CN218333714U - Insert flower basket for cleaning silicon wafer - Google Patents
Insert flower basket for cleaning silicon wafer Download PDFInfo
- Publication number
- CN218333714U CN218333714U CN202222829153.XU CN202222829153U CN218333714U CN 218333714 U CN218333714 U CN 218333714U CN 202222829153 U CN202222829153 U CN 202222829153U CN 218333714 U CN218333714 U CN 218333714U
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- upper substrate
- infrabasal plate
- fixedly connected
- location
- clamping
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Abstract
The utility model relates to a silicon chip basket of flowers technical field, it is specific that a wash inserted sheet basket of flowers for silicon chip, the utility model discloses an upper substrate and infrabasal plate, be provided with between upper substrate and the infrabasal plate and be used for the silicon chip to carry out the piece rack of putting that bears, the top of putting the piece rack and the equal fixedly connected with location card axle in bottom, all seted up the penetration hole on upper substrate and the infrabasal plate, the location card axle of putting piece rack both ends runs through the penetration hole respectively and extends to the outside of base plate and infrabasal plate, passes the location card axle through the location card pole, can be fast with upper substrate and infrabasal plate chucking at the both ends of putting the piece rack, when taking off the location card pole, can be fast with upper substrate and infrabasal plate from putting piece rack both ends separation to when the location card axle passes the penetration hole, can make the location riser pass the location notch, accomplish the location of locating card axle and putting the piece rack, conveniently change different specifications and put the piece rack and use.
Description
Technical Field
The utility model relates to a silicon chip basket of flowers technical field, specificly a wash silicon chip with inserted sheet flower blue.
Background
The silicon wafer basket is used for bearing the silicon wafers in the silicon wafer processing process, so that the silicon wafers on the silicon wafer basket can be conveniently cleaned and other related processes can be conveniently carried out.
The silicon wafer flower basket is provided with the tooth-shaped structures which are distributed in a longitudinal row, so that the silicon wafer can be conveniently loaded and positioned, for example, the silicon wafer flower basket provided by the patent application number of 202020234556.8 is positioned at intervals by the aid of the two sharp tooth bodies, only one contact point is arranged between the sharp tooth bodies and the silicon wafer, and the surface of the silicon wafer is well protected.
In the prior art, as the silicon wafer basket proposed in patent application No. 202020234556.8, which is used for bearing silicon wafers, the part with the tooth structure, both ends of which are fixed with the end plate, needs to be replaced for each specification of silicon wafer to be borne, and the part with the tooth structure cannot be replaced independently for bearing the silicon wafer according to the specification of the silicon wafer.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a wash inserted sheet flower blue for silicon chip to solve the problem that proposes in the above-mentioned background art.
The purpose of the utility model can be realized by the following technical scheme:
an insert basket for cleaning silicon wafers comprises an upper substrate and a lower substrate, wherein a wafer placing rack for bearing the silicon wafers is arranged between the upper substrate and the lower substrate, the top and the bottom of the wafer placing rack are fixedly connected with positioning clamp shafts, the upper substrate and the lower substrate are respectively provided with a through hole, and the positioning clamp shafts at the two ends of the wafer placing rack respectively penetrate through the through holes and extend to the outer parts of the upper substrate and the lower substrate;
the upper substrate and the lower substrate are both provided with positioning clamp rods, positioning holes are formed in the positioning clamp shafts, the positioning clamp rods penetrate through the positioning holes and extend to the outer portions of the positioning clamp shafts, positioning notches are formed in the inner surfaces of the penetrating holes, and the outer surfaces of the positioning clamp shafts are fixedly connected with positioning vertical plates matched with the positioning notches for use.
Preferably, the top of the upper substrate and the bottom of the lower substrate are both symmetrically and fixedly connected with a plurality of supporting support feet, and the supporting support feet are designed into a table body.
Preferably, the central position of the positioning clamping rod is fixedly connected with a clamping plate, and a clamping groove is formed in the clamping plate.
Preferably, equal fixedly connected with chucking mechanism on upper substrate and the infrabasal plate, chucking mechanism is including the fixed nest of blocks that has the transverse groove, the top fixedly connected with adjusting spring of fixed nest of blocks inner wall, adjusting spring's bottom fixedly connected with chucking piece, the one end slope of chucking piece sets up, fixed nest of blocks is fixed in the top of upper substrate.
