CN218298004U - Universal optical element surface quality rotation scanning detection device - Google Patents
Universal optical element surface quality rotation scanning detection device Download PDFInfo
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- CN218298004U CN218298004U CN202222467331.9U CN202222467331U CN218298004U CN 218298004 U CN218298004 U CN 218298004U CN 202222467331 U CN202222467331 U CN 202222467331U CN 218298004 U CN218298004 U CN 218298004U
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Abstract
The utility model discloses a universal optical element surface quality rotary scanning detection device, which comprises a sample installation device and a first rotating shaft; the first rotating shaft is provided with a first longitudinal supporting structure, and the first rotating shaft can drive the first longitudinal supporting structure to rotate; the longitudinal support structure I is provided with a linear moving shaft I which can slide up and down, the linear moving shaft I is provided with a beam I, the beam I is provided with a camera and an imaging lens, the rotating shaft I can drive the camera and the imaging lens to rotate by taking the extension line of the axis of the rotating shaft I as the center, and the optical axes of the camera and the imaging lens are always intersected with the extension line of the axis of the rotating shaft I in the rotating process; the sample mounting device is provided with a sample clamp, the height of the sample clamp is adjustable, the sample clamp is provided with an XY fine adjustment mechanism and a rotating mechanism, the rotating mechanism can rotate along a second rotating shaft, and the second rotating shaft is vertically intersected with the extension line of the first rotating shaft. The utility model discloses be suitable for various face type optical element's clear no dead angle detection.
Description
Technical Field
The utility model relates to a device that general type optical element surface quality rotation scanning detected belongs to optical element surface quality and detects technical field.
Background
The mainstream of optical elements widely used in optical instruments is still constituted by a plane, a spherical surface, a rotation aspherical surface and their arrangement combination due to the convenience of processing.
At present, surface quality inspection of planar optical elements, although the method of inspection by human eyes still remains to inspect and inspect the quality of the optical surface, is gradually replaced by automatic inspection equipment, such as inspection of the display screen of a mobile phone. However, the quality of the optical surfaces of spherical optical surfaces and rotating aspherical surfaces is still detected mainly by observation with the human eye. Although the prior art also relates to the research of detecting the defects on the surface of the spherical surface, the precision and accuracy of the detection are very limited, for example, the patent with the application number of 202010916390.2 discloses a device and a method for measuring the defects on the surface of the spherical optical element, which realize the in-situ detection of the surface defects through the polarization characteristic difference between the reflected light on the smooth surface and the scattered light of the surface defects and the photoluminescence characteristic of the pollution defects such as polishing solution, and has the following disadvantages: (a) The incident direction and the incident angle of the illuminating light are single, and because the surface defects have certain directionality, a part of defects cannot be detected; (b) difficulty in adapting to the detection of concave spherical surfaces; (c) After the lens swings for a certain angle, the height of the spherical surface changes, so that the imaging lens is out of focus, and the detection fails.
With the mass production and use of cell phone cameras, surveillance cameras, vehicle mounted cameras, etc., a vast number of spherical and rotationally aspherical optical surfaces are produced, and the quality inspection of these optical surfaces must be done by a significant amount of labor. Not only occupies a huge amount of labor force, but also has the key that the production efficiency and the quality stability become the bottleneck of the industry.
Disclosure of Invention
The utility model provides a device that general type optical element surface quality rotation scanning detected is suitable for various face type optical element's such as sphere and rotatory aspheric surface detection, has realized that 360 clear scans at no dead angles in optical element surface detect, has improved the accuracy that detects, has not only liberated a large amount of labours out to guarantee the stability that the quality detected, also improved the production efficiency of production line.
For solving the technical problem, the utility model discloses the technical scheme who adopts as follows:
a universal optical element surface quality rotation scanning detection method comprises the following steps:
1) Subdividing an arc line from the edge to the center of the element to be tested into n segments;
2) Concentric rotation shooting:
21 The optical axis of the camera imaging lens passes through the spherical center of the optical spherical surface of the element to be detected, the camera imaging lens is aligned with the first segment of the edge of the element to be detected, the element to be detected is rotated 360 degrees along the optical axis of the camera imaging lens, and the camera can follow 360 degrees of the swept spherical surface to realize imaging of an annular band of the spherical surface;
22 Keeping the optical axis of the imaging lens always passing through the spherical center of the optical spherical surface of the element to be detected, adjusting the included angle between the imaging lens and the optical axis of the element to be detected, enabling the imaging lens of the camera to be aligned with the second segment of the edge of the element to be detected, rotating the element to be detected for 360 degrees along the optical axis of the element to be detected, realizing the imaging of one annular belt of the spherical surface, and repeating the steps until the scanning detection of the surface of the element to be detected is completed.
In the whole shooting of the step 2), the optical axis of the camera imaging lens is always kept to pass through the spherical center of the optical spherical surface of the element to be measured, so that clear imaging of each angle can be ensured.
The imaging system now projects the information of the object plane to the conjugate image plane through the optical system, that is, the imaging system can only provide high quality imaging to a plane object, and generally cannot provide clear imaging to a curved object plane.
Due to the bending property of the spherical surface, in general, it is almost impossible to realize clear imaging of a spherical surface by a one-time imaging method, that is, to realize detection of spherical surface quality by a one-time shooting method.
