CN218349765U - Laser energy calibration source equipment - Google Patents

Abstract

The application discloses laser energy calibration source equipment, laser energy calibration source equipment are used for producing infrared laser as energy calibration source, and include laser generator, optical gate device and energy attenuation device. The laser generator is used for generating infrared laser; the shutter device comprises a driving element and a first reflector, wherein the first reflector comprises a first reflecting surface and two side surfaces adjacent to the first reflecting surface; the driving element is used for driving the first reflecting mirror to rotate; when the first reflector rotates to the first position, the first reflector leaves the optical path of the infrared laser; when the first reflector rotates to the second position, the first reflector is positioned in the light path of the infrared laser, and the first reflecting surface can change the propagation direction of the infrared laser; the energy attenuation device is provided with a reflection cavity and a light inlet hole communicated with the reflection cavity. The application discloses laser energy calibration source equipment can properly handle the unstable light of energy to lifting means's convenience.

Description

Laser energy calibration source equipment

Technical Field

The application relates to the technical field of laser, in particular to laser energy calibration source equipment.

Background

In the related art, the light output by the energy calibration source device in the initial stage has the problem of unstable energy, and the unstable energy light cannot be used as the energy calibration source. In addition, light with unstable energy is also generated during the light intensity switching process. The existing energy calibration source equipment needs to perform additional treatment when emitting light with unstable energy, and is inconvenient to use.

SUMMERY OF THE UTILITY MODEL

The present application is directed to solving at least one of the problems in the prior art. Therefore, the application provides a laser energy calibration source device which can properly process light with unstable energy, thereby improving the convenience of the device.

According to the laser energy calibration source device of the embodiment of the application, the laser energy calibration source device is used for generating infrared laser as an energy calibration source, and comprises the following components:

a laser generator for generating the infrared laser;

a shutter device comprising a driving element and a first mirror, the first mirror comprising a first reflective surface and two side surfaces adjacent to the first reflective surface; the driving element is used for driving the first reflector to rotate; when the first reflector rotates to a first position, the first reflector leaves the optical path of the infrared laser; when the first reflector rotates to a second position, the first reflector is located in the light path of the infrared laser, and the first reflecting surface can change the propagation direction of the infrared laser;

the energy attenuation device is provided with a reflection cavity, the energy attenuation device is further provided with a light inlet hole communicated with the reflection cavity, the light inlet hole is used for guiding the infrared laser reflected by the first reflector, and the reflection cavity is used for reflecting the infrared laser entering from the light inlet hole for multiple times.

The laser energy calibration source device according to the embodiment of the application has at least the following beneficial effects: when the laser generator is just started or the power is adjusted, the first reflector can be rotated to the second position through the driving element, so that the infrared laser with unstable energy is reflected to the reflection cavity of the energy attenuation device, the laser is reflected and absorbed by the reflection cavity, the infrared laser with unstable energy cannot be emitted to the outside, extra processing is not needed by the outside, and the laser energy calibration source equipment is more convenient to use; in addition, when the energy of the infrared laser is stable, the first reflector can be rotated to the first position through the optical driving element, and the infrared laser can be normally output.

According to some embodiments of the application, the infrared laser further comprises an integrating mirror, and when the first reflecting mirror rotates to the first position, the integrating mirror is used for enabling the energy distribution of the light spot formed by the infrared laser to be more uniform.

According to some embodiments of the present application, it is perpendicular to the plane of the rotation axis of the first reflecting mirror to establish the measuring surface, establish two intersection lines of the side surface and the measuring surface are respectively a first measuring line and a second measuring line, and establish the perpendicular distance between the second measuring line and the rotation axis of the first reflecting mirror as d ₁ Let d be the vertical distance between the first and second measurement lines ₂ ，d ₁ And d ₂ Satisfy the relation:

according to some embodiments of the present application, the optical shutter device further includes a limiting seat and a first mounting seat, the driving element includes a housing, the limiting seat is fixedly connected to the housing, the first reflector is mounted to the first mounting seat, and the driving element is configured to drive the first mounting seat to rotate; the limiting seat is provided with a first measuring line and a second limiting line, and the first mounting seat is provided with a third limiting surface and a fourth limiting surface; when the first reflector rotates to a first position, the third limiting surface is in surface contact with the first measuring line, and when the first reflector rotates to a second position, the fourth limiting surface is in surface contact with the second limiting line.

According to some embodiments of the present application, the first measuring line and the third limiting surface are both planar; or, the first measuring line and the third limiting surface are both spherical surfaces.

According to some embodiments of the present application, the inner surface of the reflective cavity comprises a second reflective surface, a third reflective surface, a fourth reflective surface and a fifth reflective surface, and the light inlet hole penetrates through the fifth reflective surface; the second reflecting surface, the third reflecting surface, the fourth reflecting surface and the fifth reflecting surface are sequentially connected end to end, the second reflecting surface is also connected with the fifth reflecting surface to form a surrounding surface, and the surrounding surface is used for circularly reflecting infrared laser entering from the light inlet hole.

According to some embodiments of the present application, the second, third, fourth and fifth reflective surfaces are all planar, an included angle α between the third and fifth reflective surfaces is 0 ° to 3 °, an included angle β between the second and third reflective surfaces is 148.5 ° to 153.5 °, and an included angle γ between the third and fourth reflective surfaces is 88 ° to 93 °.

According to some embodiments of the present application, an angle β between the second reflective surface and the third reflective surface is 151 °, and an angle γ between the third reflective surface and the fourth reflective surface is 88 ° or 93 °.

