CN218291109U - Gas preheating device for deposition furnace - Google Patents
Gas preheating device for deposition furnace Download PDFInfo
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- CN218291109U CN218291109U CN202222088949.4U CN202222088949U CN218291109U CN 218291109 U CN218291109 U CN 218291109U CN 202222088949 U CN202222088949 U CN 202222088949U CN 218291109 U CN218291109 U CN 218291109U
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- graphite plate
- air passage
- graphite
- deposition furnace
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Abstract
The utility model relates to a gaseous preheating device for deposition furnace belongs to carbon-carbon combined material technical field. Including last graphite plate, lower graphite plate and middle part graphite plate, go up the graphite plate and be connected through the mode of reverse lock down between the graphite plate, go up the graphite plate and be equallyd divide into six fan-shaped dishes with lower graphite plate, middle part graphite plate arranges in go up the graphite plate and the middle part of graphite plate down, just go up graphite plate, make up into a holistic big disc down between graphite plate and the middle part graphite plate. The utility model discloses when using, after the natural gas got into from the inlet port, the in-process that flows through the air flue was heated to about 900 ℃, flows out from the venthole and gets into in the sedimentation furnace. The whole circular graphite plate is large in size, so that the whole circular graphite plate is divided into six fan-shaped graphite plates and a middle circular graphite plate, and the purpose is to facilitate manufacturing, installation, overhaul and replacement.
Description
Technical Field
The utility model relates to a gaseous preheating device for deposition furnace belongs to carbon-carbon combined material technical field.
Background
In the process of preparing the carbon-carbon composite material by using a chemical vapor deposition method, natural gas is required to be introduced into a deposition furnace, the temperature in the deposition furnace is 1000-1100 ℃, and the temperature is the temperature of gas cracking reaction. The introduced natural gas is usually at normal temperature, enters from the bottom of the deposition furnace and is extracted from the upper part of the deposition furnace. Because the temperature difference between the natural gas just entering the deposition furnace and the temperature in the furnace is large, the gas temperature can be raised to the temperature in the furnace within a certain time. In the process of natural gas temperature rise, natural gas continuously flows from the bottom to the top, and the newly-coming natural gas is not cracked at the bottom due to the fact that the cracking temperature is not reached, and the deposition effect is poor for workpieces needing deposition at the bottom. Therefore, a preheating device is needed to preheat the natural gas, the temperature difference when the natural gas enters the workpiece is controlled, and the deposition effect is improved.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a gaseous preheating device for deposition furnace to solve the problem that proposes in the background art.
In order to solve the technical problem, the utility model discloses a scheme does: the utility model provides a gaseous preheating device for sedimentation furnace, includes graphite plate, lower graphite plate and middle part graphite plate, go up the graphite plate and be connected through the mode of reverse lock between the graphite plate down, go up the graphite plate and be equallyd divide into six fan-shaped dishes with lower graphite plate, middle part graphite plate is arranged in go up the graphite plate and the middle part of graphite plate down, just go up graphite plate, make up into a holistic big disc between graphite plate and the middle part graphite plate.
An air outlet and an upper air passage are arranged in the upper graphite plate, and an air inlet and a lower air passage are arranged in the lower graphite plate.
The upper air passage and the lower air passage are both semicircular grooves with the diameter of 30mm, and the upper air passage and the lower air passage are buckled to form a complete circular tube-shaped air passage.
The length of air flue is 1600mm, adopts smooth excessive circular plus linear shape setting.
The edge of going up the air flue is provided with the air flue arch, the edge of air flue is provided with the air flue recess down, the air flue recess with the protruding matching setting of air flue.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses when using, after the natural gas got into from the inlet port, the in-process that flows through the air flue was heated to about 900 ℃, flows out from the venthole and gets into in the sedimentation furnace. The whole circular graphite plate is large in size, so that the whole circular graphite plate is divided into six fan-shaped graphite plates and a middle circular graphite plate, and the purpose is to facilitate manufacturing, installation, overhaul and replacement.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic structural view of the lower graphite plate of the present invention;
fig. 3 is a schematic structural view of the upper graphite plate of the present invention;
fig. 4 is a schematic structural view of the air channel protrusion of the present invention;
fig. 5 is a schematic structural diagram of the air passage groove of the present invention.
