CN218274509U

CN218274509U - Mounting structure for scanning electron microscope electron optical component

Info

Publication number: CN218274509U
Application number: CN202221053154.3U
Authority: CN
Inventors: 崔战伟; 杨润潇
Original assignee: Huiran Technology Co ltd
Current assignee: Huiran Technology Co ltd
Priority date: 2022-05-05
Filing date: 2022-05-05
Publication date: 2023-01-10
Anticipated expiration: 2032-05-05

Abstract

The utility model discloses a mounting structure of an electronic optical component of a scanning electron microscope, which comprises a lens cone and a bracket; lens cone inner wall sets up two support mounting portions including seting up two parts in relative blind groove, blind inslot installation joint elastic ball, the support includes that support main part and upper and lower both sides are provided with two support grafting portions of ball joint portion, support grafting portion is pegged graft between two parts of support mounting portion, connect two reset spring that 90 degrees distribute between support main part and the lens cone, install two position control mechanism on the lens cone, butt portion sets up in support main part both sides with reset spring relatively respectively, adjustment mechanism's butt portion can move under the drive of drive division, this motion is including making butt portion from initial position to compression reset spring's direction promotion support main part and make butt portion return initial position. The utility model discloses can realize adjusting electron optical component's position appearance under the condition that does not dismantle, can avoid the destruction to the vacuum to time and human cost have been practiced thrift.

Description

Mounting structure for scanning electron microscope electron optical component

Technical Field

The utility model relates to a scanning electron microscope technical field especially relates to a scanning electron microscope electron optical component mounting structure.

Background

Scanning Electron Microscope (SEM), abbreviated Scanning Electron Microscope, is a common micro-analyzer for modulating and imaging various physical signals excited by a focused Electron beam when Scanning on a sample surface, wherein a plurality of Electron optical components are required to realize focusing and deflecting of the Electron beam.

At present, an electronic optical component of a mainstream scanning electron microscope is generally fixedly arranged in a lens cone through a bracket, and the position of the electronic optical component is not adjustable, so that the debugging of the system is mainly adjusted by a circuit, the imaging effect is difficult to meet under certain conditions, and if the position of the electronic optical component is adjusted, a cavity needs to be disassembled and then installed again.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a scanning electron microscope electron optical component mounting structure convenient to adjust electron optical component position at least.

In order to achieve the above purpose, the utility model provides a following technical scheme:

a mounting structure of electron optical component of scanning electron microscope comprises a lens cone and an electron optical component mounting bracket; the inner wall of the lens cone is relatively provided with two bracket mounting parts, each bracket mounting part comprises two parts which are vertically spaced, the two parts are provided with opposite blind grooves, clamping elastic balls are mounted in the blind grooves, each clamping elastic ball comprises a ball body and a spring, one end of each clamping elastic ball is connected with the corresponding ball body, the other end of each spring is located at the bottom of each blind groove, the corresponding ball bodies can move up and down along the blind grooves, at least one part of each ball body is located outside the corresponding blind groove, each bracket comprises a bracket main body and two bracket insertion parts which extend outwards from the bracket main body in opposite directions, the upper side and the lower side of each bracket insertion part are provided with ball joint parts matched with the corresponding ball bodies, the two bracket insertion parts are respectively inserted between the two parts of one of the two bracket mounting parts, the corresponding ball bodies are clamped with the ball joint parts, two reset springs which are distributed along the circumference of the lens cone at 90 degrees are connected between the bracket main body and the lens cone, two position adjusting mechanisms are mounted on the lens cone, each position adjusting mechanism comprises a butting part and a driving part which is connected with the butting part in a driving part in which the abutting part in a driving part and a driving part which the two abutting part is arranged in the initial movement direction of the corresponding bracket main body, and the two restoring springs, and the two restoring mechanisms which can push the two restoring springs in the initial movement of the bracket main body.

Optionally, the ball joint is a hemispherical groove.

Optionally, the ball bond is a circular hole.

Optionally, the circular hole is a blind hole.

Optionally, the two ball combining portions on the upper and lower sides of the bracket insertion portion are circular holes which are vertically through.

Optionally, the driving part is used for driving the abutting part to generate reciprocating linear motion through a transmission mechanism.

Optionally, the drive part is a linear motor.

Optionally, the abutting portion is a cam, a curved edge of the cam abuts against the bracket main body, and the driving portion is configured to drive the cam to rotate through a transmission mechanism.

Optionally, the driving part is a stepping motor.

Optionally, the holder body is a circular cylinder.

The utility model provides an installation structure can realize adjusting electron optical component's position appearance under the condition of not dismantling, can avoid the destruction to the vacuum to time cost and human cost have been practiced thrift.

The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof taken in conjunction with the accompanying drawings.

Drawings

Some specific embodiments of the present invention will be described in detail hereinafter, by way of illustration and not by way of limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:

fig. 1 is a schematic diagram illustrating an overall structure of an electron optical component mounting structure of a scanning electron microscope according to an embodiment of the present invention;

fig. 2 is a schematic top cross-sectional view of an exemplary sem electron optics mounting structure according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a bracket according to an embodiment of the present invention;

fig. 4 is a schematic view of a partial fitting structure of the bracket and the bracket mounting portion according to an embodiment of the present invention.

