CN218372489U

CN218372489U - High temperature resistant pneumatic overturning baffle for saving space

Info

Publication number: CN218372489U
Application number: CN202221965137.7U
Authority: CN
Inventors: 马续航; 高卫民; 张锐; 王春柱; 王尧; 瞿学选
Original assignee: Southern University of Science and Technology
Current assignee: Southern University of Science and Technology
Priority date: 2022-07-28
Filing date: 2022-07-28
Publication date: 2023-01-24
Anticipated expiration: 2032-07-28

Abstract

The utility model belongs to the technical field of vacuum coating, a high temperature resistant pneumatic upset keeps off province space stop is disclosed, bear the support including vacuum coating frame and with vacuum coating frame fixed connection's work piece, can dismantle through the screw in one side that the work piece bore the support and be connected with the connection backing plate, one side that deviates from the work piece and bear the support at the connection backing plate rotates and is connected with vertical company's board, connect backing plate and vertical company's board parallel arrangement each other, vertical company's board includes guide section and linkage segment, the top of guide section can be dismantled and be connected with the direction baffle frame, be connected with the pollution upset baffle that is used for preventing the sputtering thing in the upper end an organic whole of direction baffle frame, the upset baffle is the design of hemisphere concave surface, save space, rotate in the bottom of linkage segment and be connected with upset transmission assembly. The utility model relates to a simply, rational in infrastructure, it is big to have solved baffle mechanism occupation space among the prior art, and the flexibility is poor, and can influence the inside flow field direction of cavity to cause and use reliability scheduling problem that falls.

Description

High temperature resistant pneumatic overturning baffle for saving space

Technical Field

The utility model belongs to the technical field of vacuum coating, especially, relate to a high temperature resistant pneumatic upset keeps off province space stop.

Background

Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated (referred to as a substrate, a substrate or a base) is called vacuum coating. Vacuum coating has three forms, namely evaporation coating, sputtering coating and ion plating. The functions of vacuum coating are various, which also determines that the application occasions are very rich. In general, the main functions of vacuum coating include imparting a high metallic luster and mirror surface effect to the surface of the workpiece to be coated, imparting excellent barrier properties to the film layer on the film material, and providing excellent electromagnetic shielding and electrical conduction effects.

In the vacuum coating equipment that is widely used in all kinds of occasions at present, the substrate frame of substrate can use the baffle to shelter from as required for blockking sputter thing. Among the prior art, the mode of opening to baffle one side through the hinge is mainly adopted in the opening and close of baffle, and this kind of single mode of opening leads to baffle one side to reserve great space and supplies the baffle to open, and the space size requirement to the cavity is higher, and the motion flexibility is poor, and causes the influence to the inside flow field direction of cavity easily, and the fault rate is high, maintains the difficulty, is unfavorable for the high-efficient use of vacuum coating equipment. This situation needs to be changed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a high temperature resistant pneumatic upset keeps off and economizes space stop to it is big to solve the mechanism occupation space who mentions in the above-mentioned background art, can not be applicable to the limited occasion in space, and influences the inside flow field direction of cavity, uses the reliability scheduling problem that falls.

For realizing the purpose of the above utility model, the technical scheme adopted is as follows:

according to the utility model discloses an example, an example provides a high temperature resistance pneumatic upset keeps off province space stop, including vacuum coating frame and with vacuum coating frame fixed connection's work piece bears the support, one side bearing the support at the work piece is connected with the connection backing plate, one side that deviates from work piece bearing the support at the connection backing plate rotates and is connected with vertical company's board, the mutual parallel arrangement of connection backing plate and vertical company's board, vertical company's board includes guide section and linkage segment, top at the guide section is connected with the direction baffle grillage, an organic whole is connected with the upset baffle that is used for preventing the sputtering thing at the upper end of direction baffle grillage, the upset baffle is the design of hemisphere concave surface, bottom at the linkage segment is rotated and is connected with upset transmission assembly.

The utility model discloses further set up to: the vertical connecting plate is connected with the turnover transmission assembly in a rotating mode through the connecting section, and the turnover transmission assembly comprises a transmission connecting rod and a power driving rod connected with the transmission connecting rod in a rotating mode through a guide hinge.

The utility model discloses further set up to: the transmission connecting rod comprises an arc-shaped section and a vertical section, the arc-shaped section is connected with the vertical section into a whole, a first connecting hole used for being connected with the vertical connecting plate in a rotating mode is formed in the top of the arc-shaped section, and a second connecting hole used for being connected with the guide hinge in a rotating mode is formed in the bottom of the vertical section.