Detailed Description
The following description will further explain embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1-5, the utility model discloses a gaseous preheating device for sedimentation furnace, including last graphite plate 1, lower graphite plate 2 and middle part graphite plate 3, go up graphite plate 1 and be connected through the mode of reverse lock between the graphite plate 2 down, go up graphite plate 1 and be equallyd divide into six fan-shaped dishes with lower graphite plate 2, six fan-shaped upper and lower graphite plates enclose and form a ring, middle part graphite plate 3 is arranged in go up graphite plate 1 and lower graphite plate 2's middle part, just it makes up into a holistic big disc to go up between graphite plate 1, lower graphite plate 2 and the middle part graphite plate 3.
An air outlet 4 and an upper air flue 6 are arranged in the upper graphite plate 1, and an air inlet 7 and a lower air flue 5 are arranged in the lower graphite plate 2.
The upper air passage 6 and the lower air passage 5 are both semicircular grooves with the diameter of 30mm, and the upper air passage and the lower air passage are buckled to form a complete circular tube-shaped air passage.
The length of air flue is 1600mm, adopts smooth excessive circular plus linear shape setting. The length of air flue is 1600mm, adopts smooth excessive circular plus linear shape setting for gaseous smooth and easy flow through. (after finite element simulation analysis, under the condition of 900 ℃ of a graphite disc, the temperature of natural gas can be increased to nearly 900 ℃ from normal temperature through a stroke of 1500mm in a pipeline with the diameter of 30mm, so that the length of an air passage is set to 1600 mm).
In order to improve the tightness of the air passage, the edge of the upper air passage 6 is provided with an air passage bulge 9, the edge of the lower air passage 5 is provided with an air passage groove 8, and the air passage groove 8 is matched with the air passage bulge 9.
Specifically, during the use, the utility model discloses when using, after the natural gas got into from the inlet port, the in-process that flows through the air flue was heated to about 900 ℃, flows out from the venthole and gets into in the sedimentation furnace. The whole circular graphite plate is large in size, so that the whole circular graphite plate is divided into six fan-shaped graphite plates and a middle circular graphite plate, and the purpose is to facilitate manufacturing, installation, overhaul and replacement.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.
Claims (5)
1. A gas preheating device for a deposition furnace is characterized in that: including last graphite plate (1), lower graphite plate (2) and middle part graphite plate (3), go up graphite plate (1) and connect through the mode of reverse lock down between graphite plate (2), go up graphite plate (1) and divide equally into six fan-shaped dishes with lower graphite plate (2), middle part graphite plate (3) are arranged in go up graphite plate (1) and the middle part of lower graphite plate (2), just go up graphite plate (1), make up into a holistic big disc between graphite plate (2) and the middle part graphite plate (3) down.
2. The gas preheating apparatus for a deposition furnace according to claim 1, wherein: an air outlet (4) and an upper air passage (6) are arranged in the upper graphite plate (1), and an air inlet (7) and a lower air passage (5) are arranged in the lower graphite plate (2).
3. The gas preheating device for a deposition furnace according to claim 2, wherein: the upper air passage (6) and the lower air passage (5) are both semicircular grooves with the diameter of 30mm, and the upper air passage and the lower air passage are buckled to form a complete circular tube-shaped air passage.
4. The gas preheating device for a deposition furnace according to claim 3, wherein: the length of air flue is 1600mm, adopts smooth excessive circular alignment to set up.
5. The gas preheating apparatus for a deposition furnace according to claim 2, wherein: the edge of the upper air passage (6) is provided with an air passage bulge (9), the edge of the lower air passage (5) is provided with an air passage groove (8), and the air passage groove (8) is matched with the air passage bulge (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222088949.4U CN218291109U (en) | 2022-08-10 | 2022-08-10 | Gas preheating device for deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222088949.4U CN218291109U (en) | 2022-08-10 | 2022-08-10 | Gas preheating device for deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218291109U true CN218291109U (en) | 2023-01-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222088949.4U Active CN218291109U (en) | 2022-08-10 | 2022-08-10 | Gas preheating device for deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218291109U (en) |
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2022
- 2022-08-10 CN CN202222088949.4U patent/CN218291109U/en active Active
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