According to some embodiments of the present application, a projection of a contour of the light entrance hole in a depth direction of the light entrance hole is located on the second reflection surface, and a roughness of the second reflection surface is smaller than a roughness of any one of the third reflection surface, the fourth reflection surface, and the fifth reflection surface.

According to some embodiments of the present application, the roughness of the second reflective surface is ra0.4 to 0.8, the roughness of the third reflective surface is ra1.6 to 3.2, the roughness of the fourth reflective surface is ra1.6 to 3.2, and the roughness of the fifth reflective surface is ra1.6 to 3.2.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The present application is further described with reference to the following figures and examples, in which:

FIG. 1 is a schematic diagram of a laser energy calibration source apparatus of an embodiment of the present application;

FIG. 2 is a perspective view of a shutter arrangement of the laser energy calibration source apparatus of FIG. 1;

FIG. 3 is an exploded view of the shutter device of FIG. 2;

FIG. 4 is a top view of the drive element and the first mirror of the shutter device of FIG. 2;

FIG. 5 is a perspective view of a first mounting block of the shutter device of FIG. 2;

FIG. 6 is a bottom view of the first mounting base of the shutter device of FIG. 2;

FIG. 7 is a top view of a position-limiting seat of the shutter device shown in FIG. 2;

FIG. 8 is a top view of the first mirror of the shutter arrangement of FIG. 2 in a first position;

FIG. 9 is a top view of the first mirror of the shutter device of FIG. 2 in a second position;

FIG. 10 is a perspective view of an energy attenuation apparatus of the laser energy calibration source apparatus of FIG. 1;

FIG. 11 is an exploded view of the optical energy attenuation apparatus of FIG. 10;

FIG. 12 is a top view of the optical energy attenuation apparatus of FIG. 10;

FIG. 13 isbase:Sub>A cross-sectional view of the optical energy attenuation apparatus of FIG. 12 taken along section A-A;

FIG. 14 is a right side view of the optical energy attenuation apparatus of FIG. 10;

FIG. 15 is a cross-sectional view of the optical energy attenuation apparatus of FIG. 14 taken along section B-B;

FIG. 16 is a cross-sectional view of the optical energy attenuation apparatus of FIG. 14 taken along section C-C;

FIG. 17 is a schematic illustration of a simulation of the laser path of an energy attenuation apparatus of the second embodiment of the present application;

fig. 18 is a schematic simulation diagram of a laser optical path of an energy attenuation apparatus according to the third embodiment of the present application.

Reference numerals: a laser generator 100, an infrared laser 110;

a mirror assembly 200, a second mirror 210, a third mirror;

the optical shutter device 300, a driving element 310, a rotating shaft 311, a driving lever 312, a housing 313, a rotating shaft 314, a second mounting seat 320, a second photoelectric sensor 330, a limiting seat 340, a first limiting surface 341, a second limiting surface 342, a light blocking plate 350, a first mounting seat 360, a receiving groove 361, a glue groove 362, a third limiting surface 363, a fourth limiting surface 364, a positioning groove 365, an expansion joint 366, a blind hole 367, a through hole 368, a first reflector 370, a first measuring line 371, a second measuring line 372, a first reflecting surface 373, a measuring surface 374 and a first photoelectric sensor 380;

the energy attenuation device 400, the main body 410, the reflection groove 411, the reflection block 420, the cover plate 430, the light inlet hole 431, the reflection cavity 440, the cooling channel 450, the first cooling channel 451, the first liquid inlet 452, the first liquid outlet 453, the second cooling channel 454, the second liquid inlet 455, the second liquid outlet 456, the enclosing surface 460, the second reflection surface 461, the third reflection surface 462, the fourth reflection surface 463 and the fifth reflection surface 464;

a beam expander 500;

the integrating mirror 600.

Detailed Description

Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative and are only for the purpose of explaining the present application and are not to be construed as limiting the present application.

In the description of the present application, it is to be understood that the positional descriptions, such as the directions of up, down, front, rear, left, right, etc., referred to herein are based on the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the referred device or element must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present application.

In the description of the present application, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and the above, below, exceeding, etc. are understood as excluding the present number, and the above, below, within, etc. are understood as including the present number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present application, unless otherwise expressly limited, terms such as set, mounted, connected and the like should be construed broadly, and those skilled in the art can reasonably determine the specific meaning of the terms in the present application by combining the detailed contents of the technical solutions.

In the description of the present application, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

In some scenarios, a temperature sensor is required to detect the temperature of the flame by sensing the intensity of the infrared light generated by the flame. Specifically, when the brightness of the flame is increased, the intensity of the emitted infrared rays is also increased correspondingly, and the impedance of the temperature sensor which detects the infrared rays emitted by the flame is decreased correspondingly; when the flame brightness becomes small, the intensity of the emitted infrared ray also becomes low, and the impedance of the temperature sensor that detects the infrared ray emitted from the flame becomes high. Through this connection, the temperature sensor can detect the temperature of the flame.

In the related art, before the temperature sensor is used, calibration is required to determine the intensity of infrared rays corresponding to the impedance fed back by the temperature sensor. However, the light output by the energy calibration source device in the initial stage has the problem of unstable energy, and the unstable energy light cannot be used as the energy calibration source. In addition, light with unstable energy is also generated during the light intensity switching process. The existing energy calibration source equipment needs to perform additional treatment when emitting light with unstable energy, and is inconvenient to use.

Referring to fig. 1 and 2, it should be noted that two parallel dotted lines in fig. 1 indicate the optical path of the infrared laser 110, wherein the optical path indicated by a two-dot chain line towards the energy attenuation device 400 is a section of the optical path after the infrared laser 110 is reflected by the first reflecting mirror 370; the arrows in fig. 1 indicate the direction of propagation of the infrared laser light 110; a rectangular frame indicated by a two-dot chain line indicated by reference numeral 370 is the first mirror 370 shown in the second position, and a rectangular frame indicated by a solid line indicated by reference numeral 370 is the first mirror 370 shown in the first position.

