CN218254224U - Grinding device is used in semiconductor aluminum plate production - Google Patents

Grinding device is used in semiconductor aluminum plate production Download PDF

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Publication number
CN218254224U
CN218254224U CN202222211758.2U CN202222211758U CN218254224U CN 218254224 U CN218254224 U CN 218254224U CN 202222211758 U CN202222211758 U CN 202222211758U CN 218254224 U CN218254224 U CN 218254224U
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China
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threaded rod
aluminum plate
fixed mounting
storehouse body
polishing
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CN202222211758.2U
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Chinese (zh)
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华巍
赵海龙
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Jiangsu Xinhang Oriental Technology Co ltd
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Jiangsu Xinhang Oriental Technology Co ltd
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Abstract

The utility model relates to a grinding device is used in semiconductor aluminum plate production, including the storehouse body, the top fixed mounting of the storehouse body has the support body, the interior roof of support body is provided with grinding machanism, the inside of the storehouse body is provided with the moving mechanism that runs through and extend to storehouse body top, moving mechanism's top is provided with collects the mechanism, the top of collecting the mechanism is provided with positioning mechanism, moving mechanism includes first threaded rod, the left side of first threaded rod is rotated and is connected in the inner wall left side of the storehouse body, the right side of first threaded rod is rotated and is connected on the inner wall right side of the storehouse body. This grinding device is used in semiconductor aluminum plate production through setting up moving mechanism, not only is convenient for drive aluminum plate and removes, and stability is good moreover, has reduced the condition emergence that removes when polishing, has improved the efficiency of polishing, has reduced the influence that causes the aluminum plate quality to possess the advantage of high-efficient polishing, made things convenient for the use.

