CN218240142U

CN218240142U - Detachable probe card for semiconductor test

Info

Publication number: CN218240142U
Application number: CN202222127394.XU
Authority: CN
Inventors: 张治强
Original assignee: Jiangsu Changsheng Semiconductor Technology Co ltd
Current assignee: Jiangsu Changsheng Semiconductor Technology Co ltd
Priority date: 2022-08-13
Filing date: 2022-08-13
Publication date: 2023-01-06
Anticipated expiration: 2032-08-13

Abstract

The application relates to the technical field of semiconductor element processing equipment, in particular to a detachable probe card for semiconductor testing, which comprises a fixed support, wherein the center of the fixed support is provided with a mounting groove, the inner side surface of the mounting groove is provided with a vacant part, the top of the fixed support is provided with an annular cover plate, and the bottom surface of the vacant part is horizontal to the mounting groove; there are two sets of symmetrical "U" type installing frames in the mounting groove, there is the right angle baffle in the installing frame, the right angle baffle includes longitudinal plate and lift diaphragm, the longitudinal plate back is equipped with telescopic machanism, lift diaphragm top is connected with the adjusting bolt who runs through sliding block on the installing frame roof, the sliding block is inlayed on the installing frame roof and the direction of motion is unanimous with the longitudinal plate direction of motion, lift diaphragm side and the positive sliding connection of longitudinal plate, the top arc gag lever post of lift diaphragm is spacing with the opening at longitudinal plate top and is connected, the one end of arc gag lever post is at lift diaphragm top, the other end of arc gag lever post and the opening sliding connection in the longitudinal plate. The probe card and the chuck are convenient to disassemble and assemble, and the probe card is not easy to damage in the disassembling and assembling process.

Description

Detachable probe card for semiconductor test

Technical Field

The application relates to the technical field of semiconductor element processing equipment, in particular to a detachable probe card for semiconductor testing.

Background

The probe card is an interface between a chip to be tested and a testing machine in wafer testing, is mainly applied to preliminarily testing the electrical performance of the chip before chip slicing packaging, and carries out packaging engineering after poor chips are screened out. In the process of semiconductor testing, a probe card is needed, but the connection between the existing probe card and a chuck is mostly fixed, the probe card and the chuck are inconvenient to disassemble and assemble, the probe card is inconvenient to replace, and the practicability is poor.

SUMMERY OF THE UTILITY MODEL

In order to overcome the problems in the prior art, the present application provides a detachable probe card for semiconductor testing.

The application provides a detachable probe card for semiconductor testing, which adopts the following technical scheme:

a detachable probe card for semiconductor test comprises a fixed support, wherein the center of the fixed support is provided with an installation groove, the inner side surface of the installation groove is provided with a hollow part, the top of the fixed support is provided with an annular cover plate, and the bottom surface of the hollow part is horizontal to the installation groove; install the "U" type installing frame of two sets of symmetries in the mounting groove, wherein be equipped with the right angle baffle in the installing frame, the right angle baffle includes longitudinal plate and lift diaphragm, wherein the back of longitudinal plate is equipped with telescopic machanism, the top of lift diaphragm is connected with the adjusting bolt who runs through sliding block on the installing frame roof, the sliding block is inlayed on the installing frame roof and the direction of motion is unanimous with the longitudinal plate direction of motion, wherein the side of lift diaphragm and the front sliding connection of longitudinal plate, the top of lift diaphragm is passed through the arc gag lever post and is connected with the opening at longitudinal plate top is spacing, wherein the one end of arc gag lever post is fixed at lift diaphragm top, the other end of arc gag lever post and the interior opening sliding connection of longitudinal plate.