The laser energy calibration source apparatus according to an embodiment of the present application for generating infrared laser 110 as an energy calibration source includes a laser generator 100, a shutter device 300, and an energy attenuation device 400. The laser generator 100 is configured to generate infrared laser light 110. The shutter device 300 includes a driving element 310 and a first mirror 370, and the first mirror 370 includes a first reflecting surface 373 and two side surfaces adjacent to the first reflecting surface 373. The driving element 310 is used to drive the first mirror 370 to rotate. When the first mirror 370 is rotated to the first position (referring to fig. 8, the first mirror 370 is located at the first position in fig. 8), the first mirror 370 leaves the optical path of the infrared laser light 110; when the first mirror 370 rotates to the second position (referring to fig. 9, the first mirror 370 in fig. 9 is located at the second position), the first mirror 370 is located in the optical path of the infrared laser 110, and the first reflecting surface 373 can change the propagation direction of the infrared laser 110. The energy attenuation device 400 is provided with a reflection cavity 440, the energy attenuation device 400 is further provided with a light inlet 431 communicated with the reflection cavity 440, the light inlet 431 is used for introducing the infrared laser 110 reflected by the first reflector 370, and the reflection cavity 440 is used for reflecting the infrared laser 110 entering from the light inlet 431 for multiple times.

The laser energy calibration source device according to the embodiment of the application has at least the following beneficial effects: when the laser generator 100 is just started or power is adjusted, the first reflector 370 can be rotated to the second position by the driving element 310, so that the infrared laser 110 with unstable energy is reflected to the reflection cavity 440 of the energy attenuation device 400, the reflection cavity 440 reflects and absorbs the infrared laser 110, the infrared laser 110 with unstable energy does not exit to the outside, no additional processing is needed by the outside, and the laser energy calibration source equipment is more convenient to use; in addition, when the energy of the infrared laser 110 is stable, the first mirror 370 may be rotated to the first position by the optical driving element 310, and the infrared laser 110 may be normally output.

In addition, the infrared laser 110 has high directivity, and the infrared laser 110 is less divergent during propagation, so that the energy can be kept stable. Compared with other calibration light sources, the laser energy calibration source equipment can provide a light source with more stable energy.

Referring to fig. 1, in the above embodiment, in order to propagate the infrared laser 110 emitted from the laser generator 100 in a designated direction, the laser energy calibration source device further includes a mirror assembly 200, and the mirror assembly 200 includes a second mirror 210, a third mirror 220, a first motor, and a second motor. The first motor is used to rotate the second mirror 210, the second motor is used to rotate the third mirror 220, and the rotation axis of the second mirror 210 is perpendicular to the rotation axis of the third mirror 220. When the infrared laser 110 emitted from the laser generator 100 passes through the second reflecting mirror 210 and the third reflecting mirror 220, the angle of the second reflecting mirror 210 is adjusted by the first motor, and the angle of the third reflecting mirror 220 is adjusted by the second motor, so that the infrared laser 110 propagating in a specified direction can be obtained.

Specifically, in order to reduce the energy loss of the infrared laser 110 caused by passing through the second mirror 210 and the third mirror 220, the second mirror 210 and the third mirror 220 are both selected from total reflection mirrors.

Referring to fig. 1, in the above embodiment, to reduce the error caused by the uneven energy distribution of the spot formed by the infrared laser 110, the laser energy calibration source device further includes an integrating mirror 600, and when the first reflecting mirror 370 is rotated to the first position, the integrating mirror 600 is used to make the energy distribution of the spot formed by the infrared laser 110 more even.

It should be noted that, before the infrared laser 110 is not processed by the integrator mirror 600, the energy of the infrared laser 110 is normally distributed, that is, the light spot projected on the workpiece by the infrared laser 110 is, taking a circle as an example, the energy of the infrared laser 110 at the center of the circle is the strongest, and the energy of the infrared laser 110 gradually decreases from the center of the circle to the edge of the circle. When the infrared laser 110 with non-uniform energy distribution in the light spot is used as an energy calibration source, certain errors are brought to a calibration result.

By using the integrating mirror 600, the energy of the infrared laser 110 can be redistributed, and the energy of the light spot formed by the infrared laser 110 is uniformly distributed, thereby being beneficial to reducing the error of the calibration result.

Specifically, the mirror surface of the integrating mirror 600 includes a plurality of microstructures (e.g., convex arc surfaces) arranged in an array, and the microstructures are formed on the mirror surface of the ordinary reflecting mirror by micromachining, so that the reflection result of the integrating mirror 600 on the infrared laser 110 is the superposition of the reflection results of the microstructures on the infrared laser 110. Each microstructure has a certain curvature, which can redistribute the energy of the infrared laser 110 to each spatial position, and finally form a light spot with the energy distributed according to the flat top, which is equivalent to the size of the microstructure, at the focal point position of the integral mirror. The flat-top distribution is a kind of probability distribution, and means that a line at the top of the middle of a distribution curve is a straight line or approaches to a straight line, which means that the distribution is uniform.

Referring to fig. 1, in the above embodiment, in order to obtain the infrared laser 110 with a satisfactory spot area, the laser energy calibration source device further includes a beam expander 500, and the infrared laser 110 whose direction is adjusted by the reflector assembly 200 passes through the beam expander 500, then passes through the integrator 600, and finally is projected onto the workpiece. After the infrared laser 110 passes through the beam expander 500, the diameter of the infrared laser 110 is enlarged, so that the spot area of the infrared laser 110 can be adjusted as required. When the infrared laser 110 with the enlarged diameter passes through the integrating mirror 600, the energy distribution in the light spot is uniform, thereby facilitating the application.

