CN218248580U - Ultra-pure ammonia rectification equipment - Google Patents

Abstract

The utility model provides an ultrapure ammonia rectification equipment belongs to ultrapure ammonia water processing field. It has solved the distillation efficiency of current ultrapure aqueous ammonia and the lower problem of distilled discharge rate. This ultrapure ammonia rectification equipment, including the rectification cauldron casing, the lateral part of casing still is provided with the heating cabinet, the inside heating pipe that still installs of casing, heating pipe are connected with the heating cabinet, air inlet and inlet have still been seted up respectively to the both sides of casing, the inside rabbling mechanism that still installs of casing, the casing upper end still is provided with the blast pipe, one side of casing still is provided with connects gets the case, connect and get the case still be provided with the support directly over, and the support links firmly at the lateral part of casing, the tip of blast pipe is located the support, and still installs the condensation subassembly on the support, enough carries the ultrapure aqueous ammonia that blast pipe department condensation came out to connect through the condensation subassembly and gets the incasement. The rectified ultrapure ammonia water is directly conveyed out of the shell, so that the discharge rate is improved.

Description

Ultra-pure ammonia rectification equipment

Technical Field

The utility model belongs to the technical field of ultrapure aqueous ammonia processing, a ultrapure ammonia rectification equipment is related to.

Background

Ultra-pure ammonia is a main material of a microelectronic silicon nitride masking film, in recent years, the global information industry is rapidly developed, and recent statistical data of consumption of global electronic chemicals show that Asia-Pacific regions, particularly China, become the leading market of global electronic industry and chemicals thereof, and the demand of high-purity electronic chemicals is rapidly increased due to the rapid development of the semiconductor industry required by the information industry. The electrical resistivity of the product is greatly changed by doping trace impurity elements into the pure semiconductor product, so that the semiconductor industry has extremely high requirement on the purity of chemical materials.

Electronic grade ultrapure ammonia water is one of eight commonly used ultrapure chemical materials in the semiconductor industry, the consumption is in the third of the IC industry, and the electronic grade ultrapure ammonia water plays an important role in the manufacturing industries of integrated circuits, LCDs and the like, and the purity and cleanliness of ultrapure chemicals used in a chip process have very important influence on the yield, the electrical performance and the reliability of Integrated Circuits (ICs). The alkalescence of ammonia water is utilized to activate the surfaces of silicon wafers and particles, so that surface particles and partial metal impurities can be removed. Therefore, the ultra-pure ammonia water is widely applied to the cleaning and etching process of the chip.

When current rectifying equipment distills ultrapure ammonia, mix ultrapure ammonia and ultrapure water each other earlier, the ultrapure aqueous ammonia of mixing is heated in the inside of equipment, because the heating is comparatively slow, the ultrapure aqueous ammonia of mixing outside-in is slowly heated, need carry out long-time heating to the ultrapure aqueous ammonia, just can distill, great reduction rectifying equipment's availability factor, the ultrapure aqueous ammonia through evaporation condensation has partly can flow back to the ultrapure aqueous ammonia of treating of equipment inside simultaneously, make the ultrapure aqueous ammonia that has purified and the ultrapure aqueous ammonia that does not purify mix together each other, thereby reduce distillation efficiency and the discharge rate of distillation, can mix partial impurity at the in-process of distilling ultrapure aqueous ammonia, and the purity of the ultrapure aqueous ammonia that leads to obtaining reduces, make the distillation waste time and energy more, be unfavorable for current operating mode.

Disclosure of Invention

The utility model aims at the above-mentioned problem that prior art exists, provide a compact structure and high ultrapure ammonia rectification equipment of stability, adsorb through setting up a plurality of filtrations in the rectifying still, the ultrapure aqueous ammonia vapour of distilling out simultaneously is carried to outside the trachea in by the back discharge of condensation.

