CN218329724U - Radian detection device and radian detection equipment - Google Patents

Radian detection device and radian detection equipment Download PDF

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Publication number
CN218329724U
CN218329724U CN202222270968.9U CN202222270968U CN218329724U CN 218329724 U CN218329724 U CN 218329724U CN 202222270968 U CN202222270968 U CN 202222270968U CN 218329724 U CN218329724 U CN 218329724U
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positioning
plate
radian
detection device
piece
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饶励超
刘杰
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Shenzhen Xiner Semiconductor Technology Co Ltd
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Shenzhen Xiner Semiconductor Technology Co Ltd
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Abstract

The utility model belongs to the technical field of the semiconductor technology, especially, relate to a radian detection device and radian check out test set. The radian detection device comprises a supporting structure and a radian detection structure. Bearing structure is including the fixed plate of fixed setting, and the fixed plate has the upper surface that sets up and the lower surface that sets up down, and the inspection hole has been seted up to the fixed plate, and the both ends of inspection hole link up respectively to upper surface and lower surface. The radian detects the structure including setting up in the bed hedgehopping piece of upper surface and the altimeter of connecting the lower surface, and two bed hedgehopping pieces are arranged to the upper surface, and the inspection hole is located between two bed hedgehopping pieces, and the measuring head of altimeter appears in the upper surface in inspection hole department, and measuring head and two bed hedgehopping pieces all butt wait to detect the face to make the altimeter measure the radian of waiting to detect the face. The utility model discloses can measure the radian of treating the face of detection, measurement process is simple, device simple structure and efficient.