Referring to fig. 3 and 4, it should be noted that fig. 4 omits the remaining components in order to show the relative positions of the driving element 310 and the first reflecting mirror 370. In the modification of the above embodiment, the measuring surface 374 is a surface perpendicular to the rotation axis 314 of the first mirror 370, the intersection lines of the two side surfaces and the measuring surface 374 are respectively a first measuring line 371 and a second measuring line 372, and the perpendicular distance between the second measuring line 372 and the rotation axis 314 of the first mirror 370 is d ₁ Let a perpendicular distance d be a distance between the first measuring line 371 and the second measuring line 372 ₂ ，d ₁ And d ₂ Satisfies the relation:

the perpendicular distance between the first measuring line 371 and the second measuring line 372 is d ₂ I.e. d ₂ The perpendicular distance between the second measurement line 372 and the rotation axis 314 of the first mirror 370 is d for the width of the first mirror 370 at this position ₁ ，

That is, the rotational axis 314 of the first mirror 370 is offset from the center of the width of the first mirror 370 at that position; therefore, when first mirror 370 is rotated, first mirror 370 is in an eccentric oscillation state, and the oscillation radius of first mirror 370 is large, and even if rotation axis 314 of first mirror 370 is set at a position farther from the optical path of infrared laser beam 110, first mirror 370 in the second position can reflect infrared laser beam 110, and the average distance between first mirror 370 in the first position and the optical path of infrared laser beam 110 is large, and infrared laser beam 110 to be emitted is not easily blocked by first mirror 370, and laser shutter device 300 can be applied to infrared laser beam 110 having a large diameter, and the adaptability of the laser shutter device is strong.

Specifically, referring to fig. 4, the rotation axis 314 is provided in the vertical direction (in fig. 4, the direction perpendicular to the paper plane), and the measurement plane 374 is a horizontal plane. The first reflecting mirror 370 in this case has a cylindrical shape and a small thickness. Two side surfaces of the first reflecting mirror 370 adjacent to the first reflecting surface 373 are both arc surfaces, and intersecting lines of the two arc surfaces and the measuring surface 374 are both straight lines, that is, the first measuring line 371 and the second measuring line 372 are both straight lines.

It should be noted that, since the plane perpendicular to the rotation axis 314 may have a plurality of planes, the plane selected as the measurement plane 374 needs to intersect with two side surfaces of the first reflecting mirror 370 adjacent to the first reflecting surface 373.

In other embodiments of the first mirror 370, the first mirror 370 may be of other shapes, such as a rectangular parallelepiped, but d ₂ Still reflecting the width of the first mirror 370 at a certain position,

it still reflects that the width center of the first mirror 370 at a certain position is offset from the rotation axis center 314 of the first mirror 370. That is, the first reflector 370 may be other shapes, but it is necessary to satisfy the requirement of an eccentric arrangement.

Specifically, referring to fig. 4, the driving element 310 includes a rotating shaft 311 (refer to fig. 3 or fig. 4), the first reflecting mirror 370 is mounted on the rotating shaft 311, and the rotating shaft 311 can drive the first reflecting mirror 370 to rotate to the first position or the second position. At this time, the axis of the rotation shaft 311 is the rotation axis 314 of the first reflecting mirror 370. Since the axis of the rotating shaft 311 is a virtual straight line, d can be measured conveniently ₂ The distance from the second measuring line 372 to the outer peripheral surface of the rotating shaft 311 can be measured first, and d can be obtained by adding the radius of the rotating shaft 311 ₂ 。

In particular, d ₁ Can take on values of

d ₂ 、1.5d ₂ 、2d ₂ Or other numerical value, d ₁ The larger the value of (a), the larger the swing radius of the first reflecting mirror 370, the larger the distance between the rotation axis 314 of the first reflecting mirror 370 and the optical path of the infrared laser 110 can be set, and the first reflecting mirror 370 in the second position can still reflect the infrared laser110, the average distance between the first reflecting mirror 370 in the first position and the optical path of the infrared laser 110 is larger, and the first reflecting mirror 370 does not easily block the infrared laser 110 to be emitted.

Referring to fig. 3 and 4, in a modification of the above embodiment, d ₁ And d ₂ Satisfies the relation:

at this time, the distance between the rotation axis 314 of the first reflecting mirror 370 and the width center of the first reflecting mirror 370 is larger, the average distance between the first reflecting mirror 370 in the first position and the optical path of the infrared laser beam 110 is larger, the infrared laser beam 110 to be emitted is not easily blocked by the first reflecting mirror 370, and the laser shutter device 300 has stronger adaptability.

Referring to fig. 6 to 9, in a modified version of the above embodiment, the optical shutter device 300 further includes a limiting seat 340 and a first mounting seat 360, the driving element 310 includes a housing 313 (see fig. 3), the limiting seat 340 is fixedly connected to the housing 313, the first reflecting mirror 370 is mounted on the first mounting seat 360, and the driving element 310 is configured to drive the first mounting seat 360 to rotate. The limiting seat 340 is provided with a first limiting surface 341 and a second limiting surface 342 (refer to fig. 7), and the first mounting seat 360 is provided with a third limiting surface 363 and a fourth limiting surface 364 (refer to fig. 6); when the first reflecting mirror 370 rotates to the first position (see fig. 8), the third position-limiting surface 363 is in surface contact with the first position-limiting surface 341, and when the first reflecting mirror 370 rotates to the second position (see fig. 9), the fourth position-limiting surface 364 is in surface contact with the second position-limiting surface 342.

