CN218353030U - Perovskite device preparation equipment - Google Patents
Perovskite device preparation equipment Download PDFInfo
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- CN218353030U CN218353030U CN202222745937.4U CN202222745937U CN218353030U CN 218353030 U CN218353030 U CN 218353030U CN 202222745937 U CN202222745937 U CN 202222745937U CN 218353030 U CN218353030 U CN 218353030U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y02E10/549—Organic PV cells
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Abstract
The utility model relates to perovskite device preparation equipment, which comprises a reaction box body and an evaporation box body; a first clapboard is horizontally arranged in the reaction box body, and divides the reaction box body into a reaction cavity and a material storage cavity from top to bottom; a second partition board is vertically arranged in the material storage cavity and divides the material storage cavity into a liquid medicine groove and a cold well; an atomization column is arranged in the liquid medicine groove and used for atomizing reaction liquid medicine, and the cold well is used for recovering the reaction liquid medicine; when the evaporation box body is sealed, an evaporation cavity is formed in the evaporation box body, a connecting channel is arranged between the evaporation cavity and the reaction cavity, and the connection and disconnection of the connecting channel are controlled through a gate valve; the utility model discloses a control coating by vaporization and the accurate control film thickness of reaction time, the manifold cycles forms stable single crystal perovskite film, reduces perovskite device surface defect, improves preparation efficiency, forms the circulation of reaction liquid medicine from atomizing to condensation reflux through the cold well simultaneously, saves the liquid medicine.
Description
Technical Field
The utility model belongs to the technical field of photoelectric material manufacture equipment technique and specifically relates to indicate a perovskite device preparation equipment.
Background
In recent years, the traditional fossil energy resource is in shortage, the research and development requirements on new energy are increasingly shown, wherein photovoltaic power generation is one of new energy types with the most research prospects, and the newly released research team reports that the photoelectric conversion efficiency of the perovskite solar cell can reach 24%; in perovskite solar cells, the quality of the perovskite film layer has a direct impact on the efficiency of the perovskite solar cell.
In the main preparation method of the perovskite film, a solution method is mostly applied to a laboratory stage and is not suitable for large-scale industrial production; although the perovskite thin film prepared by the vapor phase method can be popularized and produced, the vapor deposition process needs to be strictly controlled to be in a closed environment, and the conditions such as substrate placement, vapor deposition time and the like all affect the quality of the perovskite thin film; the existing perovskite device preparation equipment cannot well control the evaporation and reaction processes in use, so that the thickness of the prepared perovskite film is difficult to control, the performance is unstable or the structure has defects, reaction liquid medicine is wasted, and the cost is increased.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model aims to solve the technical problem that it is difficult to accurate control thickness to overcome among the prior art perovskite device preparation, and the more serious technical difficulty of the extravagant serious of structural defect and liquid medicine provides a perovskite device preparation equipment, can accurate control carry out coating by vaporization-aerosol circulation reaction to the substrate and form stable single crystal perovskite film, retrieves the saving cost to unnecessary liquid medicine simultaneously.
In order to solve the technical problem, the utility model provides perovskite device preparation equipment, which comprises a reaction box body and an evaporation box body; a first clapboard is horizontally arranged in the reaction box body and divides the reaction box body into a reaction cavity and a material storage cavity from top to bottom; a second partition plate is vertically arranged in the material storage cavity and divides the material storage cavity into a liquid medicine groove and a cold well; an atomization column is arranged in the liquid medicine groove and used for atomizing reaction liquid medicine, and the cold well is used for recovering the reaction liquid medicine; the evaporation box body is internally provided with an evaporation cavity when being sealed, a connecting channel is arranged between the evaporation cavity and the reaction cavity, and the connecting channel is controlled to be switched on and off through a gate valve.
In an embodiment of the utility model, the atomizing post can atomize the reaction liquid medicine into aerosol, the particle size of aerosol is 0.05um ~ 3um.
In an embodiment of the present invention, the perovskite device preparation apparatus further comprises a sheet conveying device, the sheet conveying device runs through the reaction box and the evaporation box and is horizontally disposed at the bottom of the connection channel, and the sheet conveying device is used for conveying the substrate required for preparing the perovskite device.
In an embodiment of the utility model, the piece conveying device includes a first conveying plate and a second conveying plate, the first conveying plate set up in the reaction chamber bottom, the second conveying plate set up in the coating by vaporization intracavity wall.
In an embodiment of the present invention, the upper surfaces of the first conveying plate and the second conveying plate are provided with guide rollers.
In an embodiment of the present invention, the first control valve is disposed on two sides of the first partition plate for controlling the on/off between the reaction chamber and the storage chamber.
In an embodiment of the present invention, a second control valve is disposed on the second partition for controlling the on-off between the liquid medicine tank and the cold well, and the bottom of the cold well has a height difference with the bottom of the liquid medicine tank.
