CN218183682U

CN218183682U - Data processing device for integrated circuit manufacturing

Info

Publication number: CN218183682U
Application number: CN202221406130.1U
Authority: CN
Inventors: 姚金标
Original assignee: Wuhan Three Synthetic Technology Co ltd
Current assignee: Wuhan Three Synthetic Technology Co ltd
Priority date: 2022-06-07
Filing date: 2022-06-07
Publication date: 2022-12-30
Anticipated expiration: 2032-06-07

Abstract

The utility model discloses a device for data processing of integrated circuit manufacturing, belong to integrated circuit technical field, a device for data processing of integrated circuit manufacturing, including handling the case body, the one end fixed mounting that the connecting rod was kept away from to the apron has the elastic sealing pad, a plurality of fixed slots have been seted up to the upper wall of handling the case body, the upper end of apron is equipped with the coupling mechanism with fixed slot matched with, the upper end of apron is equipped with fixed establishment, this scheme accessible fixed establishment and coupling mechanism's cooperation is fixed and is relieved fixedly to the restriction of apron and elastic sealing pad, the installation when having realized handling the case body overhauls dismantles the simplicity and convenience of process, not only labour saving and time saving, high work efficiency, and greatly prevented the screw from using the emergence that can produce the circumstances such as corrosion and smooth silk for the installation is dismantled conveniently and more firm and airtight, improve data processing apparatus's result of use.

Description

Data processing device for integrated circuit manufacturing

Technical Field

The utility model relates to an integrated circuit technology field, more specifically say, relate to a data processing's device for integrated circuit makes.

Background

An integrated circuit is a miniature electronic device or component. The transistor, resistor, capacitor and inductor elements and wiring required in a circuit are interconnected together by a certain process, and are manufactured on one or more small semiconductor wafers or dielectric substrates to form a micro structure with the required circuit function. In the manufacturing process of the integrated circuit, the data processing device is required to perform preliminary analysis and monitoring on the data acquired by the integrated circuit, whether a machine table works normally in the production process can be judged, and the problem is searched according to the result of the data, so that the production parameters can be adjusted in time.

The data processing device of the present integrated circuit is generally closed, the access hole is fixed through installation of screws and the like, when the internal parts of the data processing device are overhauled and replaced, the data processing device is complex to disassemble and assemble, more manpower is consumed, the whole working efficiency is low, and the problems of corrosion, sliding wires and the like can be caused when the screws and the like are used for a long time, so that the access plate cannot be assembled and disassembled or is not firm in assembly, the tightness is poor, and the using effect of the data processing device is directly influenced.

Therefore, it is necessary to provide a data processing apparatus for integrated circuit manufacturing to solve the above technical problems.

SUMMERY OF THE UTILITY MODEL

An object of the present invention is to provide a data processing apparatus for integrated circuit manufacturing to solve the above technical problem.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a device for data processing of integrated circuit manufacturing, is including handling the case body, the downside outer wall fixedly connected with connecting plate of handling the case body, the left end of connecting plate articulates there is the rotor plate, the middle part of rotor plate slides and runs through there are a plurality of connecting rods, the both ends difference fixedly connected with push pedal and the apron of connecting rod, the one end fixed mounting that the connecting rod was kept away from to the apron has the elastic sealing pad, a plurality of fixed slots have been seted up to the upper wall of handling the case body, the upper end of apron is equipped with the coupling mechanism with fixed slot matched with, the upper end of apron is equipped with fixed establishment.

Furthermore, coupling mechanism is including fixed connection in the keysets of apron upper end, the outer wall fixedly connected with a plurality of fixed picture pegs of keysets, a plurality of fixed orificess have been seted up on the fixed picture peg.

Further, fixed establishment is including a plurality of transmission chambeies of seting up in handling case body upper wall, transmission chamber is linked together with fixed slot, the upper wall activity in transmission chamber has run through the dead lever, the outer wall fixedly connected with piston block of dead lever, the inner wall sliding connection in piston block outer wall and transmission chamber, the first spring of fixedly connected with between the upper wall in piston block and transmission chamber.

Furthermore, the first spring is sleeved outside the fixing rod, and the upper end of the fixing rod is fixedly connected with a pulling block.

Furthermore, an arc edge is arranged on the left side of the lower end of the fixing rod, and the end part of the fixing insertion plate is matched with the arc edge at the lower end of the fixing rod.

Furthermore, the outer wall of the rotating plate is fixedly connected with a plurality of second springs, and one ends, far away from the rotating plate, of the second springs are fixedly connected with the outer wall of the cover plate.