For a spherical surface or a rotating aspheric surface, subdividing the spherical surface, replacing a continuous spherical surface with a series of broken lines, and replacing an arc in the range of each broken line with a straight line; considering that the imaging system has a certain depth of field, the principle of subdividing the arc and replacing it with a broken line is also feasible in engineering.
When the engineering is implemented, the arch height of the arc line cut by each section of broken line is required to be less than or equal to the depth of field of the imaging lens.
The method has universality and is suitable for various surface types such as spherical surfaces, rotating aspheric surfaces and the like.
The camera and the imaging lens used in the application can be the existing products sold in the market, and the camera can be an area-array camera or a line-array camera.
A universal device for optical element surface quality rotation scanning detection comprises a sample mounting device and a first rotating shaft;
the first rotating shaft is provided with a first longitudinal supporting structure, and the first rotating shaft can drive the first longitudinal supporting structure to rotate; the longitudinal support structure I is provided with a linear moving shaft I which can slide up and down, the linear moving shaft I is provided with a beam I, the beam I is provided with a camera and an imaging lens, the rotating shaft I can drive the camera and the imaging lens to rotate by taking the extension line of the axis of the rotating shaft I as the center, and the optical axes of the camera and the imaging lens are always intersected with the extension line of the axis of the rotating shaft I in the rotating process;
the sample mounting device is provided with a sample clamp, the height of the sample clamp is adjustable, the sample clamp is provided with an XY fine adjustment mechanism and a rotating mechanism, the rotating mechanism can rotate along a second rotating shaft, and the second rotating shaft is vertically intersected with the extension line of the first rotating shaft.
The sample mounting device may be capable of implementing various configurations of the present application.
As a specific implementation scheme, the device for the universal optical element surface quality rotation scanning detection comprises a first rotating shaft and a third rotating shaft, wherein the first rotating shaft and the third rotating shaft are opposite and coaxially arranged;
the first rotating shaft is provided with a first longitudinal supporting structure, and the first rotating shaft can drive the first longitudinal supporting structure to rotate; the longitudinal supporting structure I is provided with a linear moving shaft I which can slide up and down, the linear moving shaft I is provided with a beam I, the beam I is provided with a camera and an imaging lens, the rotating shaft I can drive the camera and the imaging lens to rotate by taking the extension line of the axis of the rotating shaft I as a center, and the optical axes of the camera and the imaging lens are always intersected with the extension line of the axis of the rotating shaft I in the rotating process;
a second longitudinal supporting structure is arranged on the third rotating shaft, and the third rotating shaft can drive the second longitudinal supporting structure to rotate; and a second linear moving shaft capable of sliding up and down is arranged on the second longitudinal supporting structure, a second cross beam is arranged on the second linear moving shaft, a sample clamp is arranged on the second cross beam, an XY fine adjustment mechanism and a rotating mechanism are arranged on the sample clamp, the rotating mechanism can rotate around the second rotating shaft, the second rotating shaft is vertically intersected with extension lines of the first rotating shaft and the third rotating shaft, and the second rotating shaft is overlapped with an optical axis of the element to be measured.
The sample clamp is mainly used for clamping and positioning the element to be measured so as to conveniently enable the right imaging system to take a picture; and the right part of the structure mainly clamps the camera and adjusts the angle and the direction of the camera so as to realize the scanning, photographing and detection of the whole detected spherical surface.
The sample clamp is provided with an XY fine adjustment mechanism and a rotation mechanism, and has the functions of adjusting in X and Y directions and driving a sample to be detected (an element to be detected) to rotate.
The sample clamp is also provided with a horizontal adjusting mechanism. The inclination of the tested sample can be avoided.
The XY fine adjustment mechanism is used for adjusting the position of the element to be measured in the X and Y directions so that the optical axis of the element to be measured is vertical to the upper direction and is coaxial with the camera and the imaging lens; the rotating mechanism is used for driving the element to be tested to rotate; the horizontal adjusting mechanism is used for adjusting the levelness of the element to be measured. The XY fine adjustment mechanism, the rotation mechanism and the horizontal adjustment mechanism are all directly formed by adopting the existing structures, and the components are not particularly improved in the application, so that the details are not repeated.
The scanning detection method by using the universal optical element surface quality rotary scanning detection device comprises the following steps:
1) Rotating the third rotating shaft, adjusting the second longitudinal supporting structure and the second linear moving shaft to be vertical, and clamping the element to be measured on the sample clamp, wherein the optical spherical surface of the element to be measured is upward; rotating the first rotating shaft to adjust the first longitudinal supporting structure and the first linear moving shaft to be in a vertical state, wherein the camera and the imaging lens are vertically downward;
2) Finely adjusting an XY fine adjustment mechanism on the sample clamp to enable the optical axis of the element to be measured to be vertically upward and coaxial with the camera and the imaging lens;
3) Adjusting the position of the second linear moving shaft to enable the spherical center of the optical spherical surface of the element to be measured to fall on the extension line of the first axis of the rotating shaft, and arranging the first rotating shaft and the third rotating shaft coaxially, namely enabling the extension line of the first axis of the rotating shaft to be collinear with the extension line of the third axis of the rotating shaft;
4) Subdividing an arc line from the edge to the center of the element to be tested into n segments; rotating the first rotating shaft, rotating the first supporting structure around the first rotating shaft to adjust an included angle between the imaging lens and the second rotating shaft, so that the imaging lens is aligned with the first segment formed by the edge of the element to be detected, the optical axis of the imaging lens is kept to always pass through the spherical center of the optical spherical surface, the element to be detected rotates 360 degrees around the second rotating shaft under the driving of the rotating mechanism, and the camera follows 360 degrees of the swept spherical surface to realize imaging of one annular belt of the spherical surface;
5) Keeping the optical axis of the imaging lens to always pass through the spherical center of the optical spherical surface of the element to be detected, adjusting the included angle between the imaging lens and the optical axis of the element to be detected, enabling the imaging lens of the camera to be aligned to the second segment of the edge of the element to be detected, rotating the element to be detected for 360 degrees along the optical axis of the element to be detected, realizing the imaging of an annular belt of the spherical surface, and repeating the steps until the imaging of each segment is completed, namely completing the scanning detection of the whole optical spherical surface of the element to be detected.
