CN218308055U

CN218308055U - High-low temperature cold-hot table for ultrahigh vacuum

Info

Publication number: CN218308055U
Application number: CN202221881504.5U
Authority: CN
Inventors: 汤忠喜; 刘杰
Original assignee: Techpool Nanjing Industrial Technology Co ltd
Current assignee: Techpool Nanjing Industrial Technology Co ltd
Priority date: 2022-07-20
Filing date: 2022-07-20
Publication date: 2023-01-17
Anticipated expiration: 2032-07-20

Abstract

The utility model relates to a cold and hot platform technical field of high low temperature just discloses a high low temperature cold and hot platform for ultrahigh vacuum, including the mounting panel, one side fixed mounting of mounting panel has first motor, the shaft coupling fixedly connected with axis of rotation of first motor, and the one end of axis of rotation runs through one side of mounting panel through first bearing and rotate with the mounting panel and be connected, one side of mounting panel is provided with liquid nitrogen transfusion mouth, one side of mounting panel is provided with the liquid nitrogen leakage fluid dram, the one end of axis of rotation is provided with the cold and hot platform, the positive fixed mounting of cold and hot platform has the second motor, the first bull stick of shaft coupling fixedly connected with of second motor. The rotating shaft is driven to rotate through the first motor, so that the cold and hot table is driven to rotate, the refrigerating surface and the heating surface of the cold and hot table can be adjusted conveniently, the cold and hot table is refrigerated through liquid nitrogen, the cold and hot table is heated through the heating plate, and accordingly heating and cooling control is achieved.

Description

High-low temperature cold-hot table for ultrahigh vacuum

Technical Field

The utility model relates to a high low temperature cold and hot platform technical field specifically is a high low temperature cold and hot platform for super high vacuum.

Background

At present, materials such as semiconductors and biochemistry are widely researched, the development of materials also restricts the development of science and technology, and how to develop a higher-end new material becomes a current focus.

However, a general detection table cannot perform cold-hot switching, cannot perform temperature rise and temperature reduction control or test, consumes a large amount of refrigerant and electricity, and cannot realize simultaneous compatibility of high temperature and low temperature.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a super high vacuum is with cold and hot platform of high low temperature reaches the problem of mentioning in solving above-mentioned background.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a super high vacuum is with high low temperature cold and hot platform, includes the mounting panel, one side fixed mounting of mounting panel has first motor, the shaft coupling fixedly connected with axis of rotation of first motor, and the one end of axis of rotation runs through one side of mounting panel through first bearing and rotate with the mounting panel and be connected, one side of mounting panel is provided with liquid nitrogen infusion mouth, one side of mounting panel is provided with the liquid nitrogen leakage fluid dram, the one end of axis of rotation is provided with cold and hot platform, the positive fixed mounting of cold and hot platform has the second motor, the first bull stick of shaft coupling fixedly connected with of second motor, the first conical gear of the other end fixedly connected with of first bull stick, the front of cold and hot platform is rotated through the second bearing and is connected with the second bull stick, the other end fixedly connected with second conical gear of second bull stick, fixed cover is equipped with the gear train on the second bull stick, the front of cold and hot platform is rotated through the third bearing and is connected with the toothed disc, and is connected with the gear train meshing, the top fixedly connected with of toothed disc places the platform, the back of cold and hot platform is provided with the hot plate, and places the platform through bolt fixed connection.

The embodiment of the utility model provides an in, be provided with import pipe and outlet pipe on the warm table, and import pipe and outlet pipe intercommunication setting, import pipe and liquid nitrogen transfusion mouth intercommunication set up, the outlet pipe sets up with liquid nitrogen leakage fluid dram intercommunication, through setting up import pipe and outlet pipe, is for the convenience of liquid nitrogen circulation to play cryogenic effect.

The embodiment of the utility model provides an in, liquid nitrogen transfusion mouth and liquid nitrogen leakage fluid dram symmetry set up in the both sides of first motor, through with liquid nitrogen transfusion mouth and liquid nitrogen leakage fluid dram symmetry set up in the both sides of first motor, be for the ease of making, save manufacturing cost.