Preferably, the top fixedly connected with connecting axle of chucking piece, adjusting spring and fixed nest block and fixedly connected with stirring piece are run through at the top of connecting axle.
Preferably, first annular groove has been seted up to the bottom of upper substrate, and second annular groove has been seted up at the top of infrabasal plate, is provided with the conflict pole between upper substrate and the infrabasal plate, the top threaded connection of conflict pole has threaded sleeve, the bottom of conflict pole sets up in the inside of second annular groove, threaded sleeve's top sets up inside first annular groove.
The utility model has the advantages that:
pass the locator card axle through the locator card pole, can be fast with upper substrate and infrabasal plate chucking at the both ends of putting the piece rack, when taking off the locator card pole, can be fast with upper substrate and infrabasal plate from putting piece rack both ends separation, and when the locator card axle passed the penetrating hole, can make the location riser pass the location notch, accomplish the locator card axle and put the location of piece rack, conveniently change different specifications and put the piece rack and use, and when the piece rack was put in the installation, can aim at the position of putting the piece rack fast.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art to obtain other drawings without creative efforts;
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a rear view of the upper substrate of FIG. 1;
FIG. 3 is a schematic structural view of a bottom portion of the lower substrate of FIG. 2;
FIG. 4 is an enlarged view at A in FIG. 2;
FIG. 5 is an enlarged view at B in FIG. 2;
FIG. 6 is an enlarged view at C of FIG. 3;
FIG. 7 is a cross-sectional view of a side view of the clamping mechanism of FIG. 2;
fig. 8 is a perspective view of the chucking plate of fig. 7.
The reference numbers in the figures are as follows:
1. the upper substrate, 2, the infrabasal plate, 3, put a rack, 4, the location card axle, 5, the through hole, 6, the location calorie pole, 7, the locating hole, 8, the location notch, 9, the location riser, 10, support the foot, 11, the chucking board, 12, the draw-in groove, 13, chucking mechanism, 131, transverse groove, 132, fixed cover piece, 133, adjusting spring, 134, chucking piece, 14, the connecting axle, 15, the stirring piece, 16, first annular groove, 17, second annular groove, 18, the round bar of contradicting, 19, threaded sleeve.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
An insert basket for cleaning silicon wafers comprises an upper substrate 1 and a lower substrate 2, wherein a wafer placing rack 3 used for bearing the silicon wafers is arranged between the upper substrate 1 and the lower substrate 2, the top and the bottom of the wafer placing rack 3 are fixedly connected with positioning clamp shafts 4, penetrating holes 5 are formed in the upper substrate 1 and the lower substrate 2, and the positioning clamp shafts 4 at two ends of the wafer placing rack 3 penetrate through the penetrating holes 5 respectively and extend to the outer parts of the upper substrate 1 and the lower substrate 2;
all be provided with locator card pole 6 on upper substrate 1 and the infrabasal plate 2, locating hole 7 has been seted up on the locator card axle 4, locator card pole 6 runs through locating hole 7 and extends to the outside of locator card axle 4, and location notch 8 has been seted up to the internal surface of through hole 5, the outer fixed surface of locator card axle 4 is connected with the location riser 9 that uses with the cooperation of location notch 8.
As shown in fig. 1 and 2, the upper substrate 1 and the lower substrate 2 are made of metal and are symmetrically arranged, the sheet rack 3 between the upper substrate 1 and the lower substrate 2 has the same size, and the number of the teeth of the sheet rack 3 is 100, so that the problem that the silicon wafers are not completely adsorbed and dirty is not cleaned can be avoided, and the phenomenon that the adsorption force is too large in a water environment can be prevented.
The top of the upper substrate 1 and the bottom of the lower substrate 2 are symmetrically and fixedly connected with a plurality of supporting support feet 10, and the supporting support feet 10 are designed into a table body.
As shown in fig. 1 and 3, no matter the lower substrate 2 and the upper substrate 1 are facing the ground, the support can be provided by the support stand pins 10, the upper substrate 1 and the lower substrate 2 do not adhere to the ground, and the design of the table body enables the bottom of the support stand pins 10 to have a larger contact area with the ground, thereby improving the stability of the whole device.
The center position of the positioning clamping rod 6 is fixedly connected with a clamping plate 11, and a clamping groove 12 is formed in the clamping plate 11.
As shown in fig. 7 and 8, the top and bottom of the chucking plate 11 are both inclined.
