CN218262736U

CN218262736U - High-temperature double-chamber vacuum deposition furnace with differential pressure control mechanism

Info

Publication number: CN218262736U
Application number: CN202221894484.5U
Authority: CN
Inventors: 何淑英; 何浩梁; 冯嘉荔
Original assignee: Guangzhou Honghao Optoelectronic Semiconductor Co ltd
Current assignee: Guangzhou Honghao Optoelectronic Semiconductor Co ltd
Priority date: 2022-07-21
Filing date: 2022-07-21
Publication date: 2023-01-10
Anticipated expiration: 2032-07-21

Abstract

The utility model discloses a two room vacuum deposition furnaces of high temperature with pressure differential control mechanism of sedimentation furnace technical field, the heating chamber comprises a heating chamber, the inside fixed mounting of heating chamber has the reacting chamber, fixed mounting has the heater between heating chamber and the reacting chamber, the utility model discloses a setting of storage tank in advance can add the gas after mixing into wherein through the air intake pump to through the control of the subassembly that opens and shuts, make the gas mixture in the storage tank in advance enter into the reacting chamber, when the inside atmospheric pressure of reacting chamber produces the change, when atmospheric pressure is too high, can carry during the recovery jar with unnecessary gas, when atmospheric pressure is low excessively, gas in the recovery jar can flow back once more in the reacting chamber, thereby make the inside atmospheric pressure of reacting chamber remain the best reaction state all the time, and when atmospheric pressure changes, the gas of carrying still is the initial gas mixture, consequently can not make the nature of gas change, thereby can not cause the influence to the reaction.

Description

High-temperature double-chamber vacuum deposition furnace with differential pressure control mechanism

Technical Field

The utility model relates to a deposition furnace technical field specifically is a two room vacuum deposition furnaces of high temperature with pressure differential control mechanism.

Background

Chemical Vapor Deposition (CVD), which refers to a process in which chemical gases or vapors react to synthesize coatings or nanomaterials on the surface of a substrate, is the most widely used technique in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metallic materials and metal alloy materials.

The deposition furnace is needed when performing chemical vapor deposition, but the existing deposition furnace has the defects that two or more mixed gases are needed for deposition reaction, and the gas pressure inside the reaction chamber can change during the reaction, so when the pressure difference changes, the traditional method is to directly inject gas into the reaction chamber or exhaust the gas, and the mixing ratio of the gas inside the reaction chamber can be changed, thereby affecting the deposition quality.

Based on this, the utility model designs a two room vacuum deposition furnaces of high temperature with pressure differential control mechanism to solve above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a two room vacuum deposition furnaces of high temperature with pressure differential control mechanism to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above purpose, the utility model provides a following technical scheme: a high-temperature double-chamber vacuum deposition furnace with a differential pressure control mechanism comprises a heating chamber, wherein a reaction chamber is fixedly arranged in the heating chamber, a heater is fixedly arranged between the heating chamber and the reaction chamber, a vertical plate is fixedly arranged on the back surface of the heating chamber, an electric push rod is fixedly arranged at the bottom of the vertical plate, a sealing cover is fixedly arranged at the bottom of the electric push rod, an air pressure sensor is embedded at the bottom of the sealing cover, a pre-storage tank is fixedly arranged on the left side of the heating chamber, and a recovery tank is fixedly arranged on the right side of the heating chamber;

an adding pipe is communicated with the right side of the top of the pre-storage tank, the other end of the adding pipe is communicated with the reaction chamber, an opening and closing assembly is fixedly mounted on the inner wall of the adding pipe, an air inlet pump is communicated with the left side of the top of the pre-storage tank, an air exhaust end of the air inlet pump is communicated with an inflation pipe, and the other end of the inflation pipe is communicated with the pre-storage tank;

the inner wall fixed mounting who retrieves the jar has the baffle, the bottom fixed mounting who retrieves the jar inner chamber has circulating air pump, circulating air pump's inlet end intercommunication has the exhaust tube, the other end and the baffle intercommunication of exhaust tube, circulating air pump's exhaust end intercommunication has the circulating pipe, the other end and the storage tank intercommunication in advance of circulating air pump, the right side fixed mounting who retrieves the tank deck portion has the vacuum pump, the inlet end intercommunication of vacuum pump has the vacuum tube, the left end and the reacting chamber intercommunication of vacuum tube, the bottom intercommunication of vacuum tube has the back flow, the bottom and the recovery jar intercommunication of back flow.