Through adopting above-mentioned technical scheme, install the probe card in the mounting groove at fixed bolster center to the vacancy portion of probe groove side is used for the spacing of probe card, and "U" type installing frame in the mounting groove can carry out the centre gripping to the probe card of putting into the mounting groove and fix, and the annular apron at fixed bolster top covers the top surface and the vacancy portion of mounting groove, thereby fixes the probe card in the fixed bolster. Wherein the right angle baffle that is equipped with in the installing frame can be followed both sides and top and carried on spacingly to the probe card, wherein divide into sliding connection's vertical plate and lift diaphragm in the right angle baffle, and wherein vertical plate adjusts through telescopic machanism control according to the width of probe card and presss from both sides tightly fixedly. The lifting transverse plate moves along with the longitudinal plate, the sliding block for installing the adjusting bolt on the top plate of the installing frame moves along with the lifting transverse plate, and the adjusting bolt starts to clamp the upper surface of the probe card after the clamping position of the longitudinal plate on the probe card is determined. The arc-shaped limiting rod fixedly connected with the top of the lifting transverse plate can be matched with the opening in the top of the longitudinal plate, so that the relative positions of the longitudinal plate and the lifting transverse plate cannot be changed in the process of independent movement of the longitudinal plate and the lifting transverse plate, and the stability of fixing the probe card is guaranteed.

Preferably, a fixing frame is installed at the joint of the telescopic mechanism and the longitudinal plate, and a protection device is arranged at the joint of the adjusting bolt and the lifting transverse plate.

Through adopting above-mentioned technical scheme, indulge the board back and be equipped with the fixed bolster, can strengthen indulging board bulk strength. The protection device at the end part of the adjusting bolt can provide buffer for the lifting transverse plate in the clamping process of the probe card, and damage to the probe card is reduced.

Preferably, the protection device comprises an adjusting plate sleeved at one end of the adjusting bolt close to the lifting transverse plate, the center of the top surface of the adjusting plate is connected with the end part of the adjusting bolt, and buffer rods connected with the lifting transverse plate are annularly distributed on the bottom surface of the adjusting plate.

Through adopting above-mentioned technical scheme, protection device passes through the design of regulating plate, and the lateral surface and the adjusting bolt of regulating plate rotate to be connected, can realize the lift of lift diaphragm through adjusting bolt's rotation. The buffer rod arranged on the bottom surface of the adjusting plate is connected with the lifting transverse plate, when the lifting transverse plate abuts against the surface of the probe card, the buffer rod can provide certain buffer, and the situation that the probe card is crushed by the lifting transverse plate is reduced.

Preferably, the adjusting plate is internally provided with a cavity structure, the center of the adjusting plate is provided with a limiting pipe body rotatably connected with the adjusting bolt, and the outer wall of the limiting pipe body is connected with the top of a buffer rod on the adjusting plate through a fixing rod.

Through adopting above-mentioned technical scheme, the regulating plate adopts the cavity structure, and wherein the spacing body that the center of regulating plate was equipped with is used for rotating with adjusting bolt and is connected to the top fixed connection of the buffer beam on the outer wall of spacing body and the regulating plate can make the precision of its adjustment higher with the direct top of transmitting the buffer beam of the power of adjusting bolt to the effect of regulating plate.

Preferably, the buffer lever includes the body of rod and cushion collar, and the outside at the lift diaphragm is fixed to the bottom of cushion collar, and the body of rod slip joint is kept away from the one end of lift diaphragm at the cushion collar, and be equipped with in the cushion collar with body of rod butt spring, the fixed connection all around of body of rod top and regulating plate.

Through adopting above-mentioned technical scheme, the buffer beam is flexible in the cushion collar that has the spring through the body of rod to after letting lift diaphragm and probe card laminating, adjusting bolt is still when continuing to exert pressure, and this partial pressure just can be absorbed to the buffer beam this moment, thereby has avoided the damage of lift diaphragm to the probe card.

Preferably, the fixing frame comprises a cross rod body arranged on the back surface of the longitudinal plate, wherein the fixing frame is positioned on a diagonal line of the back surface of the longitudinal plate, and the intersection point of the end part of the telescopic mechanism and the diagonal line is fixedly connected

Through adopting above-mentioned technical scheme, adopt on the fixed bolster to set up on the diagonal at the vertical board back, can carry out effectual reinforcement to the curb plate, avoid telescopic machanism to carry out the butt to the center of vertical board for a long time and cause the deformation of vertical board.