Description

Radian detection device and radian detection equipment
Technical Field
The utility model belongs to the technical field of the semiconductor device, especially, relate to a radian detection device and radian check out test set.
Background
At present, an Insulated Gate Bipolar Transistor (IGBT) is a short-form IGBT, and is widely used in the fields of industrial control, electric power systems, locomotive traction, wind power generation, automobile power, and the like. The IGBT has obvious characteristics when applied to the electric automobile: the IGBT has the advantages of large voltage and current variation range, severe working environment, high vibration resistance and high reliability requirements, and the limitations of assembly volume, weight and production and manufacturing cost, and all of the above components make the IGBT a key component influencing the overall performance and the practical process of the electric automobile. In a soldering type IGBT packaging process, a DBC (Direct Bonding coater) substrate is usually connected to a Copper base plate by soldering, and the soldering quality significantly affects the efficiency of heat transfer. Usually, hard solder is used, the melting point of the hard solder is high, and the copper base plate can deform to a certain extent under the operation of welding stress at high temperature, so that the flatness of the contact surface of the copper base plate and the radiator is influenced.
Therefore, the IGBT module copper base plate is usually pre-bent in the traditional technology, so that the IGBT module copper base plate has a certain radian, the deformation of the copper base plate during welding is counteracted, the flatness of a contact surface between the copper base plate and a radiator is ensured, and the heat dissipation of the radiator is further ensured. Therefore, the detection of the reserved radian of the copper base plate before welding is the most important process of module packaging, and the radian of the copper base plate needs to be detected, tested and screened before vacuum welding to determine whether the reserved curvature of the copper base plate meets the requirements of process specifications.
However, the traditional detection method mainly depends on staff operation, the detection process is complex, the dependence on skilled staff is high, manual operation detection easily pollutes the welding surface of the base plate, welding quality is further affected, and working efficiency is low.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of the present application is to provide a radian detecting device, which aims to solve the problem of how to detect the radian of a substrate and improve the detection efficiency.
In order to achieve the purpose, the technical scheme adopted by the application is as follows:
in a first aspect, a radian detection device is provided, which can detect a substrate, the substrate has a surface to be detected, the surface to be detected is a spherical surface, and the radian detection device comprises:
the supporting structure comprises a fixed plate which is fixedly arranged, the fixed plate is provided with an upper surface which is arranged upwards and a lower surface which is arranged downwards, the fixed plate is provided with a detection hole, and two ends of the detection hole are respectively communicated with the upper surface and the lower surface; and
the radian detection structure comprises a heightening piece arranged on the upper surface and a height meter connected with the lower surface, wherein the two heightening pieces are arranged on the upper surface, the detection hole is positioned between the two heightening pieces, a measuring head of the height meter is exposed out of the upper surface at the detection hole, and the measuring head and the two heightening pieces are abutted to the surface to be detected so that the radian of the surface to be detected can be measured by the height meter.
In some embodiments, the heightening member has an abutting surface for abutting against the surface to be detected, the abutting surface is arranged in a convex arc surface, and the abutting surface is in linear contact with the surface to be detected.
In some embodiments, the cross-sectional shape of the step-up member is circular.
In some embodiments, the supporting structure further includes a fixing member connected to the lower surface and used for fixing the height gauge, a clamping hole is formed in a position of the fixing member corresponding to the detection hole, and one end of the height gauge is clamped in the clamping hole.
In some embodiments, the support structure further includes a positioning assembly disposed on the upper surface, and the positioning assembly is configured to position the substrate such that the central position of the surface to be detected abuts against the measurement head.
In some embodiments, the locating component includes a first locating piece, a second locating piece and a locating plate tiled on the upper surface, the locating plate corresponds to each the position of the padding member has all been seted up and has been dodged the groove, just the locating plate corresponds the position of inspection hole has been seted up the through-hole, the padding member is in the correspondence it exposes to dodge groove department the locating plate, the measuring head in the through-hole appears the locating plate, first locating piece with the second locating piece restricts along first direction and second direction respectively the horizontal migration of base plate, wherein, first direction with the second direction sets up in a staggered manner.
In some embodiments, the first positioning member and the second positioning member are both detachably connected to the positioning plate; the first positioning piece can move for a preset distance along the second direction so as to adjust the connecting position of the first positioning piece and the positioning plate; and/or the second positioning piece can move for a preset distance along the first direction so as to adjust the connection position of the second positioning piece and the positioning plate.