The utility model discloses further set up to: the guide hinge is connected with the power driving rod integrally.

The utility model discloses further set up to: and a driving cylinder is arranged at the bottom of the power driving rod.

The utility model discloses further set up to: and the bottom of the driving cylinder is provided with a driving air hole for connecting air supply equipment.

The utility model discloses further set up to: vertical company board the guide way that is used for connecting the direction baffle frame has been seted up to the direction section spacing hole has been seted up to the tank bottom of guide way the direction baffle frame is close to vertical company board is seted up guide way department be provided with be used for with guide way assorted vertical picture peg.

The utility model discloses further set up to: the vertical inserting plate is provided with a waist-shaped hole for fixedly connecting the guide baffle frame with the vertical connecting plate.

The utility model discloses further set up to: the center of the vertical connecting plate is provided with a rotating shaft, and the vertical connecting plate is rotatably connected with the connecting base plate through the rotating shaft.

The utility model discloses further set up to: the connecting backing plate is designed in an I shape.

To sum up, compare with prior art, the utility model discloses a high temperature resistant pneumatic upset keeps off province space stop, its include vacuum coating frame and with vacuum coating frame fixed connection's work piece bears the support, can dismantle through the screw in one side that the work piece bore the support and be connected with the connection backing plate, deviates from at the connection backing plate one side rotation that the work piece bore the support is connected with vertical company's board, and the mutual parallel arrangement of connection backing plate and vertical company's board, vertical company's board include direction section and linkage segment, and the top of direction section can be dismantled and be connected with direction baffle frame, is connected with the upset baffle that is used for preventing the sputtering thing in direction baffle frame's upper end an organic whole, and the upset baffle is the design of hemisphere concave surface, rotates in the bottom of linkage segment and is connected with upset transmission assembly. Through this setting promptly, the embodiment of the utility model provides an advantageous effect that the technical scheme brought includes at least:

1. one side of the connecting base plate deviating from the workpiece bearing support is rotatably connected with a vertical connecting plate, and the bottom of the connecting section of the vertical connecting plate is rotatably connected with an overturning transmission assembly, so that the problems that in the prior art, a baffle mechanism is large in occupied space and poor in flexibility are solved.

2. The upper end of the guide baffle plate frame is integrally connected with a turnover baffle plate for preventing sputtering objects, and the turnover baffle plate is designed to be a hemispherical concave surface, so that the influence on the flow field direction in the cavity is reduced through the arrangement, and the use reliability is improved to a great extent.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic view of an overall structure of a high-temperature-resistant pneumatic overturning space-saving baffle according to an exemplary embodiment of the present invention;

fig. 2 is a schematic view of an overall structure of a high temperature resistant pneumatic overturning space-saving baffle according to an exemplary embodiment of the present invention;

fig. 3 is an exploded view of a high temperature resistant pneumatic turnover baffle space-saving baffle according to an exemplary embodiment of the present invention;

fig. 4 is a schematic perspective view of a vertical connecting plate of a high temperature resistant pneumatic turnover space-saving baffle according to an exemplary embodiment of the present invention;

fig. 5 is a schematic perspective view of a transmission link of a high temperature resistant pneumatic turnover space-saving baffle according to an exemplary embodiment of the present invention;

fig. 6 is a schematic view showing a working state of a high temperature resistant pneumatic turnover baffle space-saving baffle according to an exemplary embodiment of the present invention;

fig. 7 is a schematic view illustrating a working state of the high temperature resistant pneumatic overturning space-saving baffle according to an exemplary embodiment of the present invention.

Reference numerals: 1. a workpiece-carrying support; 2. connecting a base plate; 3. a vertical connecting plate; 31. a guide section; 32. a connection section; 33. a guide groove; 34. a limiting hole; 35. a rotating shaft; 4. a guide baffle frame; 41. a vertical plug board; 42; a kidney-shaped hole; 5. turning over the baffle; 6. a turnover transmission assembly; 61. a transmission link; 611. an arc-shaped section; 612. a vertical section; 613. a first connection hole; 614. a second connection hole; 62. a guide hinge; 63. a power drive shaft; 7. a driving cylinder; 71. the air hole is driven.

