CN218212997U - Ultrahigh vacuum zinc sulfide window - Google Patents
Ultrahigh vacuum zinc sulfide window Download PDFInfo
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- CN218212997U CN218212997U CN202222184878.8U CN202222184878U CN218212997U CN 218212997 U CN218212997 U CN 218212997U CN 202222184878 U CN202222184878 U CN 202222184878U CN 218212997 U CN218212997 U CN 218212997U
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Abstract
The utility model discloses an ultrahigh vacuum zinc sulfide window relates to geological sample analytical instrument technical field, and it includes the base, and the base middle part is the counter bore, and counter bore upper portion is equipped with first metal seal circle, trapezoidal sealing washer, second metal seal circle, zinc sulfide crystal, pressure balance circle and upper cover plate in proper order. Preferably, the counter bore is coaxially provided with a circle of groove. During installation, after the bottom plate, the first metal sealing ring, the trapezoid sealing ring, the second metal sealing ring, the zinc sulfide crystal, the pressure balance ring and the upper cover plate are sequentially placed, the sealing ring and the zinc sulfide crystal between the bottom plate and the upper cover plate are extruded through the mounting screws, and the bottom plate and the sealing ring are tightly combined with the zinc sulfide crystal. The utility model discloses help improving the leakproofness and the heat stability of zinc sulfide window.
Description
Technical Field
The utility model relates to a geological sample analytical instrument technical field, concretely relates to super high vacuum zinc sulfide window.
Background
The zinc sulfide crystal has high optical transmittance in a plurality of spectral bands such as near infrared, middle infrared, far infrared and the like, and is often used as an infrared and thermal band lens. A carbon dioxide laser can be used as the heating source, typically with a wavelength of 10.6 μm. For this reason, the zinc sulfide window is a laser window commonly used in noble gas laboratories.
When rare gas analysis is carried out, high requirements are placed on the vacuum degree, the cavity gas release rate and the static background rising rate of a system for improving the sensitivity of the instrument. When the sample is replaced, the sample cavity is frequently exposed to the atmosphere, and a large amount of air is easily entrained in the replaced sample. Baking of the system is a necessary step in order to restore the sample chamber vacuum to an optimum state as quickly as possible. Although zinc sulfide can be normally used in atmospheric environment at a temperature of not higher than 250 ℃, the safety and the sealing performance of a window are greatly influenced by the overhigh temperature limited by the traditional zinc sulfide window manufacturing technology, so that the temperature is generally not higher than 150 ℃ during system baking, and the static vacuum background and the static background rising rate are influenced by long-time baking.
The zinc sulfide window in the prior art has the problems of insufficient sealing performance and thermal stability.
SUMMERY OF THE UTILITY MODEL
To the not enough among the prior art, the utility model provides an ultrahigh vacuum zinc sulfide window to improve the leakproofness and the thermal stability of zinc sulfide window.
In order to achieve the above purpose, the technical scheme of the utility model is that:
an ultra-high vacuum zinc sulfide window, comprising:
a base;
the counter bore is arranged in the middle of the base;
the first metal sealing ring is arranged on the counter bore;
the trapezoid sealing ring is arranged on the first metal sealing ring;
the second metal sealing ring is arranged on the trapezoid sealing ring;
the zinc sulfide crystal is arranged on the second metal sealing ring;
a pressure balance ring disposed on the zinc sulfide crystal; and (c) a second step of,
and the upper cover plate is arranged on the pressure balance ring.
The ultra-high vacuum zinc sulfide window as described above, further, the base further comprises:
a through hole penetrating the base; and (c) a second step of,
and the groove is coaxially arranged on the counter bore.
The ultrahigh vacuum zinc sulfide window is characterized in that the trapezoidal sealing ring is made of pure metal or alloy material with hardness higher than a set standard and extrusion deformation lower than the set standard.
The ultra-high vacuum zinc sulfide window is characterized in that the trapezoid sealing ring is made of one or any metal of iron, copper, aluminum and steel.
The ultrahigh vacuum zinc sulfide window is characterized in that the first metal sealing ring and the second metal sealing ring are made of pure metal or alloy materials, the hardness of the pure metal or alloy materials is lower than a set standard, and the extrusion deformation of the pure metal or alloy materials is higher than the set standard.
The ultra-high vacuum zinc sulfide window is characterized in that the first metal sealing ring and the second metal sealing ring are made of one or any metal of gold, silver, indium, tin, bismuth and babbitt metal.
The ultra-high vacuum zinc sulfide window is characterized in that the pressure balance ring is made of pure metal or alloy material with hardness higher than a set standard and extrusion deformation quantity lower than the set standard.
The ultra-high vacuum zinc sulfide window is characterized in that the pressure balance ring is made of one or any metal of iron, copper, aluminum and steel.
According to the ultrahigh vacuum zinc sulfide window, furthermore, the bottom of the upper cover plate is provided with a plurality of blind holes for mounting springs.