In some embodiments, the upper surface is provided with a positioning column in a protruding manner, the positioning plate is provided with a positioning hole, and a free end of the positioning column penetrates through the positioning hole.
In some embodiments, the support structure further includes a support column and a support plate disposed opposite to the support table, one end of the support column is connected to the lower surface, the other end of the support column is connected to the support plate, and the support columns are spaced apart from each other.
In a second aspect, it is another object of the embodiments of the present application to provide an arc degree detecting apparatus, which includes the arc degree detecting device, two arc degree detecting structures are arranged at an interval, and the arc degree detecting apparatus further includes a calibration plate for resetting the altimeter.
The beneficial effect of this application lies in: radian detection device includes bearing structure and radian and detects the structure, and bearing structure includes the fixed plate that the tiling set up, and the radian detects the structure including connecting two bed hedgehopping pieces of upper surface and connecting the altimeter of lower surface, and base plate relatively fixed plate sets up, and waits to detect the both ends of face and two bed hedgehopping pieces of butt respectively, and the measuring head of altimeter waits to detect the face in the upper surface butt to measure the radian of waiting to detect the face, the measurement process is simple, device simple structure and efficient.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or exemplary technical descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic perspective view of an arc detection device provided in an embodiment of the present application;
FIG. 2 is a schematic partial exploded view of the arc detection apparatus of FIG. 1;
FIG. 3 is a further exploded schematic view of the arc detection apparatus of FIG. 2;
fig. 4 is a schematic perspective view of a calibration plate according to an embodiment of the present application.
Wherein, in the figures, the respective reference numerals:
100. a radian detection device; 10. a support structure; 11. a fixing plate; 12. a support column; 13. a support plate; 20. a radian detection structure; 21. an altimeter; 101. a substrate; 30. a positioning assembly; 31. positioning a plate; 102. A surface to be detected; 32. a first positioning member; 33. a second positioning member; 36. a positioning column; 211. positioning holes; 212. an avoidance groove; 213. a through hole; 111. a detection hole; 34. a fixing member; 341. a tension arm; 342. an elastic groove; 343. a clamping hole; 35. fixing the bolt; 344. a locking hole; 200. a calibration plate; 112. an upper surface; 113. a lower surface;
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of and not restrictive on the broad application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly connected to the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element. The terms "upper", "lower", "left", "right", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application, and the specific meaning of the terms will be understood by those skilled in the art according to the particular situation. The terms "first", "second" and "first" are used merely for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "plurality" is two or more unless specifically limited otherwise.
Referring to fig. 1 to 3, an embodiment of the present application provides a radian detecting device, which is used for detecting a substrate 101, where the substrate 101 has a surface 102 to be detected, and the surface 102 to be detected is arranged in a spherical shape, and the radian of the surface 102 to be detected can be measured by the radian detecting device, and the measured radian value is compared with a standard value to determine whether the substrate 101 meets the use requirement. Optionally, in this embodiment, the substrate 101 is a copper plate for being welded to the DBC substrate, the copper plate needs to be pre-bent during welding, and a surface of the bent copper plate is an arc surface, so as to facilitate subsequent vacuum welding. The cambered surface of the copper plate can be measured through the radian detection device so as to judge that the prebending of the copper plate meets the processing requirement, and finally, the welding quality is improved.
Referring to fig. 1 to 3, the radian measuring device includes a supporting structure 10 and a radian measuring structure 20. The support structure 10 comprises a fixedly arranged fixed plate 11, said fixed plate 11 having an upwardly arranged upper surface 112 and a downwardly arranged lower surface 113. Optionally, both the upper surface 112 and the lower surface 113 are horizontally disposed. The fixing plate 11 is opened with a detection hole 111, and two ends of the detection hole 111 respectively penetrate through the upper surface 112 and the lower surface 113. The fixing plate 11 may be made of a hard material, such as a metal material, the metal material includes iron, stainless steel or an aluminum alloy, in this embodiment, the fixing plate 11 is made of an aluminum alloy, and the aluminum alloy is an alloy based on aluminum and added with a certain amount of other alloying elements. In addition to the general characteristics of aluminum, aluminum alloys have certain alloy specific characteristics due to the variety and amount of alloying elements added. The aluminum alloy has the density of 2.63-2.85 g/cm < 3 >, higher strength (sigma b is 110-650 MPa), good casting performance and plastic processing performance, good electric conduction and heat conduction performance, and good corrosion resistance and weldability.