Preferably, the longitudinal plate and the lifting transverse plate are connected in a clamping mode, arc-shaped clamping grooves are formed in the left side edge and the right side edge of the longitudinal plate, arc-shaped transition is formed between the surface of the longitudinal plate and the two side faces of the longitudinal plate, and elastic clamping blocks corresponding to the arc-shaped clamping grooves are arranged at the end portions of the lifting transverse plate.

Through adopting above-mentioned technical scheme, still be equipped with the arc draw-in groove on the left and right sides of vertical plate to still be equipped with the arc transition between both sides face and surface, the tip that can make things convenient for the lift diaphragm passes through elasticity fixture block and arc draw-in groove joint adaptation, is difficult for taking place the separation when can letting the lift diaphragm slide on the curb plate.

Preferably, the back surface of the mounting frame is symmetrically distributed with an L-shaped reinforcing plate, and the part of the reinforcing plate, which is attached to the mounting groove, is fixed by a positioning bolt.

Through adopting above-mentioned technical scheme, the installing frame is fixed in the mounting groove, adds at its back and is equipped with "L" type gusset plate, can consolidate the installing frame to consolidate through positioning bolt, avoided the change of installing frame position and the condition that drops in the mounting groove.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the arc-shaped limiting rod fixedly connected with the top of the lifting transverse plate can be matched with the opening in the top of the longitudinal plate, so that the relative positions of the longitudinal plate and the lifting transverse plate cannot change in the process that the longitudinal plate and the lifting transverse plate move independently, and the fixing stability of the probe card is ensured;

2. the back of the longitudinal plate is provided with a fixed support, so that the overall strength of the longitudinal plate can be enhanced. The protection device at the end part of the adjusting bolt can provide buffer for the lifting transverse plate in the clamping process of the probe card, so that the damage to the probe card is reduced;

3. some probe cards and the chuck are detachably connected, so that the probe cards and the chuck are more convenient to disassemble and assemble, convenient to replace subsequently and good in practicability.

Drawings

FIG. 1 is a schematic view of an overall structure of a detachable probe card for semiconductor testing;

FIG. 2 is an enlarged view at A in FIG. 1;

FIG. 3 is a schematic view of a mounting frame of the detachable probe card for semiconductor testing;

fig. 4 is a right side view of a mounting frame of the detachable probe card for semiconductor test.

Description of the reference numerals: 1. a fixed bracket; 11. mounting grooves; 12. a void portion; 13. an annular cover plate; 2. installing a frame; 21. a right angle baffle; 22. a longitudinal plate; 221. an opening; 222. an arc-shaped clamping groove; 223. a telescoping mechanism; 23. lifting the transverse plate; 231. adjusting the bolt; 232. an arc-shaped limiting rod; 233. an elastic clamping block; 24. a slider; 25. a fixed mount; 26. a reinforcing plate; 3. a protection device; 31. an adjusting plate; 311. a limiting pipe body; 32. a buffer rod; 321. a rod body; 322. a buffer sleeve.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses a detachable probe card for semiconductor testing.