In the step 1), the initial height of the sample holder is located near the height of the three axes of the rotation axis (the position is also the position for loading and unloading the sample), if the optical spherical surface of the element to be measured is a concave spherical surface, the height of saving the radius of curvature is adjusted downward from the linear movement axis, and if the optical spherical surface of the element to be measured is a convex spherical surface, the height of saving the radius of curvature is adjusted upward from the linear movement axis.
In order to further improve the definition of the image, the step 3) comprises the following steps:
31 Rotating the first longitudinal support structure around the first rotation axis to adjust an included angle between the imaging lens and the second rotation axis, so that the imaging lens is aligned with the edge of the optical spherical surface of the element to be measured; then, the distance from the imaging lens to the element to be detected is adjusted by moving the linear moving shaft I up and down to obtain clear imaging of the edge of the element to be detected;
32 The sample to be detected is rotated 360 degrees along the second rotating shaft, the levelness of the sample to be detected is adjusted by the horizontal adjusting mechanism by observing the definition of the edge image of the sample to be detected and the position drift on the image until the definition of the edge of the sample to be detected does not change along with the rotation of the sample and the position of the edge of the sample to be detected does not drift along with the rotation of the sample, and at the moment, the levelness of the sample to be detected is ensured;
33 Starting a coaxial illumination light source in the imaging lens, irradiating coaxial illumination light on an optical spherical surface (on the optical spherical surface) of the element to be detected, and adjusting the distance between the imaging lens and the element to be detected by moving a linear moving shaft up and down until light reflected by the optical spherical surface of the element to be detected is imaged on an image plane of a camera; then, adjusting an included angle between the imaging lens and the second rotating shaft, enabling the coaxial illumination light to sweep through the optical spherical surface of the element to be measured, observing the size and the shape of the reflected light on the image plane, if the size and the shape of the reflected light on the image plane are found to be changed along with the change of the included angle between the imaging lens and the second rotating shaft, adjusting and lifting the height of the sample clamp, until the size and the shape of the reflected light on the image plane are not changed completely when the included angle between the imaging lens and the second rotating shaft is adjusted, and at the moment, the spherical center of the measured optical spherical surface falls on the extension line of the first rotating shaft, which is concentricity adjustment; that is, if the spherical center of the convex spherical surface to be measured just falls on the first rotating shaft, it indicates that the convex spherical surface and the first rotating shaft are concentric, and no matter how the imaging lens swings, as long as the optical axis of the lens always points to the first rotating shaft, the focusing degree of the lens on any position of the convex spherical surface is the same, whereas if the convex spherical surface and the first rotating shaft are not concentric, when the imaging lens swings to different angles, especially when the imaging lens is aligned with the edge of the sample to be measured, the focusing degree of the imaging lens changes, and at this time, the coaxiality and the levelness of the sample need to be further adjusted until the state that the focusing degrees are the same is reached;
34 Fine tuning an XY fine tuning mechanism on the sample clamp to enable the optical axis of the element to be measured to be vertically upward, and repeating the step 32), so that the imaging lens can realize clear imaging of the edge of the spherical surface of the element to be measured, and thus, the condition of scanning and detecting the optical spherical surface is achieved.
The imaging lens is designed and placed with an illumination light source, which can provide illumination completely coaxial with the imaging lens, and the illumination is a relatively mature prior art and is not described any more.
In the step 4), the arc line from the edge to the center of the element to be measured is divided into n broken line segments with the bow height less than or equal to the depth of field of the imaging lens, namely, the step distance of the included angle between the imaging lens and the second rotating shaft is calculated according to the curvature radius of the spherical surface to be measured and the depth of field parameters of the lens.
As another specific implementation structure: the general device for the surface quality rotary scanning detection of the optical element comprises a lifting platform and a first rotating shaft;
the first rotating shaft is provided with a first longitudinal supporting structure, and the first rotating shaft can drive the first longitudinal supporting structure to rotate; the longitudinal support structure I is provided with a linear moving shaft I which can slide up and down, the linear moving shaft I is provided with a beam I, the beam I is provided with a camera and an imaging lens, the rotating shaft I can drive the camera and the imaging lens to rotate by taking the extension line of the axis of the rotating shaft I as the center, and the optical axes of the camera and the imaging lens are always intersected with the extension line of the axis of the rotating shaft I in the rotating process;
and a sample clamp is arranged on the lifting platform, an XY fine adjustment mechanism and a rotating mechanism are arranged on the sample clamp, the rotating mechanism can rotate along a second rotating shaft, and the second rotating shaft is vertically intersected with the extension line of the axis of the first rotating shaft.