In one embodiment of the present invention: the reaction chamber is internally provided with a baking device which is oppositely arranged on the first clapboard and at the top of the reaction chamber.
The utility model discloses an embodiment, the reaction box still is equipped with nitrogen gas interface and vacuum interface, the external nitrogen gas pipeline of nitrogen gas interface, the external vacuum pump of vacuum interface.
In an embodiment of the present invention, a crucible is further disposed at the bottom of the evaporation chamber.
Compared with the prior art, the technical scheme of the utility model have following advantage:
the perovskite device preparation equipment can accurately control the preparation process, can predesign the reaction time and the film layer thickness of single evaporation-aerosol reaction according to the required perovskite device characteristic parameters, further determine the cycle times of evaporation-aerosol cyclic reaction, accurately control the reaction quantity through the atomization operation of evaporation and reaction liquid medicine, perform saturation reaction through the accurate control film thickness of evaporation, form stable single crystal perovskite film through multiple cycles, reduce the surface defects of the perovskite device and improve the preparation efficiency;
perovskite device preparation equipment can make the liquid medicine carry out transient reaction with the aerosol state, form the reaction liquid medicine through the cold well simultaneously from the liquid medicine groove atomizing to the condensation backward flow extremely the liquid medicine groove's circulation effectively saves the liquid medicine and uses, practices thrift the cost of preparation.
Drawings
In order to make the content of the present invention more clearly understood, the present invention will be described in further detail with reference to the following embodiments of the present invention, in conjunction with the accompanying drawings, wherein:
FIG. 1 is a schematic structural view of an apparatus for manufacturing a perovskite device according to a preferred embodiment of the present invention;
FIG. 2 is a schematic plan view of the perovskite device fabrication apparatus shown in FIG. 1;
FIG. 3 is a schematic structural diagram of an apparatus for manufacturing a perovskite device according to another preferred embodiment of the present invention.
The specification reference numbers indicate: 1. a reaction box body; 11. a first separator; 12. a second separator; 13. a nitrogen interface; 14. a vacuum interface; 15. a substrate; 2. evaporating a box body; 21. evaporating and plating the cavity; 3. a reaction chamber; 31. a baking device; 4; a material storage cavity; 41. a liquid medicine tank; 42. cooling the well; 43. an atomizing column; 5. a sheet conveying device; 51. a first transfer plate; 52. a second transfer plate; 501. a guide roller; 6. a gate valve; 61. a connecting channel; 7. a first control valve; 8. a second control valve; 9. a crucible is provided.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Examples
Referring to fig. 1, the perovskite device preparation equipment provided by the embodiment of the present invention integrates the evaporation and reaction functions of perovskite devices, is convenient for multiple reactions, and is suitable for preparation and use of perovskite devices, especially perovskite thin films, and comprises a reaction box 1 and an evaporation box 2, wherein the reaction box 1 is communicated with the evaporation box 2 through a connecting channel 61; a first clapboard 11 is horizontally arranged in the reaction box body 1, and the reaction box body 1 is divided into a reaction cavity 3 and a material storage cavity 4 from top to bottom by the first clapboard 11; a second partition plate 12 is vertically arranged in the material storage cavity 4 to divide the material storage cavity 4 into a liquid medicine tank 41 and a cold well 42; an atomization column 43 is arranged in the liquid medicine groove 41 and used for atomizing reaction liquid medicine, and the cold well 42 is used for recovering the reaction liquid medicine; when the evaporation box body 2 is sealed, an evaporation cavity 21 is formed in the evaporation box body, the connecting channel 61 is arranged between the evaporation cavity 21 and the reaction cavity 3, and the connection and disconnection of the connecting channel 61 are controlled by the gate valve 6.
Specifically, referring to fig. 1 and 2, the perovskite device preparation apparatus further includes a sheet transfer device 5, the sheet transfer device 5 penetrates through the reaction box 1 and the evaporation box 2 and is horizontally disposed at the bottom of the connecting channel 61, the sheet transfer device 5 is used for transferring a substrate 15 required for preparing a perovskite device, the gate valve 6 and the sheet transfer device 5 are both externally connected with a control unit, when the perovskite device preparation apparatus works, the control unit controls the gate valve 6 to be lifted, and the sheet transfer device 5 transfers the substrate 15 to reciprocate. It should be noted that the sheet conveying device 5 includes a first conveying plate 51 and a second conveying plate 52, the sheet conveying device 5 is a strip-shaped plate respectively disposed on two sides of the conveying direction of the substrate 15, the first conveying plate 51 is disposed at the bottom of the reaction chamber 3 and is disposed on two sides of the first partition 11, and the second conveying plate 52 is disposed on an inner wall of the evaporation chamber 21; the sheet conveying device 5 further comprises guide rollers 501, the guide rollers 501 are arranged on the upper surfaces of the strip-shaped plates at equal intervals, the strip-shaped plates are fixed when the substrate 15 is conveyed, the guide rollers 501 rotate around shafts at the installation positions of the guide rollers, the two sides of the substrate 15 can be stably supported, the conveying effect is achieved, the contact area between the guide rollers and the substrate 15 is small, evaporation layers and reaction products on the substrate 15 are prevented from being damaged, and the structure of the perovskite device is protected; the guide rollers 501 are arranged on the first conveying plate 51 and the second conveying plate 52 at equal intervals and have the same rotating speed, so that the conveying speed of the substrate 15 is constant, and the substrate 15 is prevented from tipping due to speed change; the guide roller 501 can rotate around a shaft in both directions, so that the conveying direction of the substrate 15 can be adjusted conveniently, and the device is suitable for being used in multiple cyclic reactions.