Equal fixedly connected with chucking mechanism 13 on upper substrate 1 and the infrabasal plate 2, chucking mechanism 13 is including the fixed nest of blocks 132 that has transverse groove 131, the top fixedly connected with adjusting spring 133 of fixed nest of blocks 132 inner wall, adjusting spring 133's bottom fixedly connected with chucking piece 134, the one end slope of chucking piece 134 sets up, fixed nest of blocks 132 is fixed in the top of upper substrate 1.
As shown in fig. 7 and 8, the bottom of the clamping block 134 passes through the slot 12 of the clamping plate 11 to prevent the clamping plate 11 from being separated from the transverse slot 131.
The top fixedly connected with connecting axle 14 of chucking piece 134, adjusting spring 133 and fixed cover piece 132 and fixedly connected with stirring piece 15 are run through to the top of connecting axle 14.
First annular groove 16 has been seted up to the bottom of upper substrate 1, and second annular groove 17 has been seted up at the top of infrabasal plate 2, is provided with conflict round bar 18 between upper substrate 1 and the infrabasal plate 2, the top threaded connection of conflict round bar 18 has threaded sleeve 19, the bottom of conflict round bar 18 sets up in the inside of second annular groove 17, threaded sleeve 19's top sets up inside first annular groove 16.
As shown in fig. 1 and 2, when the silicon wafer to be cleaned is pushed into the tooth lattice of the wafer placing rack 3, two sides of the silicon wafer can be clamped into the tooth lattice, the wafer placing rack 3 bears a plurality of silicon wafers to be cleaned together, and when the silicon wafer is abutted to the abutting round rod 18, the silicon wafer is shown to be mounted in place, so that the silicon wafer is convenient to position.
The surface at conflict round bar 18 top and the internal surface of screw sleeve 19 all have the screw thread, it makes screw sleeve 19 reciprocate to the equidirectional rotation screw sleeve 19 of equidirectional convenience, when screw sleeve 19 moves down, can take off conflict round bar 18 from between upper substrate 1 and the infrabasal plate 2, when screw sleeve 19 moves up, can make screw sleeve 19's top card go into first annular groove 16, the bottom card of conflict round bar 18 is gone into in second annular groove 17, the completion is to the chucking location of conflict round bar 18.
The utility model provides a pair of wash silicon chip with inserted sheet flower blue theory of operation as follows:
before the silicon wafers are required to be cleaned, the silicon wafers are inserted into the tooth lattices of the wafer placing rack 3, and then the plurality of silicon wafers can be driven by the flower basket to be cleaned in the next process;
as shown in fig. 2 and 7, when the sheet rack 3 of different specifications needs to be replaced, the abutting round rod 18 is taken down first, then the shifting sheet 15 is pulled upwards, the shifting sheet 15 drives the clamping block 134 to move upwards through the connecting shaft 14, so that the clamping block 134 moves upwards and is separated from the clamping plate 11, then the positioning clamping rod 6 can be pulled in the direction away from the fixed sleeve block 132, so that the positioning clamping rod 6 is separated from the positioning clamping shaft 4, the positioning clamping rod 6 is taken down, the upper substrate 1 is moved upwards, the upper substrate 1 is separated from the sheet rack 3, and similarly, the lower substrate 2 can be separated from the sheet rack 3, and the detachment of the sheet rack 3 is completed;
then, the new positioning clamp shafts 4 at two ends of the sheet rack 3 penetrate through the upper substrate 1 and the lower substrate 2 from the penetrating holes 5, then two ends of the positioning clamp rods 6 penetrate through the positioning clamp shafts 4 through the positioning holes 7, the positioning clamp shafts 4, the upper substrate 1 and the lower substrate 2 are clamped together, the opposite sheet racks 3 are installed, the clamping plate 11 moves along with the positioning clamp rods 6 and is clamped into the transverse groove 131, the clamping plate 11 extrudes the inclined surface of the clamping block 134, the clamping block 134 moves upwards until the clamping plate 11 is completely clamped into the transverse groove 131, the clamping block 134 is pressed downwards by the adjusting spring 133, the clamping block 134 penetrates through the clamping groove 12 in the clamping plate 11, the clamping plate 11 is clamped, and positioning of the clamping plate 11 and the positioning clamp rods 6 is completed.