But the elevating platform oscilaltion, and then drive the sample anchor clamps and reciprocate, the concrete structure of elevating platform adopt present ripe structure can.
And a horizontal adjusting mechanism is arranged on the sample clamp. Sample tilt can be avoided.
In the two structures of the present application, the first rotating shaft and the second rotating shaft must be on the same plane and intersect at a point.
The left part of the structure is mainly used for clamping and positioning a tested sample so as to facilitate the photographing of the right imaging system; and the right part of the structure mainly clamps the camera and adjusts the angle and the direction of the camera so as to realize the scanning, photographing and detection of the whole detected spherical surface.
The scanning detection method by using the universal optical element surface quality rotation scanning detection device comprises the following steps:
1) Clamping the element to be detected on a sample clamp, wherein the optical spherical surface of the element to be detected faces upwards; rotating the first rotating shaft to adjust the first longitudinal supporting structure and the first linear moving shaft to be in a vertical state, and enabling the camera and the imaging lens to be vertically downward;
2) Finely adjusting an XY fine adjustment mechanism on the sample clamp to enable the optical axis of the element to be measured to be vertically upward and coaxial with the camera and the imaging lens;
3) Adjusting the height of the lifting platform to enable the sphere center of the optical spherical surface of the element to be measured to fall on the extension line of the first axis of the rotating shaft, wherein the first rotating shaft and the third rotating shaft are coaxially arranged, namely the extension line of the first axis of the rotating shaft is collinear with the extension line of the third axis of the rotating shaft;
4) Subdividing an arc line of the element to be tested from the edge to the center into n segments; rotating the first rotating shaft, rotating the first supporting structure around the first rotating shaft to adjust an included angle between the imaging lens and the second rotating shaft, so that the imaging lens is aligned with the first segment formed by the edge of the element to be detected, the optical axis of the imaging lens is kept to always pass through the spherical center of the optical spherical surface, the element to be detected rotates 360 degrees around the second rotating shaft under the driving of the rotating mechanism, and the camera follows 360 degrees of the swept spherical surface to realize imaging of one annular belt of the spherical surface;
5) Keeping the optical axis of the imaging lens to always pass through the spherical center of the optical spherical surface of the element to be detected, adjusting the included angle between the imaging lens and the optical axis of the element to be detected, enabling the imaging lens of the camera to be aligned to the second segment of the edge of the element to be detected, rotating the element to be detected for 360 degrees along the optical axis of the element to be detected, realizing the imaging of an annular belt of the spherical surface, and repeating the steps until the imaging of each segment is completed, namely completing the scanning detection of the whole optical spherical surface of the element to be detected.
In the step 1), the initial height of the sample holder is located near the height of an axis of the rotation axis (which is also the position for loading and unloading the sample), if the optical spherical surface of the device under test is a concave spherical surface, the height of the lifting platform is reduced by about the radius of curvature, and if the optical spherical surface of the device under test is a convex spherical surface, the height of the lifting platform is increased by about the radius of curvature.
In order to further improve the imaging definition, the step 3) comprises the following steps:
31 Rotating the first longitudinal supporting structure around the first rotating shaft to adjust the included angle between the imaging lens and the second rotating shaft so that the imaging lens is aligned with the edge of the optical spherical surface of the element to be measured; then, the distance from the imaging lens to the element to be detected is adjusted by moving the linear moving shaft I up and down so as to obtain clear imaging of the edge of the element to be detected;
32 The sample to be detected is rotated 360 degrees along the second rotating shaft, the levelness of the sample to be detected is adjusted by the horizontal adjusting mechanism by observing the definition of the edge image of the sample to be detected and the position drift on the image until the definition of the edge of the sample to be detected does not change along with the rotation of the sample and the position of the edge of the sample to be detected does not drift along with the rotation of the sample, and at the moment, the levelness of the sample to be detected is ensured;
33 Starting a coaxial illumination light source in the imaging lens, irradiating coaxial illumination light on an optical spherical surface (on the optical spherical surface) of the element to be measured, and adjusting the distance between the imaging lens and the element to be measured by moving a linear moving shaft up and down until light reflected by the optical spherical surface of the element to be measured is imaged on an image plane of a camera; then, adjusting an included angle between the imaging lens and the second rotating shaft, enabling the coaxial illumination light to sweep through the optical spherical surface of the element to be measured, observing the size and the shape of the reflected light on the image plane, if the size and the shape of the reflected light on the image plane are found to be changed along with the change of the included angle between the imaging lens and the second rotating shaft, adjusting and lifting the height of the sample clamp, until the size and the shape of the reflected light on the image plane are not changed completely when the included angle between the imaging lens and the second rotating shaft is adjusted, and at the moment, the spherical center of the measured optical spherical surface falls on the extension line of the first rotating shaft, which is concentricity adjustment; that is, if the spherical center of the convex spherical surface to be measured just falls on the first rotating shaft, it indicates that the convex spherical surface and the first rotating shaft are concentric, and no matter how the imaging lens swings, as long as the optical axis of the lens always points to the first rotating shaft, the focusing degree of the lens on any position of the convex spherical surface is the same, whereas if the convex spherical surface and the first rotating shaft are not concentric, when the imaging lens swings to different angles, especially when the imaging lens is aligned with the edge of the sample to be measured, the focusing degree of the imaging lens changes, and at this time, the coaxiality and the levelness of the sample need to be further adjusted until the state that the focusing degrees are the same is reached;
34 Fine-tuning an XY fine-tuning mechanism on the sample clamp to enable the optical axis of the element to be tested to be vertically upward, and repeating the step 32), so that the imaging lens can realize clear imaging of the edge of the spherical surface of the element to be tested, and thus, the condition for scanning and detecting the optical spherical surface is achieved;
in the step 4), the arc line from the edge to the center of the element to be measured is divided into n broken line segments with the bow height less than or equal to the depth of field of the imaging lens, namely, the step distance of the included angle between the imaging lens and the second rotating shaft is calculated according to the curvature radius of the spherical surface to be measured and the depth of field parameters of the lens.
