CN218272928U - Binocular narrowband multiband confocal imaging system - Google Patents

Binocular narrowband multiband confocal imaging system Download PDF

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Publication number
CN218272928U
CN218272928U CN202222906033.5U CN202222906033U CN218272928U CN 218272928 U CN218272928 U CN 218272928U CN 202222906033 U CN202222906033 U CN 202222906033U CN 218272928 U CN218272928 U CN 218272928U
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light
lens
filter
array
point light
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袁涛
易定容
吴栋梁
叶一青
蒋威
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Huaqiao University
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Huaqiao University
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Abstract

The embodiment of the utility model discloses confocal imaging system of two mesh narrowband multiband relates to confocal imaging technical field. The lighting unit generates polychromatic light; the collimating lens collimates the polychromatic light into a polychromatic light beam; the digital micromirror device forms the polychromatic light beam into a point light array; the dispersion tube mirror disperses the first reflection point light array to obtain a monochromatic point light array; the first light splitting lens transmits and reflects the spotlight array; the first light splitting lens also transmits and reflects incident imaging light; the second beam splitting lens transmits and reflects the second transmission point light array; the first filtering rotary disc and the second filtering rotary disc respectively bear a plurality of optical filters and can switch any optical filter to the light path of the third transmission point light array; the first focusing lens and the second focusing lens focus; the first imaging unit and the second imaging unit form an imaging result. The utility model discloses a change the light filter at the formation of image in-process, improve formation of image efficiency.

Description

Binocular narrowband multiband confocal imaging system
Technical Field
The utility model relates to a confocal imaging technology field especially relates to a confocal imaging system of two mesh narrowband multiband.
Background
With the rapid development of science and technology, confocal imaging becomes a hot spot of research of scholars at home and abroad. Confocal imaging is based on a method of multi-section color narrow-band wave bands to image a high-precision workpiece.
Referring to fig. 1, the conventional binocular narrowband multiband confocal imaging system includes an illumination unit 1, a collimating lens 2, a digital micromirror device 3, a first beam splitting lens 4, a dispersive tube lens 5, an objective lens 6, an object carrying module 7, a second beam splitting lens 8, a first focusing lens 11, a first imaging unit 12, a second focusing lens 15, a second imaging unit 16 and a display module 17. The existing binocular narrow-band multiband confocal imaging system needs to be provided with an optical filter in advance, the optical filter cannot be replaced in the imaging process, and the imaging efficiency is limited to a certain degree.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a confocal imaging system of two mesh narrowband multiband to the realization is changing the light filter at the imaging process, improves imaging efficiency.
In order to achieve the above object, the embodiment of the present invention provides the following solutions:
a binocular narrowband multiband confocal imaging system, comprising:
a first optical subsystem comprising: the device comprises a lighting unit (1), a collimating lens (2) and a digital micromirror device (3); the centers of all the components in the first optical subsystem are on the same straight line;
the object carrying module (7) is used for carrying an object to be measured;
a second optical subsystem comprising: the objective lens (6), the dispersion tube lens (5), the first light splitting lens (4) and the second light splitting lens (8) are sequentially arranged in the direction away from the object carrying module (7); the centers of all the components in the second optical subsystem are on the same straight line;
a first imaging subsystem comprising: a first filter turntable (9), a first focusing lens (11) and a first imaging unit (12); the centers of the first focusing lens (11) and the first imaging unit (12) are on the same straight line;
a second imaging subsystem comprising: a second filter turntable (13), a second focusing lens (15) and a second imaging unit (16); the centers of the second focusing lens (15) and the second imaging unit (16) are on the same straight line;