Referring to fig. 1, 2, 3 and 4, a detachable probe card for semiconductor testing includes a fixed support 1, a mounting groove 11 is formed in the center of the fixed support 1, a hollow portion 12 is formed on the inner side surface of the mounting groove 11, an annular cover plate 13 is mounted on the top of the fixed support 1, and the bottom surface of the hollow portion 12 is horizontal to the mounting groove 11; install "U" type installing frame 2 of two sets of symmetries in the mounting groove 11, wherein be equipped with right angle baffle 21 in the installing frame 2, right angle baffle 21 includes vertical plate 22 and lift diaphragm 23, wherein vertical plate 22's the back is equipped with telescopic machanism 223, lift diaphragm 23's top is connected with the adjusting bolt 231 who runs through slider 24 on the installing frame 2 roof, slider 24 inlays on the installing frame 2 roof and direction of motion and vertical plate 22 direction of motion are unanimous, wherein lift diaphragm 23's side and vertical plate 22's front sliding connection, the top of lift diaphragm 23 is through arc gag lever post 232 and the opening 221 spacing connection at vertical plate 22 top, wherein the one end of arc gag lever post 232 is fixed at lift diaphragm 23 top, the other end of arc gag lever post 232 and the opening 221 sliding connection in the vertical plate 22. The probe card is installed in the installation groove 11 in the center of the fixing support 1, the vacant part 12 on the side edge of the probe groove is used for limiting the probe card, the probe card placed in the installation groove 11 can be clamped and fixed by the U-shaped installation frame 2 in the installation groove 11, and the annular cover plate 13 on the top of the fixing support 1 covers the top surface of the installation groove 11 and the vacant part 12, so that the probe card is fixed in the fixing support 1. The right-angle baffle 21 arranged in the mounting frame 2 can limit the probe card from two sides and the top, wherein the right-angle baffle 21 is divided into a vertical plate 22 and a lifting horizontal plate 23 which are connected in a sliding manner, and the vertical plate 22 is controlled by a telescopic mechanism 223 to be adjusted, clamped and fixed according to the width of the probe card. The horizontal elevating plate 23 moves with the vertical plate 22, and the slide block 24 on the top plate of the mounting frame 2 for mounting the adjusting bolt 231 moves, so that the adjusting bolt 231 starts to clamp the upper surface of the probe card after the clamping position of the vertical plate 22 to the probe card is determined. The arc-shaped limiting rod 232 fixedly connected with the top of the lifting transverse plate 23 can be matched with the opening 221 in the top of the longitudinal plate 22, so that in the process that the longitudinal plate 22 and the lifting transverse plate 23 respectively and independently move, the relative positions of the longitudinal plate 22 and the lifting transverse plate 23 cannot change, and the fixing stability of the probe card is ensured.

Referring to fig. 1 and 4, a fixing frame 25 is installed at the connection position of the telescopic mechanism 223 and the vertical plate 22, and a protection device 3 is arranged at the connection position of the adjusting bolt 231 and the lifting transverse plate 23. The fixing bracket 1 is arranged on the back surface of the vertical plate 22, so that the overall strength of the vertical plate 22 can be enhanced. The protector 3 at the end of the adjusting bolt 231 can provide buffer for the lifting horizontal plate 23 in the clamping process of the probe card, thereby reducing damage to the probe card.

Referring to fig. 1, 3 and 4, the protection device 3 includes an adjusting plate 31 sleeved on one end of the adjusting bolt 231 close to the lifting cross plate 23, the center of the top surface of the adjusting plate 31 is connected with the end of the adjusting bolt 231, and buffer rods 32 connected with the lifting cross plate 23 are annularly distributed on the bottom surface of the adjusting plate 31. The protection device 3 is designed by the adjusting plate 31, the outer side surface of the adjusting plate 31 is rotatably connected with the adjusting bolt 231, and the lifting transverse plate 23 can be lifted by rotating the adjusting bolt 231. The buffer rod 32 arranged on the bottom surface of the adjusting plate 31 is connected with the lifting transverse plate 23, when the lifting transverse plate 23 is abutted on the surface of the probe card, the buffer rod 32 can provide certain buffer, and the situation that the probe card is crushed by the lifting transverse plate 23 is reduced.

Referring to fig. 1, 2, 3 and 4, the adjusting plate 31 has a hollow structure, wherein a limiting tube 311 rotatably connected to the adjusting bolt 231 is disposed at the center of the adjusting plate 31, and the outer wall of the limiting tube 311 is connected to the top of the buffer rod 32 on the adjusting plate 31 through a fixing rod. The adjusting plate 31 adopts a cavity structure, wherein a limiting pipe body 311 is arranged at the center of the adjusting plate 31 and is used for being rotatably connected with the adjusting bolt 231, the outer wall of the limiting pipe body 311 is fixedly connected with the top of the buffer rod 32 on the adjusting plate 31, the force of the adjusting bolt 231 on the adjusting plate 31 can be directly transmitted to the top of the buffer rod 32, and the adjusting precision is higher.