Specifically, refer to fig. 1 and fig. 2, the both sides of first baffle 11 are equipped with first control valve 7, in the embodiment of the utility model provides an in first control valve 7 set up to arrange in the through-hole of first baffle 11 both sides, first control valve 7 is used for control reaction chamber 3 with deposit break-make between the material chamber 4, when first control valve 7 was opened, reaction chamber 3 with deposit material chamber 4 and pass through the through-hole intercommunication, the reaction liquid medicine that deposits material chamber 4 is atomized to the aerosol state by the high frequency and is passed through the through-hole gets into reaction chamber 3 with the material after 15 surface coating by vaporization of base plate is accomplished reacts.
Further, be equipped with second control valve 8 on the second baffle 12, be used for control break-make between liquid medicine groove 41 and the cold well 42, cold well 42 bottom with there is the difference in height liquid medicine groove 41 bottom, the bottom of cold well 42 is higher than the bottom of liquid medicine groove 41, the aerosol state when reacting in the reaction box 1 the reaction liquid medicine is liquid through the cold well 42 condensation, passes through again 8 backward flows to liquid medicine groove 41 forms the reaction liquid medicine and participates in preparation, recondenstion backward flow from the liquid atomization for the aerosol state, practices thrift the reaction liquid medicine quantity, and the recycle of the unnecessary liquid medicine of being convenient for practices thrift manufacturing cost.
Further, referring to fig. 1 and fig. 2, a baking device 31 is further included in the reaction chamber 3, the baking device 31 is oppositely disposed on the first partition plate 11 and at the top of the reaction chamber 3, and is disposed on two sides of the substrate 15 in parallel to bake the substrate 15 after the evaporation is completed.
The reaction box body 1 is also provided with a nitrogen interface 13 and a vacuum interface 14, the nitrogen interface 13 is externally connected with a nitrogen pipeline to provide a nitrogen environment for preparation reaction, and the vacuum interface 14 is externally connected with a vacuum pump to vacuumize the preparation equipment; the perovskite device preparation equipment further comprises a vacuum pressure gauge, the pressure of the cavity in the preparation equipment is monitored in real time, and the safety of the preparation process is improved.
The bottom of the evaporation cavity 21 is also provided with a crucible 9, and the crucible 9 is used for heating evaporation materials; furthermore, in the preferred embodiment of the present invention, a third partition board is further disposed inside the evaporation box body 2, the third partition board is parallel to the placing direction of the substrate 15, and a hollow portion is used for passing through the evaporation material heated by the crucible 9, so that the evaporation material is concentrated in the area where the substrate 15 is located.
The working principle of perovskite device preparation equipment is as follows:
and determining the single reaction duration of the evaporation-aerosol reaction and the film thickness change of the single reaction through the parameters such as the film thickness of the prepared perovskite device, and further determining the cycle number of the evaporation-aerosol cyclic reaction.
Carry out single coating by vaporization-aerosol circulation reaction time, the base plate 15 place in the reaction chamber 3, open the slide valve 6 will the reaction chamber 3 with the chamber 21 that evaporates passes through interface channel 61 intercommunication, the drive of external control unit the deflector roll 501 pivoting will the base plate 15 passes through first transfer board 51 is followed the reaction chamber 3 is seen into the chamber 21 that evaporates second transfer board 52, deflector roll 501 stall close slide valve 6 simultaneously, make evaporation coating box 2 forms airtight space, heats evaporation coating material in the crucible 9 evaporates the coating by vaporization, opens slide valve 6 rethread after waiting to evaporate the coating by vaporization completion the biography piece device 5 will the base plate 15 returns reaction chamber 3 closes slide valve 6.