wherein:
a lighting unit (1) for generating polychromatic light;
a collimating lens (2) for collimating the polychromatic light into a polychromatic light beam;
a digital micromirror device (3) for forming the polychromatic light beam into a spot light array;
the central connecting line of the first light splitting lens (4) and the digital micromirror device (3) is not coincident with the central connecting line of a target, and the central connecting line of the target is the central connecting line of each component in the first optical subsystem;
the dispersion tube mirror (5) is used for dispersing the first reflection point light array to obtain a monochromatic point light array; the monochromatic spot light array reaches the object carrying module (7) through the objective lens (6), and after being reflected, the monochromatic spot light array serving as imaging light reaches the first light splitting lens (4) through the objective lens (6) and the dispersion tube lens (5);
the first beam splitting lens (4) is used for: transmitting and reflecting the point light array to obtain a first transmission point light array and a first reflection point light array;
the first beam splitting lens (4) is further configured to: transmitting and reflecting the incident imaging light to obtain a second transmission point light array and a second reflection point light array;
the second beam splitting lens (8) is used for: transmitting and reflecting the second transmission point light array to obtain a third transmission point light array and a third reflection point light array;
the first light filtering turntable (9) is used for bearing a plurality of light filters and can switch any one light filter to the light path of the third transmission point light array; the optical filter positioned on the optical path can filter the third transmission point light array to form a first narrow-band light beam;
the second light filtering rotary disc (13) is used for bearing a plurality of light filters and can switch any light filter to the light path of the third reflection point light array; the optical filter positioned on the optical path can filter the third reflection point light array to form a second narrow-band light beam;
the first focusing lens (11) is used for focusing the first narrow-band light beam;
the first imaging unit (12) is used for collecting the focused first narrow-band light beam and forming a first imaging result;
the second focusing lens (15) is used for focusing the second narrow-band light beam;
the second imaging unit (16) is used for collecting the focused second narrow-band light beam and forming a second imaging result.
Optionally, the first filter turret (9) comprises:
a first filter wheel (901) for carrying a plurality of filters;
the first stepping motor (903) is connected with the first filter disc (901) and used for driving the first filter disc (901) to rotate according to a control signal;
the second filter wheel (13) comprises:
the second filter disc (1301) is used for bearing a plurality of filters;
and the second stepping motor (1303) is connected with the second light filtering disc (1301) and is used for driving the second light filtering disc (1301) to rotate according to a control signal.
Optionally, the wavelength bands filtered by a plurality of filters carried by the first filter turntable (9) are different;
the wavelength bands filtered by a plurality of filters carried by the second filter rotating disc (13) are different.
Optionally, the objective lens (6) has a distance Z from the focal point of the monochromatic spot light array to the optical center thereof; wherein the Z corresponds to a wavelength of the spot light array.
Optionally, the first beam splitting lens (4) comprises: a half-transmitting and half-reflecting lens; the second beam splitting lens (8) includes: a half-lens and a half-lens.
Optionally, the first beam splitting lens (4) further includes: a polarizer, a polarizing beam splitter and a wave plate; the second beam splitting lens (8) further includes: polarizer, polarizing beam splitter and wave plate.
Optionally, a straight line of the center of the second imaging subsystem is perpendicular to a straight line of the center of the second optical subsystem.
Optionally, the object module (7) is embodied as a three-dimensional motion object stage.
Optionally, the first imaging unit (12) comprises a camera; the second imaging unit (16) comprises a camera.
Optionally, comprising:
and the system control unit (17) is respectively connected with the first stepping motor (903) and the second stepping motor (1303) and is used for sending out the control signal.