The technology not mentioned in the present invention refers to the prior art.
The utility model discloses general optical element surface quality rotation scanning detects's device is suitable for various face type optical element's such as sphere and rotatory aspheric surface detection, has realized 360 clear scanning detections at no dead angles in optical element surface, has improved the accuracy that detects, has not only liberated a large amount of labours out to guarantee the stability that the quality detected, also improved the production efficiency of production line.
Drawings
FIG. 1 is a schematic diagram of the surface planarization subdivision of the optical element of the present invention;
FIG. 2 is a schematic diagram of the concentric rotation shooting of the present invention;
fig. 3 shows a first structure of the apparatus for rotary scanning and detecting surface quality of a general optical element according to the present invention;
FIG. 4 is a schematic diagram of the adjustment of the concentricity of a convex spherical surface;
FIG. 5 is a schematic diagram of the adjustment of the concentricity of the concave spherical surface;
fig. 6 shows a second structure of the apparatus for rotary scanning and detecting surface quality of a general optical element according to the present invention;
in the figure, 1 is a second rotation axis, 2 is a camera, 3 is an imaging lens, 4 is a sphere center of the device to be measured, 5 is the first rotation axis, 51 is the first longitudinal support structure, 52 is the first linear movement axis, 53 is the first beam, 6 is the third rotation axis, 61 is the second longitudinal support structure, 62 is the second linear movement axis, 63 is the second beam, 7 is a sample holder, and 8 is a lifting table.
Detailed Description
For better understanding of the present invention, the following embodiments are provided to further explain the content of the present invention, but the present invention is not limited to the following embodiments.
The terms of orientation such as up, down, left, right, horizontal and vertical in the present application are all based on the relative orientation or position relationship shown in the drawings, and should not be understood as absolute limitation to the present application.
Example 1
A method for detecting surface quality of spherical optical element by rotation scanning comprises the following steps:
1) Dividing an arc line from the edge to the center of the element to be detected into n segments, wherein the arch height of each segment is less than or equal to the depth of field of the imaging lens; it should be noted that such a subdivision method is also suitable for a rotation aspherical surface, and the rotation aspherical surface is generally not largely deviated from the spherical surface, and even when the deviation is relatively large, the solution can be solved by increasing the angular subdivision.
In the existing imaging system, information of an object plane is generally projected to a conjugate image plane through an optical system, that is, the imaging system can only provide high-quality imaging for a planar object, and generally cannot provide clear imaging for a curved object plane.
Due to the bending property of the spherical surface, it is almost impossible to realize clear imaging of a spherical surface by a single imaging method, that is, to detect the quality of the spherical surface by a single shooting method.
For a spherical surface or a rotating aspheric surface, the spherical surface is subdivided, as shown in fig. 1, a series of broken lines are used for replacing a continuous spherical surface, and a circular arc in the range of each broken line is replaced by a straight line; considering that the imaging system has a certain depth of field, the principle of subdividing the circular arc and replacing the circular arc with the broken line is also feasible in engineering. When the engineering is implemented, the arch height of the arc line cut by each section of the folding line is required to be less than or equal to the depth of field of the camera.
2) Concentric rotation shooting:
21 As shown in fig. 2, generally, the optical element is a part of a symmetrical spherical surface cut by a rotational symmetry axis (a dashhed line in the figure) perpendicular to the spherical surface, an optical axis of the camera imaging lens passes through a spherical center of the optical spherical surface of the element to be measured, and the camera imaging lens is aligned with a first segment from an edge of the element to be measured, the element to be measured is rotated 360 degrees along its optical axis, and the camera will follow 360 degrees of the swept spherical surface to realize imaging of an annular band of the spherical surface; the camera is an area-array camera or a line-array camera;
22 Keeping the optical axis of the imaging lens always passing through the spherical center of the optical spherical surface of the element to be detected, adjusting the included angle between the imaging lens and the optical axis of the element to be detected, enabling the imaging lens of the camera to be aligned with the second section of the edge of the element to be detected, rotating the element to be detected for 360 degrees along the optical axis of the element to be detected, realizing the imaging of one annular belt of the spherical surface, and repeating the steps until the scanning detection of the surface of the element to be detected is completed. In fig. 2, the dotted line part is a spherical lens, and the arc line from the edge to the center is subdivided into 2 segments, so that the imaging scanning detection of the whole spherical lens can be obtained by scanning twice in 360 degrees. It should be noted that, in the whole shooting in step 2), the optical axis of the camera imaging lens is always kept to pass through the spherical center of the optical spherical surface of the device under test.
