CN218364101U - Diamond collator that diamond and brush are compound to be arranged - Google Patents

Abstract

The utility model relates to a wafer processing technology field just discloses a diamond collator of diamond and brush composite arrangement, which comprises a substrate, the lower fixed surface of base plate is connected with coupling mechanism, the last fixed surface of base plate is connected with and inlays and be equipped with a plurality of brill blocks, a plurality of coupling groove have been seted up to the lateral wall of base plate, coupling groove's cell wall swing joint has the connecting plate, the last fixed surface of connecting plate is connected with the brush piece, the lateral wall fixedly connected with fixture block of connecting plate, it is a plurality of the arc strip has been cup jointed jointly to the outer wall of fixture block. The utility model discloses can make diamond collator have the limit and grind the clastic ability of edging clearance, improve the continuation that the wafer ground to improve diamond collator and grind the convenience and the efficiency of wafer, diamond and the compound diamond collator of arranging of brush still have the convenient function of changing the maintenance of brush moreover, can improve the life-span of the use of this diamond collator simultaneously.

Description

Diamond collator that diamond and brush are compound to be arranged

Technical Field

The utility model relates to a wafer processing technology field especially relates to a diamond collator of diamond and brush complex range.

Background

In the chemical mechanical planarization process of a wafer for semiconductor, a diamond conditioner is usually used to contact the surface of the wafer or other semiconductor devices to polish the wafer or other semiconductor devices by mechanical force, and the polishing process is combined with a chemical etching slurry to remove impurities or uneven structures on the surface of the wafer or other semiconductor devices by chemical reaction and physical mechanical force.

At present, the diamond dresser needs to stop grinding after grinding a wafer for a period of time, then uses a brush to clean chips generated by grinding the surface of the wafer, and then grinds the wafer again, so that the grinding process is inconvenient, the grinding process is time-consuming, and the convenience and the efficiency of the diamond dresser for grinding the wafer are further influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving among the prior art diamond reorganizer and grinding the wafer and need stop grinding the clearance and grind the piece midway, lead to the grinding process comparatively consuming time, and then influence the problem that diamond reorganizer ground wafer convenience and efficiency, and the diamond reorganizer of a diamond and brush complex range that proposes.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a diamond collator of diamond and compound range of brush, includes the base plate, the lower fixed surface of base plate is connected with coupling mechanism, the last fixed surface of base plate is connected with and inlays and be equipped with a plurality of brill stone blocks, a plurality of connecting grooves have been seted up to the lateral wall of base plate, connecting groove's cell wall swing joint has the connecting plate, the last fixed surface of connecting plate is connected with the brush piece, the lateral wall fixedly connected with fixture block of connecting plate is a plurality of the arc strip has been cup jointed jointly to the outer wall of fixture block, the inner wall of arc strip seted up with fixture block matched with slot, the equal fixedly connected with stop gear of both sides outer wall of arc strip.

Preferably, the connecting mechanism comprises a connecting ring fixedly connected with the lower surface of the substrate, through holes are formed in the outer walls of the two sides of the connecting ring, fixing bolts are movably connected to the hole walls of the through holes, and fixing nuts are sleeved on the outer walls of the fixing bolts in a threaded manner.

Preferably, the limiting mechanism comprises a hook fixedly connected with the outer wall of the arc strip, a rope ring is movably sleeved on the outer wall of the hook, an elastic sheet is fixedly connected with the outer wall of the rope ring, and the top end of the elastic sheet is fixedly connected with the side wall of the base plate.

Preferably, the groove walls on the two sides of the connecting groove are both provided with a clamping groove, the groove walls of the clamping grooves are movably connected with clamping strips, and the outer walls of the clamping strips are fixedly connected with the side walls of the connecting plate.

Preferably, one side of the elastic sheet close to the arc-shaped strip is fixedly connected with a limiting block matched with the outer wall of the arc-shaped strip.

Preferably, the outer wall of the fixing bolt is movably sleeved with two arc-shaped cushion blocks which are symmetrically distributed.

Preferably, one side of the base plate, which is far away from the arc-shaped strip, is fixedly connected with a counterweight strip.