Compared with the prior art, the utility model has the advantages of:

when the inner part of the treatment box body needs to be overhauled or replaced, the limit fixation of the cover plate and the elastic sealing gasket can be released through the matching of the fixing mechanism and the connecting mechanism, then the rotating plate can drive the cover plate and the elastic sealing gasket to rotate anticlockwise and outwards, and the operations of overhauling, replacing and the like can be conveniently carried out on the inner part of the treatment box body; when the installation after finishing, can rotate the rotor plate clockwise, then can promote the push pedal and pass through the connecting rod and drive apron and the sealed pad of elasticity and move to the right, at this in-process, fix apron and the sealed pad of elasticity through fixed establishment and coupling mechanism's cooperation. The installation when having realized handling the maintenance of case body dismantles the simplicity of process, and not only the dismouting is simple labour saving and time saving, and work efficiency is high, has greatly prevented moreover that the screw from using the emergence that can produce the circumstances such as corrosion and smooth silk for the installation is dismantled conveniently and more firm and airtight, improves data processing device's result of use.

Can seal the case body opening of handling through apron and elastic sealing pad, greatly improve the protection effect of handling the inside components and parts of case body, and then improve life and the result of use who handles the case body. After a period of follow-up use, whether the elastic sealing gasket needs to be replaced or not can be known through the matching condition of the elastic sealing gasket and the fixing mechanism and the connecting mechanism, the replacement is timely and effective, and the long-term use effect of the treatment box body is improved.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is an enlarged schematic view of the portion A in FIG. 1;

FIG. 3 is a schematic view of the front view internal section structure of the treatment box body of the present invention;

FIG. 4 is an enlarged view of the structure at B in FIG. 3;

FIG. 5 is a schematic view of the shape and structure of the cover plate of the present invention when the cover plate is opened;

FIG. 6 is an enlarged view of the structure at C in FIG. 5;

fig. 7 is a schematic view of the local structure of the fixing rod of the present invention.

The numbering in the figures illustrates:

1. a treatment tank body; 2. a connecting plate; 3. a rotating plate; 4. a connecting rod; 5. pushing the plate; 6. a cover plate; 7. an elastic seal gasket; 8. a connecting mechanism; 801. a patch panel; 802. fixing the inserting plate; 803. a fixing hole; 9. a fixing mechanism; 901. a transmission cavity; 902. a fixing rod; 903. a piston block; 904. a first spring; 10. fixing the slot; 11. pulling the block; 12. a second spring.

Detailed Description

The first embodiment is as follows:

referring to fig. 1 and fig. 3-5, a data processing device for integrated circuit manufacturing includes a processing box body 1, a connecting plate 2 is fixedly connected to the outer wall of the lower side of the processing box body 1, a rotating plate 3 is hinged to the left end of the connecting plate 2, a plurality of connecting rods 4 are slidably penetrated through the middle of the rotating plate 3, two ends of each connecting rod 4 are respectively and fixedly connected with a push plate 5 and a cover plate 6, an elastic sealing gasket 7 is fixedly mounted at one end of each cover plate 6, which is far away from the corresponding connecting rod 4, a plurality of fixing slots 10 are formed in the upper wall of the processing box body 1, a connecting mechanism 8 matched with the corresponding fixing slots 10 is arranged at the upper end of each cover plate 6, and a fixing mechanism 9 is arranged at the upper end of each cover plate 6. When the maintenance box is used, when the data processing device, namely the interior of the processing box body 1, needs to be maintained or replaced, the limit fixation of the cover plate 6 and the elastic sealing gasket 7 can be released through the matching of the fixing mechanism 9 and the connecting mechanism 8, then the rotating plate 3 can rotate around a hinge point with the connecting plate 2, the rotating plate 3, the cover plate 6 and the elastic sealing gasket 7 can rotate anticlockwise and outwards to be opened, and as shown in fig. 5, the maintenance and replacement operations and the like can be conveniently performed on the interior of the processing box body 1; when handling the back installation that finishes, can be with rotor plate 3 round with connecting plate 2 pin joint clockwise rotation for rotor plate 3 is perpendicular with connecting plate 2, then can promote push pedal 5 and pass through connecting rod 4 and drive apron 6 and the right side of elastic sealing pad 7 and move, finally make apron 6 and elastic sealing pad 7 paste the left wall of tightly handling case body 1, at this in-process, the cooperation through fixed establishment 9 and coupling mechanism 8 is fixed apron 6 and elastic sealing pad 7. The installation when having realized the maintenance to handling case body 1 dismantles the simplicity of process, has avoided at present needing to pass through the screw fixation, and not only the dismouting is simple labour saving and time saving, and work efficiency is high, has greatly prevented moreover that the screw from using the emergence that can produce the circumstances such as corrosion and smooth silk for a long time for the installation is dismantled conveniently and is makeed to handle case body 1 more firmly and airtight, improves data processing apparatus's result of use.

