CN218196149U

CN218196149U - Follow fixture for silicon rod slicing/polishing

Info

Publication number: CN218196149U
Application number: CN202221886902.6U
Authority: CN
Inventors: 李全普; 郑家坤; 杨真永; 杨旭
Original assignee: Lianzhi Dalian Intelligent Technology Co Ltd
Current assignee: Lianzhi Dalian Intelligent Technology Co Ltd
Priority date: 2022-07-21
Filing date: 2022-07-21
Publication date: 2023-01-03
Anticipated expiration: 2032-07-21

Abstract

The utility model belongs to the technical field of monocrystalline silicon, polycrystalline silicon rod butt, abrasive machining equipment, a retinue anchor clamps that is used for silicon rod butt/polishing usefulness is disclosed. Comprises a follower fixture seat body, a fixed clamp head seat and a movable clamp head seat; a fixed chuck seat is arranged at one end of the follower fixture seat body, and a floating fixed chuck is inserted into the bottom of the front end of the fixed chuck seat; the upper end of the floating fixed chuck is connected with a power butt fluted disc A; the pallet base body is provided with a linear guide rail A and a T-shaped lead screw, and the movable clamp base body is movably connected with the pallet base body through the linear guide rail A, the T-shaped lead screw and a sliding block; the top of the movable chuck seat is provided with a floating movable chuck, and the side surface of the top of the movable chuck seat is provided with a rotary clamping cylinder; the front end of a piston rod of the air cylinder is connected with the connecting plate, one end of a base body of the pallet is provided with a bearing seat A, a bearing A is arranged in the bearing seat A, and a clamping butt joint shaft penetrates through the bearing A; the follow fixture has good clamping reference and low error rate, reduces silicon material loss and improves grinding efficiency.

Description

Following clamp for silicon rod squaring/polishing

Technical Field

The utility model belongs to the technical field of monocrystalline silicon, polycrystalline silicon rod butt, abrasive machining equipment, the utility model relates to a pallet for silicon rod butt/polishing usefulness.

Background

In the prior art, an integrated forming device (a manufacturing island) is mostly adopted for cutting and grinding monocrystalline silicon and polycrystalline silicon rods, the whole working process is operated and completed in the integrated machine, a workbench clamp in the integrated machine forming device follows the manufacturing island, but the integrated forming device has high equipment cost, when one part needs to be maintained, the whole machine needs to be stopped and maintained, the equipment maintenance time is long, the maintenance cost is high, and meanwhile, when the cutting process or the grinding and polishing process is required to be carried out independently, the equipment runs integrally, the time is long, and unnecessary resource waste is caused. The other type in the prior art is a production automation line consisting of a general square cutting machine (single cutting and double cutting) general grinding machine and an automation logistics technology, wherein a workbench is a single machine with a workbench and is used for independent clamping; therefore, the cost is higher, the clamping error is large, and the silicon material loss and the yield are low.

SUMMERY OF THE UTILITY MODEL

The utility model aims at overcoming not enough among the above-mentioned background art, providing a pallet for silicon rod butt/polishing usefulness, this pallet clamping benchmark is good, the error rate is low, reduces silicon material loss simultaneously, improves grinding efficiency, simplifies other butt machines, grinding machine function, reduction in production cost.

The utility model provides a technical scheme that its technical problem adopted is: a follower fixture for silicon rod squaring/polishing comprises a follower fixture seat body, a fixed clamp head seat and a movable clamp head seat; a fixed chuck seat is arranged at one end of the pallet seat body, and a floating fixed chuck is inserted into the bottom of the front end of the fixed chuck seat; the upper end of the floating fixed chuck is connected with a power butt fluted disc A; the pallet base body is provided with a linear guide rail A and a T-shaped lead screw, and the movable clamp base body is movably connected with the pallet base body through the linear guide rail A, the T-shaped lead screw and a sliding block; the top of the movable chuck seat is provided with a floating movable chuck, and the side surface of the top of the movable chuck seat is provided with a rotary clamping cylinder; the front end of a cylinder piston rod is connected with a connecting plate, one end of a pallet base body is provided with a bearing seat A, a bearing A is arranged in the bearing seat A, and a clamping butt joint shaft penetrates through the bearing A; the clamping butt joint shaft is connected with the T-shaped lead screw through a coupler A, and a pneumatic clamp is arranged at the position adjacent to the bearing A.