Therefore, the first reflector 370 rotated to the first position can be mechanically limited by the surface contact of the third limiting surface 363 and the first limiting surface 341, and the first reflector 370 rotated to the second position can be mechanically limited by the surface contact of the fourth limiting surface 364 and the second limiting surface 342, so that the position accuracy of the first reflector 370 at the first position and the second position is ensured.

Specifically, the driving element 310 includes a rotating shaft 311, and the first mounting seat 360 is fixed to the rotating shaft 311, so that the driving element 310 can drive the first mounting seat 360 to rotate. It should be noted that, in the conventional optical shutter device 300, two shift levers 312 (refer to fig. 3) are fixed on the rotating shaft 311, the shift lever 312 is cylindrical, and in order to position the first reflecting mirror 370, the shift lever 312 is directly contacted with the planar second limiting surface 342, so that the shift lever 312 is in line contact with the second limiting surface 342, and the line contact area is small, which is easy to slip, resulting in inaccurate positioning, and further affecting the reflection direction of the infrared laser 110 by the first reflecting mirror 370 (the first reflecting mirror 370 also needs to accurately reflect the infrared laser 110 to the energy attenuation device 400, and thus the energy attenuation device 400 can absorb the energy of the infrared laser 110).

Referring to fig. 3, 5 and 6, in order to fix the first mounting seat 360 to the rotating shaft 311, the first mounting seat 360 is provided with a positioning groove 365, an expansion joint 366, a blind hole 367, a through hole 368 and a threaded hole, wherein the threaded hole is coaxially disposed with the through hole 368 and is located in the right half of the first mounting seat 360 (see fig. 5). The positioning slot 365 is provided with two positions, the two positions of the positioning slot 365 are respectively used for accommodating the two shift levers 312, and meanwhile, the rotating shaft 311 is accommodated in the blind hole 367. At this time, the rotation shaft 311 may transmit the torque to the first mounting base 360 through the driving lever 312, and finally to the first reflecting mirror 370, thereby rotating the first reflecting mirror 370.

Of course, at this time, the first mounting seat 360 is still not fixedly connected to the rotating shaft 311, and the first mounting seat 360 is still easily separated from the rotating shaft 311 from above. In order to fix the first mounting seat 360 and the rotating shaft 311, the screw passes through the through hole 368 and is in threaded connection with the threaded hole, at this time, the width of the expansion joint 366 is reduced, and the left half part and the right half part of the first mounting seat 360 clamp the rotating shaft 311 (refer to fig. 5), so that the fixed connection between the first mounting seat 360 and the rotating shaft 311 is realized.

It is understood that the first mounting seat 360 and the rotation shaft 311 can also be fixedly connected through a key and a set screw, which are conventional technologies and will not be described in detail herein.

Referring to fig. 6, in the above embodiment, the first stopper surface 341 and the third stopper surface 363 may be both provided as a plane. On one hand, the plane is convenient to process, so that the processing cost of the limiting seat 340 and the first mounting seat 360 is reduced; on the other hand, flat-to-flat conformity provides a larger contact area, thereby facilitating accurate positioning of first mount 360 and first mirror 370.

It is understood that the first position-limiting surface 341 and the third position-limiting surface 363 in the above embodiments may be replaced by spherical surfaces. The spherical surface is also regular in shape, so that the processing is convenient, and the processing cost of the limiting seat 340 and the first mounting seat 360 is favorably reduced. In addition, the spherical surface to spherical surface fit also provides a larger contact area, thereby facilitating accurate positioning of the first mount 360 and the first reflector 370.

Referring to fig. 6, in the above embodiment, the second stopper surface 342 and the fourth stopper surface 364 may be both provided as a plane. Similarly, the plane is easy to machine, thereby being beneficial to reducing the machining cost of the limiting seat 340 and the first mounting seat 360; in addition, the flat-to-flat fit may provide a larger contact area, thereby facilitating accurate positioning of the first mount 360 and the first mirror 370.

It is understood that both the second limiting surface 342 and the fourth limiting surface 364 of the above embodiments may be replaced by spherical surfaces. Similarly, the spherical surface is also regular in shape, so that the processing is convenient, thereby being beneficial to reducing the processing cost of the limiting seat 340 and the first mounting seat 360. In addition, the spherical surface to spherical surface fit also provides a larger contact area, thereby facilitating accurate positioning of the first mount 360 and the first reflector 370.

Referring to fig. 2 and 3, in the above embodiment, the first reflecting mirror 370 is adhesively fixed to the first mount 360. The bonding and fixing mode is fast and direct, and the first reflector 370 can be fixed on the first mounting seat 360 after the glue is solidified, so that the assembly time is reduced, and the assembly efficiency is improved.

It is understood that the first reflector 370 in the above embodiments may also be fixed to the first mounting base 360 by fasteners, instead of being fixedly attached by bonding.

Referring to fig. 3, in the above embodiment, the first mounting base 360 may further include a receiving groove 361, the first reflector 370 is disposed in the receiving groove 361, a glue groove 362 is formed on an inner surface of the receiving groove 361, and glue is filled in the glue groove 362 and adhesively fixes the first mounting base 360 and the first reflector 370.

The glue groove 362 can contain glue, so that the glue is not easy to overflow, the operations such as glue scraping can be reduced, the operation time is reduced, and the assembly efficiency is improved. In addition, reducing the overflow of glue is also beneficial to improving the appearance finish of the optical shutter device 300. In addition, by providing the glue groove 362, the consistency of the glue applying position and the glue applying amount can be better, which is beneficial to control and improve the bonding quality of the first reflecting mirror 370.