Preferably, a first electromagnetic valve is fixedly mounted on the surface of the inflation pipe, a second electromagnetic valve is fixedly mounted on the surface of the exhaust pipe, and a third electromagnetic valve is fixedly mounted on the surface of the return pipe.

Preferably, a first one-way valve is fixedly mounted on the surface of the circulating pipe, and the first one-way valve is arranged in a left-out and right-in mode.

Preferably, a second one-way valve is fixedly mounted on the surface of the vacuum tube, and the second one-way valve is arranged in a left-in and right-out mode.

Preferably, the opening and closing assembly comprises a hollow pipe, an inner cavity of the hollow pipe is connected with a mandril in a sliding mode, the inner wall of the mandril is connected with a lead screw in a threaded mode, a micro motor is fixedly installed on the left side of the inner cavity of the hollow pipe, an output shaft of the micro motor is fixedly installed on the left side of the lead screw, and a sealing plate is fixedly installed on the right side of the mandril.

Preferably, a metal sealing ring is fixedly mounted on the left side of the sealing plate, and the left side of the metal sealing ring is attached to the right side of the adding pipe.

Preferably, the cross-sectional shapes of the hollow tube and the ejector rod are rectangular, the top and the bottom of the hollow tube are welded with fixing blocks, and the fixing blocks are fixedly installed on the inner wall of the adding tube.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a setting of storage tank in advance, can add the gas after mixing into wherein through the pump that admits air, and the control through the subassembly that opens and shuts, make the mist in the storage tank in advance enter into the reacting chamber, when the inside atmospheric pressure of reacting chamber produces the change, when atmospheric pressure is too high, can carry unnecessary gas in the recovery jar, when atmospheric pressure is low excessively, gas in the recovery jar can flow back again in the reacting chamber, thereby make the inside atmospheric pressure of reacting chamber remain the best reaction state all the time, and in the atmospheric pressure change, the gas of carrying still is the mixed gas at first, consequently, can not make gaseous nature change, thereby can not lead to the fact the influence to the reaction.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front sectional view of the feeding tube of the present invention;

FIG. 3 is a schematic perspective view of the hollow tube and the post rod of the present invention;

fig. 4 is a partial front sectional view of the recycling tank of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1. a heating chamber; 2. a reaction chamber; 3. a heater; 4. a vertical plate; 5. an electric push rod; 6. a sealing cover; 7. an air pressure sensor; 8. pre-storage tank; 9. a recovery tank; 10. an addition pipe; 11. an opening and closing component; 111. a hollow tube; 112. a top rod; 113. a screw rod; 114. a micro motor; 115. sealing plates; 12. an intake pump; 13. an inflation tube; 14. a partition plate; 15. a circulating air pump; 16. an air exhaust pipe; 17. a circulation pipe; 18. a vacuum pump; 19. a vacuum tube; 20. a return pipe; 21. a first solenoid valve; 22. a second solenoid valve; 23. a third solenoid valve; 24. a first check valve; 25. a second one-way valve; 26. a metal seal ring; 27. and (5) fixing blocks.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person skilled in the art without creative work belong to the scope of protection of the present invention based on the embodiments of the present invention.