Furthermore, the fixed clamp base is fixedly connected with one side of the upper part of the accompanying clamp base;

furthermore, the power butt-joint fluted disc A is connected with the floating fixed chuck to form a power connecting piece, and the power connecting piece penetrates through the front end of the fixed chuck seat;

furthermore, the two ends of the T-shaped lead screw are respectively arranged on the lead screw seat A and the lead screw seat B, and the lead screw seat A and the lead screw seat B are arranged on the pallet body.

Furthermore, the clamping butt-joint shaft is connected with the follower fixture seat body through a bearing seat A, and the clamping butt-joint shaft is arranged on one side of the fixed clamp seat body. A locking nut A is arranged on the clamping butt joint shaft and used for locking the bearing A; and a pneumatic clamp is arranged adjacent to the bearing A and used for locking the T-shaped lead screw.

Furthermore, a floating movable chuck is arranged at the top of the movable chuck seat, and the movable chuck seat moves and clamps the single crystal silicon rod through the rotation of the T-shaped lead screw; the rotary clamping cylinder is used for clamping the flaw-piece of the silicon single crystal rod during processing. The connecting plate is arranged at the bottom of the movable chuck base; two clamping rods are arranged on the connecting plate.

Furthermore, a positioning plate is also arranged on the pallet body, and a plurality of pin holes are formed in the positioning plate; and the positioning plate is arranged below the movable chuck seat.

Furthermore, the side of the follower fixture seat body is provided with a positioning hole for connecting with positioning pins of other equipment. Other devices may be a squarer, grinder, polishing machine, etc. with locating pins.

The traveling fixture is also provided with a PLC system; the air cylinder, the pneumatic clamp, the small oil cylinder and the servo motor are respectively connected with a PLC system, the specific models are not limited, and the working functions can be realized.

Compared with the prior art, the utility model beneficial effect who has is:

the utility model provides a pair of a pallet for silicon rod butt/polishing usefulness, this pallet clamping benchmark is good, the error rate is low, reduces silicon material loss simultaneously, improves grinding efficiency, simplifies other butt machines, grinding machine function, reduction in production cost. The follower fixture can automatically clamp the crystal bars with the diameter of 200-310mm and the length of 700-950mm and various specifications.

Drawings

The invention will be further described with reference to the following figures and examples:

fig. 1 is a perspective view of a pallet for slicing/polishing a silicon rod according to the present invention.

Fig. 2 is a cross-sectional view of a pallet for slicing/polishing a silicon rod according to the present invention.

Fig. 3 is a perspective view of the powered docking mechanism in an embodiment.

Fig. 4 is a cross-sectional view of the powered docking mechanism in an embodiment.

FIG. 5 is a schematic view of the pallet interfacing with the power docking mechanism.

In the drawing, 1, a pallet base body, 2, a linear guide rail A,3, T-shaped lead screws, 4, a movable chuck base, 5, a floating movable chuck, 6, a clamping rod, 7, a connecting plate, 8, an air cylinder, 9, a single crystal silicon rod, 10, a floating fixed chuck, 11, a power butt fluted disc A,12, a fixed chuck base, 13, a clamping butt shaft, 14, a pneumatic caliper, 15, a bearing A,16, a bearing seat A,17, a locking nut A,18, a coupler A,19, a lead screw seat A,20, a positioning hole, 21, a lead screw seat B,22, a power butt fluted disc B,23, a release pin, 24, a power butt seat, 25, a linear guide rail B,26, a small oil cylinder, 27, a servo motor, 28, a bearing seat B,29, a bearing B,30, a gland, 31, a locking nut B,32, a coupler B,33, a pin shaft pin, 34, a spring A,35, a locking pin, 36 and a spring B are arranged.