Referring to fig. 1 to 3, optionally, the radian measuring structure 20 includes a height pad disposed on the upper surface 112 and a height gauge 21 connected to the lower surface 113, and the measurement accuracy of the height gauge 21 is 0.001mm. The upper surface 112 is provided with two raised elements and is capable of providing support to the substrate 101. The surface to be inspected 102 is located above the upper surface 112 with a gap from the upper surface 112. The detection hole 111 is located between the two raised pieces, and in this embodiment, the detection hole 111 is located in the middle of the two raised pieces, that is, the two raised pieces are symmetrically arranged with respect to the detection hole 111. The measuring head of the altimeter 21 is exposed to the upper surface 112 at the detecting hole 111, and both the measuring head and the two heightening members are abutted against the surface 102 to be detected, so that the altimeter 21 measures the radian of the surface 102 to be detected.
Referring to fig. 1 to 3, it can be understood that the surface to be detected 102 is a convex arc surface, and the abutting portions of the two raising members and the abutting portion of the measuring head are located on the same plane before the detection starts. When the surface to be detected 102 is a concave arc surface, the height of the abutting part of the measuring head is greater than that of the abutting part of the heightening piece. In this embodiment, the surface to be detected 102 is a convex arc surface. After the substrate 101 is placed, the connecting line of the abutting point of the measuring head and the surface 102 to be detected and the sphere center determined by the surface 102 to be detected is arranged along the vertical direction, so that the shortest distance between the surface 102 to be detected and the upper surface 112 is obtained through the height meter 21, the supporting height of the surface 102 to be detected is converted according to the two padding pieces, the radian of the surface 102 to be detected is obtained, the operation process is simple, and the efficiency is high. Alternatively, by building a conversion module in the altimeter 21, the radian of the surface 102 to be detected can be directly obtained.
Referring to fig. 1 to 3, the radian detecting device of the present embodiment includes a supporting structure 10 and a radian detecting structure 20, the supporting structure 10 includes a fixing plate 11 disposed in a tiled manner, the radian detecting structure 20 includes two heightening members connected to an upper surface 112 and a height gauge 21 connected to a lower surface 113, the substrate 101 is disposed opposite to the fixing plate 11, two ends of the surface 102 to be detected are respectively abutted to the two heightening members, a measuring head of the height gauge 21 is abutted to the surface 102 to be detected on the upper surface 112, and the radian of the surface 102 to be detected is measured, the measuring process is simple and the efficiency is high.
It will be appreciated that the two padding members and the height gauge 21 are similar in principle to a digital display radius gauge, so that the curvature of the surface 102 to be detected can be directly derived.
Referring to fig. 1 to 3, in some embodiments, the padding member has an abutting surface for abutting against the surface to be detected 102, the abutting surface is disposed in a convex arc surface, and the abutting surface is in linear contact with the surface to be detected 102.
Optionally, the abutting surface is in linear contact with the surface to be detected 102, the substrate 101 may be supported by the two raised pieces, and the linear contact is favorable for accurately measuring the radian of the surface to be detected 102.
Referring to fig. 1 to 3, in some embodiments, the cross-sectional shape of the padding member is circular, so that the padding member is disposed in a cylinder.
In some embodiments, the supporting structure 10 further includes a fixing member 34 connected to the lower surface 113 and used for fixing the height gauge 21, the fixing member 34 is provided with a clamping hole 343 corresponding to the position of the detection hole 111, and one end of the height gauge 21 is clamped in the clamping hole 343.
Optionally, the fixing member 34 further has an elastic groove 342 communicating with the clamping hole 343, the fixing member 34 is divided into two elastic arms 341, the two elastic arms 341 are provided with locking holes 344, and the two elastic arms 341 can be locked by the fixing bolt 35, so that one end of the height gauge 21 is clamped in the clamping hole 343.
In some embodiments, the supporting structure 10 further includes a positioning assembly 30 disposed on the upper surface 112, and the positioning assembly 30 is used for positioning the substrate 101 so that the central position of the surface to be detected 102 abuts against the measuring head.
Referring to fig. 1 to fig. 3, in the present embodiment, the substrate 101 is a rectangular plate, and the positioning assembly 30 can arrange a connection line between the geometric center of the substrate 101 and the measuring head along a vertical direction, so as to improve the detection accuracy of the surface 102 to be detected. It can be understood that, the detection efficiency of the substrate 101 can be improved by the positioning assembly 30, and the accurate placement of the substrate 101 can be realized without manual intervention, so that the detection efficiency is high.
Referring to fig. 1 to 3, in some embodiments, the positioning assembly 30 includes a first positioning element 32, a second positioning element 33, and a positioning plate 31 disposed on the upper surface 112 in a tiled manner, an avoiding groove 212 is disposed at a position of the positioning plate 31 corresponding to each of the raising elements, a through hole 213 is disposed at a position of the positioning plate 31 corresponding to the detecting hole 111, the raising element exposes the positioning plate 31 at the avoiding groove 212, the measuring head exposes the positioning plate 31 at the through hole 213, the first positioning element 32 and the second positioning element 33 respectively limit the horizontal movement of the substrate 101 along a first direction and a second direction, wherein the first direction and the second direction are disposed in a staggered manner.