Description

Grinding device is used in production of semiconductor aluminum plate
Technical Field
The utility model relates to an aluminum plate production technical field specifically is a semiconductor aluminum plate is grinding device for production.
Background
Etching is a very important step in semiconductor manufacturing process, microelectronic IC manufacturing process and micro-nano manufacturing process, and is a main process of graphical processing associated with photoetching.
When aluminum plate produces, need use grinding device to polish aluminum plate, the staff fixes a position aluminum plate earlier, then opens grinding machanism and polishes aluminum plate, though current grinding device is convenient for drive aluminum plate and removes about, can polish to the position that aluminum plate is different, but stability is not good, can take place to remove when polishing, has reduced the efficiency of polishing, has influenced the aluminum plate quality, needs improve.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art, the utility model provides a semiconductor aluminum plate is grinding device for production possesses the high efficiency and polishes etc. and advantage has solved current grinding device and has been convenient for drive aluminum plate and has controlled, can polish to the position that aluminum plate is different, but stability is not good, can take place to remove when polishing, has reduced the efficiency of polishing, has influenced the problem of aluminum plate quality.
In order to achieve the above purpose, the utility model provides a following technical scheme: a polishing device for semiconductor aluminum plate production comprises a bin body, wherein a frame body is fixedly mounted at the top of the bin body, a polishing mechanism is arranged on the inner top wall of the frame body, a moving mechanism penetrating through and extending above the bin body is arranged inside the bin body, a collecting mechanism is arranged at the top of the moving mechanism, and a positioning mechanism is arranged at the top of the collecting mechanism;
moving mechanism includes first threaded rod, the left side of first threaded rod is rotated and is connected in the inner wall left side of the storehouse body, the right side of first threaded rod is rotated and is connected on the inner wall right side of the storehouse body, the interior diapire of the storehouse body is rotated and is installed the worm that one end runs through and extends to storehouse body top, the outside fixed mounting of first threaded rod has the worm wheel that meshes mutually with the worm, the outside of first threaded rod just is located the left side screw thread of worm wheel and installs the thread bush that quantity is two, two the thread bush all with first threaded rod phase-match, the top fixed mounting of thread bush has the removal post, two the top of removing the post all runs through the storehouse body and with collection mechanism fixed connection.
Further, grinding machanism includes electric putter, electric putter fixed connection is at the interior roof of support body, electric putter's output fixed mounting has the motor, the output fixed mounting of motor has the connecting rod, the bottom fixed mounting of connecting rod has the mill of polishing.
Furthermore, the first threaded rod and the worm are rotatably connected with the bin body through bearings, and a hand wheel is fixedly mounted at the top of the worm.
Furthermore, a limiting groove is formed in the inner bottom wall of the bin body, two limiting rods with one ends extending to the inner parts of the limiting grooves are fixedly mounted at the bottoms of the thread sleeves, the limiting grooves are matched with the moving ranges of the two limiting rods, a moving hole is formed in the top of the bin body, and the moving hole is matched with the moving ranges of the two moving columns.
Further, collect the mechanism and include the box, two the top of removal post all with box fixed connection, the inside fixed mounting of box has the filter screen, the inner diapire fixed mounting of box has the air pump.
Further, the front of box inlays and is equipped with the chamber door, the suction hole that quantity is a plurality of is seted up at the top of box, the air inlet intercommunication of air pump has the intake pipe, the gas outlet intercommunication of air pump has one end to run through and extend to the left outlet duct of box.
Further, positioning mechanism includes that quantity is two risers, two the equal fixed connection of riser is at the top of box, the relative one side fixed mounting of riser has the diaphragm, the relative one side of riser and the top fixed mounting who is located the diaphragm have the mounting panel, the top screw thread of mounting panel is installed one end and is run through and extend to the second threaded rod of mounting panel below, the bottom fixed mounting of second threaded rod has the locating plate.
Further, the top fixed mounting of second threaded rod has the knob, the screw hole is seted up at the top of mounting panel, screw hole and second threaded rod phase-match.
Compared with the prior art, the technical scheme of the application has the following beneficial effects:
1. this grinding device is used in semiconductor aluminum plate production through setting up moving mechanism, not only is convenient for drive aluminum plate and removes, and stability is good moreover, has reduced the condition emergence that removes when polishing, has improved the efficiency of polishing, has reduced the influence that causes the aluminum plate quality to possess the advantage of high-efficient polishing, made things convenient for the use.
2. This grinding device is used in semiconductor aluminum plate production collects mechanism and positioning mechanism through setting up, and positioning mechanism carries out the centre gripping with aluminum plate, and the piece that produces when polishing drifts down the top of collecting the mechanism, then collects the mechanism and inhales the inside of collecting the mechanism with the piece, has reduced the pollution that the piece caused to the environment, has alleviateed the clearance burden to possess and collect clastic advantage, made things convenient for the use.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of the point A of FIG. 1 according to the present invention;
fig. 3 is a front view of the present invention.
In the figure: 1 storehouse body, 2 support bodies, 3 grinding mechanism, 4 moving mechanism, 41 first threaded rod, 42 worm, 421 hand wheel, 43 worm wheel, 44 thread bush, 45 removal post, 5 collection mechanism, 51 box, 52 filter screens, 53 air pump, 6 positioning mechanism, 61 riser, 62 diaphragm, 63 mounting panel, 64 second threaded rod, 641 knob, 65 locating plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the polishing device for semiconductor aluminum plate production in the present embodiment includes a bin body 1, a frame body 2 is fixedly mounted on the top of the bin body 1, a polishing mechanism 3 is disposed on an inner top wall of the frame body 2, a moving mechanism 4 penetrating and extending above the bin body 1 is disposed inside the bin body 1, a collecting mechanism 5 is disposed on the top of the moving mechanism 4, and a positioning mechanism 6 is disposed on the top of the collecting mechanism 5;