Example 2
As shown in FIG. 3, a universal optical element surface quality rotation scanning detection device comprises a first rotating shaft and a third rotating shaft, wherein the first rotating shaft and the third rotating shaft are opposite and coaxially arranged;
the first rotating shaft is provided with a first longitudinal supporting structure, and the first rotating shaft can drive the first longitudinal supporting structure to rotate; the longitudinal supporting structure I is provided with a linear moving shaft I which can slide up and down, the linear moving shaft I is provided with a beam I, the beam I is provided with a camera and an imaging lens, the rotating shaft I can drive the camera and the imaging lens to rotate by taking the extension line of the axis of the rotating shaft I as a center, and the optical axes of the camera and the imaging lens are always intersected with the extension line of the axis of the rotating shaft I in the rotating process;
the third rotating shaft is provided with a second longitudinal supporting structure and can drive the second longitudinal supporting structure to rotate; and a second linear moving shaft capable of sliding up and down is arranged on the second longitudinal supporting structure, a second cross beam is arranged on the second linear moving shaft, a horizontal adjusting mechanism is arranged on the second cross beam, an XY fine adjusting mechanism is arranged on the horizontal adjusting mechanism, a rotating mechanism is arranged on the XY fine adjusting mechanism, a sample clamp is arranged on the rotating mechanism, the rotating mechanism can rotate around the second rotating shaft, the second rotating shaft is vertically intersected with extension lines of the first rotating shaft and the third rotating shaft, and the second rotating shaft is overlapped with an optical axis of the element to be measured.
The method for scanning and detecting the optical element by using the universal device for rotary scanning and detecting the surface quality of the optical element comprises the following steps:
1) Rotating the third rotating shaft to adjust the second longitudinal supporting structure and the second linear moving shaft to be vertical, enabling the height of the sample clamp to be close to the height of the three axes of the rotating shaft (the position is the loading and unloading position of the sample) through the second linear moving shaft which slides up and down, clamping the element to be detected on the sample clamp, and enabling the optical spherical surface of the element to be detected to face upwards (the optical spherical surface mentioned below); rotating the first rotating shaft to adjust the first longitudinal supporting structure and the first linear moving shaft to be in a vertical state, wherein the camera and the imaging lens are vertically downward;
2) In this example, the optical spherical surface of the device to be measured (convex lens) is a convex spherical surface, the linear movement axis is adjusted upward in two directions to reduce the height of the curvature radius (the dotted line part in fig. 3), and then the XY fine adjustment mechanism on the sample holder is finely adjusted to make the optical axis of the device to be measured vertically upward and coaxial with the camera and the imaging lens;
3) Rotating the first longitudinal supporting structure around the first rotating shaft to adjust an included angle between the imaging lens and the second rotating shaft, so that the imaging lens is aligned to the edge of the optical spherical surface of the element to be measured; then, the distance from the imaging lens to the element to be detected is adjusted by moving the linear moving shaft I up and down to obtain clear imaging of the edge of the element to be detected;
4) Rotating the sample to be detected for 360 degrees along the second rotating shaft, and adjusting the levelness of the sample to be detected through the horizontal adjusting mechanism by observing the definition of the edge image of the sample to be detected and the position drift on the image until the definition of the edge of the sample to be detected does not change along with the rotation of the sample and the position of the edge of the sample to be detected does not drift along with the rotation of the sample, so that the levelness of the sample to be detected is ensured;
5) Starting a coaxial illumination light source in an imaging lens, irradiating coaxial illumination light on an optical spherical surface (on the optical spherical surface) of the element to be detected, and adjusting the distance between the imaging lens and the element to be detected by moving a linear moving shaft up and down until light reflected by the optical spherical surface of the element to be detected is imaged on an image plane of a camera; then, as shown in fig. 4, adjusting an included angle between the imaging lens and the second rotating shaft, allowing the coaxial illumination light to sweep across the optical spherical surface of the element to be measured, and observing the size and shape of the reflected light on the image plane, if the size and shape of the reflected light on the image plane are found to change along with the change of the included angle between the imaging lens and the second rotating shaft, the height of the sample fixture needs to be raised or lowered, until the size and shape of the reflected light on the image plane are not changed any more when the included angle between the imaging lens and the second rotating shaft is adjusted, at this time, the sphere center of the optical spherical surface to be measured falls on the extension line of the first rotating shaft, which is concentricity adjustment; that is, if the spherical center of the convex spherical surface to be measured just falls on the first rotating shaft, it indicates that the convex spherical surface and the first rotating shaft are concentric, and no matter how the imaging lens swings, as long as the optical axis of the lens always points to the first rotating shaft, the focusing degree of the lens on any position of the convex spherical surface is the same, whereas if the convex spherical surface and the first rotating shaft are not concentric, when the imaging lens swings to different angles, especially when the imaging lens is aligned with the edge of the sample to be measured, the focusing degree of the imaging lens changes, and at this time, the coaxiality and the levelness of the sample need to be further adjusted until the state that the focusing degrees are the same is reached;
6) Finely adjusting an XY fine adjustment mechanism on the sample clamp to enable the optical axis of the element to be detected to be vertically upward, and repeating the step 4), so that the imaging lens can realize clear imaging of the edge of the spherical surface of the element to be detected, and thus, the condition for scanning and detecting the optical spherical surface is achieved;
7) Dividing an arc line from the edge to the center of the element to be detected into n segments, wherein the arch height of each segment is less than or equal to the depth of field of the imaging lens; rotating the first rotating shaft, rotating the first supporting structure around the first rotating shaft to adjust an included angle between the imaging lens and the second rotating shaft, so that the imaging lens is aligned with a first section formed by the edge of the element to be measured, the optical axis of the imaging lens is kept to always pass through the spherical center of the optical spherical surface, the element to be measured rotates 360 degrees around the second rotating shaft under the driving of the rotating mechanism, and the camera follows 360 degrees of the swept spherical surface to realize the imaging of one annular belt of the spherical surface;
8) Keeping the optical axis of the imaging lens to always pass through the spherical center of the optical spherical surface of the element to be detected, adjusting the included angle between the imaging lens and the optical axis of the element to be detected, enabling the imaging lens of the camera to be aligned with the second segment of the edge of the element to be detected, rotating the element to be detected for 360 degrees along the optical axis of the element to be detected, realizing the imaging of an annular belt of the spherical surface, and repeating the steps until the imaging of each segment is completed, namely completing the scanning detection of the whole optical spherical surface of the element to be detected, wherein the detection precision reaches below 0.5 um; within the error range of 2.5um, the accuracy rate reaches more than 99.98 percent, and within the error range of 3um, the accuracy rate reaches more than 99.9997 percent.