Example one

Referring to the drawings, the utility model provides a technical scheme: a high-temperature double-chamber vacuum deposition furnace with a differential pressure control mechanism comprises a heating chamber 1, a reaction chamber 2 is fixedly installed inside the heating chamber 1, a heater 3 is fixedly installed between the heating chamber 1 and the reaction chamber 2, a vertical plate 4 is fixedly installed on the back of the heating chamber 1, an electric push rod 5 is fixedly installed at the bottom of the vertical plate 4, a sealing cover 6 is fixedly installed at the bottom of the electric push rod 5, an air pressure sensor 7 is embedded at the bottom of the sealing cover 6, a pre-storage tank 8 is fixedly installed on the left side of the heating chamber 1, and a recovery tank 9 is fixedly installed on the right side of the heating chamber 1;

the right side of the top of the pre-storage tank 8 is communicated with an adding pipe 10, the other end of the adding pipe 10 is communicated with the reaction chamber 2, an opening and closing assembly 11 is fixedly mounted on the inner wall of the adding pipe 10, the left side of the top of the pre-storage tank 8 is communicated with an air inlet pump 12, the exhaust end of the air inlet pump 12 is communicated with an inflation pipe 13, and the other end of the inflation pipe 13 is communicated with the pre-storage tank 8;

the inner wall fixed mounting of recovery tank 9 has baffle 14, the bottom fixed mounting of recovery tank 9 inner chamber has circulating air pump 15, circulating air pump 15's inlet end intercommunication has exhaust tube 16, the other end and the baffle 14 intercommunication of exhaust tube 16, circulating air pump 15's exhaust end intercommunication has circulating pipe 17, circulating pipe 17's the other end and prestorage tank 8 intercommunication, the right side fixed mounting at recovery tank 9 top has vacuum pump 18, vacuum pump 18's inlet end intercommunication has vacuum tube 19, vacuum tube 19's left end and reacting chamber 2 intercommunication, vacuum tube 19's bottom intercommunication has back flow 20, the bottom and the recovery tank 9 intercommunication of back flow 20.

Specifically, a first solenoid valve 21 is fixedly mounted on the surface of the inflation tube 13, a second solenoid valve 22 is fixedly mounted on the surface of the suction tube 16, and a third solenoid valve 23 is fixedly mounted on the surface of the return tube 20.

Specifically, a first one-way valve 24 is fixedly mounted on the surface of the circulating pipe 17, and the first one-way valve 24 is arranged in a left-out and right-in mode.

Specifically, a second one-way valve 25 is fixedly mounted on the surface of the vacuum tube 19, and the second one-way valve 25 is arranged in a left-in and right-out mode.

Specifically, the opening and closing assembly 11 comprises a hollow tube 111, a push rod 112 is slidably connected to an inner cavity of the hollow tube 111, a lead screw 113 is connected to the inner wall of the push rod 112 in a threaded manner, a micro motor 114 is fixedly mounted on the left side of the inner cavity of the hollow tube 111, an output shaft of the micro motor 114 is fixedly mounted on the left side of the lead screw 113, and a sealing plate 115 is fixedly mounted on the right side of the push rod 112.

The working principle of the embodiment is as follows: the sealing cover 6 is closed through the electric push rod 5, the second electromagnetic valve 22 and the sealing plate 115 are in an open state at the moment, then the vacuum pump 18 pumps the gas in the reaction chamber 2, the pre-storage tank 8 and the recovery tank 9 to be in a vacuum state, after the pumping is finished, the vacuum pump 18 is closed, due to the action of the second one-way valve 25, the external gas cannot flow back to the reaction chamber 2 through the vacuum pipe 19, at the moment, the gas inlet pump 12 and the first electromagnetic valve 21 are opened, the sealing plate 115 is in an open state, the rest valves are in a closed state, then the mixed gas is pumped into the pre-storage tank 8 and the reaction chamber 2 through the gas inlet pump 12, after a sufficient amount of gas is pumped, the gas inlet pump 12 and the first electromagnetic valve 21 are closed, the sealing plate 115 is in a closed state, and at the moment, the gas pressure sensor 7 is opened to monitor the pressure condition of the gas in the reaction chamber 2 in real time;