The purpose of the utility model can be realized by the following technical proposal:

the utility model provides an ultrapure ammonia rectification equipment, includes the rectifying still casing, its characterized in that, the lateral part of casing still is provided with the heating cabinet, the inside heating pipe that still installs of casing, the output of heating cabinet is connected with the heating pipe, air inlet and inlet have still been seted up respectively to the both sides of casing, the inside rabbling mechanism that can stir to ultrapure aqueous ammonia mixture of still installing of casing, the casing upper end still sets up the gas outlet, gas outlet department still is connected with the blast pipe, the outside of casing still is provided with and connects the case of getting, the lateral part of casing still has linked firmly the support, and the support is located and connects directly over the case, still install the condensation subassembly on the support, the tip of blast pipe is connected with the condensation subassembly, can become ultrapure aqueous ammonia with the gas condensation in the blast pipe through the condensation subassembly, the tip department of blast pipe still is connected with the ultrapure aqueous ammonia that can condense out and carries to the fluid-discharge tube who connects the case.

An air inlet for ammonia to enter and an inlet for ultrapure water to enter are respectively formed in two sides of a rectifying still shell, ammonia and ultrapure water are respectively added into the shell, the ammonia and the ultrapure water are mixed in the shell, a heating box outside the shell can heat a heating pipe inside the shell, the mixture of the ammonia and the ultrapure water inside the shell can be heated, meanwhile, a stirring mechanism can stir the mixture of the ammonia and the ultrapure water at the lower part of the shell, the heating rate of the mixture of the ammonia and the ultrapure water can be increased, the mixture of the ammonia and the ultrapure water can be heated more uniformly, the mixture of the vaporized ammonia and the ultrapure water can rise, the mixture of the ammonia and the ultrapure water can be conveyed to the outside of the shell through an exhaust pipe at the upper part of the shell, gas in the exhaust pipe is liquefied through a condensing component outside the shell, liquefied and condensed ultrapure ammonia water is conveyed into an access box outside the shell and collected, the structure can enable the rectified gas to be directly conveyed to the end part of the exhaust pipe to be condensed, the phenomenon that the condensed gas is condensed in the shell and flows back to the mixture of the ammonia and the exhaust pipe can be effectively avoided, the discharge rate can be increased, and the flow of the mixture of the ammonia and the ultrapure water can be heated, and the discharge cost of the ammonia can be increased, and the discharge rate of the ammonia water can be greatly increased.

In foretell ultrapure ammonia rectification equipment, the condensation subassembly includes supporting shoe and condenser, the tip of blast pipe is wavy, the tip of support is the connecting portion that is the rectangle, the supporting shoe embedding is in connecting portion, and the inside of supporting shoe still set up with blast pipe tip assorted recess, still install the cold clot in the recess, and the quantity of condensation piece has a plurality of, a plurality of the cold clot is installed respectively between adjacent blast pipe, the cold clot is the U-shaped, the condensation piece all with blast pipe surface contact, the bottom of blast pipe all still is connected with the fluid-discharge tube, the bottom setting of fluid-discharge tube is being connect and is got incasement portion, a plurality of the cold clot all is connected with the condenser, the condenser links firmly on the support, the lower surface of support still has linked firmly a plurality of frame leg, the middle part of blast pipe still installs the delivery pump, the tip of blast pipe still is connected with the circulating pipe, and the circulating pipe is connected with the delivery pump.

One end of the support is fixedly connected with the side part of the shell, the other end of the support is provided with a rectangular connecting part, the support block is embedded in the connecting part of the support, the end part of the exhaust pipe is wavy, the inside of the support block is provided with a groove matched with the wavy exhaust pipe, the end part of the exhaust pipe is embedded in the groove, a U-shaped condensation block is also arranged between two adjacent exhaust pipe bodies, the end part of the exhaust pipe is provided with a plurality of parallel exhaust pipe bodies due to the wavy exhaust pipe end part, a condensation block is arranged between every two adjacent exhaust pipe bodies, a plurality of bent wavy exhaust pipes are provided, a condensation block is arranged between every two adjacent exhaust pipe bodies and is connected with an external condenser, so that the gas in the exhaust pipe is liquefied when encountering cold, the ultrapure aqueous ammonia that the liquefaction came out is carried to connecing through the fluid-discharge tube of blast pipe bottom and is got the incasement, the blast pipe tip is wavy, and the multistage body all contacts with the condensation piece, area of contact has been increased, wavy blast pipe tip evil is connected with the circulating pipe, the one end and the blast pipe tip of circulating pipe are linked together, the other end is connected on the delivery pump, make the gas in the blast pipe can be by cycle transport, make great increase cooling efficiency, the installing port that supplies the blast pipe entering and circulating pipe entering is still seted up respectively to the both sides of connecting portion simultaneously, the valve is still installed to the bottom of fluid-discharge tube, during gas and the cold liquefaction in the blast pipe, the valve is for closing, the gas homoliquefaction in the blast pipe is ultrapure aqueous ammonia, and under the effect of gravity, all be located every drain pipe, then the valve is opened to the manual work, and can connect the case of connecing of whole ultrapure aqueous ammonia lower part and get.