Compared with the prior art, the utility model provides a diamond collator of diamond and brush complex range possesses following beneficial effect:

1. this diamond collator of diamond and brush complex range, through being provided with coupling mechanism, diamond piece and brush piece, through arranging diamond piece and brush piece complex to the base plate of diamond collator, install the grinding device on through coupling mechanism to the diamond collator after that, wafer surface grinding can be realized to the diamond piece when grinding, and the brush piece can clear up the piece that grinds the production in the time of grinding, need not stop grinding midway, time saving and labor saving, this mechanism can make diamond collator have the limit to grind the clastic ability of edging clearance, improve the continuation that the wafer ground, and improve convenience and efficiency that diamond collator ground the wafer.

2. This diamond collator of diamond and compound range of brush, through being provided with stop gear, when the serious needs change of brush piece clearance wearing and tearing, only need to separate stop gear's becket bridle and couple, later stir the shell fragment, then take out the arc strip, take out the connecting plate that needs to be changed in the connecting groove after that, the connecting plate drives the damage brush piece change can, need not to change whole diamond collator, the use cost of diamond collator has been practiced thrift, this mechanism makes the diamond collator of diamond and the compound range of brush have the convenient function of changing the maintenance of brush, can improve the life-span of the use of this diamond collator simultaneously.

The device in not relate to the part all the same with prior art or can adopt prior art to realize, the utility model discloses can make diamond collator have the limit and grind the clastic ability of edging clearance, improve the continuation that the wafer ground to improve diamond collator and grind the convenience and the efficiency of wafer, diamond collator that diamond and brush complex were arranged still has the convenient function of changing the maintenance of brush moreover, can improve the life-span of the use of this diamond collator simultaneously.

Drawings

FIG. 1 is a schematic structural view of a diamond collator in which diamonds and brushes are arranged in a composite manner according to the present invention;

FIG. 2 is a schematic view of a diamond dresser with diamonds and brushes arranged in a composite manner according to the present invention;

fig. 3 is a schematic structural view of a part a of the diamond collator in which diamonds and brushes are compositely arranged according to the present invention.

In the figure: 1. a substrate; 2. a connecting mechanism; 21. a connecting ring; 22. fixing the bolt; 23. fixing a nut; 3. drilling a stone block; 4. a connecting groove; 5. a connecting plate; 6. a brush sheet; 7. a clamping block; 8. an arc-shaped strip; 9. a limiting mechanism; 91. hooking; 92. a rope loop; 93. a spring plate; 10. a slot; 11. a card slot; 12. clamping the strip; 13. a limiting block; 14. an arc-shaped cushion block; 15. a weight strip.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a diamond collator that diamond and brush are compound to be arranged, including base plate 1, the lower fixed surface of base plate 1 is connected with coupling mechanism 2, coupling mechanism 2 includes go-between 21 with 1 lower fixed surface of base plate is connected, the through-hole has all been seted up to the both sides outer wall of go-between 21, and the pore wall swing joint of through-hole has fixing bolt 22, fixing bolt 22's outer wall screw thread has cup jointed fixation nut 23, fixing bolt 22's outer wall activity has cup jointed two symmetric distribution's arc cushion 14, arc cushion 14 can guarantee fixing bolt 22 and fixing nut 23 fixed connection ring 21's stability, this mechanism can make things convenient for the installation of diamond collator.

The last fixed surface of base plate 1 is connected with and inlays and be equipped with a plurality of brill stones 3, and a plurality of connecting groove 4 have been seted up to the lateral wall of base plate 1, and connecting groove 4's cell wall swing joint has connecting plate 5, and draw-in groove 11 has all been seted up to connecting groove 4's both sides cell wall, and draw-in groove 11's cell wall swing joint has card strip 12, and the outer wall of card strip 12 and connecting plate 5's lateral wall fixed connection, card strip 12 and draw-in groove 11 can improve the reliability that connecting plate 5 and connecting groove 4 are connected.

The upper surface fixed connection of connecting plate 5 has brush piece 6, the lateral wall fixedly connected with fixture block 7 of connecting plate 5, arc strip 8 has been cup jointed jointly to the outer wall of a plurality of fixture blocks 7, slot 10 with fixture block 7 matched with has been seted up to arc strip 8's inner wall, one side fixedly connected with counter weight strip 15 of arc strip 8 is kept away from to base plate 1, the focus of diamond collator is located the focus position during counter weight strip 15, and then stability and reliability when guaranteeing diamond collator spin grinding.