Detailed Description

The present invention will be further described with reference to the drawings attached to the specification, but the present invention is not limited to the following embodiments. Other devices involved in the embodiments include, but are not limited to, a squaring machine, a polishing machine, an up/down feeder, a grinding machine, an AGV cart, etc., and the functions thereof are implemented without limitation to models. The robot vision loading and unloading device in the embodiment is a structure disclosed in the patent CN216613042U applied by the applicant. In the embodiment, the robot is abbreviated as a vision robot.

Example 1

A pallet for silicon rod squaring/polishing, as shown in fig. 1-2, comprising a pallet base 1, a fixed chuck base 12, a movable chuck base 4; a fixed chuck base 12 is arranged at one end of the pallet base 1, and a floating fixed chuck 10 is inserted at the bottom of the front end of the fixed chuck base 12; the upper end of the floating fixed chuck 10 is connected with a power docking fluted disc A11; a linear guide rail A2 and a T-shaped lead screw 3 are arranged on the pallet base body 1, and the movable clamp base 4 is movably connected with the pallet base body 1 through the linear guide rail A2, the T-shaped lead screw 3 and a slide block; the top of the movable chuck seat 4 is provided with a floating movable chuck 5, and the side surface of the top of the movable chuck seat 4 is provided with a rotary clamping cylinder 8; the front end of a piston rod of the air cylinder 8 is connected with the connecting plate 7, one end of the pallet base body 1 is provided with a bearing seat A16, a bearing A15 is arranged in the bearing seat A16, and a clamping butt joint shaft 13 penetrates through the bearing A15; the clamping butt joint shaft 13 is connected with the T-shaped lead screw 3 through a coupling A18, and a pneumatic clamp 14 is arranged at the position adjacent to a bearing A15.

Further, the fixed clamp head seat 12 is fixedly connected with one side of the upper part of the pallet seat body 1;

furthermore, the dynamic docking fluted disc A11 is connected with the floating fixed chuck 10 to form a dynamic connecting piece, and the dynamic connecting piece penetrates through the front end of the fixed chuck seat 12;

further, the two ends of the T-shaped lead screw 3 are respectively installed on a lead screw seat a 19 and a lead screw seat B21, and the lead screw seat a 19 and the lead screw seat B21 are installed on the pallet base body 1.

Furthermore, the clamping butt-joint shaft 13 is connected with the pallet body 1 through a bearing seat a 16, and the clamping butt-joint shaft 13 is arranged on one side of the fixed clamp head seat 12. A locking nut A17 is arranged on the clamping butt joint shaft 13 and used for locking a bearing A15; a pneumatic clamp 14 is arranged adjacent to the bearing A15 and used for locking the T-shaped lead screw 3.

Furthermore, a floating movable chuck 5 is arranged at the top of the movable chuck seat 4, and the movable chuck seat 4 moves and clamps the single crystal silicon rod 9 through the rotation of the T-shaped lead screw 3; the rotary clamping cylinder 8 is used for clamping the flaw-piece of the monocrystalline silicon rod 9 during processing. The connecting plate 7 is arranged at the bottom of the movable chuck seat 4; two clamping rods 6 are mounted on the connecting plate 7.

Furthermore, a positioning plate is also arranged on the pallet base body 1, and a plurality of pin holes are formed in the positioning plate; and the positioning plate is arranged below the movable chuck seat 4.

Furthermore, the side surface of the pallet base body 1 is provided with a plurality of positioning holes 20, preferably two positioning holes 20 are arranged on the opposite side of other parts; for connection with locating pins of other equipment. Other devices may be a squarer, grinder, polishing machine, etc. with locating pins.