In foretell ultrapure ammonia rectification equipment, rabbling mechanism is including installing the agitator motor in left side rectifying still bottom, rectifying still internally mounted has the agitator, and the agitator is connected with agitator motor's output, still be connected with the puddler on the agitator, the lower part of puddler still can rotate and be connected with the stirring leaf, stirring leaf array sets up on the puddler, and the cross-section of stirring leaf is the cross form, every blade of stirring leaf all is the cambered surface, puddler, a plurality of stirring leaf of connecting on the puddler are a stirring unit, and are a plurality of the stirring unit sets up along the length direction of agitator.

Stirring motor can drive the agitator, make the puddler on the agitator rotate with the stirring leaf is synchronous, the stirring leaf of connection on the puddler is rotatable coupling, in the puddler pivoted, because the stirring leaf is rotatable coupling, under the effect of rivers, can make stirring leaf circumference rotatory, the puddler is rotatory around agitator motor's output shaft, the puddler, a plurality of stirring leaves of connection on the puddler are a stirring unit, the setting of a plurality of stirring units can make the ammonia that is located the casing inside mix with ultrapure water mixture more abundant, simultaneously in the heating, through the setting of a plurality of stirring, can make ammonia and ultrapure water mixture in the casing be heated more evenly, increase mobility.

In foretell ultrapure ammonia rectification equipment, the baffle is still installed at the middle part of casing, the baffle is the T word form, the through-hole that the symmetry set up is still seted up on the surface of baffle, the through-hole sets up along the length direction equipartition of baffle, the axis of rotation is still installed to the inside of baffle, the both sides of axis of rotation still have the gasket that can block up the through-hole, the quantity of axis of rotation, gasket and the quantity one-to-one of through-hole.

The baffle cuts apart into upper and lower two parts with the casing, and the lower part is the heating mixture, and upper portion is carried for the exhaust, and the inside gasket of baffle can be stopped up the through-hole, plays sealed effect, and when the lower part heated to the uniform temperature, steam produced, the gasket displacement for the through-hole is unblocked state, and the steam of production floats to the upper portion of casing.

In foretell ultrapure ammonia rectification equipment, the adsorption plate that can adsorb impurity is still installed to the lower part of baffle, the upper surface of adsorption plate supports and leans on the lower surface at the baffle, the air inlet sets up between adsorption plate and baffle, forms the cavity that supplies the ammonia edulcoration between adsorption plate and the baffle.

The adsorption plate sets up in the lower part of baffle, and the adsorption plate supports and leans on the lower part at the baffle, both make and form a cavity that supplies the ammonia edulcoration between adsorption plate and the baffle, the air inlet sets up between adsorption plate and baffle, when ammonia is carried and is got into inside the casing, at first filtered by the adsorption plate, make the impurity that contains in the ammonia adsorbed by the adsorption plate, ammonia and ultrapure water mixture are heated the vaporization back simultaneously, rise, also adsorbed the impurity that contains in the ammonia and the ultrapure water mixture after the vaporization by the adsorption plate, and both can discharge clean ammonia and ultrapure water mixture.

In foretell ultrapure ammonia rectification equipment, the driver is still installed to the lateral part of casing, the actuating lever is still installed to the inside of baffle, and the tip of actuating lever is connected with the driver, and every axis of rotation in the baffle all is connected with the actuating lever, the recess that supplies the gasket to remove is still seted up to the inside both sides of baffle, recess and gasket phase-match, and the recess is linked together with the through-hole, the quantity of recess and the quantity one-to-one of through-hole.