Referring to fig. 3, optionally, a coordinate system is established, wherein the X-axis is the short side of the substrate 101, the Y-axis is the long side of the substrate 101, the first direction is the Y-direction, and the second direction is the X-direction. The first positioning member 32 is arranged in the X direction and defines the movement of the substrate 101 in the Y direction; the second positioning part 33 is arranged along the Y direction, the substrate 101 is limited to move along the X direction, the substrate 101 is placed on the two heightening parts through a worker, the side plate surface where the short edge of the substrate 101 is located and the side plate surface where the long edge of the substrate 101 is located are respectively abutted against the first positioning part 32 and the second positioning part 33, the detection and positioning of the substrate 101 can be achieved, the operation is simple, and the efficiency is high.
In some embodiments, the first positioning member 32 and the second positioning member 33 are both detachably connected to the positioning plate 31; it is understood that the base plates 101 of different sizes can be adapted by adjusting the coupling position of the first positioning member 32 to the positioning plate 31 or adjusting the coupling position of the second positioning member 33 to the positioning plate 31. It is understood that the positioning plate 31 can be replaced according to the size of the different substrates 101, so as to meet the radian detection of the different substrates 101.
In some embodiments, the first positioning member 32 can move a predetermined distance in the second direction to adjust its connection position with the positioning plate 31; optionally, the first direction and the second direction are orthogonal, the first positioning element 32 and the positioning plate 31 are connected by a bolt structure, a plurality of first threaded holes may be formed in the positioning plate 31 at intervals along the second direction, and the first positioning element 32 is screwed and fixed at different first threaded holes, so that the connection position of the first positioning element 32 and the positioning plate 31 is adjusted to adapt to the substrates 101 with different sizes.
Referring to fig. 1 to 3, in some embodiments, the second positioning element 33 can move a predetermined distance along the first direction to adjust a connection position between the second positioning element and the positioning plate 31. Optionally, the first direction and the second direction are orthogonal, the second positioning element 33 is connected to the positioning plate 31 through a bolt structure, a plurality of second threaded holes may be formed in the positioning plate 31 at intervals along the first direction, and the second positioning element 33 is screwed and fixed at different second threaded holes, so that the connection position of the second positioning element 33 and the positioning plate 31 is adjusted to adapt to the substrates 101 with different sizes.
In some embodiments, the upper surface 112 is convexly provided with a positioning column 36, the positioning plate 31 is provided with a positioning hole 211, and a free end of the positioning column 36 penetrates through the positioning hole 211. Alternatively, two positioning columns 36 are provided, and the two positioning columns 36 are arranged along a diagonal line of the positioning plate 31. The number of the positioning holes 211 is matched with the number of the positioning posts 36, and the positioning holes are arranged in a one-to-one correspondence manner.
In some embodiments, the supporting structure 10 further includes a supporting column 12 and a supporting plate 13 disposed opposite to the supporting table, one end of the supporting column 12 is connected to the lower surface 113, the other end of the supporting column 12 is connected to the supporting plate 13, and a plurality of supporting columns 12 are arranged at intervals.
Referring to fig. 1 to 3, optionally, the supporting plate 13 is laid on the ground, and four supporting columns 12 are provided, and the four supporting columns 12 are respectively located at four right angles of the fixing plate 11, so that the fixing plate 11 can be supported on the ground.
Referring to fig. 4, the present invention further provides a radian detecting apparatus 100, wherein the radian detecting apparatus 100 includes a radian detecting device, the specific structure of the radian detecting device refers to the above-mentioned embodiments, and the radian detecting apparatus 100 adopts all technical solutions of all the above-mentioned embodiments, so that all the beneficial effects brought by the technical solutions of the above-mentioned embodiments are also achieved, and are not repeated here.
Referring to fig. 4, in some embodiments, the radian detection structures 20 are arranged in two at intervals, and the radian detection apparatus 100 further includes a calibration plate 200 for resetting the height meter 21. Alternatively, when a different substrate 101 is replaced, the height gauge 21 may be calibrated and cleared by the calibration plate 200.
Alternatively, two raised pieces of one of the arc detecting structures 20 are arranged at intervals in the first direction and used for measuring the degree of bending of the substrate 101 in the Y direction; the two elevation members of the other arc detecting structure 20 are arranged at intervals in the second direction and are used to measure the degree of bending of the substrate 101 in the X direction.
Optionally, two positioning assemblies 30 are also provided, and the two positioning assemblies 30 are respectively disposed corresponding to the two radian detecting structures 20. Wherein, the two positioning plates 31 are integrally formed.
The above are merely alternative embodiments of the present application and are not intended to limit the present application. Various modifications and changes may occur to those skilled in the art to which the present application pertains. Any modification, equivalent replacement, improvement or the like made within the spirit and principle of the present application shall be included in the scope of the claims of the present application.