Referring to fig. 1, fig. 3 and fig. 4, the buffer rod 32 includes a rod 321 and a buffer sleeve 322, the bottom of the buffer sleeve 322 is fixed at the outer side of the lifting transverse plate 23, the rod 321 is slidably connected to one end of the buffer sleeve 322 far away from the lifting transverse plate 23, a spring is arranged in the buffer sleeve 322 and connected to the rod 321, and the top of the rod 321 is fixedly connected to the periphery of the adjusting plate 31. The buffer rod 32 is extended and contracted in the buffer sleeve 322 with a spring through the rod body 321, so that after the lifting transverse plate 23 is attached to the probe card, when the adjusting bolt 231 continues to apply pressure, the buffer rod 32 at the moment can absorb the pressure, and the probe card is prevented from being damaged by the lifting transverse plate 23.

Referring to fig. 1, 2, 3 and 4, the fixing frame 25 includes a cross rod 321 disposed on the back of the vertical plate 22, wherein the fixing frame 25 is located on a diagonal line of the back of the vertical plate 22, and an end of the telescopic mechanism 223 is fixedly connected to an intersection point of the diagonal line. Adopt on the fixed bolster 1 to set up on the diagonal on the back of vertical plate 22, can carry out effectual reinforcement to the curb plate, avoid telescopic machanism 223 to carry out the butt to the center of vertical plate 22 for a long time and cause vertical plate 22's deformation.

Referring to fig. 1, 2, 3 and 4, the longitudinal plate 22 is connected with the lifting transverse plate 23 in a clamping manner, wherein the left and right sides of the longitudinal plate 22 are provided with arc-shaped slots 222, an arc-shaped transition is arranged between the surface and the two sides of the longitudinal plate 22, and the end of the lifting transverse plate 23 is provided with an elastic clamping block 233 corresponding to the arc-shaped slots 222. Arc-shaped clamping grooves 222 are further formed in the left side edge and the right side edge of the longitudinal plate 22, arc-shaped transition is further formed between the two side faces and the surface, the end portions of the lifting transverse plate 23 can be conveniently clamped and matched with the arc-shaped clamping grooves 222 through elastic clamping blocks 233, and the lifting transverse plate 23 cannot be easily separated when sliding on the side plates.

Referring to fig. 1, L-shaped reinforcing plates 26 are symmetrically distributed on the back surface of the mounting frame 2, and the portions of the reinforcing plates 26, which are attached to the mounting groove 11, are fixed by positioning bolts. The mounting frame 2 is fixed in the mounting groove 11, and the L-shaped reinforcing plate 26 is additionally arranged on the back surface of the mounting frame 2, so that the mounting frame 2 can be reinforced and reinforced through the positioning bolt, and the situation that the mounting frame 2 changes in position and falls off in the mounting groove 11 is avoided.

The working principle is as follows: a probe card is mounted in a mounting groove 11 in a fixed support 1, one end of the probe card is arranged in a vacant part 12, two sides of the probe are clamped by a mounting frame 2, and then an annular cover plate 13 is covered on the fixed support 1. The side and the top of the probe card are clamped by the right-angle baffle 21 in the mounting frame 2, wherein the vertical plate 22 in the right-angle baffle 21 is pushed by the telescopic mechanism 223, the fixing frame 25 arranged at one end of the telescopic mechanism 223 close to the vertical plate 22 reinforces the vertical plate 22, and the telescopic mechanism 223 pushes the vertical plate 22 to clamp and fix the side of the probe card. In the moving process of the vertical plate 22, the lifting horizontal plate 23 in the right-angle baffle 21 slides along with the sliding block 24 at the top of the mounting frame 2 by the adjusting bolt 231, after the vertical plate 22 reaches a fixed position, the adjusting bolt 231 rotates and adjusts, the protection device 3 arranged between the adjusting bolt 231 and the lifting horizontal plate 23 protects the pressure contact of the surface of the probe card, the top of the adjusting plate 31 in the protection device 3 is rotatably connected with the adjusting bolt 231 through the limiting tube 311 in the cavity, the buffer rod 32 at the bottom of the adjusting plate 31 can absorb the force from the lifting horizontal plate 23, and the rod body 321 presses the spring in the buffer sleeve 322 to realize the contraction of the buffer rod 32. In the process of lifting the horizontal lifting plate 23, the elastic clamping blocks 233 on the lateral side of the horizontal lifting plate 23 are slidably connected with the arc-shaped clamping grooves 222 on the two sides of the longitudinal plate 22, and the arc-shaped limiting rods 232 on the horizontal lifting plate 23 are slidably connected with the openings 221 on the longitudinal plate 22.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A detachable probe card for semiconductor test comprises a fixed support (1), and is characterized in that: the center of the fixed support (1) is provided with a mounting groove (11), the inner side surface of the mounting groove (11) is provided with a vacancy part (12), the top of the fixed support (1) is provided with an annular cover plate (13), and the bottom surface of the vacancy part (12) is horizontal to the mounting groove (11); install "U" type installing frame (2) of two sets of symmetries in mounting groove (11), wherein be equipped with right angle baffle (21) in installing frame (2), right angle baffle (21) are including vertical plate (22) and lift diaphragm (23), and wherein the back of vertical plate (22) is equipped with telescopic machanism (223), and the top of lift diaphragm (23) is connected with adjusting bolt (231) that runs through sliding block (24) on installing frame (2) roof, on installing frame (2) roof was inlayed in sliding block (24) and direction of motion and vertical plate (22) direction of motion unanimous, wherein the side of lift diaphragm (23) and the front sliding connection of vertical plate (22), the top of lift diaphragm (23) is passed through arc gag lever post (232) and is spacing with opening (221) at vertical plate (22) top and is connected, and wherein the one end of arc gag lever post (232) is fixed at lift diaphragm (23) top, the other end of arc gag lever post (232) and opening (221) sliding connection in vertical plate (22).