According to the utility model provides a specific embodiment discloses following technological effect:
the embodiment of the utility model provides a confocal imaging system of binocular narrowband multiband, including first optical subsystem, carry the thing module, second optical subsystem, first imaging subsystem and second imaging subsystem. The parts cooperate as follows: the lighting unit generates polychromatic light; the collimating lens collimates the polychromatic light into a polychromatic light beam; the digital micromirror device forms the polychromatic light beam into a point light array; the central connecting line of the first light splitting lens and the digital micromirror device is not coincident with the central connecting line of a target, and the central connecting line of the target is the central connecting line of each component in the first optical subsystem; the dispersion tube mirror disperses the first reflection point light array to obtain a monochromatic point light array; the monochromatic point light array reaches the object carrying module through the objective lens and is reflected, and then the monochromatic point light array serving as imaging light reaches the first light splitting lens through the objective lens and the dispersion tube lens; the first beam splitting lens transmits and reflects the point light array to obtain a first transmission point light array and a first reflection point light array; the first light splitting lens is used for transmitting and reflecting incident imaging light to obtain a second transmission point light array and a second reflection point light array; the second beam splitting lens transmits and reflects the second transmission point light array to obtain a third transmission point light array and a third reflection point light array; the first filtering turntable bears a plurality of filters and can switch any filter to the light path of the third transmission point light array; the optical filter positioned on the optical path can filter the third transmission point light array to form a first narrow-band light beam; the second light filtering turntable bears a plurality of light filters and can switch any one light filter to the light path of the third reflection point light array; the optical filter positioned on the optical path can filter the third reflection point light array to form a second narrow-band light beam; the first focusing lens focuses the first narrow-band light beam; the first imaging unit collects the focused first narrow-band light beam and forms a first imaging result; the second focusing lens focuses the second narrow-band light beam; the second imaging unit collects the focused second narrow-band light beam and forms a second imaging result.
The embodiment of the utility model provides an in, the combination of first light filtering carousel and a plurality of light filters and second light filtering carousel and a plurality of light filters has realized changing the light filter at the formation of image in-process, has solved current narrowband multiband differential imaging system and need install the light filter in advance, can't change the problem of light filter at the formation of image in-process, has improved imaging efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is a schematic structural diagram of a binocular narrow-band multiband confocal imaging system in the prior art;
fig. 2 is a schematic structural diagram of a binocular narrow-band multiband confocal imaging system according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first filter wheel according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a digital micromirror device according to an embodiment of the present invention.
Description of the symbols:
the system comprises a lighting unit-1, a collimating lens-2, a digital micromirror device-3, a first beam splitting lens-4, a dispersion tube lens-5, an objective lens-6, a carrying module-7, a second beam splitting lens-8, a first filtering turntable-9, a first filtering disc-901, a first stepping motor-903, a first focusing lens-11, a first imaging unit-12, a second filtering turntable-13, a second filtering disc-1301, a second stepping motor-1303, a second focusing lens-15, a second imaging unit-16 and a system control unit-17.
Detailed Description
The structure and scenario described in the embodiment of the present application are for more clearly illustrating the technical solution of the embodiment of the present application, and do not form a limitation on the technical solution provided in the embodiment of the present application, and it is known by a person skilled in the art that with the occurrence of a new scenario, the technical solution provided in the embodiment of the present application is also applicable to similar technical problems.
It is noted that, in the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or illustrations. Any embodiment or design described herein as "exemplary" or "e.g.," is not necessarily to be construed as preferred or advantageous over other embodiments or designs. Rather, use of the word "exemplary" or "such as" is intended to present concepts related in a concrete fashion.
The embodiment of the utility model provides a confocal imaging system of two mesh narrowband multiband to solve and change the light filter at the imaging process, the problem of formation of image inefficiency.
Fig. 2 shows an exemplary structure of the binocular narrow-band multi-band confocal imaging system, which comprises a first optical subsystem, a second optical subsystem, a carrier module 7, a first imaging subsystem and a second imaging subsystem. The following details each:
the first optical subsystem includes at least: a lighting unit 1, a collimating lens 2 and a digital micromirror device 3.
In one example, the centers of the illumination unit 1, the collimating lens 2, and the digital micromirror device 3 are on the same line.
The carrier module 7 is used for carrying an object to be measured.
In one example, the carrier module 7 may be embodied as a carrier.
The second optical subsystem includes at least: the objective lens 6, the dispersion tube lens 5, the first light splitting lens 4 and the second light splitting lens 8 are arranged in sequence in a direction away from the carrier module 7, namely in a direction vertically upward when the carrier module 7 is horizontally placed.
In one example, the centers of the objective lens 6, the dispersing tube lens 5, the first dichroic lens 4, and the second dichroic lens 8 are on the same straight line.
The first imaging subsystem includes at least: a first filter turret 9, a first focusing lens 11 and a first imaging unit 12.