Atomizing post 43 work will reaction liquid medicine in the liquid medicine groove 41 is beaten into the aerosol state that the particle diameter is 0.05um ~ 3um through high frequency atomizing's mode, opens first control valve 7 and second control valve 8, and the reaction liquid medicine of aerosol state passes through the through-hole entering of first baffle 11 both sides reaction chamber 3 is in 15 surface emergence reactions of base plate, evaporation coating and atomizing operation can make accurate to the molecular level of reaction, reasonable control reaction volume. Part of the unreacted reaction liquid medicine enters the cold well 42, is condensed back to a liquid state due to the temperature change in the cold well 42, and the condensed liquid reaction liquid medicine flows back to the liquid medicine tank 41 through the second control valve 8 and the height difference between the cold well 42 and the bottom of the liquid medicine tank 41, so that the circulation of atomization, condensation and backflow of the reaction liquid medicine is formed.
And closing the first control valve 7 and the second control valve 8, baking the substrate 15 through the baking device 31, carrying out reaction in a nitrogen environment, adjusting the pressure in the reaction cavity 3 through the nitrogen interface 13 and the vacuum interface 14 after the reaction is finished, and finishing the preparation process of single evaporation-aerosol reaction. The above-mentioned preparation process is repeated according to the determined number of times of the cyclic reaction, and the reaction time of the single evaporation-aerosol reaction is limited by the opening and closing of the gate valve 6 and the first control valve 7. After the perovskite device is prepared, an organic adsorption material is arranged below the cold well 42 to absorb redundant reaction liquid medicine, and the working process of the perovskite device preparation equipment is completed.
Referring to fig. 3, in another preferred embodiment of the present invention, the perovskite device manufacturing apparatus includes a first reaction box 1, an evaporation box 2 and a second reaction box 1 sequentially connected by a gate valve 6, the structures of the first reaction box 1 and the second reaction box 1 are identical, in another preferred embodiment of the present invention, the perovskite device manufacturing apparatus is used, the first reaction box 1 and the second reaction box 1 can both pass through the sheet transmission device 5 for transmitting the substrate 15 to the evaporation box 2, and the substrate 15 is used for the reaction time in the reaction chamber 3 at one side, so that the evaporation of another substrate 15 can be performed, and the production efficiency can be improved.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (10)
1. A perovskite device preparation device is characterized by comprising,
the reaction box body is horizontally provided with a first partition plate inside, and the first partition plate divides the reaction box body into a reaction cavity and a material storage cavity from top to bottom; a second partition board is vertically arranged in the material storage cavity and divides the material storage cavity into a liquid medicine groove and a cold well; an atomization column is arranged in the liquid medicine groove and used for atomizing reaction liquid medicine, and the cold well is used for recovering the reaction liquid medicine;
the evaporation box body is internally provided with an evaporation cavity when sealed, a connecting channel is arranged between the evaporation cavity and the reaction cavity, and the connecting channel is controlled to be switched on and off through a gate valve.
2. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: the atomizing column can atomize the reaction liquid medicine into aerosol, and the particle size of the aerosol is 0.05 um-3 um.
3. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: the device further comprises a sheet conveying device, wherein the sheet conveying device penetrates through the reaction box body and the evaporation box body and is horizontally arranged at the bottom of the connecting channel, and the sheet conveying device is used for conveying a substrate required by the preparation of the perovskite device.
4. The perovskite device manufacturing apparatus as claimed in claim 3, wherein: the film conveying device comprises a first conveying plate and a second conveying plate, the first conveying plate is arranged at the bottom of the reaction cavity, and the second conveying plate is arranged on the inner wall of the evaporation coating cavity.
5. The perovskite device manufacturing apparatus as claimed in claim 4, wherein: the upper surfaces of the first conveying plate and the second conveying plate are provided with guide rollers.
6. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: and first control valves are arranged on two sides of the first partition plate and used for controlling the connection and disconnection between the reaction cavity and the material storage cavity.
7. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: and a second control valve is arranged on the second partition plate and used for controlling the on-off of the liquid medicine tank and the cold well, and the bottom of the cold well and the bottom of the liquid medicine tank have a height difference.
8. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: the reaction chamber is internally provided with a baking device which is oppositely arranged on the first clapboard and at the top of the reaction chamber.
9. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: the reaction box body is further provided with a nitrogen interface and a vacuum interface, the nitrogen interface is externally connected with a nitrogen pipeline, and the vacuum interface is externally connected with a vacuum pump.
10. The perovskite device manufacturing apparatus as claimed in claim 1, wherein: the bottom of the evaporation cavity is also provided with a crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222745937.4U CN218353030U (en) | 2022-10-18 | 2022-10-18 | Perovskite device preparation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222745937.4U CN218353030U (en) | 2022-10-18 | 2022-10-18 | Perovskite device preparation equipment |
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| Publication Number | Publication Date |
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| CN218353030U true CN218353030U (en) | 2023-01-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222745937.4U Active CN218353030U (en) | 2022-10-18 | 2022-10-18 | Perovskite device preparation equipment |
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| CN (1) | CN218353030U (en) |
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