The driver can drive the driving rod, so that the driving rod generates displacement, thereby driving the sealing sheet connected to the driving rod, so that the sealing sheet can rotate around the rotating shaft, when the sealing sheet is positioned on the through hole, the sealing state is realized, after the sealing sheet is driven to rotate, the sealing sheet is separated from the through hole, so that the upper part and the lower part of the shell are communicated, the steam positioned on the lower part can be upwards discharged, the number of the driving rods is two, the two driving rods are arranged in parallel and are abutted against each other, one sealing sheet is connected with the upper part of the baffle, the other sealing sheet is connected with the lower part of the baffle, when the driving is carried out, the upper driving rod is forwardly displaced, the lower driving rod is backwardly displaced, so that the sealing edge positioned on the upper part is forwardly rotated, the sealing edge positioned on the lower part is backwardly rotated, the two driving rods are arranged in a staggered manner, so that the upper sealing sheet and the lower sealing sheet are far away from the through hole, when the two driving rods are reset, so that the sealing sheets of the upper part and the lower part of the shell are manually opened, so that the sealing sheet is communicated with the through hole, and a plurality of the upper part of the shell is discharged from the upper part of the shell when the shell is heated and stirred, and the sealing sheet is manually opened, and the lower part of the sealing sheet is discharged by the steam discharged from the through hole, and the upper part of the shell, and the upper part of the shell.

In the above ultrapure ammonia rectification equipment, the upper part of the shell is further provided with an end cover, the end cover is detachably mounted on the shell, one end of the exhaust pipe is detachably connected to the outer surface of the end cover, the inner surface of the end cover is also detachably connected with an adsorption net, and the adsorption net is arc-shaped.

The internal surface of end cover still installs and to dismantle and is circular-arc absorption net, and the blast pipe is releasable connection also at the top of casing, and the blast pipe is linked together with the casing, and the junction of exhaust and casing still installs the air current and flows through the valve, and the inside steam of casing can be adsorbed once more by the absorption net and filter before getting into the blast pipe, and then makes cleaner gas carried to the tip of blast pipe, further play the effect of removing impurity.

In the above ultrapure ammonia rectification equipment, the heating pipe is L-shaped, and the heating pipe is annularly arranged in the shell, and the middle part of the heating pipe is also provided with a reserved round hole for the stirring frame to penetrate through.

The heating pipe is L form, and the annular equipartition of heating pipe of L form is in the bottom of casing, and the lower part of a plurality of heating pipe forms one and reserves the round hole, reserves the installation that the round hole can be convenient for the stirring frame, and the both sides of stirring frame have certain clearance with the heating pipe simultaneously, and the lower part of stirring frame also has certain clearance with the bottom of heating pipe, and the effectual stirring frame that prevents contacts with the heating pipe in rotatory, plays the effect of stepping down.

In the above ultra-pure ammonia rectification equipment, an air inlet cover is further installed at the position of the shell and the air inlet, and activated carbon is further filled in the air inlet cover.

The air inlet is also provided with an air inlet cover, the air inlet cover is communicated with the air inlet, and the interior of the air inlet cover is filled with activated carbon, so that harmful substances and impurities remained in the input ammonia gas can be removed.

In the above-mentioned ultrapure ammonia rectification apparatus, the liquid inlet is disposed at a lower portion of the adsorption plate.

The inlet sets up in the lower part of adsorption plate, and the ultrapure water's of being convenient for is gone into like this, and effectual ultrapure water of avoiding contacts with the adsorption plate, and the effectual ultrapure water that prevents adsorbs because of the contact of ultrapure water, and then leads to the adsorption plate to lose to adsorb and filter the edulcoration effect.