in the reaction process, if the air pressure is greater than the preset value, the air pressure sensor 7 can be triggered, the second electromagnetic valve 22 is in an open state, and the interior of the recovery tank 9 is in a vacuum state, so that the air is not required to be pumped by the circulating air pump 15, the gas in the reaction chamber 2 enters the recovery tank 9 under the action of the air pressure difference, and the second electromagnetic valve 22 is closed until the air pressure in the reaction chamber 2 returns to a normal value, and the reaction is normally carried out;

in the process of reaction, if the air pressure is less than the preset value, the air pressure sensor 7 is triggered, at this time, the third electromagnetic valve 23 and the circulating air pump 15 are started, and the sealing plate 115 is in an open state, the circulating air pump 15 pumps the air in the recovery tank 9 and conveys the air into the pre-storage tank 8 through the circulating pipe 17, because the air is continuously conveyed, the air in the pre-storage tank 8 enters the reaction chamber 2 through the adding pipe 10, and because the second electromagnetic valve 22 is in a closed state, the air pressure in the reaction chamber 2 is gradually increased, so that the air pressure gradually returns to a normal value, when the air pressure in the reaction chamber 2 returns to the normal value, the sealing plate 115 is closed, the circulating air pump 15 and the third electromagnetic valve 23 are in a closed state, and then the reaction is normally carried out;

it should be noted that: the closing and opening of the sealing plate 115 are controlled by the micro motor 114, the output shaft of the micro motor 114 can drive the screw rod 113 to rotate, and the surface of the screw rod 113 and the inner wall of the ejector rod 112 are in a threaded connection state, so that the ejector rod 112 can be driven to move when the screw rod 113 rotates, and the sealing plate 115 is driven to open and close under the action of the ejector rod 112;

in the device, the setting of first check valve 24 can prevent that the gas in the storage tank 8 from entering into recovery tank 9 in advance to because first check valve 24 advances the setting for the left-hand outlet right-hand, consequently when circulating air pump 15 starts, can carry gas through circulating pipe 17 in advance storage tank 8, the compensation of atmospheric pressure is the initial mixed gas who injects in the device, in whole compensation process, there is not the joining of other gases, consequently can guarantee reactant's purity, thereby can not cause the influence to the reaction process.

Example two

The structure of this embodiment is basically the same as that of the first embodiment, except that the metal seal ring 26 is fixedly mounted on the left side of the sealing plate 115, the left side of the metal seal ring 26 is attached to the right side of the addition pipe 10, and the gap between the addition pipe 10 and the sealing plate 115 can be sealed by the metal seal ring 26 to improve the sealing performance, and the metal seal ring 26 can prevent the aging phenomenon because the inside of the reaction chamber 2 is in a high temperature state, so that the sealing performance is always in an optimal state, and the leakage is avoided.

EXAMPLE III

The structure of this embodiment is basically the same as that of the first embodiment, except that, the cross-sectional shapes of the hollow tube 111 and the ejector rod 112 are both rectangular, the top and the bottom of the hollow tube 111 are both welded with the fixing blocks 27, the fixing blocks 27 are fixedly mounted on the inner wall of the adding tube 10, the cross-sectional shapes of the hollow tube 111 and the ejector rod 112 are both rectangular, the lead screw 113 can be prevented from rotating, the ejector rod 112 rotates along with the lead screw 113, and the ejector rod 112 can also slide in the hollow tube 111, so as to satisfy the condition of driving the sealing plate 115 to move.

