box 3 pollutes the stoste and guarantee first stock solution storehouse 8, second stock solution storehouse 9, third stock solution storehouse 10 and fourth stock solution storehouse 11 the same with external atmospheric pressure, and then the inside stoste of the first stock solution storehouse 8 of being convenient for, second stock solution storehouse 9, third stock solution storehouse 10 and fourth stock solution storehouse 11 flows into the inside of mixing drum 1 through flow control subassembly 12.
When the chemical liquid medicine proportioning system works, different types of stock solutions are respectively added into the first liquid storage bin 8, the second liquid storage bin 9, the third liquid storage bin 10 and the fourth liquid storage bin 11, when chemical liquid medicine proportioning is mixed, the second electromagnetic valve 122 is controlled to be opened through the controller 4, the stock solutions in the first liquid storage bin 8, the second liquid storage bin 9, the third liquid storage bin 10 and the fourth liquid storage bin 11 sequentially flow into the mixing barrel 1 through the connecting pipe 121, the second electromagnetic valve 122 and the flowmeter 123, the flow of the stock solutions is calculated through the flowmeter 123, when the adding amount of the stock solutions in the first liquid storage bin 8, the second liquid storage bin 9, the third liquid storage bin 10 and the fourth liquid storage bin 11 reaches a preset value, the second electromagnetic valve 122 is controlled to be closed through the controller 4, the motor 53 is controlled to be started through the controller 4, the motor 53 drives the rotating shaft 51 and the stirring rod 52 to rotate, the stock solutions in the mixing barrel 1 to be mixed and stirred through the rotation of the stirring rod 52, the motor 53 is closed, the first electromagnetic valve 6 is controlled through the controller 4 to open, the first electromagnetic valve 6, the contents of the stock solutions in the mixing barrel 1 are continuously cleaned through the chemical liquid medicine, and the chemical liquid medicine is continuously cleaned through the chemical liquid medicine, and the special chemical liquid medicine cleaning machine, and the special chemical liquid medicine is not fully described above steps are described in the technical field.
It should be noted that, in the present application, the embodiments and features of the embodiments may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention as referred to in the present application is not limited to the embodiments with a specific combination of the above-mentioned features, but also covers other embodiments with any combination of the above-mentioned features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (6)
1. The utility model provides a chemical liquid medicine proportioning system of wafer monolithic cleaning machine, includes mixing drum (1) of installing on the cleaning machine and installs explosive box (3) and controller (4) of installing on link (2) in mixing drum (1) top through link (2), its characterized in that: the utility model discloses a mixing drum's (1) inside rotation is connected with rabbling mechanism (5) of carrying out the electricity between with controller (4) and is connected, one side intercommunication of mixing drum (1) has transfer line (7) that one end was provided with first solenoid valve (6), carry out the electricity between first solenoid valve (6) and controller (4) and be connected, the inside of explosive box (3) is provided with first stock solution storehouse (8), second stock solution storehouse (9), third stock solution storehouse (10) and fourth stock solution storehouse (11) respectively, and the bottom of explosive box (3) through with controller (4) between carry out the electricity be connected and respectively with first stock solution storehouse (8), second stock solution storehouse (9), carry out the flow control subassembly (12) that communicate between third stock solution storehouse (10) and fourth stock solution storehouse (11) and communicate with the top of mixing drum (1), first stock solution storehouse (8), second stock solution storehouse (9), third stock solution storehouse (10) and fourth stock solution storehouse (11) inboard top all sealed the cover be equipped with inlet pipe (13), the middle part of closing plate (14) cup joint the sealed cover has inlet pipe (14), the top intercommunication of sealing plate (14) top (14).
2. The chemical solution proportioning system of a wafer single wafer cleaning machine of claim 1, wherein: rabbling mechanism (5) are including rotating pivot (51) of connecting in mixing drum (1) inside, the outside of pivot (51) is provided with puddler (52) that are located mixing drum (1) inboard, and pivot (51) extend mixing drum (1) outside one end through the axle sleeve cup joint install on mixing drum (1) and carry out motor (53) that communicate between controller (4).
3. The chemical solution proportioning system of a wafer single wafer cleaning machine of claim 1, wherein: the bottom of first stock solution storehouse (8), second stock solution storehouse (9), third stock solution storehouse (10) and fourth stock solution storehouse (11) all communicates have be located flow control subassembly (12) one side and with controller (4) between carry out the pressure sensor of electricity connection, the inside of first stock solution storehouse (8), second stock solution storehouse (9), third stock solution storehouse (10) and fourth stock solution storehouse (11) all is provided with perspective window.
4. The chemical solution proportioning system of a wafer single wafer cleaning machine of claim 1, wherein: the flow control assembly (12) comprises a connecting pipe (121) communicated with the bottom of the medicine storage box (3), the bottom end of the connecting pipe (121) is communicated with a flow meter (123) communicated with the top of the mixing barrel (1) through a second electromagnetic valve (122), and the second electromagnetic valve (122) and the flow meter (123) are electrically connected with the controller (4).
5. The chemical solution proportioning system of a wafer single wafer cleaning machine of claim 1, wherein: an alarm is arranged in the controller (4).
6. The chemical solution proportioning system of a wafer single wafer cleaning machine of claim 1, wherein: and the middle part of the sealing cover (15) is provided with a dustproof breathable net.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222081369.2U CN218422595U (en) | 2022-08-09 | 2022-08-09 | Chemical liquid medicine proportioning system of wafer single-chip type cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222081369.2U CN218422595U (en) | 2022-08-09 | 2022-08-09 | Chemical liquid medicine proportioning system of wafer single-chip type cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218422595U true CN218422595U (en) | 2023-02-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222081369.2U Active CN218422595U (en) | 2022-08-09 | 2022-08-09 | Chemical liquid medicine proportioning system of wafer single-chip type cleaning machine |
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| Country | Link |
|---|---|
| CN (1) | CN218422595U (en) |
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- 2022-08-09 CN CN202222081369.2U patent/CN218422595U/en active Active
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