Compared with the prior art, the inner side of the lower part of the ultra-pure ammonia rectification equipment is also provided with a plurality of annularly arranged L-shaped heaters, the heating box outside the shell can ensure that the plurality of heating pipes synchronously heat the mixture of the ammonia gas and the ultrapure water inside the shell, meanwhile, the stirring mechanism positioned in the shell can stir the mixture of the ammonia gas and the ultrapure water, so that the mixture of the ammonia gas and the ultrapure water is heated more uniformly, the baffle can seal the lower part of the shell, after the mixture of ammonia gas and ultrapure water in the shell is vaporized, the mixture can be far away from the through hole through the sealing sheet on the baffle plate, so that the vaporized substance can pass through the baffle plate and be conveyed to the top of the shell, meanwhile, the inside and the top of the shell are respectively provided with an adsorption plate and an adsorption net, thereby being capable of carrying out adsorption impurity removal operation, the vapor can be conveyed to the end part of the exhaust pipe through the exhaust pipe for condensation operation, so that the condensed ultrapure ammonia water can be discharged into the liquid discharge pipe, after the complete condensation, opening a valve at the end part of the liquid discharge pipe, discharging the ultrapure ammonia water into an external receiving box, collecting the ultrapure ammonia water by the receiving box, pumping the distilled gas by an exhaust pipe and a delivery pump connected with the exhaust pipe, so that the excessive gas is condensed in the shell and then flows back to the mixture of ammonia and ultrapure water, thereby improving the discharging rate, simultaneously through the heating pipe of annular equipartition and the inside rabbling mechanism of casing, can make the inside ammonia of casing and ultrapure water mixture increase its mobility and circulation, and then can make ammonia and ultrapure water mixture be heated more evenly, further improvement ejection of compact rate increases the purity of the ejection of compact, great reduction manufacturing cost, can the high-efficient ultrapure aqueous ammonia that discharges and basically not contain impurity.

Drawings

FIG. 1 is a schematic structural diagram of the present ultrapure ammonia rectification apparatus.

FIG. 2 is a schematic view of the structure of the end of the holder and the exhaust pipe in the ultrapure ammonia rectification apparatus.

FIG. 3 is a schematic structural diagram of a stirring motor and a stirring rack in the ultrapure ammonia rectification equipment.

Figure 4 is a schematic structural diagram of the middle part of a baffle in the ultrapure ammonia rectification equipment.

In the figure, 1, a housing; 2. a heating box; 3. heating a tube; 4. an air inlet; 5. a liquid inlet; 6. an exhaust pipe; 7. a receiving box; 8. a support; 9. a connecting portion; 10. cold-coagulating; 11. a liquid discharge pipe; 12. a supporting block; 13. a delivery pump; 14. a circulation pipe; 15. a stirring motor; 16. a stirring frame; 17. a stirring rod; 18. stirring blades; 19. a baffle plate; 20. a through hole; 21. a rotating shaft; 22. sealing the sheet; 23. an adsorption plate; 24. a drive rod; 25. a groove; 26. an end cap; 27. an adsorption net; 28. an air intake hood; 29. a condenser.

Detailed Description

As shown in fig. 1, fig. 2, fig. 3 and fig. 4, this ultrapure ammonia rectification equipment includes a rectification kettle shell 1, the lateral part of shell 1 is still provided with heating box 2, heating pipe 3 is still installed inside shell 1, and the output of heating box 2 is connected with heating pipe 3, air inlet 4 and inlet 5 have still been seted up respectively to the both sides of shell 1, the stirring mechanism that can stir ultrapure aqueous ammonia mixture is still installed to shell 1 inside, shell 1 upper end still sets up the gas outlet, gas outlet department still is connected with blast pipe 6, the outside of shell 1 still is provided with and connects case 7, the lateral part of shell 1 has still linked firmly support 8, and support 8 is located and connects case 7 directly over, still install the condensation subassembly on support 8, the tip of blast pipe 6 is connected with the condensation subassembly, can become ultrapure aqueous ammonia through the condensation in the blast pipe 6, the tip department of blast pipe 6 still is connected with can carry the ultrapure aqueous ammonia that condenses to connect case 7's that gets drainpipe 11.