Can seal 1 opening of case body through apron 6 and elastic sealing gasket 7 to elastic sealing gasket 7 makes pressurized state, carries out fine sealing through elastic sealing gasket 7, has greatly improved the protection effect of handling 1 inside components and parts of case body, and then has improved life and the result of use of handling case body 1. After follow-up use a period, elastic sealing pad 7 can slowly wear and tear, and elasticity also can diminish gradually, can know through the cooperation condition with fixed establishment 9 and coupling mechanism 8 whether elastic sealing pad 7 needs to be changed, and it is timely effective to change, can greatly avoid the influence to handle the closure effect of case body 1, improves the long-term result of use of handling case body 1.

Referring to fig. 2, 4 and 6, the connection mechanism 8 includes an adapter plate 801 fixedly connected to the upper end of the cover plate 6, the outer wall of the adapter plate 801 is fixedly connected with a plurality of fixing insertion plates 802, and the fixing insertion plates 802 are provided with a plurality of fixing holes 803. When making apron 6 and elastic sealing gasket 7 paste the left wall of processing case body 1 tightly, at this in-process, fixed picture peg 802 can insert in fixed slot 10, when fixed picture peg 802 contacts dead lever 902 bottom, can make dead lever 902 move up, and fixed picture peg 802 can continue to insert inwards to it is fixed finally to restrict fixed picture peg 802 through fixed establishment 9, can fix apron 6 and elastic sealing gasket 7.

Referring to fig. 4 and 7, the fixing mechanism 9 includes a plurality of transmission cavities 901 formed in the upper wall of the treatment chamber body 1, the transmission cavities 901 are communicated with the fixing slots 10, a fixing rod 902 penetrates through the upper wall of the transmission cavities 901, a piston block 903 is fixedly connected to the outer wall of the fixing rod 902, the outer wall of the piston block 903 is slidably connected to the inner wall of the transmission cavities 901, a first spring 904 is fixedly connected between the piston block 903 and the upper wall of the transmission cavities 901, the first spring 904 is sleeved outside the fixing rod 902, and a pull block 11 is fixedly connected to the upper end of the fixing rod 902. The pulling rod 11 is pulled upward to move the fixing rod 902 upward, the fixing rod 902 will simultaneously drive the piston 903 to move upward along the inner wall of the transmission cavity 901, and compress the first spring 904, and finally the fixing rod 902 will move upward to leave the fixing hole 803 of the fixing board 802, at this time, the fixing board 802 is released from the restriction of the fixing rod 902, and the fixing rod 902 can be removed from the fixing slot 10. When the fixing board 802 contacts the bottom of the fixing rod 902, the fixing rod 902 moves upward, the fixing board 802 continues to be inserted inward, and finally when the fixing hole 803 of the fixing board 802 is aligned with the fixing rod 902, the fixing rod 902 is inserted into the fixing hole 803 of the fixing board 802 for fixing by the action of the first spring 904.

Example two:

on the basis of the first embodiment, referring to fig. 7, the left side of the lower end of the fixing rod 902 is provided with an arc edge, and the end of the fixing board 802 is provided with an arc edge matched with the arc edge of the lower end of the fixing rod 902. When the fixed inserting plate 802 is inserted into the fixed inserting groove 10 and contacts with the fixed rod 902, the fixed rod 902 can ascend, manual pulling of the fixed rod 902 is not needed, and the fixed inserting plate is convenient and practical.

Example three:

on the basis of the first embodiment, please refer to fig. 1 and fig. 3, the outer wall of the rotating plate 3 is fixedly connected with a plurality of second springs 12, and one end of the second spring 12 away from the rotating plate 3 is fixedly connected with the outer wall of the cover plate 6. When the fixing mechanism 9 is operated to release the fixing of the fixed inserting plate 802, the cover plate 6 and the elastic sealing gasket 7 move towards the direction far away from the treatment box body 1 through the resilience function skill of the second spring 12, and the fixed inserting plate 802 can also move out of the fixed inserting slot 10, so that the manpower loss can be greatly reduced, and the convenience is improved.