In one example, the centers of the first focusing lens 11 and the first imaging unit 12 are on the same straight line.
The second imaging subsystem includes at least: a second filter turret 13, a second focusing lens 15 and a second imaging unit 16.
In one example, the centers of the second focusing lens 15 and the second imaging unit 16 are on the same straight line.
Wherein:
the lighting unit 1 is for generating polychromatic light.
In one example, the lighting unit 1 may be specifically an LED light source, an incandescent lamp, or the like as long as it can emit visible light.
The collimator lens 2 is for collimating the polychromatic light into a polychromatic light beam.
In one example, the collimating lens 2 may be a convex lens, and the parameter setting of the convex lens is related to the spatial position of the lighting unit 1, and the convex lens can collimate the divergent polychromatic light emitted by the lighting unit 1 to form a polychromatic light beam.
The digital micromirror device 3 is used to form a polychromatic light beam into a spot light array.
In one example, the digital micromirror device 3 may be embodied as a DLP2000 digital micromirror device. Referring to fig. 4, the polychromatic light beam irradiates the digital micromirror device 3, and is reflected by the digital micromirror device 3 to form a spot light array. The center of the illumination unit 1, the center of the digital micromirror device 3, and the center of the collimating lens 2 are located on the same straight line.
The central connecting line of the first light splitting lens 4 and the digital micromirror device 3 is not coincident with the target central connecting line, and the target central connecting line is the central connecting line of each component device in the first optical subsystem.
In one example, a person skilled in the art can flexibly design the angle between the central connecting line and the target central connecting line, for example, 30 degrees, 45 degrees, 50 degrees, etc., as long as the central connecting line and the target central connecting line do not overlap, and thus the detailed description is omitted here.
The dispersion tube mirror 5 is used for dispersing the first reflection point light array to obtain a monochromatic point light array; the monochromatic spot light array reaches the carrier module 7 through the objective lens 6, and after being reflected, the monochromatic spot light array serving as imaging light reaches the first light splitting lens 4 through the objective lens 6 and the dispersion tube lens 5.
In one example, the dispersive tube mirror 5 may specifically be a combination of a plurality of different lenses.
The first beam splitting lens 4 is used for transmitting and reflecting the point light array to obtain a first transmission point light array and a first reflection point light array.
In one example, the spot light array is transmitted and reflected by the first beam splitting lens 4 to form a first transmitted spot light array and a first reflected spot light array. The first beam splitting lens 4 may be a half-mirror lens.
The first beam splitting lens 4 is further configured to transmit and reflect incident imaging light, so as to obtain a second transmission point light array and a second reflection point light array.
In one example, the imaging light is transmitted and reflected after passing through the first beam splitting lens 4, forming a second transmission point light array and a second reflection point light array.
The second beam splitting lens 8 is used for transmitting and reflecting the second transmission point light array to obtain a third transmission point light array and a third reflection point light array.
In one example, the second transmissive point light array is transmitted and reflected by the second beam splitting lens 8 to form a third transmissive point light array and a third reflective point light array. The second array of reflected spot light is dissipated as illumination light. The second beam splitting lens 8 may be a half-mirror lens.
The first filter turntable 9 is used for bearing a plurality of filters and can switch any filter to the light path of the third transmission point light array; and the optical filter positioned on the optical path can filter the third transmission point light array to form a first narrow-band light beam.
In one example, a plurality of filters can be simultaneously mounted on the first filter turret 9, and a person skilled in the art can flexibly design the distance between the collimating lens 2 and the digital micromirror device 3. The skilled person can design the number of filters flexibly, e.g. 3,4,5, etc. The first filter turntable 9 can switch any filter to the light path of the third transmission point light array through manual rotation and automatic rotation, so that the third transmission point light array passes through the filter, and the filter filters the third transmission point light array to form a first narrow-band light beam. The size of the light transmission surface of the filter is larger than the sectional area of the third transmission point light array. The wavelength range of the first narrow-band light beam is less than 10nm.
The second filter rotating disc 13 is used for bearing a plurality of filters and can switch any filter to the light path of the third reflection point light array; and the optical filter positioned on the optical path can filter the third reflection point light array to form a second narrow-band light beam.
In one example, a plurality of filters may be simultaneously mounted on the second filter turret 13. The skilled person can design the number of filters flexibly, e.g. 3,4,5, etc. The second filter rotating disc 13 can switch any filter to the light path of the third reflection point light array through manual rotation and automatic rotation, so that the third reflection point light array passes through the filter, and the filter filters the third reflection point light array to form a second narrow-band light beam. The size of the light transmitting surface of the light filter is larger than the sectional area of the third reflection point light array. The wavelength range of the second narrow band light beam is less than 10nm.
The first focusing lens 11 is used to focus the first narrow-band light beam.
In one example, the first focusing lens 11 is adapted to a color camera.
The first imaging unit 12 is used for collecting the focused first narrow-band light beam and forming a first imaging result.
In one example, the first imaging unit 12 may be specifically a color camera (a 2a1920-160 ucBAS) or a black and white camera, as long as it can image, and the color camera or the black and white camera may form the first narrow-band light beam into the first imaging result.
The second focusing lens 15 is used to focus the second narrow-band light beam.
In one example, the second focusing lens 15 is adapted to a color camera.
The second imaging unit 16 is used to collect the focused second narrow-band light beam and form a second imaging result.
In one example, the second imaging unit 16 may be specifically a color camera (a 2a1920-160 ucBAS) or a black and white camera, as long as it can image, and the color camera or the black and white camera may form the second narrow-band light beam into the second imaging result.
The first filter wheel 9 comprises at least: a first filter wheel 901 and a first stepper motor 903.
The first filter wheel 901 is used for carrying a plurality of filters.
Referring to FIG. 3, the first filter wheel 901 is used for carrying a plurality of filters. When the first filter wheel 901 rotates, the first filter wheel 901 may rotate manually, or the first filter wheel 901 may be driven to rotate by the rotation of the first stepper motor 903.
The first stepper motor 903 is connected to the first filter wheel 901, and the first stepper motor 903 is configured to drive the first filter wheel 901 to rotate according to a control signal.
In one example, the first stepper motor 903 receives a control signal to rotate the first filter wheel 901.
In another example, first filter wheel 9 also includes a first motor driver 904, and first motor driver 904 is coupled to first stepper motor 903. The first motor driver 904 receives the control signal and drives the first stepping motor 903 to rotate.
The second filter wheel 13 includes at least: a second filter wheel 1301 and a second stepper motor 1303.
The second filter wheel 1301 is used for carrying a plurality of filters.
Referring to FIG. 3, the second filter wheel 1301 and the first filter wheel 901 have the same structure. The second filter wheel 1301 is used for carrying a plurality of filters. When the second filter wheel 1301 rotates, the second filter wheel 1301 can rotate manually, or the second stepper motor 1303 rotates to drive the second filter wheel 1301 to rotate.
The second stepping motor 1303 is connected to the second filter wheel 1301, and the second stepping motor 1303 is used for driving the second filter wheel 1301 to rotate according to the control signal.
In one example, the second stepper motor 1303 receives the control signal to rotate the second filter wheel 1301.
In another example, second filter wheel 13 also includes a second motor drive 1304, where second motor drive 1304 is coupled to a second stepper motor 1303. The second motor driver 1304 drives the second stepping motor 1303 to rotate after receiving the control signal.
The wavelength bands filtered by the plurality of filters carried by the first filter turntable 9 are different.
Referring to fig. 3, the first filter turret 9 may be installed with 4 filters, and the 4 filters may filter out 4 first narrowband lights with different wavelengths.
The wavelength bands filtered by the plurality of filters carried by the second filter turntable 13 are different.
Referring to fig. 3,4 filters may be installed in the second filter wheel 13, and the 4 filters may filter out 4 first narrowband lights with different wavelengths.
The distance between the focus of the objective lens 6 aiming at the monochromatic point light array and the optical center of the objective lens is Z; wherein Z corresponds to the wavelength of the spot light array.
In one example, the distance Z is a focal length, 4 filters can filter out 4 kinds of narrow-band light with different wavelengths, 4 kinds of monochromatic spot light arrays with different wavelengths are formed by the 4 kinds of narrow-band light with different wavelengths, the 4 kinds of monochromatic spot light arrays with different wavelengths form 4 different focal points after passing through the objective lens 6, and the 4 different focal points have 4 different focal lengths Z from the optical center of the objective lens 6, that is, the 4 kinds of monochromatic spot light arrays with different wavelengths correspond to the 4 different focal lengths Z one to one.
The first dichroic lens 4 includes: a half-mirror lens. The second dichroic lens 8 includes: a half-lens and a half-lens.
In one example, when the spot light array passes through the half-mirror, a part of the spot light array transmits through the half-mirror, and a part of the spot light array is reflected by the half-mirror.
The first dichroic lens 4 further includes: polarizer, polarizing beam splitter and wave plate.
The second dichroic lens 8 further includes: polarizer, polarizing beam splitter and wave plate.
In one example, the wave plate may specifically be a 1/4 wave plate. The point light array is changed into polarized light after passing through the polarizer, and the polarized light is reflected by the polarization spectroscope and then is irradiated on the surface of an object to be imaged after passing through the 1/4 wave plate. And then, the reflected light on the surface of the object to be imaged passes through the 1/4 wave plate to be changed into second polarized light with the polarization difference of 90 degrees with the polarizer, and then the second polarized light passes through the polarization spectroscope.
The straight line of the center of the second imaging subsystem is vertical to the straight line of the center of the second optical subsystem.
The object carrying module 7 is embodied as a three-dimensional moving object carrying table.
In one example, the three-dimensional motion stage may be embodied as a five-axis motor, a six-axis motor. The three-dimensional motion objective table not only can drive the object of waiting to form images and carry out the ascending displacement of horizontal direction and vertical side, can drive moreover and wait to form images the object and rotate.
The first imaging unit 12 includes a camera; the second imaging unit 16 comprises a camera.
In one example, binocular in a binocular narrow band multiband confocal imaging system means including two cameras. Of course, the number of cameras can be flexibly designed by those skilled in the art, for example, 1 camera is a single eye; for example, 3 cameras, namely, three-purpose cameras.
The system control unit 17 is connected to the first stepper motor 903 and the second stepper motor 1303, respectively, and the system control unit 17 is configured to send out a control signal.
In one example, the system control unit 17 may be embodied as a computer or a controller.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principle and implementation of the embodiments of the present invention are explained herein by applying specific examples, and the above descriptions of the embodiments are only used to help understand the method and core ideas of the embodiments of the present invention; meanwhile, for a person skilled in the art, according to the idea of the embodiment of the present invention, there are variations in the specific implementation and application range. In summary, the content of the present specification should not be construed as limiting the embodiments of the present invention.

Claims (10)

1. A binocular narrowband multiband confocal imaging system, comprising:
a first optical subsystem comprising: the device comprises a lighting unit (1), a collimating lens (2) and a digital micromirror device (3); the centers of all the components in the first optical subsystem are on the same straight line;
the object carrying module (7) is used for carrying an object to be measured;
a second optical subsystem comprising: the objective lens (6), the dispersion tube lens (5), the first light splitting lens (4) and the second light splitting lens (8) are sequentially arranged in the direction away from the object carrying module (7); the centers of all the components in the second optical subsystem are on the same straight line;
a first imaging subsystem comprising: a first filter turntable (9), a first focusing lens (11) and a first imaging unit (12); the centers of the first focusing lens (11) and the first imaging unit (12) are on the same straight line;
a second imaging subsystem comprising: a second filter turntable (13), a second focusing lens (15) and a second imaging unit (16); the centers of the second focusing lens (15) and the second imaging unit (16) are on the same straight line;
wherein:
a lighting unit (1) for generating polychromatic light;
a collimating lens (2) for collimating the polychromatic light into a polychromatic light beam;
a digital micromirror device (3) for forming the polychromatic light beam into a spot light array;
the central connecting line of the first light splitting lens (4) and the digital micromirror device (3) is not coincident with the target central connecting line, and the target central connecting line is the central connecting line of each component device in the first optical subsystem;
the dispersion tube mirror (5) is used for dispersing the first reflection point light array to obtain a monochromatic point light array; the monochromatic point light array reaches the object carrying module (7) through the objective lens (6), and after being reflected, the monochromatic point light array serving as an imaging light reaches the first light splitting lens (4) through the objective lens (6) and the dispersion tube lens (5);
the first beam splitting lens (4) is used for: transmitting and reflecting the point light array to obtain a first transmission point light array and a first reflection point light array;
the first beam splitting lens (4) is further configured to: transmitting and reflecting the incident imaging light to obtain a second transmission point light array and a second reflection point light array;
the second beam splitting lens (8) is used for: transmitting and reflecting the second transmission point light array to obtain a third transmission point light array and a third reflection point light array;
the first filtering turntable (9) is used for bearing a plurality of filters and can switch any filter to the light path of the third transmission point light array; the optical filter positioned on the optical path can filter the third transmission point light array to form a first narrow-band light beam;
the second light filtering rotary disc (13) is used for bearing a plurality of light filters and can switch any one light filter to the light path of the third reflection point light array; the optical filter positioned on the optical path can filter the third reflection point light array to form a second narrow-band light beam;
the first focusing lens (11) is used for focusing the first narrow-band light beam;
the first imaging unit (12) is used for collecting the focused first narrow-band light beam and forming a first imaging result;
the second focusing lens (15) is used for focusing the second narrow-band light beam;
the second imaging unit (16) is used for collecting the focused second narrow-band light beam and forming a second imaging result.
2. The binocular narrow band multi-band confocal imaging system of claim 1, wherein the first filter carousel (9) comprises:
a first filter wheel (901) for carrying a plurality of filters;
the first stepping motor (903) is connected with the first filter disc (901) and used for driving the first filter disc (901) to rotate according to a control signal;
the second filter wheel (13) comprises:
the second filter disc (1301) is used for bearing a plurality of filters;
and the second stepping motor (1303) is connected with the second light filtering disc (1301) and is used for driving the second light filtering disc (1301) to rotate according to a control signal.
3. The binocular narrow band multi-band confocal imaging system of claim 1,
the wave bands filtered by a plurality of optical filters carried by the first optical filtering rotary disc (9) are different;
the wavelength bands filtered by a plurality of filters carried by the second filter rotating disc (13) are different.
4. The binocular narrow band multiband confocal imaging system according to claim 1, wherein the objective lens (6) has a distance Z for the focal point of the monochromatic spot light array from its optical center; wherein the Z corresponds to a wavelength of the spot light array.
5. The binocular narrow band multi-band confocal imaging system of claim 1,
the first spectroscope lens (4) includes: a half-transmitting and half-reflecting lens;
the second beam splitting lens (8) includes: a half-lens and a half-lens.
6. The binocular narrow band multi-band confocal imaging system of claim 5,
the first dichroic lens (4) further includes: a polarizer, a polarizing beam splitter and a wave plate;
the second beam splitting lens (8) further comprises: polarizer, polarizing beam splitter and wave plate.
7. The binocular narrow band multi-band confocal imaging system of claim 1, wherein a line along which a center of the second imaging subsystem is located is perpendicular to a line along which a center of the second optical subsystem is located.
8. The binocular narrow band multiband confocal imaging system according to claim 1, wherein the object module (7) is embodied as a three-dimensional moving object stage.
9. The binocular narrow band multiband confocal imaging system of claim 1, wherein the first imaging unit (12) includes a camera; the second imaging unit (16) comprises a camera.
10. The binocular narrowband multiband confocal imaging system of claim 2, comprising:
and the system control unit (17) is respectively connected with the first stepping motor (903) and the second stepping motor (1303) and is used for sending out the control signal.
CN202222906033.5U 2022-11-02 2022-11-02 Binocular narrowband multiband confocal imaging system Active CN218272928U (en)

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