Reference numerals are as follows:

1-lens cone, 2-bracket, 21-bracket main body, 22-bracket plug-in part, 221-ball combination part, 3-bracket mounting part, 31-blind groove, 32-clamping elastic ball, 4-reset spring, 5-position adjusting mechanism, 51-abutting part and 52-driving part

Detailed Description

It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

The scanning electron microscope mainly comprises the following components:

an electron optical system comprising an electron gun and a lens system. The electron gun functions to generate an electron illumination source. The lens system is used for (1) reducing the size of virtual light source from tens of micrometers to 5nm (or less) and continuously changing from tens of micrometers to several nanometers, (2) controlling the opening angle of electron beam, which can be 10% ^-2 ～10 ^-3 Variable in rad range, (3) the focused electron beam formed can be raster-scanned over the surface of the sample, with a variable scanning angle range, and, in order to obtain the above-mentioned scanning electron beam, lens systemsThe system generally comprises an electromagnetic lens for focusing the electron beam, a scanning coil for deflecting the electron beam and regularly sweeping the surface of the sample, and an aperture for filtering the off-axis electrons in the electron beam and adjusting the depth of field of the image.

A mechanical system comprising a support portion and a sample chamber. The sample chamber is provided with a sample platform, and the four walls are generally provided with a plurality of windows, so that the electronic detector can be installed, and other detectors and spectrometers can be installed at the same time.

Vacuum systems, which are important in electron-optical instruments, are known because the electron beam can only be generated and manipulated under vacuum. The commonly used high vacuum systems include three types, namely a dry pump system, a turbomolecular pump system and an ion pump system.

In the signal collecting, processing and displaying system, an electron beam emitted by an electron gun of a scanning electron microscope is focused and then converged into a point light source, the point light source forms a high-energy electron beam under an accelerating voltage, the high-energy electron beam is focused into a light spot with a small diameter through an electromagnetic lens, after passing through an electromagnetic lens with a scanning coil at the last stage, the electron beam bombards the surface of a sample point by point in a raster scanning mode, and physical signals with different depths are excited simultaneously. The physical signals can be received by different signal detectors and synchronously transmitted to a computer display screen through an amplifier to form real-time imaging record. Under the action of incident electron beams, the sample can generate various physical signals, namely auger electrons (Au E), secondary Electrons (SE), backscattered electrons (BSE), X rays (characteristic X rays and continuous X rays), cathode fluorescence (CL), absorbed Electrons (AE) and transmitted electrons, and different physical signals need different types of detection systems. There are roughly three main categories, namely electron detectors, cathodoluminescence detectors and X-ray detectors.

The electron optical system is generally located in a lens barrel above the sample chamber, the signal detector is generally located in the sample chamber or the lens barrel, the electron gun, the lens system, the signal detector and the like are connected with an external power supply, and the vacuum system provides a vacuum environment for the lens barrel and the sample chamber.

The utility model provides a scanning electron microscope electron optical component mounting structure, this mounting structure is including the support that is used for installing electron optical component, the setting is used for the support mounting department of support mounting, the reset spring of one end connection lens cone inner wall other end linking bridge and the position control mechanism who adjusts the support position at lens cone inner wall. One electro-optical component corresponds to one of the mounting structures, and a plurality of the electro-optical components are provided with a plurality of the mounting structures in one-to-one correspondence.

As shown in fig. 1-4, in one embodiment, the present invention provides a mounting structure for an electron optical component of a scanning electron microscope, including a lens barrel 1 and a bracket 2, wherein the inner wall of the lens barrel 1 is provided with paired bracket mounting portions 3 at opposite positions, the bracket mounting portions 3 include two portions spaced from each other at an upper portion and a lower portion, which extend inwards from the inner wall of the lens barrel 1, the two portions are provided with opposite blind grooves 31, clamping elastic balls 32 are installed in the blind grooves 31, each clamping elastic ball 32 includes a ball body and a spring, one end of the spring is located at the bottom of the blind groove 31, the other end of the spring is connected with the ball body, the ball body can move up and down along the blind groove 31, and at least one portion of the ball body is located outside the blind groove 31. The bracket 2 includes a bracket main body 21 and two bracket insertion parts 22, in this embodiment, the bracket main body 21 is a cylinder body which is open at the upper and lower sides, and the two bracket insertion parts 22 extend outwards from the bracket main body 21 along opposite directions. The upper and lower sides of the bracket insertion part 22 are provided with ball coupling parts 221, such as a circular hole or a hemispherical groove, which are engaged with the ball body of the snap-fit elastic ball 32. The electron optical component may be fixed to the support 2 by means of bolts, gluing, riveting or the like.