When the following fixture is used for connecting other equipment, the following fixture can be butted by virtue of a power butting mechanism when the whole work is finished. The power docking mechanism is shown in figures 3-4; the power butt joint mechanism comprises a power butt joint support 24 and a power butt joint fluted disc B22, wherein a linear guide rail B25 is arranged at the bottom of the power butt joint support 24, and the power butt joint mechanism is connected with other equipment through the linear guide rail B25 and a sliding block; preferably fixedly connected with the upright posts of other equipment, and a small-sized oil cylinder 26 is arranged on the power butt joint support 24; the front end of the power butt joint support 24 is provided with a bearing seat B28, a bearing B29 is arranged in the bearing seat B28, a power butt joint toothed disc B22 is installed on the bearing seat B28 through the bearing B29, the power butt joint toothed disc B22 is connected with a servo motor 27 through a coupler B32, and the servo motor 27 is installed on the power butt joint support 24; a gland 30 is arranged at one end of the bearing seat B28, and the gland 30 is in contact with the outer ring of the bearing B29; and a locking nut B31 is arranged on the power docking fluted disc B22, and the locking nut B31 is contacted with the inner ring of the bearing B29. The power butt joint support 24 is also provided with an unlocking pin 23, and the adjacent surface of the follower fixture and the power butt joint support 24 is also provided with a positioning pin hole which can be movably connected with the unlocking pin 23. An unlocking pin 23 is arranged at the adjacent position of the power docking fluted disc B22, and a pin shaft 33 is also arranged on the follower fixture; the pin shaft 33 is arranged right below the unlocking pin 23, the spring A34 is arranged on the periphery of the lower portion of the pin shaft 33, the locking pin 35 is arranged below the pin shaft 33, the periphery of one end of the locking pin 35 is partially connected with the spring B36, and the other end of the locking pin is connected with the floating fixed chuck 10 in the pallet.

The locking pin 35 is vertical to the pin shaft 33, the locking pin 35 is horizontally arranged, and the middle of the locking pin 35 is of a concave structure and is movably connected with the bottom of the pin shaft 33; thereby moving the locking pin 35 to compress the spring B36.

Further, a CXR-LA40X80 small oil cylinder 26 is filled with oil and pressurized, a piston rod of the oil cylinder drives the power butt joint support 24 to move to the top on the guide rail 25, and oil locking and pressure maintaining are carried out simultaneously.

Further, the power butt-joint fluted disc A11 is butted with the power butt-joint fluted disc B22, so that the power butt-joint support 24 and the pallet are integrated.

When the pallet is applied to the feeding/discharging machine, the working process is as follows: firstly, an AGV (F4-1000C) trolley drives an empty pallet to move to the center of an upper/lower machine, then a pallet fork of the AGV trolley and the pallet are lifted to a certain height together and exceed the height of a thick positioning pin on a working platform of the upper/lower machine, the AGV trolley continuously moves forward, when two wedge-shaped positioning pins on a pallet on the AVG trolley are in contact with two wedge-shaped positioning blocks on the upper/lower machine, because four universal bearings are arranged between the lower part of the pallet fork and the lifting pallet fork, the pallet and the pallet can deflect, when the AGV trolley continuously moves forward, the pallet and the pallet deflect due to the limitation of the wedge-shaped positioning blocks, the horizontal center of the pallet is ensured to be coincident with the center between the two wedge-shaped positioning blocks on the upper/lower machine, after butt joint positioning, an electric cylinder on the AGV trolley acts to pull out a locking pin of the AGV trolley, the thick positioning pin on a working platform of the upper/lower machine is enabled to correspond to a pin hole at the bottom of the pallet and the pallet fork and the pallet of the pallet, then the AGV trolley falls back to the original place, and then the AGV trolley is withdrawn from the upper/lower machine; meanwhile, the pallet and the workbench are positioned and butted by two coarse positioning pins, and a fine positioning hole on the back of the pallet is positioned with a fine positioning pin on the front of the upright post of the feeding/discharging machine, so that the back of the pallet is tightly attached to the front of the upright post of the feeding/discharging machine; then, the feeding/discharging machine enables a butt-joint fluted disc arranged at the upper part of the feeding/discharging machine to be in butt joint with a power butt-joint fluted disc A11 at the upper part of the pallet through a servo motor of the feeding/discharging machine, and meanwhile, the pneumatic clamp 14 is opened by ventilation; the visual robot grabs the silicon rod, finds out the position of a crystal line and a central line of the silicon rod, then sends the silicon rod to the middle position of two chucks of a following fixture in an upper/lower feeder, a servo motor in the upper/lower feeder operates to drive a butt-joint fluted disc and a power butt-joint fluted disc A11 to rotate, meanwhile, a T-shaped lead screw 3 rotates to further drive a movable chuck seat 4 and a movable floating chuck 5 on the movable chuck seat to move upwards, when the end surface of the floating movable chuck contacts with the lower end surface of a single crystal silicon rod 9, a chuck of the visual robot and the single crystal silicon rod 9 move upwards along with the movable chuck seat 4, when the end surface of a floating fixed chuck 10 on a fixed chuck seat 12 contacts with the upper end surface of the single crystal silicon rod 9, the chuck of the visual robot stops following, the servo motor in the upper/lower feeder continues to rotate and when the servo motor reaches a set torque, the rotation is stopped, meanwhile, the air inlet of a pneumatic caliper 14 is cut off, the T-shaped lead screw 3 is locked, and the clamping state of the single crystal silicon rod 9 is kept; and the gripper of the vision robot is released and returns to the original position. The working table and the pallet move to the front end, the pallet is separated from the upright post of the feeding/discharging machine, the empty AGV trolley drives the pallet to enter the middle position of the feeding/discharging machine, the empty AGV trolley is lifted to enable the lower bottom surface of the pallet to be separated from the working table, the lifting height exceeds the thick positioning pin, then the AGV trolley drives the pallet to exit the working table, the fork of the AGV falls back to the original point, and the AGV exits the feeding/discharging machine.