2. The detachable probe card for semiconductor testing according to claim 1, wherein: a fixing frame (25) is installed at the joint of the telescopic mechanism (223) and the longitudinal plate (22), and a protection device (3) is arranged at the joint of the adjusting bolt (231) and the lifting transverse plate (23).

3. The detachable probe card for semiconductor testing according to claim 2, wherein: protection device (3) are close to regulating plate (31) of lift diaphragm (23) one end including suit at adjusting bolt (231), the top surface center and adjusting bolt (231) end connection of regulating plate (31), ring distribution has buffer beam (32) of being connected with lift diaphragm (23) on regulating plate (31) bottom surface.

4. The detachable probe card for semiconductor testing according to claim 3, wherein: be the cavity structure in regulating plate (31), wherein regulating plate (31) center is equipped with rotates spacing body (311) of being connected with adjusting bolt (231), the dead lever is passed through at the top of the outer wall of spacing body (311) and buffer beam (32) on regulating plate (31) and is connected.

5. The detachable probe card for semiconductor testing according to claim 4, wherein: buffer beam (32) are including the body of rod (321) and cushion collar (322), the outside at lift diaphragm (23) is fixed to the bottom of cushion collar (322), the body of rod (321) slip joint is kept away from the one end of lift diaphragm (23) in cushion collar (322), and is equipped with in cushion collar (322) with the body of rod (321) butt spring, the fixed connection all around of the body of rod (321) top and regulating plate (31).

6. The detachable probe card for semiconductor testing according to claim 2, wherein: the fixing frame (25) comprises a cross rod body (321) arranged on the back surface of the longitudinal plate (22), wherein the fixing frame (25) is positioned on a diagonal line of the back surface of the longitudinal plate (22), and the end part of the telescopic mechanism (223) is fixedly connected with the intersection point of the diagonal line.

7. The detachable probe card for semiconductor testing according to claim 1, wherein: the clamping connection between the longitudinal plate (22) and the lifting transverse plate (23), wherein the arc-shaped clamping grooves (222) are formed in the left side edge and the right side edge of the longitudinal plate (22), arc-shaped transition is formed between the surface of the longitudinal plate (22) and the two side surfaces of the longitudinal plate, and elastic clamping blocks (233) corresponding to the arc-shaped clamping grooves (222) are arranged at the end parts of the lifting transverse plate (23).

8. The detachable probe card for semiconductor testing according to claim 1, wherein: l-shaped reinforcing plates (26) are symmetrically distributed on the back surface of the mounting frame (2), and the parts, attached to the mounting grooves (11), of the reinforcing plates (26) are fixed through positioning bolts.