In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the present invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A high-temperature double-chamber vacuum deposition furnace with a differential pressure control mechanism comprises a heating chamber (1), and is characterized in that: the reaction chamber (2) is fixedly installed inside the heating chamber (1), the heater (3) is fixedly installed between the heating chamber (1) and the reaction chamber (2), a vertical plate (4) is fixedly installed on the back face of the heating chamber (1), an electric push rod (5) is fixedly installed at the bottom of the vertical plate (4), a sealing cover (6) is fixedly installed at the bottom of the electric push rod (5), an air pressure sensor (7) is embedded at the bottom of the sealing cover (6), a pre-storage tank (8) is fixedly installed on the left side of the heating chamber (1), and a recovery tank (9) is fixedly installed on the right side of the heating chamber (1);

the right side of the top of the pre-storage tank (8) is communicated with an adding pipe (10), the other end of the adding pipe (10) is communicated with the reaction chamber (2), an opening and closing assembly (11) is fixedly mounted on the inner wall of the adding pipe (10), the left side of the top of the pre-storage tank (8) is communicated with an air inlet pump (12), the exhaust end of the air inlet pump (12) is communicated with an air charging pipe (13), and the other end of the air charging pipe (13) is communicated with the pre-storage tank (8);

the inner wall fixed mounting who retrieves jar (9) has baffle (14), the bottom fixed mounting who retrieves jar (9) inner chamber has circulating air pump (15), the inlet end intercommunication of circulating air pump (15) has exhaust tube (16), the other end and baffle (14) intercommunication of exhaust tube (16), the exhaust end intercommunication of circulating air pump (15) has circulating pipe (17), the other end and the storage tank (8) intercommunication in advance of circulating pipe (17), the right side fixed mounting who retrieves jar (9) top has vacuum pump (18), the inlet end intercommunication of vacuum pump (18) has vacuum tube (19), the left end and the reacting chamber (2) intercommunication of vacuum tube (19), the bottom intercommunication of vacuum tube (19) has back flow (20), the bottom and the recovery jar (9) intercommunication of back flow (20).

2. The high temperature dual chamber vacuum deposition furnace with differential pressure control mechanism of claim 1, wherein: the surface of the air charging pipe (13) is fixedly provided with a first electromagnetic valve (21), the surface of the air suction pipe (16) is fixedly provided with a second electromagnetic valve (22), and the surface of the return pipe (20) is fixedly provided with a third electromagnetic valve (23).

3. The high temperature dual chamber vacuum deposition furnace with differential pressure control mechanism of claim 1, wherein: the surface of the circulating pipe (17) is fixedly provided with a first one-way valve (24), and the first one-way valve (24) is arranged in a left-out and right-in mode.

4. The high temperature dual chamber vacuum deposition furnace with differential pressure control mechanism of claim 1, wherein: and a second one-way valve (25) is fixedly arranged on the surface of the vacuum tube (19), and the second one-way valve (25) is arranged in a left-in and right-out mode.

5. The high temperature dual chamber vacuum deposition furnace with differential pressure control mechanism of claim 1, wherein: the opening and closing assembly (11) comprises a hollow pipe (111), an inner cavity of the hollow pipe (111) is connected with a push rod (112) in a sliding mode, the inner wall of the push rod (112) is connected with a screw rod (113) in a threaded mode, a micro motor (114) is fixedly installed on the left side of the inner cavity of the hollow pipe (111), an output shaft of the micro motor (114) is fixedly installed on the left side of the screw rod (113), and a sealing plate (115) is fixedly installed on the right side of the push rod (112).

6. The high temperature dual chamber vacuum deposition furnace with differential pressure control mechanism of claim 5, wherein: the left side fixed mounting of closing plate (115) has metal sealing washer (26), the left side of metal sealing washer (26) and the right side laminating of interpolation pipe (10).

7. The high temperature dual chamber vacuum deposition furnace with differential pressure control mechanism of claim 5, wherein: the cross sectional shape of hollow tube (111) and ejector pin (112) is the rectangle setting, fixed block (27) have all been welded to the top and the bottom of hollow tube (111), fixed block (27) fixed mounting is at the inner wall that adds pipe (10).