moving mechanism 4 includes first threaded rod 41, the left side of first threaded rod 41 is rotated and is connected on the inner wall left side of the storehouse body 1, the right side of first threaded rod 41 is rotated and is connected on the inner wall right side of the storehouse body 1, the interior diapire of the storehouse body 1 is rotated and is installed the worm 42 that one end runs through and extends to storehouse body 1 top, the outside fixed mounting of first threaded rod 41 has the worm wheel 43 who meshes mutually with worm 42, the outside of first threaded rod 41 and the left side screw thread that is located worm wheel 43 install quantity be two thread bush 44, two thread bush 44 all with first threaded rod 41 phase-match, the top fixed mounting of thread bush 44 has removal post 45, the storehouse body 1 is all run through and 5 fixed connection with collection mechanism in the top of two removal posts 45.
It is specific, through rotating worm 42, worm 42 drives worm wheel 43 and rotates, worm wheel 43 drives first threaded rod 41 and rotates, first threaded rod 41 drives two thread bushings 44 and moves left simultaneously or moves right simultaneously, two thread bushings 44 can drive collection mechanism 5 through two removal posts 45, positioning mechanism 6 and aluminum plate move, be convenient for polish to the position of aluminum plate left and right sides difference, because worm 42 and worm wheel 43 have self-locking function, not only be convenient for drive aluminum plate and remove about, and stability is good, the condition that has reduced when polishing and has removed takes place, the efficiency of polishing has been improved, the influence that causes the aluminum plate quality has been reduced.
In this embodiment, grinding machanism 3 includes electric putter, electric putter fixed connection is at the interior roof of support body 2, electric putter's output fixed mounting has the motor, the output fixed mounting of motor has the connecting rod, the bottom fixed mounting of connecting rod has the polishing dish, through opening the motor, the motor drives the connecting rod and the dish of polishing rotates, through opening electric putter, electric putter drives the polishing dish and removes downwards, makes the polishing dish polish to aluminum plate's top.
In this embodiment, the first threaded rod 41 and the worm 42 are both rotatably connected to the bin body 1 through a bearing, a hand wheel 421 is fixedly mounted on the top of the worm 42, and the hand wheel 421 is rotated to drive the worm 42 to rotate.
In this embodiment, the spacing groove has been seted up to the inner diapire of the storehouse body 1, the equal fixed mounting in bottom of two thread bush 44 has one end to extend to the gag lever post of the inside of spacing groove, the displacement range phase-match of spacing groove and two gag lever posts, two thread bush 44 drive two gag lever posts when removing and move in the inside of spacing groove, can make two thread bush 44 remove more steadily, the removal hole has been seted up at the top of the storehouse body 1, the displacement range phase-match of removal hole and two removal posts 45, two removal posts 45 extend to the top of the storehouse body 1 through removing the hole.
In this embodiment, collection mechanism 5 includes box 51, the top of two removal posts 45 all with box 51 fixed connection, the inside fixed mounting of box 51 has filter screen 52, the interior diapire fixed mounting of box 51 has air pump 53, through opening air pump 53, the inside of box 51 is inhaled to the piece at box 51 top, filter screen 52 filters the piece, the air after the filtration passes through air pump 53 and discharges the outside, the pollution that the piece led to the fact to the environment has been reduced, the clearance burden has been lightened.
In this embodiment, the chamber door has been inlayed in the front of box 51, be provided with the sealing washer between chamber door and the box 51, the leakproofness of box 51 has been strengthened, quantity is a plurality of suction holes seted up at the top of box 51, the piece inhales the inside of box 51 through a plurality of suction holes, air pump 53's air inlet intercommunication has the intake pipe, the inside of air pump 53 is inhaled through the intake pipe to the air after filtering, air pump 53's gas outlet intercommunication has one end to run through and extends to the left outlet duct of box 51, the outside of box 51 is discharged through the outlet duct to the air after filtering.
In this embodiment, positioning mechanism 6 includes that quantity is two riser 61, the equal fixed connection of two riser 61 is at the top of box 51, one side fixed mounting that riser 61 is relative has diaphragm 62, one side that riser 61 is relative and the top fixed mounting that is located diaphragm 62 has mounting panel 63, the top screw thread of mounting panel 63 is installed one end and is run through and extend to the second threaded rod 64 of mounting panel 63 below, the bottom fixed mounting of second threaded rod 64 has locating plate 65, place aluminum plate at the top of two diaphragm 62 earlier, then rotate two second threaded rod 64, two second threaded rod 64 move downwards in the inside of two mounting panels 63, two mounting panels 63 drive two locating plates 65 and move downwards, can fix a position aluminum plate.
In this embodiment, a knob 641 is fixedly mounted at the top of the second threaded rod 64, the knob 641 is rotated to drive the second threaded rod 64 to rotate in a shape-entering manner, a threaded hole is formed in the top of the mounting plate 63, the threaded hole is matched with the second threaded rod 64, and the second threaded rod 64 can move upwards or downwards in the mounting plate 63 through the threaded hole.
The working principle of the above embodiment is as follows:
(1) An operator firstly places an aluminum plate on the tops of the two transverse plates 62, then rotates the two knobs 641 to drive the two second threaded rods 64 to rotate, the two second threaded rods 64 move downwards in the two mounting plates 63, the two mounting plates 63 drive the two positioning plates 65 to move downwards, the aluminum plate can be positioned, the air pump 53 is started firstly, then the motor is started, the motor drives the connecting rod and the polishing disc to rotate, finally, the electric push rod is started, the electric push rod drives the polishing disc to move downwards, so that the polishing disc polishes the tops of the aluminum plates, chips generated by polishing fall onto the top of the box body 51 and are sucked into the box body 51 through the plurality of air suction holes, the filter screen 52 filters the chips, filtered air is discharged to the outside through the air pump 53, the pollution of the chips to the environment is reduced, the cleaning burden is reduced, and the advantage of collecting the chips is achieved, and the use is facilitated;