Claims (10)

1. The utility model provides a radian detection device, can detect the base plate, the base plate has and waits to detect the face, wait to detect and personally submit the sphere setting, its characterized in that, radian detection device includes:
the supporting structure comprises a fixed plate which is fixedly arranged, the fixed plate is provided with an upper surface which is arranged upwards and a lower surface which is arranged downwards, the fixed plate is provided with a detection hole, and two ends of the detection hole are respectively communicated with the upper surface and the lower surface; and
the radian detection structure comprises a heightening piece arranged on the upper surface and a height meter connected with the lower surface, wherein the two heightening pieces are arranged on the upper surface, the detection hole is positioned between the two heightening pieces, a measuring head of the height meter is exposed out of the upper surface at the detection hole, and the measuring head and the two heightening pieces are abutted to the surface to be detected so that the radian of the surface to be detected can be measured by the height meter.
2. The arc detection device of claim 1, wherein: the heightening piece is provided with an abutting surface used for abutting against the surface to be detected, the abutting surface is arranged in a convex arc surface, and the abutting surface is in linear contact with the surface to be detected.
3. The arc detection device of claim 2, wherein: the cross section of the heightening piece is circular.
4. The arc detecting device according to claim 1, wherein: the supporting structure further comprises a fixing piece connected with the lower surface and used for fixing the height gauge, a clamping hole is formed in the position, corresponding to the detection hole, of the fixing piece, and one end of the height gauge is clamped in the clamping hole.
5. The arc detection device of any of claims 1-4, wherein: the supporting structure further comprises a positioning assembly arranged on the upper surface, and the positioning assembly is used for positioning the substrate so that the central position of the surface to be detected is abutted to the measuring head.
6. The arc detection device of claim 5, wherein: the locating component comprises a first locating piece, a second locating piece and a positioning plate, wherein the first locating piece, the second locating piece and the tiling are arranged on the positioning plate of the upper surface, the positioning plate corresponds to each avoiding groove is formed in the position of the padding piece, the positioning plate corresponds to the position of the detection hole, the padding piece corresponds to each avoiding groove and exposes, the measuring head is exposed out of the through hole, the positioning plate is limited by the first locating piece and the second locating piece along the first direction and the second direction respectively, and the first direction and the second direction are arranged in a staggered mode.
7. The arc detection device of claim 6, wherein: the first positioning piece and the second positioning piece are detachably connected with the positioning plate; the first positioning piece can move for a preset distance along the second direction so as to adjust the connecting position of the first positioning piece and the positioning plate; and/or the second positioning part can move for a preset distance along the first direction so as to adjust the connection position of the second positioning part and the positioning plate.
8. The arc detection device of claim 6, wherein: the positioning device comprises a positioning plate, a positioning column and a positioning rod, wherein the positioning column is convexly arranged on the upper surface, the positioning plate is provided with a positioning hole, and the free end of the positioning column penetrates through the positioning hole.
9. The arc detection device according to any one of claims 1 to 4, wherein: the supporting structure further comprises a supporting column and a supporting plate arranged opposite to the supporting column, one end of the supporting column is connected with the lower surface, the other end of the supporting column is connected with the supporting plate, and the supporting columns are arranged at intervals.
10. An arc detection device comprising the arc detection device of any one of claims 1 to 9, wherein the arc detection structure is arranged in two spaced apart positions, and wherein the arc detection device further comprises a calibration plate for resetting the altimeter.
CN202222270968.9U 2022-08-26 2022-08-26 Radian detection device and radian detection equipment Active CN218329724U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222270968.9U CN218329724U (en) 2022-08-26 2022-08-26 Radian detection device and radian detection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222270968.9U CN218329724U (en) 2022-08-26 2022-08-26 Radian detection device and radian detection equipment

Publications (1)

Publication Number Publication Date
CN218329724U true CN218329724U (en) 2023-01-17

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CN202222270968.9U Active CN218329724U (en) 2022-08-26 2022-08-26 Radian detection device and radian detection equipment

Country Status (1)

Country Link
CN (1) CN218329724U (en)

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