When the pallet clamp and the power butt joint mechanism are matched and applied to the square cutting machine, the AGV trolley drives the pallet clamp to convey to the square cutting machine, the pallet forks and the pallet clamp of the AGV trolley rise to a certain height and exceed the height of the thick positioning pin on the workbench of the square cutting machine, then the AGV trolley drives the pallet clamp and the water receiving disc of the square cutting machine to move towards the inside of the square cutting machine, the thick positioning pin on the workbench of the square cutting machine corresponds to the positioning pin hole in the bottom of the pallet clamp, then the pallet forks and the pallet support of the AGV trolley are lowered back to the original position, then the square cutting machine is withdrawn, and the water receiving disc returns to the original position along with the positioning pin; meanwhile, the pallet is in positioning butt joint with two coarse positioning pins on the workbench, a fine positioning hole on the back of the pallet is positioned with a fine positioning pin on the front of a square cutting machine upright post, the back of the pallet is tightly attached to the front of the square cutting machine upright post, a servo motor 27 drives a power butt-joint fluted disc A11 to be in butt joint with a power butt-joint fluted disc B22, and a power butt-joint support 24 and the pallet are integrated; after the cutting process is finished, the servo motor 27 on the power butt joint support 24 is connected with the PLC system to instruct to rotate by 90 degrees, and then the silicon rod is clamped again along with the action of the clamp cylinder 8; then, repeating the process of the first square cutting, after the square cutting is finished, switching on the servo motor 27 on the power butt joint support 24 to instruct the reverse rotation to 90 degrees, returning to the original position, and separating the power butt joint fluted disc A11 from the power butt joint fluted disc B22 to separate the power butt joint support 24 from the pallet; the movable workbench and the pallet move to the front end, the pallet is separated from the stand column of the square cutting machine, the empty AGV trolley drives the pallet to enter the middle position of the square cutting machine, the supporting position of the pallet is just in the lower bottom surface of the pallet, the pallet fork and the pallet above the pallet fork are lifted, the lower bottom surface of the pallet fork is separated from the work table of the square cutting machine, the lifting height exceeds the coarse positioning pin, the AGV trolley drives the pallet fork to exit from the work table, the pallet fork and the pallet fork of the AGV fall back to the original point, and the AGV exits from the square cutting machine.