Referring to fig. 8 and 9, it should be noted that the arrows in fig. 8 and 9 are used to indicate the propagation direction of infrared laser 110. In some embodiments of the present application, the shutter device 300 further includes a first photosensor 380, a second photosensor 330, and a light barrier 350 (refer to fig. 3), and the driving element 310 is configured to drive the light barrier 350 to rotate. When the first mirror 370 is rotated to the first position, the light barrier 350 triggers the first photosensor 380, and when the first mirror 370 is rotated to the second position, the light barrier 350 triggers the second photosensor 330.

By arranging the first photoelectric sensor 380, the second photoelectric sensor 330 and the light barrier 350, whether the first reflecting mirror 370 rotates in place can be fed back in real time, so that the driving element 310 is stopped in time, and the driving element 310 is prevented from being overloaded. In addition, by feeding back the position of the first mirror 370, a reference can be provided for the next action.

Specifically, the driving member 310 includes a rotating shaft 311, and the light barrier 350 is fixed to the first mounting seat 360 through a fastener, so as to be fixed to the rotating shaft 311, so that the driving member 310 can drive the light barrier 350 to rotate. To mount the first photosensor 380 and the second photosensor 330, the shutter device 300 further includes a second mount 320, and the first photosensor 380 and the second photosensor 330 are fixed to the second mount 320 by fasteners.

In some embodiments of the present application, the drive element 310 comprises a motor or a rotary cylinder. The motor or the rotary cylinder can rotate, the rotating direction is controllable, and the use requirements can be better met.

In conjunction with the above, the operation of the shutter device 300 of the present embodiment is described.

Referring to fig. 8, when the infrared laser light 110 needs to pass through normally, the first mirror 370 is in the first position. At this time, the third limiting surface 363 of the first mounting seat 360 is attached to the first limiting surface 341 of the limiting seat 340, so as to mechanically limit the first mounting seat 360 and the first reflector 370; in addition, the light barrier 350 triggers the first photosensor 380, and the first photosensor 380 outputs a feedback electrical signal to the control unit indicating that the first mirror 370 is in the first position.

Referring to fig. 9, when the infrared laser 110 is not required to be emitted, the driving element 310 receives a control signal from the control unit, the driving element 310 starts and drives the first reflecting mirror 370 to rotate 90 ° clockwise (viewed from the paper surface) until the fourth position-limiting surface 364 of the first mounting seat 360 contacts the second position-limiting surface 342 of the position-limiting seat 340, and at this time, the first reflecting mirror 370 rotates to a position, and the infrared laser 110 is reflected by the first reflecting mirror 370, so as to change the propagation direction. Meanwhile, the light barrier 350 triggers the second photosensor 330, and the control unit outputs a control signal to the driving element 310 after receiving a feedback signal of the second photosensor 330, so that the driving element 310 stops rotating.

Referring to fig. 12 and 13, in a modification of the above embodiment, the inner surface of the reflection cavity 440 includes a second reflection surface 461, a third reflection surface 462, a fourth reflection surface 463 and a fifth reflection surface 464, and the light inlet 431 penetrates through the fifth reflection surface 464. The second reflection surface 461, the third reflection surface 462, the fourth reflection surface 463 and the fifth reflection surface 464 are sequentially connected end to end, the second reflection surface 461 is connected with the fifth reflection surface 464 to form a surrounding surface 460, and the surrounding surface 460 is used for circularly reflecting the infrared laser 110 entering from the light inlet hole 431.

The infrared laser 110 enters the enclosing surface 460 formed by the second reflecting surface 461, the third reflecting surface 462, the fourth reflecting surface 463 and the fifth reflecting surface 464 from the light inlet 431, and the infrared laser 110 is continuously and circularly reflected in the enclosing surface 460, in the process, the energy of the infrared laser 110 is gradually absorbed by the energy attenuation device 400, that is, the energy of the infrared laser 110 is absorbed by the enclosing surface 460 through multiple reflections, the high-energy infrared laser 110 does not return along the original path at the beginning, and the absorption rate of the infrared laser 110 is higher.

Specifically, referring to fig. 10 and 11, to facilitate the manufacturing process, the energy attenuation apparatus 400 includes a main body 410, a reflection block 420 and a cover plate 430, the main body 410 is provided with a reflection slot 411, the reflection block 420 is embedded in the right side of the reflection slot 411, and the reflection block 420 is fixedly connected with the main body 410 (fixed by a screw or glue). The cover plate 430 is positioned above the body 410 and the reflection block 420, and the cover plate 430 is fixed to the body 410 by a fastener to close the reflection slot 411, thereby forming the reflection cavity 440. The light inlet 431 is formed on the cover 430 and penetrates the cover 430.

It should be noted that, since the included angle between the fourth reflection surface 463 and the horizontal plane is usually acute, and the fourth reflection surface 463 faces downward and leftward, the fourth reflection surface 463 cannot be processed easily if the separable reflection block 420 is not provided.

Referring to fig. 12 and 13, in a modification of the above embodiment, the second reflecting surface 461, the third reflecting surface 462, the fourth reflecting surface 463 and the fifth reflecting surface 464 are all planar, an included angle α between the third reflecting surface 462 and the fifth reflecting surface 464 is 0 ° to 3 °, an included angle β between the second reflecting surface 461 and the third reflecting surface 462 is 148.5 ° to 153.5 °, and an included angle γ between the third reflecting surface 462 and the fourth reflecting surface 463 is 88 ° to 93 °.

