CN218294449U - Cabin-penetrating supporting vibration isolation device for vacuum equipment - Google Patents
Cabin-penetrating supporting vibration isolation device for vacuum equipment Download PDFInfo
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- CN218294449U CN218294449U CN202221895977.0U CN202221895977U CN218294449U CN 218294449 U CN218294449 U CN 218294449U CN 202221895977 U CN202221895977 U CN 202221895977U CN 218294449 U CN218294449 U CN 218294449U
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Abstract
The utility model discloses a vacuum apparatus supports vibration isolation device with crossing cabin, include: a first support column (10), a metal welded bellows (20), and a second support column (30); one end of the first supporting column (10) is used for supporting test equipment in the vacuum equipment (40), and the other end of the first supporting column penetrates through the metal welding corrugated pipe (20) and is fixed on one end face (31) of the second supporting column (30); one end of the metal welding corrugated pipe (20) is welded and fixed on the end face (31) and surrounds the other end of the first support column (10); the other end of the metal welding corrugated pipe (20) is used for being welded and fixed on a cavity of vacuum equipment (40). The device can realize the effect of supporting vibration isolation through crossing the cabin, has good vibration isolation effect, and is suitable for various large, medium and small vacuum equipment.
Description
Technical Field
The utility model relates to a vacuum apparatus technical field especially relates to vacuum apparatus is with wearing cabin support vibration isolation mounting.
Background
The vacuum cavity of vacuum equipment is usually installed on the ground, and vacuum pumping equipment can be installed on the vacuum cavity, and these factors lead to the inevitable vibrations that produce of vacuum cavity, and when there is the test equipment that needs to avoid vibrations in the vacuum equipment, if the test equipment is direct to be installed with the strutting arrangement on the vacuum cavity, then test equipment can produce vibrations along with the vibrations of vacuum cavity to the precision that leads to experimental data is low or inaccurate.
The method generally adopted by the existing test equipment support in the vacuum cavity is as follows: firstly, a support welded with the vacuum cavity is directly and rigidly connected with test equipment, and the method cannot avoid the vibration of the test equipment; secondly, a rubber shock pad is added between the support and the test equipment, the method has limited shock absorption effect, the rubber shock pad is not beneficial to obtaining the vacuum degree, and the risk of polluting the cleanliness of the vacuum chamber exists; thirdly, the vacuum cavity is integrally placed on the damping table, and the method has relatively high manufacturing cost and is used on large and medium-sized vacuum equipment.
Therefore, there is a need for a new technical arrangement to at least partially address the deficiencies of the prior art.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model aims at providing a vacuum apparatus supports vibration isolation mounting with crossing cabin, when the test equipment in vacuum chamber of vacuum apparatus need avoid producing vibrations, this device of accessible separates test equipment and vacuum chamber to support test equipment, effectively guarantee that test equipment can not shake thereupon because of vacuum chamber shakes, guarantee vacuum chamber's vacuum sealing performance simultaneously.
According to the utility model discloses an aspect provides a vacuum apparatus supports vibration isolation device with crossing cabin, a serial communication port, include: a first support column (10), a metal welded bellows (20), and a second support column (30);
one end of the first supporting column (10) is used for supporting test equipment in the vacuum equipment (40), and the other end of the first supporting column penetrates through the metal welding corrugated pipe (20) and is fixed on one end face (31) of the second supporting column (30);
one end of the metal welding corrugated pipe (20) is welded and fixed on the end face (31) and surrounds the other end of the first support column (10); the other end of the metal welding corrugated pipe (20) is used for being welded and fixed on a cavity of vacuum equipment (40).
According to the utility model discloses an embodiment, wherein vacuum apparatus supports vibration isolation device with crossing cabin still includes vibration isolation device (50), another terminal surface of second support column (30) is fixed on this vibration isolation device (50).
According to an embodiment of the invention, wherein the first support column (10) is fixed to the second support column (30) by welding or by a screw.
According to an embodiment of the invention, wherein the first support column (10) and the second support column (30) are hollow cylinders.
According to an embodiment of the invention, wherein the vibration isolation device (50) is an air flotation vibration isolation platform or other vibration isolation platform, such as a steel spring vibration isolation platform.
Compared with the prior art, the beneficial effects of the utility model are that:
the metal welding corrugated pipe has the advantages of large deformation, good vacuum sealing performance, good flexibility, easy absorption of various motion deformation and cyclic load and the like, can effectively avoid the vibration of test equipment in the vacuum cavity caused by the vibration of the vacuum cavity, and ensures the vibration isolation performance of the cabin-crossing supporting vibration isolation device.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, as illustrated in the accompanying drawings.
