CN218175093U

CN218175093U - Magnetic yoke assembly and magnetron sputtering equipment

Info

Publication number: CN218175093U
Application number: CN202222426065.5U
Authority: CN
Inventors: 周振国; 彭孝龙; 莫超超; 董刚强
Original assignee: Suzhou Maxwell Technologies Co Ltd
Current assignee: Suzhou Maxwell Technologies Co Ltd
Priority date: 2022-09-14
Filing date: 2022-09-14
Publication date: 2022-12-30
Anticipated expiration: 2032-09-14

Abstract

The utility model belongs to the technical field of magnetron sputtering equipment, a yoke subassembly and magnetron sputtering equipment is disclosed. The magnetic yoke assembly comprises a magnetic yoke, a first permanent magnet and a second permanent magnet; the first permanent magnet is arranged on the top surface of the magnetic yoke, and two magnetic levels of the first permanent magnet are arranged up and down; the two opposite sides of the magnetic yoke are provided with the second permanent magnets, non-magnetic conduction regions are formed below the second permanent magnets, and the arrangement directions of the two magnetic levels of the second permanent magnets and the vertical direction form a non-zero included angle. The arrangement can reduce unnecessary magnetic conduction areas formed by the magnetic yoke, is favorable for releasing the magnetic energy of the permanent magnet to the surface of the target material to the maximum extent, and avoids the magnetic energy from being absorbed by redundant magnetic conduction areas, thereby improving the magnetic field intensity provided by the magnetic yoke assembly.

Description

Magnetic yoke assembly and magnetron sputtering equipment

Technical Field

The utility model relates to a magnetron sputtering equipment technical field especially relates to a yoke subassembly and magnetron sputtering equipment.

Background

The existing magnetic yoke assembly comprises a magnetic yoke and a plurality of rows of permanent magnets, the magnetic yoke is generally made of materials with good magnetic permeability such as pure iron or stainless iron, and the plurality of rows of permanent magnets generating magnetic fields required by sputtering are adsorbed on the top surface of the magnetic yoke so as to be convenient to assemble.

In order to improve the magnetic field intensity, the prior art not only makes the structure more complicated by increasing the material grade and the volume of the used permanent magnet and using the additional electromagnetic coil and other modes, but also increases the material cost.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a yoke subassembly magnetron sputtering equipment can solve and adopt modes such as increase permanent magnet material trade mark, volume and plus solenoid to increase magnetic field intensity and lead to the problem of cost increase.

To achieve the purpose, the utility model adopts the following technical proposal:

a yoke assembly comprising:

a magnetic yoke;

the first permanent magnet is arranged on the top surface of the magnetic yoke, and two magnetic levels of the first permanent magnet are arranged up and down;

the second permanent magnet is arranged on two opposite sides of the magnetic yoke, a non-magnetic conduction region is formed below the second permanent magnet, and the arrangement direction of the two magnetic levels of the second permanent magnet and the vertical direction form a non-zero included angle.

As an alternative to the above-described yoke assembly, the two poles of the second permanent magnet are arranged in the horizontal direction.

As an alternative to the above-described yoke assembly, the yoke assembly further comprises a support member made of a non-magnetic conductive material for supporting at least a part of the second permanent magnet by a bottom portion.

As an alternative to the above-described yoke assembly, the second permanent magnet and the yoke are both disposed on the top surface of the support.

As an alternative to the above-mentioned yoke assembly, first flanges are convexly provided on opposite sides of a top surface of the support, and the yoke and the second permanent magnet are disposed between the first flanges.

As an alternative to the above-described yoke assembly, the top surface of the support is provided with a positioning groove, and the yoke is fixed in the positioning groove.

As an alternative to the above-mentioned magnet yoke assembly, the magnet yoke is fixed to the supporting member by a screw, a countersunk hole is formed in the magnet yoke, and the screw is embedded in the countersunk hole and connected to the supporting member.

As an alternative to the above-described yoke assembly, the second permanent magnets on both sides of the yoke have opposite magnetic pole directions.

As an alternative of the above-mentioned yoke assembly, second flanges are convexly provided on opposite sides of a top surface of the yoke, and the first permanent magnet is disposed between the two second flanges.