An included angle alpha between the third reflecting surface 462 and the fifth reflecting surface 464 is 0-3 degrees, namely, the third reflecting surface 462 and the fifth reflecting surface 464 are basically parallel, but certain processing errors are allowed. Under the condition that the second reflecting surface 461, the third reflecting surface 462, the fourth reflecting surface 463 and the fifth reflecting surface 464 are all planes, the included angle beta between the second reflecting surface 461 and the third reflecting surface 462 is 148.5-153.5 degrees, the included angle gamma between the third reflecting surface 462 and the fourth reflecting surface 463 is 88-93 degrees, in the angle range, through theoretical calculation simulation and actual simulation, the reflection times of the infrared laser 110 on the enclosing surface 460 are about 40-55 times, and after the high-energy infrared laser 110 is reflected for multiple times, the energy amplitude can be greatly reduced, so that the energy absorption rate of the infrared laser 110 is favorably improved.

Specifically, the included angle α between the third reflecting surface 462 and the fifth reflecting surface 464 may be 0 °, 1 °, 2 °, 3 °, or other values. The angle β between the second reflecting surface 461 and the third reflecting surface 462 can be 148.5 °, 149 °, 150 °, 151 °, 152 °, 153.5 °, or other values. The included angle γ between the third reflecting surface 462 and the fourth reflecting surface 463 may be 88 °, 89 °, 90 °, 91 °, 92 °, 93 °, or other values.

Referring to fig. 17 and 18, it should be noted that, in fig. 17, the included angle β is 151 ° and γ is 88 °; in fig. 18, the angle β is 151 ° and the angle γ is 93 °. In the above embodiment, the included angle β between the second reflecting surface 461 and the third reflecting surface 462 may specifically take a value of 151 °, and the included angle γ between the third reflecting surface 462 and the fourth reflecting surface 463 may specifically take a value of 88 ° or 93 °.

At this time, the energy attenuation apparatus of the embodiment in fig. 17 can reflect the incident infrared laser light 110 50 times, wherein the second reflective surface 461 reflects the infrared laser light 11018 times, the third reflective surface 462 reflects the infrared laser light 1107 times, the fourth reflective surface 463 reflects the infrared laser light 1107 times, and the fifth reflective surface 464 reflects the infrared laser light 11018 times. The energy attenuation apparatus of the embodiment in fig. 18 can reflect the incident infrared laser light 110 52 times, wherein the second reflective surface 461 reflects the infrared laser light 1108 times, the third reflective surface 462 reflects the infrared laser light 11016 times, the fourth reflective surface 463 reflects the infrared laser light 1105 times, and the fifth reflective surface 464 reflects the infrared laser light 11023 times.

That is, the angle value mentioned above is taken, the number of times of reflection of the surrounding surface 460 to the infrared laser 110 is large, and the energy absorption rate of the energy attenuation apparatus 400 to the infrared laser 110 is good.

Referring to fig. 13, in some embodiments of the present application, a projection of a profile of the light entrance hole 431 along a depth direction (referring to fig. 13, i.e., a vertical direction) of the light entrance hole 431 is located on the second reflection surface 461, and a roughness of the second reflection surface 461 is smaller than a roughness of any one of the third reflection surface 462, the fourth reflection surface 463 and the fifth reflection surface 464.

The projection of the contour of the light entrance hole 431 along the depth direction of the light entrance hole 431 is located on the second reflection surface 461, that is, the infrared laser 110 will be reflected by the second reflection surface 461 after passing through the light entrance hole 431. Since the second reflecting surface 461 is a surface that firstly reflects the infrared laser beam 110, it is required to be as smooth as possible, and further, the infrared laser beam 110 that is diffusely reflected by the second reflecting surface 461 and re-emitted from the light inlet 431 is reduced as possible, so that most of the infrared laser beam 110 enters the reflection cycle of the enclosing surface 460, and further, the energy absorption rate of the infrared laser beam 110 is improved.

Referring to fig. 13, in the above embodiment, the roughness of the second reflective surface 461 is specifically set to ra0.4 to 0.8. The second reflecting surface 461 with the roughness of ra0.4-0.8 can only slightly distinguish the processing direction, that is, is close to the mirror surface, because no processing trace is seen, after the infrared laser 110 passes through the second reflecting surface 461, most of the infrared laser 110 is reflected by the second reflecting surface 461 and travels along a predetermined light path, thereby being beneficial to improving the energy absorption rate of the infrared laser 110.

Referring to fig. 13, in the above embodiment, the roughness of the third reflecting surface 462 is specifically ra1.6 to 3.2, the roughness of the fourth reflecting surface 463 is specifically ra1.6 to 3.2, and the roughness of the fifth reflecting surface 464 is specifically ra1.6 to 3.2.

Since the third reflecting surface 462, the fourth reflecting surface 463 and the fifth reflecting surface 464 are used for reflecting the infrared laser beam 110 for the second time, a part of the infrared laser beam 110 deviates from the predetermined optical path due to the rough surface, and the infrared laser beam 110 deviating from the predetermined optical path is reflected circularly in the enclosing surface 460 with a high probability and does not exit from the light entrance hole 431 to the outside immediately. Therefore, the value ranges of the third reflecting surface 462, the fourth reflecting surface 463 and the fifth reflecting surface 464 are all set in the range from ra1.6 to 3.2, and at this time, the third reflecting surface 462, the fourth reflecting surface 463 and the fifth reflecting surface 464 are also smooth, so that the requirement of circularly reflecting the infrared laser 110 can be met, and the infrared laser 110 is not separated from the set optical path too early.

Specifically, the roughness of the third reflecting surface 462 is specifically ra1.6, ra3.2 or other values, the roughness of the fourth reflecting surface 463 is specifically ra1.6, ra3.2 or other values, and the roughness of the fifth reflecting surface 464 is specifically ra1.6, ra3.2 or other values.