The embodiment of the utility model provides an in, the quantity of gear in the gear train is three, through setting up the gear train, is for the ease of the meshing transmission through a plurality of gears, drives the synchronous rotation of toothed disc in a distance to the direction of placing the platform is adjusted.

The embodiment of the utility model provides an in, place bench and be provided with splint, through setting up splint, be for the fixed work piece of placing bench of convenience.

The embodiment of the utility model provides an in, flange and cold and hot platform fixed connection are passed through to the axis of rotation, through setting up flange, are for the convenience of installation or dismantlement.

The utility model provides a super high vacuum is with cold and hot platform of high low temperature. The method has the following beneficial effects:

(1) The utility model discloses a set up first motor energy band and move the axis of rotation and rotate to drive the cold and hot platform and rotate, be convenient for adjust the refrigeration face and the face of heating of cold and hot platform, refrigerate cold and hot platform through the liquid nitrogen, heat cold and hot platform through the hot plate, thereby realize the cooling control of heaing up.

(2) The utility model discloses a thereby set up the second motor and can drive first bull stick rotation and drive first bevel gear and rotate, first bevel gear rotates and can drive second bevel gear to drive the second bull stick rotation, the second bull stick rotates and can drive the toothed disc through the gear train and rotate, thereby adjusts the direction of placing the platform, improves the stability of device.

Drawings

Fig. 1 is a front view of the present invention;

FIG. 2 is a rear view of the present invention;

FIG. 3 is a front view of the cooling and heating table of the present invention;

fig. 4 is a rear view of the cooling and heating table of the present invention.

In the figure: 1. mounting a plate; 2. a rotating shaft; 3. a first motor; 4. a liquid nitrogen infusion port; 5. a liquid nitrogen drain port; 6. a cold and hot table; 7. a first rotating lever; 8. a first bevel gear; 9. a second rotating rod; 10. a second bevel gear; 11. a gear set; 12. a gear plate; 13. a placing table; 14. an inlet pipe; 15. an outlet pipe; 16. heating plates; 17. a second motor.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and for simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

As shown in fig. 1-4, the utility model provides a technical scheme: a high-low temperature cold and hot table for ultrahigh vacuum comprises a mounting plate 1, a first motor 3 is fixedly mounted on one side of the mounting plate 1, a rotating shaft 2 is fixedly connected to a coupler of the first motor 3, one end of the rotating shaft 2 penetrates through one side of the mounting plate 1 through a first bearing and is rotatably connected with the mounting plate 1, a liquid nitrogen infusion port 4 is arranged on one side of the mounting plate 1, a liquid nitrogen liquid discharge port 5 is arranged on one side of the mounting plate 1, the liquid nitrogen infusion port 4 and the liquid nitrogen liquid discharge port 5 are symmetrically arranged on two sides of the first motor 3, so that the manufacturing is facilitated, the manufacturing cost is saved, an inlet pipe 14 and an outlet pipe 15 are arranged on a heating table 6, the inlet pipe 14 and the outlet pipe 15 are communicated, the inlet pipe 14 is communicated with the liquid nitrogen infusion port 4, the outlet pipe 15 is communicated with the liquid nitrogen liquid discharge port 5, the inlet pipe 14 and the outlet pipe 15 are arranged to facilitate liquid nitrogen circulation and achieve a refrigeration effect, the cold and hot table 6 is arranged at one end of the rotating shaft 2, the rotating shaft 2 is fixedly connected with the cold and hot table 6 through a connecting flange, the mounting or dismounting is facilitated through the arrangement of the connecting flange, the second motor 17 is fixedly arranged on the front surface of the cold and hot table 6, the first rotating rod 7 is fixedly connected with a coupler of the second motor 17, the first conical gear 8 is fixedly connected with the other end of the first rotating rod 7, the second rotating rod 9 is rotatably connected with the front surface of the cold and hot table 6 through a second bearing, the second conical gear 10 is fixedly connected with the other end of the second rotating rod 9, the second rotating rod 9 is fixedly sleeved with the gear set 11, the number of gears in the gear set 11 is three, and the meshing transmission through a plurality of gears is facilitated through the gear set 11, drive the synchronous rotation of toothed disc 12 far away to the direction of platform 13 is placed in the regulation, the front of cold and hot platform 6 is connected with toothed disc 12 through the third bearing rotation, and toothed disc 12 is connected with the meshing of gear train 11, the top fixedly connected with of toothed disc 12 places platform 13, it is provided with splint to place on the platform 13, through setting up splint, be for the convenience of the fixed work piece of placing on the platform 13, the back of cold and hot platform 6 is provided with hot plate 16, and hot plate 16 with place platform 13 and pass through bolt fixed connection.