Detailed Description

To make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and embodiments, it being understood that the specific embodiments described herein are only used for explaining the present invention, and are not used for limiting the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Furthermore, the technical features mentioned in the different embodiments of the present invention described above can be combined with each other as long as they do not conflict with each other.

The utility model provides a high temperature resistant pneumatic upset fender province space stop, is applied to the vacuum coating frame, refers to 1, 2, 3 and shows, work piece bearing support 1 with the vacuum coating frame is fixed connection, work piece bearing support 1 is the annular design one side of work piece bearing support 1 can be dismantled through the screw and be connected with connection backing plate 2 connect backing plate 2 to deviate from one side of work piece bearing support 1 is rotated and is connected with vertical company board 3, connection backing plate 2 with vertical company board 3 parallel arrangement each other, vertical company board 3 includes guide section 31 and linkage segment 32 the top of guide section 31 can be dismantled and be connected with direction baffle plate frame 4, vertical company board 3 guide section 31 offers and is used for connecting the guide way 33 of direction baffle plate frame 4 spacing hole 34 has been seted up to the tank bottom of guide way 33 direction baffle plate frame 4 is close to vertical company board 3 offers guide way 33 department be provided with be used for with guide way 33 assorted vertical picture peg 41.

Refer to fig. 3, 4 and show, waist type hole 42 has been seted up on vertical picture peg 41, is used for fixed connection direction baffle plate rack 4 with vertical company board 3, vertical picture peg 41 inserts guide way 33 that vertical company board 3 tops were seted up passes through fasteners such as screw, hexagon nut, gasket, follows waist type hole 42 is worn to establish and is cross-fastened to in the spacing hole 34 that the guide way 33 tank bottom was seted up, spacing hole is equipped with a plurality ofly, when can guaranteeing to dismantle at any time, still is favorable to vertical company board 3 with the steadiness is connected between the direction baffle plate rack 4, equipment reliability reinforcing.

Referring to fig. 4, the center of vertical even board 3 is provided with axis of rotation 35, vertical even board 3 passes through axis of rotation 35 with connect backing plate 2 and rotate and connect, in operating condition vertical even board 2 with connect the mutual level setting of backing plate 2, both rotate through axis of rotation 35 and connect, just vertical even board can use the axis of rotation is the rotation center with connect backing plate 2 and take place to rotate when keeping each other horizontal relation, can save the inside space of vacuum coating machine promptly through this kind of setting, the flexibility reinforcing.

Further, as shown in fig. 3, the connecting backing plate 2 is designed in an "I" shape, that is, by the arrangement, the stability of the whole device and the use reliability of the device are improved when the vertical connecting plate 3 rotates.

Referring to fig. 1, 2, 3 and 5, an overturning baffle 5 for preventing sputtering is integrally connected to the upper end of the guide baffle frame 4, the overturning baffle 5 is designed to be a hemispherical concave surface, and it should be further described that the overturning baffle 5 is designed to be a hemispherical concave surface, so that the influence on the flow field direction inside the cavity is reduced, and the use reliability is greatly improved.

It is further noted that the roll-over damper is made of a heat-resistant material, preferably, a low-expansion high-temperature alloy based on iron-nickel-cobalt is used.

Further, as shown in fig. 3, a turnover transmission assembly 6 is rotatably connected to the bottom of the connecting section 32 of the vertical connecting plate 3, the turnover transmission assembly 6 includes a transmission connecting rod 61 and a power driving rod 63 rotatably connected to the transmission connecting rod 61 through a guide hinge 62, and the power driving rod 63 is integrally connected to the guide hinge 62. The bottom of the power driving rod 63 is provided with a driving cylinder 7, the bottom of the driving cylinder 7 is provided with a driving air hole 71 for connecting air supply equipment, it needs to be further explained that the driving cylinder 7 provides required power for the reciprocating motion of the power driving rod, and the driving air hole 71 arranged at the bottom of the driving cylinder 7 is used for connecting air ducts of air supply equipment such as an air pump.

Further, referring to fig. 5, the transmission link 61 includes an arc-shaped section 611 and a vertical section 612, the arc-shaped section 611 and the vertical section 612 are integrally connected, a first connection hole 613 for rotatably connecting with the vertical link plate 3 is formed at the top of the arc-shaped section 611, and a second connection hole 614 for rotatably connecting with the guide hinge 62 is formed at the bottom of the vertical section. One end of the transmission connecting rod 61 improves the transmission performance of the transmission connecting rod 61 through the arc design, so that the swinging is smoother, and the stability is further improved.