When passing the locator card axle 4 through the penetration mouth 5, need aim at the location riser 9 to the location notch 8 on for when the locator card axle 4 passes the penetration mouth 5, can avoid locator card axle 4 and put a rack 3 and take place to rotate, the opposition piece rack 3 is fixed a position fast, will put the tooth check orientation of piece rack 3 and aim at corresponding position fast.
Compared with the prior art, the utility model provides a pair of wash inserted sheet flower blue for silicon chip has as follows
Has the advantages that:
pass the locator card axle 4 through locator card pole 6, can be fast with 2 chucking of upper substrate 1 and infrabasal plate putting the both ends of piece rack 3, when taking off locator card pole 6, can be fast with upper substrate 1 and 2 following 3 both ends separations of piece rack of putting of infrabasal plate, and when locator card axle 4 passed through the penetrating hole 5, can make location riser 9 pass location notch 8, the completion is to locator card axle 4 and the location of putting piece rack 3, conveniently change different specifications and put piece rack 3 and use, and when piece rack 3 was put in the installation, can aim at the position of putting piece rack 3 fast.
The foregoing shows and describes the basic principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention.
Claims (6)
1. The utility model provides a wash inserted sheet basket for silicon chip, includes upper substrate (1) and infrabasal plate (2), be provided with between upper substrate (1) and infrabasal plate (2) and be used for the silicon chip to carry on putting piece rack (3), its characterized in that, the top and the bottom of putting piece rack (3) all fixedly connected with location card axle (4), all seted up through hole (5) on upper substrate (1) and infrabasal plate (2), location card axle (4) at putting piece rack (3) both ends run through hole (5) respectively and extend to the outside of infrabasal plate (1) and infrabasal plate (2);
all be provided with locator card pole (6) on upper substrate (1) and infrabasal plate (2), locating hole (7) have been seted up on locator card axle (4), locator card pole (6) run through locating hole (7) and extend to the outside of locator card axle (4), and location notch (8) have been seted up to the internal surface of penetration hole (5), the external fixed surface of locator card axle (4) is connected with location riser (9) that cooperate the use with location notch (8).
2. The insert basket according to claim 1, wherein a plurality of support pins (10) are symmetrically and fixedly connected to the top of the upper substrate (1) and the bottom of the lower substrate (2), and the support pins (10) are designed as a table body.
3. The inserting sheet basket according to claim 1, wherein a clamping plate (11) is fixedly connected to the center of the positioning clamping rod (6), and a clamping groove (12) is formed in the clamping plate (11).
4. The insert basket according to claim 1, wherein the upper substrate (1) and the lower substrate (2) are both fixedly connected with a clamping mechanism (13), the clamping mechanism (13) comprises a fixed sleeve block (132) with a transverse groove (131), the top of the inner wall of the fixed sleeve block (132) is fixedly connected with an adjusting spring (133), the bottom of the adjusting spring (133) is fixedly connected with a clamping block (134), one end of the clamping block (134) is obliquely arranged, and the fixed sleeve block (132) is fixed at the top of the upper substrate (1).
5. The insert basket according to claim 4, wherein the top of the clamping block (134) is fixedly connected with a connecting shaft (14), and the top of the connecting shaft (14) penetrates through the adjusting spring (133) and the fixed sleeve block (132) and is fixedly connected with a stirring piece (15).
6. The insert basket according to claim 1, wherein a first annular groove (16) is formed in the bottom of the upper substrate (1), a second annular groove (17) is formed in the top of the lower substrate (2), a collision round rod (18) is arranged between the upper substrate (1) and the lower substrate (2), a threaded sleeve (19) is connected to the top of the collision round rod (18) in a threaded manner, the bottom of the collision round rod (18) is arranged inside the second annular groove (17), and the top of the threaded sleeve (19) is arranged inside the first annular groove (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222829153.XU CN218333714U (en) | 2022-10-26 | 2022-10-26 | Insert flower basket for cleaning silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222829153.XU CN218333714U (en) | 2022-10-26 | 2022-10-26 | Insert flower basket for cleaning silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218333714U true CN218333714U (en) | 2023-01-17 |
Family
ID=84827048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222829153.XU Active CN218333714U (en) | 2022-10-26 | 2022-10-26 | Insert flower basket for cleaning silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218333714U (en) |
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2022
- 2022-10-26 CN CN202222829153.XU patent/CN218333714U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |