CN218268566U - Current limiting structure, water separator and water draining system of single crystal furnace - Google Patents
Current limiting structure, water separator and water draining system of single crystal furnace Download PDFInfo
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- CN218268566U CN218268566U CN202222706194.XU CN202222706194U CN218268566U CN 218268566 U CN218268566 U CN 218268566U CN 202222706194 U CN202222706194 U CN 202222706194U CN 218268566 U CN218268566 U CN 218268566U
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Abstract
The utility model discloses a current-limiting structure, water knockout drum and water discharge system of single crystal growing furnace, the current-limiting structure includes: the flow limiting piece is provided with a first channel for liquid to flow, a blocking piece is arranged in the first channel, the outer peripheral wall of the blocking piece is connected with the inner peripheral wall of the first channel, and a plurality of spaced flow limiting holes are formed in the blocking piece; and a plurality of adjusting columns are arranged in each flow limiting hole, and the adjusting columns are selectively arranged in the flow limiting holes to block the flow limiting holes. According to the utility model discloses a current-limiting structure adjusts the quantity of post shutoff restricted aperture through control to the liquid flow that the shutoff piece flowed is followed in control, and then the liquid flow that the export of control first passageway flowed. Simultaneously, the setting through restriction spare and regulation post effectively guarantees that the liquid flow who flows from the export of first passageway is stable. In addition, the liquid flow that can flow current-limiting structure outflow is adjusted to the demand precision, and simple structure, convenient operation has higher reliability.
Description
Technical Field
The utility model belongs to the technical field of the crystal growth technique and specifically relates to a water discharge system of current-limiting structure, water knockout drum and single crystal growing furnace is related to.
Background
The crystal needs to grow under lasting high temperature environment, takes away unnecessary heat through the intermediate layer of coolant liquid flow through the single crystal growing furnace cavity usually to the completion is to the protection of operation personnel and single crystal growing furnace itself, because the numerous needs of single crystal growing furnace self part are to each part processing of cooling down respectively, generally realize respectively cooling down each part through setting up the water knockout drum. In the related technology, most of the used water distributors are designed with multi-pass parallel connection and external water valves, the design of the water distributors completely meets the requirements under common products, but the water distributors are rough to crystal growth equipment and equipment with strict crystal growth process requirements, for example, a semiconductor crystal growth furnace has serious influence on the temperature in the furnace due to the size of cooling water flow, and if the water flow is not stable and is small in time, the temperature in a single crystal furnace is influenced, so that the yield of crystals in the furnace is greatly influenced.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a current-limiting structure, the liquid flow that current-limiting structure flowed is stable.
The utility model also provides a water knockout drum, the water knockout drum includes foretell current-limiting structure.
The utility model also provides a water discharge system of single crystal growing furnace, the water discharge system of single crystal growing furnace includes foretell water knockout drum.
According to the utility model discloses current-limiting structure, include: the flow limiting device comprises a flow limiting piece, a first sealing piece and a second sealing piece, wherein the flow limiting piece is provided with a first channel for liquid to flow, a blocking piece is arranged in the first channel, the outer peripheral wall of the blocking piece is connected with the inner peripheral wall of the first channel, and a plurality of spaced flow limiting holes are formed in the blocking piece; the adjusting columns are arranged in the flow limiting holes, and the adjusting columns can be arranged in the flow limiting holes selectively to block the flow limiting holes.
According to the utility model discloses current-limiting structure, current-limiting piece have the first passageway that is used for liquid to flow, are equipped with the shutoff piece in the first passageway, and the periphery wall of shutoff piece and the internal perisporium of first passageway are connected, are equipped with a plurality of spaced apart current-limiting holes on the shutoff piece, and the column is adjusted with shutoff current-limiting hole through the equal optional setting in every current-limiting hole to the liquid flow that the shutoff piece flowed is followed in the control, and then the liquid flow that the export of control first passageway flowed. Simultaneously, the setting through restriction spare and regulation post effectively guarantees that the liquid flow who flows from the export of first passageway is stable. In addition, can be according to the accurate liquid flow that the adjustment current-limiting structure of demand flows, and simple structure, convenient operation has higher reliability.
In some embodiments of the present invention, the one end of the plugging member is provided with a plurality of spaced mounting grooves, each of which is provided with one of the flow-limiting holes on the bottom wall of the mounting groove, the cross-sectional area of the mounting groove is larger than that of the flow-limiting hole, the one end of the adjusting column is provided with a spacing portion, the cross-sectional area of the spacing portion is larger than that of the flow-limiting hole, and the spacing portion is provided in the mounting groove.
In some embodiments of the present invention, the method further comprises: the apron, the apron is located in the first passageway and be located the shutoff piece be equipped with one side of mounting groove, the apron with the laminating of shutoff piece, be equipped with on the apron with a plurality of the through-hole of mounting groove one-to-one and intercommunication.
In some embodiments of the present invention, one of the cover plate and the plugging member is provided with a positioning column, and the other is provided with a positioning hole matched with the positioning column, and the positioning column or the positioning hole is eccentrically arranged with the axis of the first channel.
In some embodiments of the present invention, the blocking element and the flow limiting element are integrally formed.
In some embodiments of the present invention, the system further comprises: the electromagnetic flow meter is connected with the flow limiting piece and provided with a second channel, and an outlet of the second channel is communicated with an inlet of the first channel.
According to the utility model discloses water knockout drum, include: a first manifold; a plurality of water inlet branch pipes, wherein one end of each water inlet branch pipe is connected with the first collecting pipe; in the above flow-limiting structure, the number of the flow-limiting structures is multiple, and the other end of each water inlet branch pipe is connected with the flow-limiting structure.
According to the utility model discloses the water knockout drum sets up into water branch pipe and is a plurality of, and every one end of intaking branch pipe all is connected with first collecting pipe, and the current-limiting structure is a plurality of, and the current-limiting structure is all connected to the other end of every branch pipe of intaking, through the quantity in the regulation post shutoff restricted aperture of controlling every current-limiting structure to the liquid flow that every current-limiting structure flows is controlled, and guarantees that the liquid flow that every current-limiting structure flows is stable. Meanwhile, the liquid flow flowing out of each flow limiting structure can be accurately adjusted according to requirements, so that the liquid flow flowing out of each flow limiting structure of the water separator is different.
The utility model discloses an in some embodiments, every all be equipped with on the inlet branch pipe and be used for controlling the first switch of inlet branch pipe break-make.
In some embodiments of the present invention, the water inlet branch pipes are distributed at intervals along the length direction of the first collecting pipe.
According to the utility model discloses water discharge system of single crystal growing furnace, include: in the water separator, one end of each flow limiting structure, which is far away from the water inlet branch pipe, is communicated with a cooling channel of the single crystal furnace; a second manifold; and the water outlet branch pipes are multiple, one end of each water outlet branch pipe is connected with the second collecting pipe, and the other end of each water outlet branch pipe is communicated with a cooling channel of the single crystal furnace.
According to the utility model discloses water drainage system of single crystal growing furnace, the one end that sets up every current limiting structure and keep away from water inlet branch all communicates with the cooling channel of single crystal growing furnace, water outlet branch is a plurality of, the one end of every water outlet branch all is connected with the second collecting pipe, the other end of every water outlet branch all communicates with the cooling channel of single crystal growing furnace, quantity through the regulation post shutoff restricted aperture of every current limiting structure of control, thereby the liquid flow that every current limiting structure of control flows, it is accurate to guarantee to flow into the liquid flow of the cooling channel of single crystal growing furnace's liquid flow stability, and then guarantee to use the quality of crystal in this water drainage system's the single crystal growing furnace.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a perspective view of a current limiting structure according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of a flow-restricting structure according to an embodiment of the present invention;
FIG. 3 is an enlarged view at A in FIG. 2;
fig. 4 is an exploded view of a current limiting structure according to an embodiment of the present invention;
FIG. 5 is an enlarged view at B in FIG. 4;
FIG. 6 is a cross-sectional view of FIG. 4;
FIG. 7 is an enlarged view at C of FIG. 6;
FIG. 8 is a perspective view of a water drainage system of a single crystal furnace according to an embodiment of the present invention;
FIG. 9 is an elevation view of a water evacuation system of a single crystal furnace according to an embodiment of the present invention;
fig. 10 is an enlarged view at D in fig. 9.
Reference numerals:
1000. a water draining system of the single crystal furnace;
100. a water separator;
1. a current limiting structure; 11. a flow restriction; 111. a first channel; 112. a blocking member; 1121. a flow limiting hole; 1122. mounting grooves; 1123. positioning holes; 12. an adjustment column; 121. a limiting part; 13. a cover plate; 131. a through hole; 132. a positioning column; 14. an electromagnetic flow meter;
2. a first manifold; 21. a second switch; 22. a third switch;
3. a water inlet branch pipe; 31. a first switch;
201. a second manifold; 202. and (4) a water outlet branch pipe.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description of the present invention and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The current limiting structure 1 according to an embodiment of the present invention is described below with reference to the drawings.
As shown in fig. 2 to 5, the current limiting structure 1 according to an embodiment of the present invention includes a current limiting member 11 and an adjusting post 12. The flow limiting piece 11 is provided with a first channel 111 for liquid to flow, a blocking piece 112 is arranged in the first channel 111, the outer peripheral wall of the blocking piece 112 is connected with the inner peripheral wall of the first channel 111, a plurality of flow limiting holes 1121 are formed in the blocking piece 112, a plurality of adjusting columns 12 are arranged, and the adjusting columns 12 are selectively arranged in each flow limiting hole 1121 to block the flow limiting holes 1121.
It can be understood that the liquid flowing into the first channel 111 flows out from the outlet of the first channel 111 after flowing out through the flow restriction holes 1121 which are not blocked, and the amount of the flow restriction holes 1121 which are blocked by the control adjusting column 12 is controlled, so as to control the liquid flow rate flowing out from the blocking member 112, and further control the liquid flow rate flowing out from the outlet of the first channel 111. Meanwhile, the liquid flow flowing out of the outlet of the first channel 111 is effectively prevented from being influenced by the liquid flow flowing into the first channel 111 through the arrangement of the flow limiting piece 11 and the adjusting column 12, and the liquid flow flowing out of the outlet of the first channel 111 is ensured to be stable. In addition, each flow limiting hole 1121 can be selectively plugged by the adjusting column 12, so that the flow of liquid flowing out of the flow limiting structure 1 can be accurately adjusted according to requirements, and the flow limiting structure is simple in structure, convenient to operate and high in reliability.
Further, a blocking member 112 is positioned at the inlet of first passage 111 to ensure that liquid entering first passage 111 first exits through an outlet of first passage 111 after exiting through non-blocked flow-restricting orifice 1121, and this arrangement facilitates operator manipulation to block flow-restricting orifice 1121 or remove flow-restricting orifice 1121 from flow-restricting orifice 12. Further, the flow restriction hole 1121 extends along the length of the first channel 111 to further ensure the flow rate of the liquid flowing out from the blocking member 112.
The flow limiting structure 1 of the present application may be applied to a water draining system 1000 of a single crystal furnace. Specifically, an inlet of the first channel 111 is communicated with an external cooling liquid path, an outlet of the first channel 111 is communicated with an inlet of a cooling channel of the single crystal furnace, cooling liquid flowing into the first channel 111 flows from an outlet of the first channel 111 to the inlet of the cooling channel of the single crystal furnace after flowing out of the flow limiting hole 1121 which is not blocked, and flow stability of the cooling liquid flowing into the cooling channel of the single crystal furnace is achieved through the flow limiting structure 1, so that flow stability of the cooling liquid flowing in the cooling channel of the single crystal furnace is guaranteed, quality of crystals grown in the single crystal furnace is guaranteed, and yield of the crystals is improved. Meanwhile, the flow of the cooling liquid flowing into the cooling channel of the single crystal furnace is accurately adjustable through the matching of the flow limiting piece 11 and the adjusting column 12, and a worker can acquire more data parameters in the crystal growth process according to the flow data of the cooling liquid, so that an engineer can conveniently adjust the crystal growth process.
For example, fifteen spaced flow-limiting holes 1121 are formed in the plugging member 112, when the single crystal rod is grown to reach a certain height, the flow rate of the required cooling liquid is 110ml, the flow rate of each flow-limiting hole 1121 can be obtained according to the flow rate of the external cooling liquid and the cross-sectional area of the flow-limiting hole 1121, and if the flow rate of 11 flow-limiting holes 1121 which can reach 110ml is calculated, four flow-limiting holes 1121 can be respectively sealed by four adjusting columns 12, so that the flow rate requirement of the cooling liquid entering the cooling channel of the single crystal furnace can be met.
According to the utility model discloses current-limiting structure 1, current-limiting piece 11 has the first passageway 111 that is used for liquid to flow, is equipped with shutoff piece 112 in the first passageway 111, and the periphery wall of shutoff piece 112 is connected with the internal perisporium of first passageway 111, is equipped with a plurality of spaced apart restriction orifices 1121 on the shutoff piece 112, through all selectable setting up in every restriction orifice 1121 and adjusting post 12 with shutoff restriction orifice 1121 to control the liquid flow who flows from shutoff piece 112, and then the liquid flow of the export outflow of control first passageway 111. Meanwhile, the flow of the liquid flowing out from the outlet of the first channel 111 is effectively ensured to be stable through the arrangement of the flow-limiting piece 11 and the adjusting column 12. In addition, the liquid flow that can flow-limiting structure 1 outflow is adjusted according to the demand is accurate, and simple structure, convenient operation has higher reliability.
In some embodiments of the present invention, as shown in fig. 4 to fig. 7, one end of the blocking piece 112 is provided with a plurality of spaced mounting grooves 1122, a current limiting hole 1121 is disposed on a bottom wall of each mounting groove 1122, a cross-sectional area of the mounting groove 1122 is greater than a cross-sectional area of the current limiting hole 1121, a limiting portion 121 is disposed at one end of the adjusting column 12, the cross-sectional area of the limiting portion 121 is greater than the cross-sectional area of the current limiting hole 1121, and the limiting portion 121 is disposed in the mounting groove 1122. It can be understood that, in the process that an operator puts the adjusting column 12 into the mounting groove 1122 to block the current-limiting hole 1121, the cross-sectional area through the limiting part 121 is larger than the cross-sectional area of the current-limiting hole 1121, so that the limiting of the adjusting column 12 is realized, the adjusting column 12 is prevented from dropping, the reliability of the current-limiting structure 1 is ensured, in the process that the operator takes the adjusting column 12 out of the mounting groove 1122, the limiting part 121 is arranged so that the operator can take out the adjusting column conveniently, and the assembly efficiency is improved.
In some embodiments of the present invention, as shown in fig. 1 and 5-7, the flow-limiting structure 1 further comprises a cover plate 13. The cover plate 13 is disposed in the first channel 111 and located on one side of the plugging piece 112 where the mounting groove 1122 is disposed, the cover plate 13 is attached to the plugging piece 112, and the cover plate 13 is provided with through holes 131 corresponding to and communicating with the mounting grooves 1122. It can be understood that, the liquid flowing in from the first channel 111 flows out from the outlet of the first channel 111 after passing through the through hole 131 and the flow limiting hole 1121 which is not blocked, the blocking piece 112 can be limited in the length direction of the first channel 111 by the arrangement of the sealing cover, so as to avoid the adjusting column 12 from being separated from the flow limiting hole 1121, so as to ensure the effect of blocking the flow limiting hole 1121 by the adjusting column 12, thereby improving the reliability of the flow limiting structure 1. Meanwhile, during the process of back flushing the flow limiting structure 1, the water flow enters the first passage 111 from the outlet of the first passage 111 and flows out from the inlet of the first passage 111, and the cover plate 13 prevents the adjusting column 12 from being detached from the flow limiting hole 1121.
In some embodiments of the present invention, as shown in fig. 5 and 7, one of the cover plate 13 and the plugging member 112 is provided with a positioning column 132, and the other is provided with a positioning hole 1123 matched with the positioning column 132, and the positioning column 132 or the positioning hole 1123 is eccentrically disposed with respect to the axis of the first channel 111. Therefore, the cover plate 13 and the plugging piece 112 are connected through the matching of the positioning columns 132 and the positioning holes 1123, and the limiting effect of the cover plate 13 on the plugging piece 112 in the length direction of the first channel 111 is further ensured. Meanwhile, the positioning column 132 or the positioning hole 1123 is eccentrically arranged with the axis of the first channel 111, so that the cover plate 13 and the plugging piece 112 are ensured to be connected with the rear flow limiting holes 1121 and the through holes 131 to be aligned one by one, the reliability of the flow limiting structure 1 is ensured, and the assembly efficiency is improved.
In some embodiments of the present invention, the blocking member 112 and the flow limiting member 11 are integrally formed. Therefore, the whole structural strength of the flow limiting piece 11 is improved, the assembly process of the flow limiting structure 1 is simplified, and the assembly efficiency is improved.
In some embodiments of the present invention, as shown in fig. 10, the flow restriction structure 1 further comprises an electromagnetic flow meter 14. Wherein the electromagnetic flow meter 14 is connected to the flow restriction 11, the electromagnetic flow meter 14 having a second passage, an outlet of the second passage communicating with an inlet of the first passage 111. It can be understood that, the liquid flowing into the flow limiting structure 1 flows out from the outlet of the first channel 111 after sequentially passing through the second channel and the first channel 111, when the liquid flow flowing into the flow limiting structure 1 changes, the display numerical value of the electromagnetic flow meter 14 controls the switch of the electromagnetic flow meter 14 to set the flow of the threshold value, so as to realize coarse filtration control of the liquid flow, and then the precise control of the liquid flow is realized through the cooperation of the flow limiting piece 11 and the adjusting column 12, thereby further ensuring the stability and precision of the liquid flow flowing out from the flow limiting structure 1.
Furthermore, one end of the electromagnetic flow meter 14 close to the flow limiting structure 1 is provided with an internal thread, the outer peripheral wall of the flow limiting structure 1 close to one end of the electromagnetic flow meter 14 is provided with an external thread, and the connection between the electromagnetic flow meter 14 and the flow limiting structure 1 is realized through the matching of the internal thread and the external thread so as to realize the communication between the outlet of the second channel and the inlet of the first channel 111.
The water separator 100 of an embodiment of the present invention is described below.
The water separator 100 according to an embodiment of the present invention, as shown in fig. 10, includes a first collecting pipe 2, a water inlet branch pipe 3, and the above-mentioned flow restriction structure 1. Wherein, inlet branch 3 is a plurality of, and the one end of every inlet branch 3 all is connected with first collecting pipe 2, and current-limiting structure 1 is a plurality of, and current-limiting structure 1 is all connected to the other end of every inlet branch 3.
It can be understood that the liquid in the first collecting pipe 2 flows into the plurality of water inlet branch pipes 3 respectively, the liquid in the water inlet branch pipes 3 flows out from the outlets of the flow limiting structure 1 after flowing out through the flow limiting holes 1121 which are not blocked before flowing out from the flow limiting structure 1, and the quantity of the flow limiting holes 1121 is blocked by the control adjusting columns 12, so that the liquid flow rate flowing out from the blocking piece 112 is controlled, and further the liquid flow rate flowing out from the flow limiting structure 1 is controlled. Meanwhile, the liquid flow flowing out of the flow limiting structure 1 is effectively prevented from being influenced by the liquid flow in the first collecting pipe 2 through the arrangement of the flow limiting piece 11 and the adjusting column 12, and the stability of the liquid flow flowing out of the flow limiting structure 1 is guaranteed. In addition, each flow limiting hole 1121 can be selectively blocked by the adjusting column 12, so that the flow rate of the liquid flowing out of each flow limiting structure 1 can be accurately adjusted according to requirements, and different flow rates of the liquid flowing out of each flow limiting structure 1 of the water separator 100 are realized, thereby meeting different requirements of users.
The water separator 100 of the present application may be applied to a water draining system 1000 of a single crystal furnace. Specifically, first collecting pipe 2 and external coolant liquid way intercommunication, every current-limiting structure 1 keep away from the one end of intaking branch pipe 3 all with the cooling channel intercommunication of single crystal growing furnace, the coolant liquid that flows into first collecting pipe 2 flows into a plurality of water inlet branch pipes 3 respectively in, all connect current-limiting structure 1 through every other end of intaking branch pipe 3, and the liquid flow that every current-limiting structure 1 flows out is stable accurate and different to satisfy the cooling demand of the different parts of single crystal growing furnace.
Further, as shown in fig. 10, the flow restriction structure 1 further includes an electromagnetic flow meter 14, the electromagnetic flow meter 14 is connected to the flow restriction 11, the electromagnetic flow meter 14 has a second passage, and an outlet of the second passage communicates with an inlet of the first passage 111. It can be understood that, the liquid in the water inlet branch pipe 3 flows out from the outlet of the first channel 111 after sequentially passing through the second channel and the first channel 111, when the liquid flow flowing into the flow limiting structure 1 changes, the display numerical value of the electromagnetic flow meter 14 controls the switch of the electromagnetic flow meter 14 to set the flow of the threshold value, so as to realize coarse filtration control of the liquid flow, and then the precise control of the liquid flow is realized through the cooperation of the flow limiting piece 11 and the adjusting column 12, thereby further ensuring the stability and precision of the liquid flow flowing out from the flow limiting structure 1.
Furthermore, the first collecting pipe 2 is communicated with an outlet of the liquid supply device, the first collecting pipe 2 is provided with a third switch 22 for controlling the on-off of the first collecting pipe 2 and the liquid supply device, and one end of the first collecting pipe 2, which is far away from the third switch 22, is provided with a second switch 21 for controlling the on-off of the first collecting pipe 2. When the second switch 21 is closed and the third switch 22 is opened, the liquid of the liquid supply device enters the first collecting pipe 2 through the third switch 22 and flows into the plurality of water inlet branch pipes 3 respectively; when the second switch 21 is opened and the third switch 22 is closed, the requirement of the water separator 100 for overhauling or flushing the water separator 100 can be met, and the operation of a user is facilitated.
According to the utility model discloses water knockout drum 100 of an embodiment sets up water inlet branch pipe 3 for a plurality ofly, and every water inlet branch pipe 3's one end all is connected with first collecting pipe 2, and current limiting structure 1 is a plurality of, and current limiting structure 1 is all connected to every water inlet branch pipe 3's the other end, through the quantity of controlling every current limiting structure 1's regulation post 12 shutoff restriction orifice 1121 to control the liquid flow that every current limiting structure 1 flows out, and guarantee that the liquid flow that every current limiting structure 1 flows out is stable. Meanwhile, the liquid flow flowing out of each flow limiting structure 1 can be accurately adjusted according to the requirement, so that the liquid flow flowing out of each flow limiting structure 1 of the water separator 100 is different.
In some embodiments of the present invention, as shown in fig. 10, each water inlet branch pipe 3 is provided with a first switch 31 for controlling the on/off of the water inlet branch pipe 3. It can be understood that the maintenance of the corresponding water inlet branch pipe 3 during the operation of the water separator 100 is accomplished by the first switch 31 disconnecting the communication between the corresponding water inlet branch pipe 3 and the first manifold 2.
Meanwhile, the first switch 31 controls the on-off of the corresponding water inlet branch pipe 3 to realize different water distribution requirements of the water distributor 100, thereby meeting different requirements of users. For example, when the water separator 100 of the present application is applied to the water draining system 1000 of the single crystal furnace, the on-off of the corresponding water inlet branch pipe 3 is controlled by the first switch 31 according to the cooling requirements of different components in the single crystal furnace, so as to cool each component at different time intervals.
In some embodiments of the present invention, as shown in fig. 8 to 10, the plurality of water inlet branch pipes 3 are spaced apart along the length direction of the first collecting pipe 2. Through the arrangement, the first collecting pipe 2 and the plurality of water inlet branch pipes 3 are convenient to assemble, the structure is simple, and the cost is low.
The water draining system 1000 of the single crystal furnace according to the embodiment of the present invention will be described.
The water draining system 1000 of the single crystal furnace according to an embodiment of the present invention, as shown in fig. 8-10, includes the water segregator 100, the second collecting pipe 201, and the water outlet branch pipe 202. Wherein, the one end that every current-limiting structure 1 kept away from into water branch pipe 3 all communicates with the cooling channel of single crystal growing furnace, and it is a plurality of to go out water branch pipe 202, and the one end of every water branch pipe 202 all is connected with second collecting pipe 201, and the other end of every water branch pipe 202 all communicates with the cooling channel of single crystal growing furnace.
It can be understood that the first collecting pipe 2 is communicated with an outlet of the liquid supply device, the second collecting pipe 201 is communicated with an inlet of the liquid supply device, the liquid supply device provides cooling liquid for the first collecting pipe 2, the cooling liquid of the first collecting pipe 2 flows into the plurality of water inlet branch pipes 3 respectively, the cooling liquid in each water inlet branch pipe 3 flows into a corresponding cooling channel of the single crystal furnace through the flow limiting structure 1, so that components in the single crystal furnace are cooled, the cooling liquid in the cooling channel of the single crystal furnace flows out to the water outlet branch pipes 202, and the cooling liquid of each water outlet branch pipe 202 flows out to the liquid supply device after the second collecting pipe 201 is converged, so that circulation of the cooling liquid flowing into the single crystal furnace is realized, and the cooling effect of the water drainage system 1000 of the single crystal furnace on the single crystal furnace is ensured. Meanwhile, the quantity of the flow limiting holes 1121 are blocked by the adjusting columns 12 of each flow limiting structure 1, so that the flow of liquid flowing out of each flow limiting structure 1 is controlled, the flow of liquid flowing into a cooling channel of the single crystal furnace is stable and accurate and is not influenced by secondary distribution, and the quality of crystals in the single crystal furnace of the water discharge system 1000 of the single crystal furnace is further ensured.
Furthermore, the plurality of water outlet branch pipes 202 correspond to the plurality of water inlet branch pipes 3 one by one, and the water outlet branch pipes 202 and the water inlet branch pipes 3 corresponding to one by one are respectively communicated with the same cooling channel of the single crystal furnace, so that the corresponding water inlet branch pipes 3 are controlled to be disconnected by the first switch 31, the selective cooling of different components in the single crystal furnace is met, and the corresponding water inlet branch pipes 3 or the corresponding water outlet branch pipes 202 are convenient to maintain when the water drainage system 1000 of the single crystal furnace operates.
According to the utility model discloses a water discharge system 1000 of single crystal growing furnace, the one end that sets up every current-limiting structure 1 and keep away from into water branch pipe 3 all communicates with the cooling channel of single crystal growing furnace, it is a plurality of to go out water branch pipe 202, the one end of every water branch pipe 202 all is connected with second collecting pipe 201, the other end of every water branch pipe 202 all communicates with the cooling channel of single crystal growing furnace, the quantity through controlling 12 shutoff restriction orifices 1121 of regulation post of every current-limiting structure 1, thereby control the liquid flow that every current-limiting structure 1 flows out, it is accurate to guarantee to flow in the liquid flow of the cooling channel of single crystal growing furnace, and then guarantee to use the quality of the interior crystal of water discharge system 1000's the single crystal growing furnace of this single crystal growing furnace.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A current-limiting structure, comprising:
the flow limiting device comprises a flow limiting piece, a first sealing piece and a second sealing piece, wherein the flow limiting piece is provided with a first channel for liquid to flow, a blocking piece is arranged in the first channel, the outer peripheral wall of the blocking piece is connected with the inner peripheral wall of the first channel, and a plurality of spaced flow limiting holes are formed in the blocking piece;
the adjusting columns are arranged in the flow limiting holes, and the adjusting columns can be arranged in the flow limiting holes selectively to block the flow limiting holes.
2. The flow-limiting structure of claim 1, wherein one end of the blocking member is provided with a plurality of spaced mounting grooves, one flow-limiting hole is formed in a bottom wall of each mounting groove, a cross-sectional area of the mounting groove is larger than that of the flow-limiting hole, one end of the adjusting column is provided with a limiting portion, a cross-sectional area of the limiting portion is larger than that of the flow-limiting hole, and the limiting portion is disposed in the mounting groove.
3. The flow-limiting structure of claim 2, further comprising:
the apron, the apron is located in the first passageway and be located of shutoff piece is equipped with one side of mounting groove, the apron with the laminating of shutoff piece, be equipped with on the apron with a plurality of the through-hole of mounting groove one-to-one and intercommunication.
4. The flow-limiting structure of claim 3, wherein one of the cover plate and the blocking member is provided with a positioning post, and the other one of the cover plate and the blocking member is provided with a positioning hole matched with the positioning post, and the positioning post or the positioning hole is eccentrically arranged with respect to the axis of the first channel.
5. The flow-restricting structure of claim 1, wherein the blocking member and the flow-restricting member are integrally formed.
6. The flow restriction structure of claim 1, further comprising:
the electromagnetic flow meter is connected with the flow limiting piece and provided with a second channel, and an outlet of the second channel is communicated with an inlet of the first channel.
7. A water separator, comprising:
a first manifold;
a plurality of water inlet branch pipes, wherein one end of each water inlet branch pipe is connected with the first collecting pipe;
the flow-restricting structure of any one of claims 1 to 6, wherein the flow-restricting structure is plural, and the other end of each of the water inlet branch pipes is connected to the flow-restricting structure.
8. The water separator according to claim 7, wherein each water inlet branch pipe is provided with a first switch for controlling the on-off of the water inlet branch pipe.
9. The diverter of claim 7, wherein a plurality of the inlet manifolds are spaced apart along the length of the first manifold.
10. A water draining system of a single crystal furnace, comprising:
the water separator of any one of claims 7-9, wherein an end of each flow restricting structure remote from the water inlet branch pipe is communicated with a cooling channel of a single crystal furnace;
a second manifold;
and the plurality of water outlet branch pipes are connected with the second collecting pipe at one end, and the other end of each water outlet branch pipe is communicated with a cooling channel of the single crystal furnace.
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| CN202222706194.XU CN218268566U (en) | 2022-10-13 | 2022-10-13 | Current limiting structure, water separator and water draining system of single crystal furnace |
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| CN202222706194.XU CN218268566U (en) | 2022-10-13 | 2022-10-13 | Current limiting structure, water separator and water draining system of single crystal furnace |
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Address after: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Address before: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20230420 Address after: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 221004 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. |