The condensation subassembly includes supporting shoe 12 and condenser 29, the tip of blast pipe 6 is wavy, the tip of support 8 is for being the connecting portion 9 of rectangle, supporting shoe 12 imbeds in connecting portion 9, and the inside of supporting shoe 12 still seted up with blast pipe 6 tip assorted recess 25, still install cold clot 10 in the recess 25, and the quantity of condensation piece 10 has a plurality of, a plurality of cold clot 10 is installed respectively between adjacent blast pipe 6, cold clot 10 is the U-shaped, and cold clot 10 all contacts with blast pipe 6 face, the bottom of blast pipe 6 all still is connected with fluid-discharge tube 11, the bottom of fluid-discharge tube 11 sets up and is being connect inside getting case 7, a plurality of cold clot 10 all is connected with condenser 29, condenser 29 links firmly on support 8, support 8's lower surface still has linked firmly a plurality of frame leg, delivery pump 13 is still installed at the middle part of blast pipe 6, the tip of blast pipe 6 still is connected with circulating pipe 14, and circulating pipe 14 is connected with delivery pump 13.

Rabbling mechanism is including installing agitator motor 15 in left side rectifying still bottom, rectifying still internally mounted has agitator 16, and agitator 16 is connected with agitator motor 15's output, still be connected with puddler 17 on the agitator 16, the lower part of puddler 17 still can rotate and be connected with stirring leaf 18, stirring leaf 18 array sets up on puddler 17, and the cross-section of stirring leaf 18 is the cross form, every blade of stirring leaf 18 all is the cambered surface, puddler 17, a plurality of stirring leaf 18 of connecting on puddler 17 are a stirring unit, and are a plurality of stirring unit sets up along the length direction of agitator 16.

Baffle 19 is still installed at the middle part of casing 1, baffle 19 is the T word form, the through-hole 20 that the symmetry set up is still seted up on baffle 19's surface, through-hole 20 sets up along baffle 19's length direction equipartition, axis of rotation 21 is still installed to baffle 19's inside, the both sides of axis of rotation 21 still have the gasket 22 that can block up through-hole 20, the quantity one-to-one of axis of rotation 21, gasket 22 and the quantity of through-hole 20.

The lower part of baffle 19 still installs the adsorption plate 23 that can adsorb impurity, the upper surface of adsorption plate 23 supports and leans on the lower surface at baffle 19, air inlet 4 sets up between adsorption plate 23 and baffle 19, forms the cavity that supplies the ammonia edulcoration between adsorption plate 23 and the baffle 19.

The driver is still installed to the lateral part of casing 1, actuating lever 24 is still installed to the inside of baffle 19, and the tip of actuating lever 24 is connected with the driver, and every axis of rotation 21 in the baffle 19 all is connected with actuating lever 24, the recess 25 that supplies gasket 22 to remove is still seted up to the inside both sides of baffle 19, recess 25 and gasket 22 phase-match, and recess 25 and through-hole 20 are linked together, the quantity one-to-one of recess 25 and through-hole 20.

The upper portion of casing 1 still is provided with end cover 26, end cover 26 demountable installation is on casing 1, the connection can be dismantled at end cover 26 surface to the one end of blast pipe 6, the internal surface of end cover 26 still can be dismantled and be connected with adsorption net 27, adsorption net 27 is circular-arc.

The heating pipe 3 is L-shaped, the heating pipe 3 is annularly arranged inside the shell 1, and a reserved round hole for the stirring frame 16 to penetrate is further formed in the middle of the heating pipe 3.

An air inlet hood 28 is further installed at the position of the shell 1 and the air inlet 4, and activated carbon is further filled in the air inlet hood 28.

The liquid inlet 5 is arranged at the lower part of the adsorption plate 23.