Compared with the prior art, the utility model, its beneficial effect lies in: for the sealed mode of traditional zinc sulfide window, the utility model discloses counter sink department at the bottom plate increases sealed recess, adopts the lower and yielding material of hardness as connecting and sealing, alright reach better sealed effect under lower effort. The design avoids exerting too large acting force on the zinc sulfide crystals to influence the service life. The spring and the pressure balance ring at the bottom of the upper cover plate enable the sealing of the whole window to have elasticity, the material has larger elastic space when heated and outgassed due to expansion with heat and contraction with cold, and the micro-leakage risk after the system is baked can be reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic diagram of an ultra-high vacuum sample chamber of a noble gas mass spectrometer according to an embodiment of the invention;
description of the reference numerals: 1. a base plate; 2. a counter bore; 3. a first metal seal ring; 4. a trapezoidal sealing ring; 5. a second metal seal ring; 6. zinc sulfide crystals; 7. a pressure balance ring; 8. an upper cover plate; 9. through the aperture; 10. and (4) a groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Example (b):
it should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, of embodiments of the present invention are intended to cover non-exclusive inclusions, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
It will be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing and simplifying the invention, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.
In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise. Furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly and encompass, for example, both fixed and removable coupling as well as integral coupling; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
In the present application, unless expressly stated or limited otherwise, a first feature "on" or "under" a second feature may be directly contacting the second feature or the first and second features may be indirectly contacting the second feature through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Referring to fig. 1, fig. 1 shows a schematic structural diagram of an ultrahigh vacuum sample chamber of the rare gas mass spectrometer of the present embodiment, which includes a base, a counter bore 2 is formed in the middle of the base, and a first metal sealing ring 3, a trapezoid sealing ring 4, a second metal sealing ring 5, a zinc sulfide crystal 6, a pressure balance ring 7, and an upper cover plate 8 are sequentially disposed on the upper portion of the counter bore 2. Preferably, the counter bore 2 is coaxially provided with a circle of groove 10. During installation, after the bottom plate 1, the first metal sealing ring 3, the trapezoid sealing ring 4, the second metal sealing ring 5, the zinc sulfide crystal 6, the pressure balance ring 7 and the upper cover plate 8 are sequentially placed, the sealing ring between the bottom plate 1 and the upper cover plate 8 and the zinc sulfide crystal 6 are extruded through the installation screws, and the bottom plate 1, the sealing ring and the sealing ring are tightly combined with the zinc sulfide crystal 6.
As an alternative embodiment, in some embodiments, the trapezoid sealing ring 4 is made of a pure metal or alloy material with high hardness and is not easily deformed when being pressed, and the material includes, but is not limited to, iron, copper, aluminum, steel, etc.
As an alternative embodiment, in some embodiments, first metal seal ring 3 and second metal seal ring 5 are relatively low hardness, extrusion-compliant pure metal or alloy materials including, but not limited to, gold, silver, indium, tin, bismuth, babbitt metal, and the like.
It should be noted that the trapezoid sealing ring 4 extrudes the first metal sealing ring 3, and the first metal sealing ring 3 has plasticity, so that the first metal sealing ring is pressed into the sealed groove 10 during installation, thereby enhancing the sealing performance with the bottom plate 1. The second metal sealing ring 5 is extruded by the trapezoid sealing ring 4, and due to the plasticity of the second metal sealing ring 5, excessive pressure cannot be applied to the zinc sulfide crystal 6, so that the stability of the ultrahigh vacuum zinc sulfide window is enhanced.
As an alternative embodiment, in some embodiments, the pressure balance ring 7 is made of a pure metal or alloy material with high hardness and difficult deformation during extrusion, and the material includes, but is not limited to, iron, copper, aluminum, steel, etc. The pressure balance ring 7 can effectively balance the extrusion force of the upper cover plate 8, so that local high pressure can not be generated on the zinc sulfide crystal 6, and the stability of the ultrahigh vacuum zinc sulfide window is further enhanced.
As an alternative, in some embodiments, the back of the upper cover plate 8 at the uppermost part is provided with small holes for mounting springs, and the springs at the back of the upper cover plate 8 can be used as a buffer during the heating process of the window, so as to prevent the vacuum stability from being affected by the expansion and contraction of the material.
It should be noted that the present invention is to apply the known materials in the prior art to the products with shapes and structures, and does not belong to the improvement proposed to the materials themselves.
Illustratively, the material used for the first metal seal ring 3 and the second metal seal ring 5 is pure indium, the material used for the trapezoid seal ring 4 is aluminum, and the material used for the upper pressure balance ring 7 is aluminum. Specifically, the width of the groove 10 in the middle of the counter bore 2 is 2mm, and the depth is 0.5mm. The ring width of the metal indium sealing ring is 5mm, and the thickness of the ring is 1mm. The height of the convex part of the trapezoidal sealing ring 4 is 1mm, and the width of the convex part is 1mm. When the trapezoid sealing ring is installed, part of the metal indium sealing ring is pressed into the groove 10, and the sealing performance of the trapezoid sealing ring 4 and the base is enhanced.