The working principle is as follows:

referring to fig. 6 and 7, air is supplied to the inside of the driving air hole 71 disposed at the bottom of the driving cylinder 7 by an air supply device such as an air pump (not shown), so as to provide power for the power driving rod 63, the power driving rod 63 is integrally connected with the guide hinge 62, so that the guide hinge 62 drives the transmission link 61 to move obliquely upward together, the top of the transmission link 61 is rotatably connected with the vertical link 3 through the rotation axis, after the transmission link 61 moves obliquely upward, the vertical link 3 is driven to rotate clockwise on the plane where the rotation axis 35 disposed at the center of the vertical link 3 is located, because in the operating state, the vertical link 3 is fixedly connected with the guide baffle frame 4 through the bolt, and the guide baffle frame 4 is integrally connected with the roll-over baffle 5, so that the vertical link 3 drives the guide baffle frame 4 to rotate clockwise together with the roll-over baffle 5, the maximum rotation can reach 90 °, and when the maximum rotation is reached, the power driving rod 63 continues to drive the transmission link 61 to move obliquely downward through the guide hinge 62, so that the vertical link 3 rotates counterclockwise along the rotation axis 35 to return to the non-operating state before the roll-over baffle 5, and thus the reciprocating motion can occur in the prescribed rotation path. Through this setting for shared space diminishes when upset baffle overturns, and the space of reinforcing equipment uses the flexibility, has improved the market competition of equipment.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.

Claims

1. The utility model provides a high temperature resistant pneumatic upset keeps off province space baffle, be applied to vacuum coating frame and with vacuum coating frame fixed connection's work piece bears the support, its characterized in that: one side that the support was born to the work piece is connected with the connection backing plate deviates from one side that the support was born to the work piece is rotated and is connected with vertical company's board, the connection backing plate with vertical company's board parallel arrangement each other, vertical company's board includes direction section and linkage segment the top of direction section is connected with direction baffle frame the upper end an organic whole of direction baffle frame is connected with the upset baffle that is used for preventing the sputter thing, the upset baffle is the design of hemisphere concave surface the bottom of linkage segment is rotated and is connected with upset transmission assembly.

2. The high temperature resistant pneumatic inversion baffle space-saving baffle of claim 1, wherein the vertical connecting plate is rotatably connected to the inversion driving assembly through the connecting section, and the inversion driving assembly comprises a driving link and a power driving rod rotatably connected to the driving link through a guiding hinge.

3. The high-temperature-resistant pneumatic overturning space-saving baffle plate according to claim 2, wherein the transmission connecting rod comprises an arc-shaped section and a vertical section, the arc-shaped section and the vertical section are integrally connected, a first connecting hole used for being rotatably connected with the vertical connecting plate is formed in the top of the arc-shaped section, and a second connecting hole used for being rotatably connected with the guide hinge is formed in the bottom of the vertical section.

4. The high temperature resistant pneumatic flipping barrier space-saving shutter according to claim 2, wherein said guide hinge is integrally connected to said power driving rod.

5. The high temperature resistant pneumatic flipping barrier space-saving shutter according to claim 2, wherein the bottom of said power driving rod is provided with a driving cylinder.

6. The high-temperature-resistant pneumatic overturning space-saving baffle plate as claimed in claim 5, wherein the bottom of the driving cylinder is provided with a driving air hole for connecting with an air supply device.

7. The high-temperature-resistant pneumatic overturning space-saving baffle plate is characterized in that the guide section of the vertical connecting plate is provided with a guide groove for connecting the guide baffle plate frame, the bottom of the guide groove is provided with a limiting hole, and a vertical inserting plate matched with the guide groove is arranged at the position, close to the guide groove formed in the vertical connecting plate, of the guide baffle plate frame.

8. The high-temperature-resistant pneumatic overturning space-saving baffle plate as claimed in claim 7, wherein the vertical inserting plate is provided with a kidney-shaped hole for fixedly connecting the guide baffle plate frame and the vertical connecting plate.

9. The high temperature resistant pneumatic inversion baffle space-saving baffle of claim 1, wherein a rotation shaft is provided at the center of the vertical connecting plate, and the vertical connecting plate is rotatably connected with the connecting backing plate through the rotation shaft.

10. The high temperature resistant pneumatic flipping barrier space-saving shutter as claimed in claim 1, wherein said connecting pad is of "I" shape design.