Magnetron sputtering equipment, including above-mentioned yoke subassembly.

The utility model has the advantages that:

in the magnet yoke assembly provided by the utility model, the second permanent magnets are arranged on the two sides of the magnet yoke, and the non-magnetic conductive area is formed below the second permanent magnets, so that the size of the magnet yoke only needs to bear the first permanent magnets, and the non-necessary magnetic conductive area formed by the magnet yoke can be reduced; on the basis, the arrangement directions of the magnetic poles of the first permanent magnet and the second permanent magnet are arranged at a non-zero included angle, so that the magnetic energy of the permanent magnets can be released to the surface of the target material to the maximum extent, the magnetic energy is prevented from being absorbed by redundant magnetic conduction areas, and the magnetic field intensity provided by the magnetic yoke assembly is improved.

Drawings

Fig. 1 is a schematic structural diagram of a yoke assembly provided by the present invention;

fig. 2 is a front view of the yoke assembly provided by the present invention;

fig. 3 is a schematic structural view of the yoke assembly provided by the present invention when not assembled;

fig. 4 is a schematic diagram of magnetic induction lines generated by the magnetic yoke assembly and the magnitude of the magnetic field in the comparative example provided by the present invention;

fig. 5 is a schematic diagram of the magnetic induction lines and the magnetic field generated by the magnetic yoke assembly according to the present invention.

In the figure:

1. a magnetic yoke; 11. a second flange; 2. a first permanent magnet; 3. a second permanent magnet; 4. a support member; 41. a first flange; 5. and (4) screws.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures associated with the present invention are shown in the drawings, not all of them.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

As shown in fig. 1 and 2, the present embodiment provides a yoke assembly that can be used in a magnetron sputtering apparatus. The yoke assembly comprises a yoke 1, a first permanent magnet 2 and two second permanent magnets 3. The first permanent magnet 2 is arranged on the top surface of the magnetic yoke 1, and two magnetic levels of the first permanent magnet 2 are arranged up and down; the two opposite sides of the magnetic yoke 1 are provided with second permanent magnets 3, and the arrangement directions of the two magnetic levels of the second permanent magnets 3 and the vertical direction form a non-zero included angle.

In the embodiment, the second permanent magnets 3 are arranged on two sides of the magnetic yoke 1, and the non-magnetic conduction region is formed below the second permanent magnets 3, so that the size of the magnetic yoke 1 only needs to bear the first permanent magnets 2, and the non-essential magnetic conduction region formed by the magnetic yoke 1 can be reduced; on the basis, the arrangement directions of the magnetic poles of the first permanent magnet 2 and the second permanent magnet 3 are arranged at a non-zero included angle, so that the magnetic energy of the permanent magnets can be released to the surface of the target material to the maximum extent, the magnetic energy is prevented from being absorbed by redundant magnetic conduction areas, and the magnetic field intensity provided by the magnetic yoke assembly is improved. Adopt the 1 structure of yoke that this embodiment provided, need not strengthen magnetic field intensity through the material trade mark, the volume of the used permanent magnet of increase and modes such as use plus solenoid, be favorable to saving the material cost, simplify yoke subassembly structure.

In addition, magnetic field intensity is enhanced by reducing magnetic energy absorbed by redundant magnetic conduction areas, smaller permanent magnets can be used under the requirement of reaching the same magnetic field intensity, structural rigidity and overall quality of the magnetic yoke assembly can be relatively reduced, the magnetic yoke assembly is more portable, and unexpected deformation caused by overall weight of the magnetic yoke assembly is reduced.

In this embodiment, the yoke 1, the first permanent magnet 2, and the second permanent magnet 3 are all long-strip structures. The first permanent magnet 2 is disposed on the top surface of the yoke 1 and can be attracted by the yoke 1. The second permanent magnet 3 is disposed on the side of the yoke 1 and in contact with the yoke 1, and can be attracted by the yoke 1 as well.

In other embodiments, the first permanent magnet 2, the second permanent magnet 3, and the yoke 1 may each have a multi-segment structure.