The working principle is as follows: when the data processing device, namely the inside of the processing box body 1, needs to be overhauled or replaced, the pull block 11 can be pulled upwards to drive the fixing rod 902 to move upwards, the fixing rod 902 can simultaneously drive the piston block 903 to move upwards along the inner wall of the transmission cavity 901 and compress the first spring 904, finally the fixing rod 902 can move upwards to leave the fixing hole 803 of the fixing insertion plate 802, at the moment, the fixing insertion plate 802 is separated from the limit of the fixing rod 902, the fixing rod 902 can be moved out of the fixing insertion slot 10, at the moment, the cover plate 6 and the elastic sealing gasket 7 are not limited, and are not tightly attached to the outer wall of the processing box body 1, then the rotating plate 3 can rotate around a hinge point with the connecting plate 2, the rotating plate 3, the cover plate 6 and the elastic sealing gasket 7 can rotate outwards anticlockwise, as shown in fig. 5, at the moment, the inside of the processing box body 1 can be conveniently overhauled and replaced; when the fixing plate is installed after the processing is finished, the rotating plate 3 can rotate clockwise around a hinge point with the connecting plate 2, the rotating plate 3 is perpendicular to the connecting plate 2, then the pushing plate 5 can be pushed to drive the cover plate 6 and the elastic sealing gasket 7 to move right through the connecting rod 4, and finally the cover plate 6 and the elastic sealing gasket 7 are attached to the left wall of the processing box body 1 tightly, in the process, the fixing insertion plate 802 can be inserted into the fixing slot 10, when the fixing insertion plate 802 contacts the bottom of the fixing rod 902, the fixing rod 902 can move upwards, the fixing insertion plate 802 can continue to be inserted inwards, and finally when the fixing hole 803 in the fixing insertion plate 802 is consistent with the position of the fixing rod 902, the fixing rod 902 can be inserted into the fixing hole 803 in the fixing insertion plate 802 to be fixed through the effect of the first spring 904, and the cover plate 6 and the elastic sealing gasket 7 can be fixed.

After follow-up use a period, elastic sealing pad 7 can slowly wear and tear, elasticity also can diminish gradually, can fix different fixed orifices 803 on fixed picture peg 802 with dead lever 902 at this in-process, fixed picture peg 802 at this moment also can increase gradually and enter into the distance in the fixed slot 10, when fixed picture peg 802 inserts darker back, when fixed orifice 803 can't cooperate fixedly with dead lever 902, explain that elastic sealing pad 7 needs to be changed, can change the use to elastic sealing pad 7, improve the long-term result of use of handling case body 1.

Claims

1. An apparatus for data processing in integrated circuit manufacturing, comprising a processing box body, characterized in that: handle the downside outer wall fixedly connected with connecting plate of case body, the left end of connecting plate articulates there is the rotor plate, the middle part of rotor plate slides and runs through there are a plurality of connecting rods, fixedly connected with push pedal and apron respectively at the both ends of connecting rod, the one end fixed mounting that the connecting rod was kept away from to the apron has the elastic sealing pad, a plurality of fixed slots have been seted up to the upper wall of handling the case body, the upper end of apron is equipped with the coupling mechanism with fixed slot matched with, the upper end of apron is equipped with fixed establishment.

2. An apparatus for data processing in integrated circuit fabrication according to claim 1, wherein: the connecting mechanism comprises a switching plate fixedly connected to the upper end of the cover plate, a plurality of fixed inserting plates are fixedly connected to the outer wall of the switching plate, and a plurality of fixing holes are formed in the fixed inserting plates.

3. An apparatus for data processing in integrated circuit fabrication according to claim 2, wherein: the fixing mechanism comprises a plurality of transmission cavities arranged on the upper wall of the processing box body, the transmission cavities are communicated with the fixing slots, fixing rods penetrate through the upper wall of the transmission cavities, outer walls of the fixing rods are fixedly connected with piston blocks, outer walls of the piston blocks are connected with the inner walls of the transmission cavities in a sliding mode, and first springs are fixedly connected between the piston blocks and the upper wall of the transmission cavities.

4. An apparatus for data processing in integrated circuit fabrication according to claim 3, wherein: the first spring is sleeved outside the fixed rod, and the upper end of the fixed rod is fixedly connected with a pulling block.

5. An apparatus for data processing in integrated circuit fabrication according to claim 3, wherein: the left side of the lower end of the fixed rod is provided with an arc edge, and the end part of the fixed inserting plate is matched with the arc edge at the lower end of the fixed rod.

6. An apparatus for data processing in integrated circuit fabrication according to claim 1, wherein: the outer wall of rotating plate fixedly connected with a plurality of second springs, the one end that the rotating plate was kept away from to the second spring is with the outer wall fixed connection of apron.