Example 3
Unlike embodiment 2, the optical spherical surface of the device under test (concave lens) is a concave spherical surface, and in step 2), the linear movement axis is adjusted downward to save the height of the curvature radius (solid line portion in fig. 3), and the schematic diagram of the concentricity adjustment of the concave spherical surface in step 5) is shown in fig. 5 with reference to embodiment 2.
Example 4
As shown in FIG. 6, a universal device for optical element surface quality rotation scanning detection comprises a lifting platform and a first rotating shaft;
the first rotating shaft is provided with a first longitudinal supporting structure, and the first rotating shaft can drive the first longitudinal supporting structure to rotate; the longitudinal support structure I is provided with a linear moving shaft I which can slide up and down, the linear moving shaft I is provided with a beam I, the beam I is provided with a camera and an imaging lens, the rotating shaft I can drive the camera and the imaging lens to rotate by taking the extension line of the axis of the rotating shaft I as the center, and the optical axes of the camera and the imaging lens are always intersected with the extension line of the axis of the rotating shaft I in the rotating process;
the lifting platform is provided with a horizontal adjusting mechanism, the horizontal adjusting mechanism is provided with an XY fine adjusting mechanism, the XY fine adjusting mechanism is provided with a rotating mechanism, the rotating mechanism is provided with a sample clamp, the rotating mechanism can rotate along a second rotating shaft, and the second rotating shaft is vertically intersected with the extension line of the first rotating shaft.
The method for scanning and detecting the optical element by using the universal device for rotary scanning and detecting the surface quality of the optical element comprises the following steps:
1) Adjusting the height of the elevating platform to make the height of the sample clamp be near the height of the three axes of the rotating shaft (the position is the position for loading and unloading the sample), clamping the element to be measured on the sample clamp, and enabling the optical spherical surface of the element to be measured to face upwards (the optical spherical surface is mentioned below); rotating the first rotating shaft to adjust the first longitudinal supporting structure and the first linear moving shaft to be in a vertical state, and enabling the camera and the imaging lens to be vertically downward;
2) In this example, the optical spherical surface of the device to be measured is a convex spherical surface, the height of the lifting platform about the height of the curvature radius (the dotted line part in fig. 3) is reduced, and then the XY fine adjustment mechanism on the sample holder is finely adjusted to make the optical axis of the device to be measured vertically upward and coaxial with the camera and the imaging lens;
3) Rotating the first longitudinal supporting structure around the first rotating shaft to adjust an included angle between the imaging lens and the second rotating shaft, so that the imaging lens is aligned to the edge of the optical spherical surface of the element to be measured; then, the distance from the imaging lens to the element to be detected is adjusted by moving the linear moving shaft I up and down so as to obtain clear imaging of the edge of the element to be detected;
4) Rotating the sample to be detected for 360 degrees along the second rotating shaft, and adjusting the levelness of the sample to be detected through the horizontal adjusting mechanism by observing the definition of the edge image of the sample to be detected and the position drift on the image until the definition of the edge of the sample to be detected does not change along with the rotation of the sample and the position of the edge of the sample to be detected does not drift along with the rotation of the sample, so that the levelness of the sample to be detected is ensured;
5) Starting a coaxial illumination light source in an imaging lens, irradiating coaxial illumination light on an optical spherical surface (on the optical spherical surface) of the element to be detected, and adjusting the distance between the imaging lens and the element to be detected by moving a linear moving shaft up and down until light reflected by the optical spherical surface of the element to be detected is imaged on an image plane of a camera; then, as shown in fig. 4, adjusting an included angle between the imaging lens and the second rotating shaft, allowing the coaxial illumination light to sweep across the optical spherical surface of the element to be measured, observing the size and shape of the reflected light on the image plane, if the size and shape of the reflected light on the image plane are found to change along with the change of the included angle between the imaging lens and the second rotating shaft, adjusting the height of the sample clamp to be raised or lowered until the size and shape of the reflected light on the image plane are not changed at all when the included angle between the imaging lens and the second rotating shaft is adjusted, at this time, the spherical center of the optical spherical surface to be measured falls on the extension line of the first rotating shaft, which is concentricity adjustment; that is, if the spherical center of the convex spherical surface to be measured just falls on the first rotating shaft, it indicates that the convex spherical surface and the first rotating shaft are concentric, and no matter how the imaging lens swings, as long as the optical axis of the lens always points to the first rotating shaft, the focusing degree of the lens on any position of the convex spherical surface is the same, whereas if the convex spherical surface and the first rotating shaft are not concentric, when the imaging lens swings to different angles, especially when the imaging lens is aligned with the edge of the sample to be measured, the focusing degree of the imaging lens changes, and at this time, the coaxiality and the levelness of the sample need to be further adjusted until the state that the focusing degrees are the same is reached;