As shown in fig. 2, the arrangement direction of the two magnetic poles of the first permanent magnet 2 is perpendicular to the arrangement direction of the two magnetic poles of the second permanent magnet 3. Two magnetic poles of the first permanent magnet 2 are arranged along the up-down direction (Y direction in the figure), and two magnetic poles of the second permanent magnet 3 are arranged along the horizontal direction (X direction in the figure). Two magnetic poles of the first permanent magnet 2 are arranged along the Y direction, so that magnetic induction lines generated by the first permanent magnet 2 are symmetrically arranged. The magnetic pole of the second permanent magnet 3 close to one end of the first permanent magnet 2 is opposite to the magnetic pole at the lower end of the first permanent magnet 2, so that the first permanent magnet 2 and the second permanent magnet 3 can form a closed magnetic induction line.

Further, the magnetic pole directions of the second permanent magnets 3 positioned on both sides of the magnetic yoke 1 are opposite, so that the two second permanent magnets 3 can be matched with the first permanent magnet 2 to form a closed magnetic induction line.

In this embodiment, the N pole of the first permanent magnet 2 faces upward, and the S pole faces downward. Correspondingly, the magnetic pole of the second permanent magnet 3 close to one end of the first permanent magnet 2 is an N pole. In other embodiments, the S pole of the first permanent magnet 2 faces upward, the N pole faces downward, and correspondingly, the magnetic pole of the second permanent magnet 3 near one end of the first permanent magnet 2 is the S pole.

In other embodiments, the two poles of the second permanent magnet 3 may also be arranged at an acute angle to the X-direction, for example 45 °.

The second permanent magnet 3 is provided above the yoke 1 and can be attracted to the yoke 1, but it is difficult to stably fix the second permanent magnet 3 only by the attraction force of the yoke 1 to the second permanent magnet 3. To solve this problem, the yoke assembly further includes a support 4, the support 4 being made of a non-magnetic conductive material, the support 4 being disposed below the yoke 1 and the second permanent magnet 3 for supporting at least a part of the second permanent magnet 3 by a bottom. By providing the non-magnetic-conductive support member 4, the support member 4 can be prevented from affecting the magnetic field strength while supporting and fixing the second permanent magnet 3.

In this embodiment, the supporting member 4 is an integral structure, the second permanent magnet 3 and the magnetic yoke 1 are both disposed on the top surface of the supporting member 4, and the supporting member 4 can support the second permanent magnet 3 and the magnetic yoke 1. In other embodiments, the support 4 may also be a split structure, and the support 4 may only support two second permanent magnets 3, i.e., the support 4 may not be disposed below the yoke 1.

In order to improve the positioning effect of the support member 4 on the second permanent magnet 3, the two opposite sides of the top surface of the support member 4 are convexly provided with first flanges 41, and the magnetic yoke 1 and the first permanent magnet are arranged between the two first flanges 41, so that the magnetic yoke assembly is convenient to assemble.

Alternatively, in order to improve the fixing effect of the support 4 to the yoke 1, the top surface of the support 4 is provided with a positioning groove, and the yoke 1 is fixed in the positioning groove.

Optionally, to facilitate assembling the first permanent magnet 2, the two opposite sides of the top surface of the magnetic yoke 1 are convexly provided with second flanges 11, and the first permanent magnet 2 is arranged between the two second flanges 11 to realize the positioning of the first permanent magnet 2.

To facilitate the assembly of the yoke assembly, as shown in fig. 3, the yoke 1 is fixed to the support 4 by screws 5 to facilitate the disassembly and assembly. In order to avoid the influence of the screw 5 on the installation of the first permanent magnet 2, the magnet yoke 1 is provided with a countersunk hole, and the screw 5 is embedded in the countersunk hole and connected with the support piece 4, so that the bottom surface of the first permanent magnet 2 can be completely attached to the magnet yoke 1.

In the yoke assembly in this embodiment, the yoke 1 and the support 4 form a composite yoke, and the composite yoke includes a magnetic conductive portion and a non-magnetic conductive portion. This combined type yoke can promote magnetic field intensity under the unchangeable condition (magnet brand size etc.) of other conditions, reduces to realize more light accurate regulation magnetic field intensity, compares conventional yoke processing cost lower than conventional yoke structure rigidity.