When using, can drive axis of rotation 2 through setting up first motor 3 and rotate, thereby it rotates to drive cold and hot platform 6, be convenient for adjust the refrigeration face and the face of heating of cold and hot platform 6, refrigerate cold and hot platform 6 through the liquid nitrogen, heat cold and hot platform 6 through hot plate 16, thereby realize intensification cooling control, thereby it rotates to drive first bevel gear 8 to drive first bull stick 7 through setting up second motor 17, first bevel gear 8 rotates and can drive second bevel gear 10 and rotate, thereby it rotates to drive second bull stick 9, second bull stick 9 rotates and can drive toothed disc 12 through gear train 11 and rotate, thereby adjust the direction of placing platform 13, improve the stability of device.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a reference structure" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Claims

1. The utility model provides a high low temperature cold and hot platform for ultra-high vacuum, includes mounting panel (1), its characterized in that: one side fixed mounting of mounting panel (1) has first motor (3), the shaft coupling fixedly connected with axis of rotation (2) of first motor (3), and the one end of axis of rotation (2) run through one side of mounting panel (1) through first bearing and rotate with mounting panel (1) and be connected, one side of mounting panel (1) is provided with liquid nitrogen transfusion mouth (4), one side of mounting panel (1) is provided with liquid nitrogen leakage fluid dram (5), the one end of axis of rotation (2) is provided with cold and hot platform (6), the front fixed mounting of cold and hot platform (6) has second motor (17), the first bull stick (7) of shaft coupling fixedly connected with of second motor (17), the first conical gear (8) of the other end fixedly connected with of first bull stick (7), the front of cold and hot platform (6) is through second bearing rotation connection with second bull stick (9), the other end fixedly connected with second conical gear (10) of second bull stick (9), fixed cover (11) is equipped with on second bull stick (9), the front of cold and hot platform (6) is connected with gear cluster (12) through third bearing rotation dish (12), the hot gear set (12) and hot platform (12) top is connected with hot gear set (16), the hot platform (12) of placing gear set (16), and the heating plate (16) is fixedly connected with the placing table (13) through bolts.

2. The high-low temperature cold-hot table for ultrahigh vacuum as claimed in claim 1, characterized in that: be provided with import pipe (14) and outlet pipe (15) on cold and hot platform (6), and import pipe (14) and outlet pipe (15) intercommunication setting, import pipe (14) and liquid nitrogen transfusion mouth (4) intercommunication setting, outlet pipe (15) and liquid nitrogen leakage fluid dram (5) intercommunication setting.

3. The high-low temperature cold-hot table for ultrahigh vacuum as claimed in claim 1, characterized in that: the liquid nitrogen transfusion port (4) and the liquid nitrogen liquid discharge port (5) are symmetrically arranged on two sides of the first motor (3).

4. The high-low temperature cold-hot table for ultrahigh vacuum as claimed in claim 1, characterized in that: the number of gears in the gear set (11) is three.

5. The high-low temperature cold-hot table for ultrahigh vacuum as claimed in claim 1, characterized in that: a clamping plate is arranged on the placing table (13).

6. The high-low temperature cold-hot table for ultrahigh vacuum as claimed in claim 1, characterized in that: the rotating shaft (2) is fixedly connected with the cold and hot platform (6) through a connecting flange.