During operation, the sealing sheet 22 can rotate around the rotating shaft 21 by being driven by a driver, and when the sealing sheet 22 is positioned on the through hole 20, the lower part of the shell 1 is in a sealed state, ammonia gas enters the shell 1 through the air inlet 4 and the air inlet hood 28 on the side part of the shell 1, harmful substances and impurities remained in the input ammonia gas can be removed by filling activated carbon in the air inlet hood 28, ultrapure water enters the shell 1 through the liquid inlet 5 on the other side of the shell 1, the air inlet 4 is positioned between the baffle plate 19 and the adsorption plate 23, the liquid inlet 5 is positioned on the lower part of the adsorption plate 23, when ammonia gas enters the shell 1, the ultrapure water firstly enters a filter cavity formed between the baffle plate 19 and the adsorption plate 23, and is discharged from the adsorption plate 23 on the lower part under the blocking of the baffle plate 19, so that the ammonia gas and the ultrapure water are finally mixed on the lower part of the shell 1, the mixture can be heated under the action of the heating phase outside the shell 1 and the heating tube 3 inside, the stirring motor 15 drives the stirring frame 16 during heating, so that the stirring rod 17 on the stirring frame 16 and the stirring blade 18 synchronously rotate, the stirring rod 17 rotates, and simultaneously, as the stirring blade 18 is in rotatable connection, under the action of water flow, the stirring blade 18 can circumferentially rotate, the stirring rod 17 rotates around the output shaft of the stirring motor 15, thereby not only increasing the mixing effect between ammonia gas and ultrapure water, but also enabling the mixture of ammonia gas and ultrapure water to be heated more uniformly and stably, as the driver is manually started during heating, when the sealing sheet 22 is positioned on the through hole 20, the lower part of the shell 1 is in a sealed state, when a large amount of steam is specifically arranged at the lower part of the shell 1, and when ammonia gas and ultrapure water are added into the shell 1, manually opening the driver again, namely driving the driving rod 24 by the driver, and keeping the sealing sheet 22 away from the through holes 20 to ensure that the upper part and the lower part of the shell 1 are communicated, discharging a large amount of steam in the shell 1 upwards through the through holes 20 on the baffle plate 19, filtering the generated steam by the adsorption plate 23 again, adsorbing and filtering the steam by the adsorption net 27, then discharging the steam through the exhaust pipe 6 at the top of the shell 1, conveying the discharged gas to the end part of the exhaust pipe 6 under the action of the conveying pump 13, wherein the end part of the exhaust pipe 6 is wavy, so that the gas in the exhaust pipe 6 can slow down the flow speed, cold blocks 10 are arranged between the pipe bodies of each exhaust pipe 6, the condensation blocks 10 are connected with an external condenser, the contact area can be increased, the gas in the exhaust pipe 6 is liquefied when encountering cold, the cold is liquefied into ultra-pure ammonia water, and the discharge rate is improved, the redundant gas is conveyed to the position of the conveying pump 13 through the circulating pipe 14 at the end part of the exhaust pipe 6 and conveyed to the end part of the exhaust pipe 6 again, so that circulation is generated, the cooling efficiency is increased, the condensed ultrapure ammonia water can be discharged into the liquid discharge pipe 11, after all condensation is completed, a valve at the end part of the liquid discharge pipe 11 is opened, the ultrapure ammonia water is discharged into the external receiving box 7 and is collected by the receiving box 7, the distilled gas is extracted by the exhaust pipe 6 and the conveying pump 13 connected to the exhaust pipe 6, so that the gas is condensed outside the shell 1, the redundant gas is effectively prevented from being condensed in the shell 1 and then reflows to the mixture of the ammonia gas and the ultrapure water, the discharging rate is improved, meanwhile, the plurality of heating pipes 3 can synchronously work with a stirring mechanism, and the mixture of the ammonia gas and the ultrapure water in the shell 1 can be enabled to increase the fluidity and the circulation performance, the ammonia and ultrapure water mixture can be heated more uniformly, the discharge rate is further improved, the purity of discharged materials is increased, the production cost is greatly reduced, and ultrapure ammonia water containing no impurities can be efficiently discharged.

Claims (10)

1. The utility model provides an ultrapure ammonia rectification equipment, includes the rectifying still casing, its characterized in that, the lateral part of casing still is provided with the heating cabinet, the inside heating pipe that still installs of casing, the heating pipe is connected with the heating cabinet, air inlet and inlet have still been seted up respectively to the both sides of casing, the inside rabbling mechanism that can stir to ultrapure aqueous ammonia mixture of still installing of casing, the casing upper end still sets up the gas outlet, gas outlet department still is connected with the blast pipe, the outside of casing still is provided with and connects the case of getting, the lateral part of casing still has linked firmly the support, and the support is located and connects directly over the case, still install the condensation subassembly on the support, the tip of blast pipe is connected with the condensation subassembly, can become ultrapure aqueous ammonia with the gas condensation in the blast pipe through the condensation subassembly, the tip department of blast pipe still is connected with the ultrapure aqueous ammonia that can will condense out and carries to the fluid-discharge tube who connects the case.