Brief description of the drawings
Some specific embodiments of the invention will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. The objects and features of the present invention will become more apparent in view of the following description taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic structural view of a cabin-penetrating supporting vibration isolation device for vacuum equipment according to an embodiment of the present invention.
In the figure: 10-a first support column, 20-a metal welded bellows, 30-a second support column, 31-an end face; 32-the other end face, 40-vacuum equipment, 50-vibration isolation means.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings, but the present invention is not limited thereto.
Fig. 1 is a schematic structural view of a cabin-penetrating supporting vibration isolation device for vacuum equipment according to an embodiment of the present invention, and as shown in the figure, the cabin-penetrating supporting vibration isolation device of the embodiment may include: a first support column 10, a metal welded bellows 20, a second support column 30, and a vibration isolation device 50.
The first support column 10 passes through a vacuum device 40 (partially shown, a through hole is formed in the cavity of the device), and one end of the first support column is arranged in the cavity of the vacuum device and used for supporting a test device (not shown); the other end passes through the metal welding corrugated pipe 20 and is connected and fixed with a second supporting column 30. For example, the other end of the first support column 10 may be fixed to one end surface 31 of the second support column 30 by welding or a screw. The first support column may be, for example, a metal hollow column to reduce mass.
One end of the metal welding bellows 20 is welded and fixed to one end face 31 of the second support column 30 and surrounds the other end of the first support column 10; the other end of the metal welding bellows 20 is welded and fixed on the cavity of the vacuum equipment 40, thereby realizing the integrated vacuum sealing with the vacuum equipment through the metal welding bellows.
As shown in the figure, the second supporting column 30 is outside the cavity of the vacuum apparatus, and one end of the second supporting column is fixed to the first supporting column 10 and the metal welding bellows 20, respectively, and the other end face 32 is fixed to a vibration isolation device (e.g., a steel spring vibration isolation table). The second support column 30 may also be a hollow metal column to reduce mass and increase vibration isolation.
The first support column 10 for supporting the test device is separated from the vacuum device 40 by the metal welding bellows, and the first support column 10 and the metal welding bellows 20 are mounted on the vibration isolation device 50 by the second support column 30. The metal welding corrugated pipe 20 has the advantages of large deformation, good vacuum sealing performance, good flexibility, easy absorption of various motion deformation and cyclic loads and the like, can effectively avoid vibration of test equipment in the vacuum cavity due to vibration of the vacuum cavity, and ensures the vibration isolation performance of the cabin-crossing supporting vibration isolation device.
The present invention has been described above with reference to specific embodiments, but the present invention is not limited to these specific embodiments. It will be understood by those skilled in the art that various changes, substitutions, variations, and alterations can be made herein without departing from the spirit of the invention. Furthermore, the various references to "one embodiment" above refer to different embodiments, which may, of course, be combined in whole or in part in a single embodiment.
Claims (5)
1. A cross-cabin supporting vibration isolation device for vacuum equipment is characterized by comprising: a first support column (10), a metal welded bellows (20), and a second support column (30);
one end of the first supporting column (10) is used for supporting test equipment in the vacuum equipment (40), and the other end of the first supporting column penetrates through the metal welding corrugated pipe (20) and is fixed on one end face (31) of the second supporting column (30);
one end of the metal welding corrugated pipe (20) is welded and fixed on the end face (31) and surrounds the other end of the first support column (10); the other end of the metal welding corrugated pipe (20) is used for being welded and fixed on a cavity of vacuum equipment (40).
2. The cross-cabin supporting vibration isolation device for the vacuum equipment according to claim 1, further comprising a vibration isolation device (50), wherein the other end surface (32) of the second supporting column (30) is fixed on the vibration isolation device (50).
3. The cross-cabin supporting and vibration isolating device for the vacuum apparatus according to claim 1, wherein the first supporting column (10) is fixed to the second supporting column (30) by welding or screwing.
4. The cross-cabin supporting and vibration isolating device for the vacuum equipment according to claim 1, wherein the first supporting column (10) and the second supporting column (30) are hollow cylinders.
5. The cross-cabin supporting and vibration isolating device for the vacuum equipment as claimed in claim 2, wherein the vibration isolating device (50) is an air-float vibration isolating platform or a steel spring vibration isolating platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221895977.0U CN218294449U (en) | 2022-07-21 | 2022-07-21 | Cabin-penetrating supporting vibration isolation device for vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221895977.0U CN218294449U (en) | 2022-07-21 | 2022-07-21 | Cabin-penetrating supporting vibration isolation device for vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218294449U true CN218294449U (en) | 2023-01-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221895977.0U Active CN218294449U (en) | 2022-07-21 | 2022-07-21 | Cabin-penetrating supporting vibration isolation device for vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218294449U (en) |
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2022
- 2022-07-21 CN CN202221895977.0U patent/CN218294449U/en active Active
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