Illustratively, the material used for the first metal seal ring 3 and the second metal seal ring 5 is pure indium, the material used for the trapezoid seal ring 4 is aluminum, and the material used for the upper pressure balance ring 7 is aluminum. Specifically, the width of the groove 10 in the middle of the counter bore 2 is 2mm, and the depth is 0.5mm. The ring width of the metal indium sealing ring is 5mm, and the thickness of the metal indium sealing ring is 2mm. The height of the convex part of the trapezoidal sealing ring 4 is 1mm, and the width is 2mm. When the sealing device is installed, the groove 10 in the middle of the counter bore 2 is completely filled with the metal indium sealing ring, and the metal indium sealing ring presents a convex shape, so that the sealing performance of the trapezoidal sealing ring 4 and the base is enhanced.
Illustratively, the material used for the first metal sealing ring 3 and the second metal sealing ring 5 is pure silver, the trapezoid sealing ring 4 is a 316 stainless steel ring, and the upper pressure balancing ring 7 is a 316 stainless steel ring. Specifically, the width of the groove 10 in the middle of the counter bore 2 is 1mm, and the depth is 0.5mm. The wire diameter of the metal silver sealing ring is 1mm. The height of the convex part of the trapezoidal sealing ring 4 is 0.5mm, and the width is 1mm. During installation, the metal silver sealing ring with the same width as the groove 10 in the line diameter is extruded by the trapezoid sealing ring 4, so that the sealing performance of the trapezoid sealing ring 4 and the base is enhanced.
For the sealed mode of traditional zinc sulfide window, the utility model discloses counter bore 2 department at bottom plate 1 increases sealed recess 10, adopts the lower and yielding material of hardness as connecting and sealing (indicating first metal seal ring 3 and second metal seal ring 5), alright reach better sealed effect under lower effort. Meanwhile, the design also avoids exerting excessive acting force on the zinc sulfide crystal 6 to influence the service life of the zinc sulfide crystal. The spring at the bottom of the upper cover plate 8 and the pressure balance ring 7 enable the whole window to be elastic in sealing, and the materials have larger elastic space in expansion with heat and contraction with cold during heating and air release, so that the risk of micro leakage after the system is baked can be reduced.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the essence of the present invention should be covered in the protection scope of the present invention.
Claims (9)
1. An ultra-high vacuum zinc sulfide window, comprising:
a base;
the counter bore is arranged in the middle of the base;
the first metal sealing ring is arranged on the counter bore;
the trapezoid sealing ring is arranged on the first metal sealing ring;
the second metal sealing ring is arranged on the trapezoid sealing ring;
the zinc sulfide crystal is arranged on the second metal sealing ring;
the pressure balance ring is arranged on the zinc sulfide crystal; and (c) a second step of,
and the upper cover plate is arranged on the pressure balance ring.
2. The ultra-high vacuum zinc sulfide window of claim 1, wherein the base further comprises:
a through hole penetrating the base; and (c) a second step of,
and the groove is coaxially arranged on the counter bore.
3. The ultra-high vacuum zinc sulfide window of claim 1, wherein the trapezoid sealing ring is made of a pure metal or an alloy material having a hardness higher than a set standard and an extrusion deformation amount lower than the set standard.
4. The ultra-high vacuum zinc sulfide window of claim 1, wherein the trapezoidal sealing ring is made of one or any metal of iron, copper, aluminum, steel.
5. The ultra-high vacuum zinc sulfide window of claim 1, wherein the first metal seal ring and the second metal seal ring are made of pure metal or alloy material with hardness lower than a set standard and extrusion deformation higher than the set standard.
6. The ultra-high vacuum zinc sulfide window of claim 1 wherein the first and second metal seal rings are made of one or any of gold, silver, indium, tin, bismuth, babbitt metal.
7. The ultra-high vacuum zinc sulfide window of claim 1, wherein the pressure balance ring is made of a pure metal or alloy material having a hardness higher than a set level and an extrusion deformation amount lower than the set level.
8. The ultra-high vacuum zinc sulfide window of claim 1, wherein the pressure balance ring is made of one or any of iron, copper, aluminum, steel.
9. The ultra-high vacuum zinc sulfide window of claim 1, wherein the bottom of the upper cover plate is provided with a plurality of blind holes for mounting springs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222184878.8U CN218212997U (en) | 2022-08-18 | 2022-08-18 | Ultrahigh vacuum zinc sulfide window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222184878.8U CN218212997U (en) | 2022-08-18 | 2022-08-18 | Ultrahigh vacuum zinc sulfide window |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218212997U true CN218212997U (en) | 2023-01-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222184878.8U Active CN218212997U (en) | 2022-08-18 | 2022-08-18 | Ultrahigh vacuum zinc sulfide window |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218212997U (en) |
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2022
- 2022-08-18 CN CN202222184878.8U patent/CN218212997U/en active Active
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