For the advantage of the yoke subassembly that further explanation this embodiment provided, the utility model provides a pair of proportion, the yoke subassembly includes the yoke and sets up first permanent magnet and second permanent magnet on the yoke in the comparative example, and the shape and the size of yoke 1 are the same with the shape and the size of the combined type yoke in this embodiment in the comparative example, and first permanent magnet and second permanent magnet are the same with first permanent magnet 2 and second permanent magnet 3 in this embodiment in the comparative example.

The magnetic field intensity generated by the magnetic yoke assembly provided in the comparative example and the embodiment on the same target surface under the same condition is calculated in a simulation manner, wherein the magnetic induction line distribution diagram and the generated magnetic field intensity in the comparative example are shown in fig. 4, and the magnetic induction line distribution and the generated magnetic field intensity in the magnetic yoke assembly in the embodiment are shown in fig. 5.

As can be seen from fig. 4, in the comparative example, since the magnetic yoke is disposed below the second permanent magnet, a part of the magnetic energy generated by the second permanent magnet forms a closed-loop magnetic induction line in the magnetic conduction region located below the second permanent magnet, and the part of the magnetic energy cannot act on the surface of the target. The highest magnetic field generated by the yoke assembly in the comparative example was 1110Gs.

As can be seen from fig. 5, in the yoke assembly provided in this embodiment, because the support 4 made of a non-magnetic conductive material is disposed below the second permanent magnet 3, the magnetic energy of the second permanent magnet 3 and the magnetic energy of the first permanent magnet 2 are all matched to form a closed magnetic induction line, so as to increase the magnetic field intensity acting on the surface of the target. In the embodiment, the highest magnetic field generated by the magnetic yoke assembly is 1260Gs, so that the effective magnetic field intensity obtained on the surface of the target material can be improved by 200Gs.

The embodiment also provides a magnetron sputtering device which comprises the magnetic yoke assembly.

It is to be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement or improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A yoke assembly, comprising:

a yoke (1);

the first permanent magnet (2) is arranged on the top surface of the magnetic yoke (1), and two magnetic levels of the first permanent magnet (2) are arranged up and down;

the magnetic yoke comprises a second permanent magnet (3), wherein the second permanent magnet (3) is arranged on two opposite sides of the magnetic yoke (1), a non-magnetic conduction region is formed below the second permanent magnet (3), and the arrangement direction of two magnetic levels of the second permanent magnet (3) and the vertical direction are arranged at a non-zero included angle.

2. The magnetic yoke assembly according to claim 1, characterized in that the two poles of the second permanent magnet (3) are arranged in a horizontal direction.

3. A magnetic yoke assembly according to claim 1, characterized in that the magnetic yoke assembly further comprises a support member (4), the support member (4) being made of a non-magnetic material, the support member (4) being adapted to support at least part of the second permanent magnet (3) from the bottom.

4. A magnetic yoke assembly according to claim 3, characterized in that the second permanent magnet (3) and the magnetic yoke (1) are both arranged on the top surface of the support (4).

5. A magnetic yoke assembly according to claim 4, characterized in that the support (4) is provided with first flanges (41) protruding from opposite sides of the top surface, the magnetic yoke (1) and the second permanent magnet (3) being arranged between the two first flanges (41).

6. A magnetic yoke assembly according to claim 4, characterized in that the top surface of the support (4) is provided with a positioning slot in which the magnetic yoke (1) is fixed.

7. The magnetic yoke assembly according to claim 4, characterized in that the magnetic yoke (1) is fixed to the support member (4) by means of screws (5), the magnetic yoke (1) is provided with a countersunk hole, and the screws (5) are embedded in the countersunk hole and connected with the support member (4).

8. A magnetic yoke assembly according to any of claims 1-6, characterized in that the second permanent magnets (3) on both sides of the magnetic yoke (1) have opposite pole directions.

9. The magnetic yoke assembly according to any of claims 1-6 characterized in that the top surface of the magnetic yoke (1) is convexly provided with second flanges (11) on opposite sides, the first permanent magnet (2) being arranged between the two second flanges (11).

10. Magnetron sputtering apparatus comprising a magnetic yoke assembly as claimed in any one of claims 1 to 9.