Referring to fig. 14-16, in some embodiments of the present application, the energy attenuation apparatus 400 is further provided with cooling channels 450, the cooling channels 450 being used to circulate a cooling medium. When a cooling medium is circulated through the cooling channels 450, the cooling medium is able to absorb heat from the energy attenuation device 400. The heat of the energy attenuation device 400 can be taken away in time by the cooling medium which flows in through the external circulation, so that the absorption efficiency of the energy attenuation device 400 on the infrared laser 110 is improved.

Specifically, the cooling medium may be water, air, nitrogen, an inert gas, or the like.

Specifically, since the energy attenuation apparatus 400 is divided into the main body 410 and the cover plate 430, in order to ensure the cooling efficiency, the cover plate 430 is provided with the first cooling channel 451, the first cooling channel 451 is provided with the first liquid inlet 452 and the first liquid outlet 453, the main body 410 is provided with the second cooling channel 454, and the second cooling channel 454 is provided with the second liquid inlet 455 and the second liquid outlet 456. Thus, the first cooling passage 451 may cool the cover plate 430, and the second cooling passage 454 may cool the body 410, with higher cooling efficiency.

In the above embodiment, the material of the energy attenuation apparatus 400 is selected to be aluminum. Aluminum has the advantage of high heat transfer efficiency, and the energy attenuation device 400 made of aluminum can rapidly transfer heat to the cooling medium, thereby improving the absorption efficiency of the energy attenuation device 400 for the energy of the infrared laser 110.

The embodiments of the present application have been described in detail with reference to the drawings, but the present application is not limited to the embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present application. Furthermore, the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

Claims (10)

1. Laser energy calibration source equipment, characterized in that, laser energy calibration source equipment is used for producing as the infrared laser of energy calibration source, includes:

a laser generator for generating the infrared laser;

a shutter device including a driving element and a first mirror including a first reflecting surface and two side surfaces adjacent to the first reflecting surface; the driving element is used for driving the first reflector to rotate; when the first reflector rotates to a first position, the first reflector leaves the optical path of the infrared laser; when the first reflector rotates to a second position, the first reflector is located in the light path of the infrared laser, and the first reflecting surface can change the propagation direction of the infrared laser;

the energy attenuation device is provided with a reflection cavity and a light inlet communicated with the reflection cavity, the light inlet is used for guiding the infrared laser reflected by the first reflector, and the reflection cavity is used for reflecting the infrared laser entering from the light inlet for multiple times.

2. The laser energy calibration source device according to claim 1, further comprising an integrating mirror, wherein when the first reflecting mirror is rotated to the first position, the integrating mirror is used for making the energy distribution of the light spot formed by the infrared laser more uniform.

3. The apparatus as claimed in claim 1, wherein the measuring plane is a plane perpendicular to the rotation axis of the first reflector, the intersection lines of the two side surfaces and the measuring plane are a first measuring line and a second measuring line, respectively, and the perpendicular distance between the second measuring line and the rotation axis of the first reflector is d ₁ Let d be the vertical distance between the first and second measurement lines ₂ ，d ₁ And d ₂ Satisfy the relation:

4. the laser energy calibration source device according to claim 1, wherein the optical shutter device further comprises a limiting seat and a first mounting seat, the driving element comprises a housing, the limiting seat is fixedly connected with the housing, the first reflector is mounted on the first mounting seat, and the driving element is configured to drive the first mounting seat to rotate; the limiting seat is provided with a first measuring line and a second limiting line, and the first mounting seat is provided with a third limiting surface and a fourth limiting surface; when the first reflector rotates to a first position, the third limiting surface is in surface contact with the first measuring line, and when the first reflector rotates to a second position, the fourth limiting surface is in surface contact with the second limiting line.

5. The laser energy calibration source device according to claim 4, wherein the first measuring line and the third limiting surface are both planar; or, the first measuring line and the third limiting surface are both spherical surfaces.

6. The device for calibrating the source of laser energy according to any one of claims 1 to 5, wherein the inner surface of the reflective cavity comprises a second reflective surface, a third reflective surface, a fourth reflective surface and a fifth reflective surface, and the light inlet hole penetrates through the fifth reflective surface; the second reflecting surface, the third reflecting surface, the fourth reflecting surface and the fifth reflecting surface are sequentially connected end to end, the second reflecting surface is also connected with the fifth reflecting surface to form a surrounding surface, and the surrounding surface is used for circularly reflecting the infrared laser entering from the light inlet.

7. The laser energy calibration source device of claim 6, wherein the second reflecting surface, the third reflecting surface, the fourth reflecting surface and the fifth reflecting surface are all planar surfaces, an included angle α between the third reflecting surface and the fifth reflecting surface is 0-3 °, an included angle β between the second reflecting surface and the third reflecting surface is 148.5-153.5 °, and an included angle γ between the third reflecting surface and the fourth reflecting surface is 88-93 °.

8. The laser energy calibration source device of claim 7, wherein an angle β between the second reflecting surface and the third reflecting surface is 151 °, and an angle γ between the third reflecting surface and the fourth reflecting surface is 88 ° or 93 °.

9. The laser energy calibration source device of claim 6, wherein a projection of the profile of the light entrance hole along the depth direction of the light entrance hole is located on the second reflection surface, and the roughness of the second reflection surface is smaller than that of any one of the third reflection surface, the fourth reflection surface and the fifth reflection surface.

10. The apparatus as claimed in claim 9, wherein the roughness of the second reflecting surface is ra0.4-0.8, the roughness of the third reflecting surface is ra1.6-3.2, the roughness of the fourth reflecting surface is ra1.6-3.2, and the roughness of the fifth reflecting surface is ra1.6-3.2.

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