(2) The staff rotates hand wheel 421 earlier and drives worm 42 and rotate, worm 42 drives worm wheel 43 and rotates, worm wheel 43 drives first threaded rod 41 and rotates, first threaded rod 41 drives two thread bush 44 and removes or remove right simultaneously leftwards simultaneously, two thread bush 44 can drive collection mechanism 5 through two removal posts 45, positioning mechanism 6 and aluminum plate remove, be convenient for polish to the position of aluminum plate left and right sides difference, because worm 42 and worm wheel 43 have self-locking function, not only be convenient for drive aluminum plate and remove about, and stability is good, the condition that has reduced when polishing and has removed takes place, the efficiency of polishing has been improved, the influence that causes the aluminum plate quality has been reduced, thereby possess the advantage of high-efficient polishing, and convenient use.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The utility model provides a grinding device is used in production of semiconductor aluminum plate, includes storehouse body (1), its characterized in that: a rack body (2) is fixedly mounted at the top of the bin body (1), a polishing mechanism (3) is arranged on the inner top wall of the rack body (2), a moving mechanism (4) which penetrates through and extends above the bin body (1) is arranged inside the bin body (1), a collecting mechanism (5) is arranged at the top of the moving mechanism (4), and a positioning mechanism (6) is arranged at the top of the collecting mechanism (5);
moving mechanism (4) include first threaded rod (41), the left side of first threaded rod (41) is rotated and is connected on the inner wall left side of the storehouse body (1), the right side of first threaded rod (41) is rotated and is connected on the inner wall right side of the storehouse body (1), the interior diapire of the storehouse body (1) is rotated and is installed one end and run through and extend to worm (42) of the storehouse body (1) top, the outside fixed mounting of first threaded rod (41) has worm wheel (43) that meshes with worm (42) mutually, the outside of first threaded rod (41) and the left side screw thread that is located worm wheel (43) install quantity be two thread bush (44), two thread bush (44) all with first threaded rod (41) phase-match, the top fixed mounting of thread bush (44) has removal post (45), two the top of removal post (45) all runs through storehouse body (1) and with collection mechanism (5) fixed connection.
2. The polishing device for semiconductor aluminum plate production as set forth in claim 1, wherein: grinding machanism (3) include electric putter, electric putter fixed connection is at the interior roof of support body (2), electric putter's output fixed mounting has the motor, the output fixed mounting of motor has the connecting rod, the bottom fixed mounting of connecting rod has the polishing dish.
3. The polishing device for producing the semiconductor aluminum plate as recited in claim 1, wherein: first threaded rod (41) and worm (42) all rotate with storehouse body (1) through the bearing and are connected, the top fixed mounting of worm (42) has hand wheel (421).
4. The polishing device for semiconductor aluminum plate production as set forth in claim 1, wherein: the limiting groove has been seted up to the inner bottom wall of the storehouse body (1), two the equal fixed mounting in bottom of thread bush (44) has one end to extend to the gag lever post of gag lever post inside, the displacement range phase-match of spacing groove and two gag lever posts, the removal hole has been seted up at the top of the storehouse body (1), the displacement range phase-match of removal hole and two removal posts (45).
5. The polishing device for producing the semiconductor aluminum plate as recited in claim 1, wherein: collect mechanism (5) including box (51), two the top of removal post (45) all with box (51) fixed connection, the inside fixed mounting of box (51) has filter screen (52), the interior diapire fixed mounting of box (51) has air pump (53).
6. The polishing device for producing the semiconductor aluminum plate as recited in claim 5, wherein: the refrigerator door is embedded in the front face of the refrigerator body (51), a plurality of air suction holes are formed in the top of the refrigerator body (51), an air inlet of the air pump (53) is communicated with an air inlet pipe, and an air outlet of the air pump (53) is communicated with an air outlet pipe with one end penetrating through and extending to the left side of the refrigerator body (51).
7. The polishing device for semiconductor aluminum plate production as set forth in claim 5, wherein: positioning mechanism (6) are riser (61) two, two including quantity the equal fixed connection in the top of box (51) in riser (61), one side fixed mounting that riser (61) is relative has diaphragm (62), the top fixed mounting that one side that riser (61) is relative and be located diaphragm (62) has mounting panel (63), the top threaded mounting of mounting panel (63) has one end to run through and extend to second threaded rod (64) of mounting panel (63) below, the bottom fixed mounting of second threaded rod (64) has locating plate (65).
8. The polishing device for semiconductor aluminum plate production as set forth in claim 7, wherein: the top fixed mounting of second threaded rod (64) has knob (641), the screw hole has been seted up at the top of mounting panel (63), screw hole and second threaded rod (64) phase-match.
CN202222211758.2U 2022-08-22 2022-08-22 Grinding device is used in semiconductor aluminum plate production Active CN218254224U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222211758.2U CN218254224U (en) 2022-08-22 2022-08-22 Grinding device is used in semiconductor aluminum plate production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222211758.2U CN218254224U (en) 2022-08-22 2022-08-22 Grinding device is used in semiconductor aluminum plate production

Publications (1)

Publication Number Publication Date
CN218254224U true CN218254224U (en) 2023-01-10

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CN202222211758.2U Active CN218254224U (en) 2022-08-22 2022-08-22 Grinding device is used in semiconductor aluminum plate production

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CN (1) CN218254224U (en)

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