The AGV trolley can be further provided with a pallet, the pallet is arranged on a fork of the AGV trolley, four universal bearings are arranged at the contact position of the bottom of the pallet and the fork, each universal bearing is arranged in a limiting seat, four sides of the bottom of the pallet are respectively provided with two supports, compression springs are arranged on the supports respectively, and a floating effect in a small range is achieved; electric cylinders are respectively arranged on two sides of the upper part of the accompanying bracket; each electric cylinder is provided with a bolt for locking; the overturning prevention device has the function of preventing the pallet from toppling during transportation. Two wedge-shaped positioning pins are arranged at the bottoms of the contact surfaces of the following bracket and other square cutters, square grinders and feeding/discharging machines; is used for butt joint positioning with two wedge-shaped positioning blocks on a square cutting machine, a square grinding machine and a feeding/discharging machine. And a coarse positioning pin is arranged on the contact surface of the pallet and the pallet to play a role in limiting.

Although the invention has been described in detail with respect to the general description and the specific embodiments, it will be apparent to those skilled in the art that modifications and improvements can be made based on the invention. Therefore, such modifications and improvements are intended to be within the scope of the invention as claimed.

Claims

1. A following clamp for silicon rod squaring/polishing is characterized by comprising a following clamp seat body (1), a fixed clamp head seat (12) and a movable clamp head seat (4); a fixed chuck base (12) is arranged at one end of the follower fixture base body (1), and a floating fixed chuck (10) is inserted into the bottom of the front end of the fixed chuck base (12); the upper end of the floating fixed chuck (10) is connected with a power butt fluted disc A (11); a linear guide rail A (2) and a T-shaped lead screw (3) are arranged on the follower fixture base body (1), and the movable fixture base (4) is movably connected with the follower fixture base body (1) through the linear guide rail A (2), the T-shaped lead screw (3) and a sliding block; the top of the movable chuck seat (4) is provided with a floating movable chuck (5), and the side surface of the top of the movable chuck seat (4) is provided with a rotary clamping cylinder (8); the front end of a piston rod of the air cylinder (8) is connected with the connecting plate (7), one end of the pallet base body (1) is provided with a bearing seat A (16), a bearing A (15) is arranged in the bearing seat A (16), and a clamping butt joint shaft (13) penetrates through the bearing A (15); the clamping butt joint shaft (13) is connected with the T-shaped lead screw (3) through a shaft coupling A (18), and a pneumatic clamp (14) is arranged at the position adjacent to the bearing A (15).

2. The pallet for silicon rod squaring/polishing according to claim 1, wherein both ends of the T-shaped lead screw (3) are respectively installed on a lead screw base a (19) and a lead screw base B (21), and the lead screw base a (19) and the lead screw base B (21) are installed on the pallet body (1).

3. The pallet for slicing/polishing silicon rods according to claim 2, wherein the power counter-toothed disk A (11) is connected to the floating fixed collet (10) to form a power connection member, and the power connection member is disposed through the front end of the fixed collet seat (12).

4. The pallet for silicon rod squaring/polishing according to claim 3, characterized in that the clamping butt-joint shaft (13) is connected with the pallet body (1) through a bearing seat A (16), and the clamping butt-joint shaft (13) is arranged at one side of the fixed chuck seat (12); and a locking nut A (17) is arranged on the clamping butt joint shaft (13) and used for locking the bearing A (15).

5. The follow clamp for silicon rod cutting/polishing as claimed in claim 4, characterized in that the connecting plate (7) is arranged at the bottom of the moving chuck seat (4); two clamping rods (6) are arranged on the connecting plate (7).

6. The pallet for silicon rod squaring/polishing according to claim 5, wherein the pallet body (1) is further provided with a positioning plate, and the positioning plate is provided with a plurality of pin holes; and the positioning plate is arranged below the movable clamping head seat (4).

7. The pallet for silicon rod squaring/polishing according to claim 5, wherein the pallet body (1) is provided with a plurality of positioning holes (20) on the side surface thereof, and the positioning holes (20) are provided.