2. The ultrapure ammonia rectification device according to claim 1, wherein the condensation component comprises a support block and a condenser, the end of the exhaust pipe is wavy, the end of the support is a rectangular connecting part, the support block is embedded in the connecting part, a groove matched with the end of the exhaust pipe is further formed in the support block, a plurality of cold congelation blocks are further installed in the groove, the number of the cold congelation blocks is several, the cold congelation blocks are respectively installed between adjacent exhaust pipes and are U-shaped, the condensation blocks are in surface contact with the exhaust pipes, the bottom of each exhaust pipe is further connected with a liquid discharge pipe, the bottom of each liquid discharge pipe is arranged in the receiving box, the plurality of cold congelation blocks are connected with the condenser, the condenser is fixedly connected to the support, the lower surface of the support is further fixedly connected with a plurality of support legs, the middle of each exhaust pipe is further connected with a delivery pump, the end of each exhaust pipe is further connected with a circulation pipe, and the circulation pipes are connected with the delivery pumps.

3. The ultrapure ammonia rectification equipment according to claim 2, wherein the stirring mechanism comprises a stirring motor arranged at the bottom of the left rectification kettle, a stirring frame is arranged in the rectification kettle and connected with the output end of the stirring motor, a stirring rod is further connected to the stirring frame, stirring blades are further rotatably connected to the lower portion of the stirring rod, the stirring blade array is arranged on the stirring rod, the cross section of each stirring blade is in a cross shape, each blade of each stirring blade is in an arc surface shape, the stirring rod and the plurality of stirring blades connected to the stirring rod are one stirring unit, and the plurality of stirring units are arranged along the length direction of the stirring frame.

4. The ultrapure ammonia rectification equipment of claim 3, wherein a baffle is further mounted in the middle of the housing, the baffle is T-shaped, through holes are symmetrically formed in the surface of the baffle, the through holes are uniformly distributed along the length direction of the baffle, a rotating shaft is further mounted in the baffle, sealing pieces capable of blocking the through holes are further arranged on two sides of the rotating shaft, and the rotating shaft, the sealing pieces and the through holes are in one-to-one correspondence.

5. The ultrapure ammonia rectification device according to claim 4, wherein an adsorption plate capable of adsorbing impurities is further mounted on the lower portion of the baffle, the upper surface of the adsorption plate abuts against the lower surface of the baffle, the gas inlet is arranged between the adsorption plate and the baffle, and a cavity for removing impurities from ammonia gas is formed between the adsorption plate and the baffle.

6. The ultrapure ammonia rectification equipment of claim 5, wherein a driver is further mounted on the side of the housing, a driving rod is further mounted inside the baffle, the end of the driving rod is connected with the driver, each rotating shaft inside the baffle is connected with the driving rod, grooves for moving the sealing sheets are further formed in two sides inside the baffle, the grooves are matched with the sealing sheets and communicated with the through holes, and the number of the grooves corresponds to the number of the through holes one to one.

7. The ultra-pure ammonia rectification equipment as claimed in claim 6, wherein an end cap is further arranged on the upper part of the shell, the end cap is detachably mounted on the shell, one end of the exhaust pipe is detachably connected to the outer surface of the end cap, the inner surface of the end cap is also detachably connected with an adsorption net, and the adsorption net is in an arc shape.

8. The ultra-pure ammonia rectification device according to claim 7, wherein the heating pipe is L-shaped and annularly arranged inside the shell, and a reserved round hole for the stirring frame to penetrate through is further formed in the middle of the heating pipe.

9. The ultrapure ammonia rectification apparatus of claim 8 wherein an inlet hood is further mounted at the housing and the inlet, and wherein the inlet hood is further filled with activated carbon.

10. The apparatus of claim 9, wherein the liquid inlet is disposed at a lower portion of the adsorption plate.

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