The two bracket insertion parts 22 are respectively inserted between the upper and lower parts of the two bracket mounting parts 3, and the clamping elastic ball 32 is clamped with the ball combining part 221 to realize the mounting of the bracket 2 on the lens cone 1. Still be connected with reset spring 4 between support 2 and the lens cone 1, reset spring 4 one end and the interior wall connection of lens cone 1, the other end is connected with support 2. The return springs 4 include two, and the two return springs 4 are distributed at 90 degrees along the circumference of the lens barrel 1. Two position adjustment mechanisms 5 are also mounted on the lens barrel 1, and the position adjustment mechanisms 5 include an abutting portion 51 and a driving portion 52. The abutting portions 51 abut against the holder main body 21, and the abutting portions 51 of the two position adjustment mechanisms 5 are provided on both sides of the holder main body 21 so as to oppose to one of the two return springs 4. The driving portion 52 is in transmission connection with the abutting portion 51, and drives the abutting portion 51 to linearly move or rotate, thereby pushing the holder 2 in the direction of the arrow shown in the figure. The driving portion 52 may be, for example, a linear motor, and drives the abutting portion 51 to reciprocate linearly, and for example, the abutting portion 51 may be a cam, a curved edge of which abuts against the bracket 2, and the cam is driven by the driving portion 52 to rotate, and thus the bracket 2 can be driven to swing between the front position and the rear position. The drive section 52 is preferably a stepping motor.

As shown in the drawings, in the present embodiment, the bracket main body 21 is a circular cylinder which is open at the top and bottom, and in other embodiments, a cylindrical structure or a frame may be used.

The position adjustment of the bracket is described by taking the cam as an abutting part, a driving part, such as a stepping motor, drives the cam to rotate through a transmission mechanism, the cam is in rigid contact with the bracket, and the bracket is pushed by the cam to displace. The two cams respectively press the bracket in two directions which are perpendicular to each other, so that the movement of the bracket can be caused, the bracket presses the return spring, when the cams rotate to exceed 90 degrees, the bracket can move in the opposite direction under the thrust action of the return spring, and the pose of the bracket can be controlled by controlling the rotation angle of the cams, so that the pose of the electron optical component arranged on the bracket is indirectly adjusted. The principle of the abutting part moving along the straight line is similar, namely, the support swings a certain angle between the direction compressing the return spring and the direction of return through the reciprocating driving of the driving part, such as a linear motor, so that the posture adjustment of the electronic optical component is realized.

The embodiment of the utility model provides an above-mentioned mounting structure can realize adjusting electron optical component's position appearance under the condition of not dismantling, can avoid the destruction to the vacuum to time cost and human cost have been practiced thrift.

The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A mounting structure of electron optical component of scanning electron microscope is characterized in that it comprises a lens cone and an electron optical component mounting bracket; the inner wall of the lens cone is oppositely provided with two bracket mounting parts, each bracket mounting part comprises two parts which are vertically spaced, the two parts are provided with opposite blind grooves, clamping elastic balls are mounted in the blind grooves, each clamping elastic ball comprises a ball body and a spring, one end of each spring is connected with the corresponding ball body, the other end of each spring is positioned at the bottom of each blind groove, each ball body can move up and down along the corresponding blind groove, at least one part of each ball body is positioned outside the corresponding blind groove, each bracket comprises a bracket main body and two bracket insertion parts which extend outwards from the bracket main body along opposite directions, the upper side and the lower side of each bracket insertion part are provided with ball joint parts which are matched with the corresponding ball bodies, and the two bracket insertion parts are respectively inserted between the two parts of one of the two bracket mounting parts, the spheroid with ball joint portion joint, be connected with between the support main part with the lens cone along two reset spring that the circumference of lens cone becomes 90 degrees distributions, install two position control mechanism on the lens cone, position control mechanism include butt portion and with the drive division that the transmission of butt portion is connected, butt portion with the support butt, just two position control mechanism's butt portion respectively with one of them of two reset spring set up relatively in the both sides of support main part, butt portion can the drive division drive moves down, the motion is including making butt portion promotes from the initial position to the compression reset spring's direction support main part with make butt portion returns initial position.

2. The scanning electron microscope electron optical component mounting structure of claim 1, wherein the ball bonding portion is a hemispherical groove.

3. The scanning electron microscope electron optical component mounting structure of claim 1, wherein the ball bonding portion is a circular hole.

4. The scanning electron microscope electron optical component mounting structure of claim 3, wherein the circular hole is a blind hole.

5. The mounting structure for an electron optical component of a scanning electron microscope according to claim 3, wherein the two ball coupling portions on the upper and lower sides of the holder insertion portion are circular holes penetrating from top to bottom.

6. The mounting structure for an electron optical component of a scanning electron microscope according to claim 1, wherein the driving section drives the abutting section to generate a reciprocating linear motion by a transmission mechanism.

7. The scanning electron microscope electron optical component mounting structure according to claim 6, wherein the driving section is a linear motor.

8. The mounting structure for an electron optical component for a scanning electron microscope according to claim 1, wherein the abutting portion is a cam, a curved edge of the cam abuts against the holder main body, and the driving portion is configured to drive the cam to rotate through a transmission mechanism.

9. The mounting structure for electron optical components of a scanning electron microscope according to any one of claims 1 to 8, wherein the driving unit is a stepping motor.

10. A mounting structure for electron optical components of a scanning electron microscope according to any one of claims 1 to 8, wherein the holder main body is a circular cylinder.