The equal fixedly connected with stop gear 9 of arc strip 8's both sides outer wall, stop gear 9 includes the couple 91 with 8 outer wall fixed connection of arc strip, becket 92 has been cup jointed in the outer wall activity of couple 91, becket 92's outer wall fixedly connected with shell fragment 93, one side fixedly connected with and the 8 outer wall matched with stopper 13 of arc strip that shell fragment 93 is close to arc strip 8, stopper 13 has enlarged the area of the fixed arc strip 8 of shell fragment 93, the amount of money people improves the spacing stability of arc strip 8, the top of shell fragment 93 and the lateral wall fixed connection of base plate 1, this mechanism can make things convenient for the dismouting of 8 convenience of arc strip, improve the convenience that diamond collator maintained more bristle brush piece 6.

The utility model discloses in, through on diamond piece 3 and the compound base plate 1 of arranging diamond collator of diamond piece 6, install the grinding equipment to the diamond collator through coupling mechanism 2 after that, improve the stability that go-between 21 is connected through rotatory fixation nut 23, and diamond piece 3 can realize the wafer surface grinding when grinding, brush piece 6 can clear up the piece that the grinding produced in addition when grinding, need not stop grinding midway, time saving and labor saving, this mechanism can make diamond collator have the limit to grind the clastic ability of edging clearance, improve the continuation that the wafer ground, and improve the convenience and the efficiency that diamond collator ground the wafer, when brush piece 6 clearance wearing and tearing seriously need to be changed, only need to separate stop gear 9's becket 92 and couple 91, later stir shell fragment 93, then take out arc strip 8, after that take out the connecting plate 5 that needs more to trade brush piece 6 in the connecting plate 5 and brush piece 6 later can, need not to change whole diamond collator, the use cost of diamond collator has been practiced thrift, this diamond arrangement of diamond brush piece makes the compound arrangement of diamond piece arrange the convenient life-span of this brush that the maintenance utensil can be used when arranging.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (7)

1. The utility model provides a diamond reorganizer of diamond and brush complex range, includes base plate (1), its characterized in that, the lower fixed surface of base plate (1) is connected with coupling mechanism (2), the last fixed surface of base plate (1) is connected with and inlays and be equipped with a plurality of diamond pieces (3), a plurality of connecting groove (4) have been seted up to the lateral wall of base plate (1), the cell wall swing joint of connecting groove (4) has connecting plate (5), the last fixed surface of connecting plate (5) is connected with brush piece (6), the lateral wall fixedly connected with fixture block (7) of connecting plate (5), it is a plurality of arc strip (8) have been cup jointed jointly to the outer wall of fixture block (7), slot (10) with fixture block (7) matched with have been seted up to the inner wall of arc strip (8), the equal fixedly connected with stop gear (9) of both sides outer wall of arc strip (8).

2. The diamond conditioner of claim 1, wherein the connecting mechanism (2) comprises a connecting ring (21) fixedly connected with the lower surface of the base plate (1), the outer walls of the two sides of the connecting ring (21) are respectively provided with a through hole, the wall of each through hole is movably connected with a fixing bolt (22), and the outer wall of each fixing bolt (22) is sleeved with a fixing nut (23) in a threaded manner.

3. A diamond collator for a diamond and brush composite arrangement according to claim 1, wherein said limiting mechanism (9) comprises a hook (91) fixedly connected with the outer wall of the arc-shaped strip (8), the outer wall of said hook (91) is movably sleeved with a rope ring (92), the outer wall of said rope ring (92) is fixedly connected with a spring plate (93), and the top end of said spring plate (93) is fixedly connected with the side wall of the base plate (1).

4. A diamond conditioner with combined diamond and brush arrangement according to claim 1, wherein the two side walls of the connection groove (4) are both provided with a slot (11), the slot wall of the slot (11) is movably connected with a clamping strip (12), and the outer wall of the clamping strip (12) is fixedly connected with the side wall of the connection plate (5).

5. A diamond conditioner with combined diamond and brush arrangement according to claim 3 wherein one side of said elastic sheet (93) close to said arced strip (8) is fixedly connected with a stop block (13) matching with the outer wall of said arced strip (8).

6. A diamond conditioner with combined diamond and brush arrangement according to claim 2 wherein the outer wall of said fixing bolt (22) is movably sleeved with two symmetrically distributed arc-shaped pads (14).

7. A diamond conditioner with a diamond and brush combination arrangement as claimed in claim 1 wherein a counter weight strip (15) is fixedly attached to the side of the base plate (1) remote from the arced strip (8).

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