6) Finely adjusting an XY fine adjustment mechanism on the sample clamp to enable the optical axis of the element to be detected to be vertically upward, and repeating the step 4), so that the imaging lens can realize clear imaging of the edge of the spherical surface of the element to be detected, and thus, the condition for scanning and detecting the optical spherical surface is achieved;
7) Dividing an arc line from the edge to the center of the element to be detected into n segments, wherein the arch height of each segment is less than or equal to the depth of field of the imaging lens; rotating the first rotating shaft, rotating the first supporting structure around the first rotating shaft to adjust an included angle between the imaging lens and the second rotating shaft, so that the imaging lens is aligned with a first section formed by the edge of the element to be measured, the optical axis of the imaging lens is kept to always pass through the spherical center of the optical spherical surface, the element to be measured rotates 360 degrees around the second rotating shaft under the driving of the rotating mechanism, and the camera follows 360 degrees of the swept spherical surface to realize the imaging of one annular belt of the spherical surface;
8) Keeping the optical axis of the imaging lens to always pass through the spherical center of the optical spherical surface of the element to be detected, adjusting the included angle between the imaging lens and the optical axis of the element to be detected, enabling the imaging lens of the camera to be aligned with the second section of the edge of the element to be detected, rotating the element to be detected for 360 degrees along the optical axis of the element to be detected, realizing the imaging of an annular belt of the spherical surface, and repeating the steps until the imaging of each section is completed, namely completing the scanning detection of the whole optical spherical surface of the element to be detected, wherein the detection precision reaches below 0.5 um; within the error range of 2.5um, the accuracy rate reaches more than 99.98 percent, and within the error range of 3um, the accuracy rate reaches more than 99.9997 percent.
If the optical spherical surface of the element to be measured is a concave spherical surface, in the step 2), the lifting platform is downwards adjusted to save the height of the curvature radius, and the rest of the steps refer to the process.
Claims (6)
1. A general device for optical element surface quality rotation scanning detection is characterized in that: comprises a sample mounting device and a first rotating shaft (5);
the first rotating shaft (5) is provided with a first longitudinal supporting structure (51), and the first rotating shaft (5) can drive the first longitudinal supporting structure (51) to rotate; a first linear moving shaft (52) capable of sliding up and down is installed on the first longitudinal supporting structure (51), a first cross beam (53) is installed on the first linear moving shaft (52), a camera (2) and an imaging lens (3) are installed on the first cross beam (53), the first rotating shaft (5) is rotated to drive the camera (2) and the imaging lens (3) to rotate by taking the extension line of the axis of the first rotating shaft (5) as a center, and the optical axes of the camera (2) and the imaging lens (3) are intersected with the extension line of the axis of the first rotating shaft (5) all the time in the rotating process;
and a sample clamp (7) is arranged on the sample mounting device, the height of the sample clamp (7) is adjustable, an XY fine adjustment mechanism and a rotating mechanism are arranged on the sample clamp (7), the rotating mechanism can rotate along a second rotating shaft (1), and the second rotating shaft (1) is vertically intersected with the extension line of the axis of the first rotating shaft (5).
2. The apparatus for universal optical component surface quality rotation scanning inspection according to claim 1, wherein: the sample mounting device is a rotating shaft III (6), and the rotating shaft I (5) and the rotating shaft III (6) are opposite and coaxially arranged; a second longitudinal supporting structure (61) is arranged on the third rotating shaft (6), and the third rotating shaft (6) can drive the second longitudinal supporting structure (61) to rotate; a second linear moving shaft (62) capable of sliding up and down is mounted on the second longitudinal supporting structure (61), a second cross beam (63) is mounted on the second linear moving shaft (62), and the sample clamp (7) is mounted on the second cross beam (63).
3. The apparatus for universal optical component surface quality rotation scanning inspection according to claim 1, wherein: the sample mounting device is arranged on a lifting platform (8), and the sample clamp (7) is arranged on the lifting platform (8).
4. The apparatus for universal optical component surface quality rotation scanning inspection according to any one of claims 1 to 3, wherein: and a horizontal adjusting mechanism is also arranged on the sample clamp (7).
5. The apparatus for universal optical component surface quality rotation scanning inspection according to any one of claims 1 to 3, wherein: the camera (2) is an area-array camera (2).
6. The apparatus for universal optical component surface quality rotation scanning inspection according to any one of claims 1 to 3, wherein: the camera (2) is a line camera (2).
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| CN202222467331.9U CN218298004U (en) | 2022-09-19 | 2022-09-19 | Universal optical element surface quality rotation scanning detection device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222467331.9U CN218298004U (en) | 2022-09-19 | 2022-09-19 | Universal optical element surface quality rotation scanning detection device |
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| CN218298004U true CN218298004U (en) | 2023-01-13 |
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