CN2181697Y

CN2181697Y - Multifunctional probe

Info

Publication number: CN2181697Y
Application number: CN 93217110
Authority: CN
Inventors: 王世进; 张郁华
Original assignee: Guangdong Non Ferrous Metal Industry Corp Tianhe Technical Developing Co; GUANGZHOU SEMICONDUCTOR MATERIAL INST
Current assignee: Guangdong Non Ferrous Metal Industry Corp Tianhe Technical Developing Co; GUANGZHOU SEMICONDUCTOR MATERIAL INST
Priority date: 1993-06-26
Filing date: 1993-06-26
Publication date: 1994-11-02
Anticipated expiration: 2003-06-26

Abstract

The utility model relates to a multifunctional probe, which is composed of a probe needle, a spring piece, a sleeve barrel, a conducting wire, etc. The utility model adopts a harrow-shaped spring piece and is arranged and positioned by an epoxy positioning ring, the accurate positioning of the spring piece and the probe needle is realized; the probe needle has constant voltage and is reliable; the accuracy of measurement of the probe is improved; the surface of a measured body is prevented and is not easy to damage. The utility model has accurate structure; the occupied plane length of the harrow-shaped spring piece is short; the volume is small; the manufacture is easy; the cost is low; according to different measured bodies, the metal probes with specific materials and shapes can be selected; the utility model has the multiform functions of measuring semiconductor material, functional materials, the resistivity of electric conductive films, surface resistance, type number, sparking voltage, etc.

Description

Multifunctional probe

The utility model relates to a kind of probe architecture advances with sonde method measurement resistivity of material, can be used for the resistivity of semiconductor material, functional material, conductive film and the measurement of sheet resistance.

Resistivity is one of main mass parameter of semiconductor material, many at present employing sonde methods are measured, sonde method is that metal probe is pressed on the material crystals surface, the stream that powers up flows in the material crystals by outer metal probe and plane of crystal contact point, by measuring potential drop between the internal probe, thereby the resistivity of calculating or square resistance, for accuracy and the repeatability that guarantees to measure, except location and motion to probe need the high precision, probe also requires to have the impressed pressure and the good electrical contact of steady, existing probe (see figure 4), usually adopt the strip spring leaf constant pressure to be provided and to weld a conductor wire on the metal probe head, structurally, every strip spring leaf is to be pressed in separately on the corresponding probe, every strip spring leaf needs location separately, difficulty is installed, because the strip spring leaf is to cut separately with spring foil metal to form, thereby be difficult to guarantee that every strip spring leaf all has identical elastic force, adopt the strip spring leaf to make the volume of probe increase the special-shaped shell processing difficulties of probe because of length is long.

The purpose of this utility model provides a kind of employing rake shape spring leaf as probe constant voltage flexible member, harrows shape spring leaf locating ring location and installation, and selects the probe of multiple shape and different materials probe for use, thereby overcome the shortcoming that prior art exists.

Narrate structure of the present utility model below in conjunction with accompanying drawing

Fig. 1 is the utility model structural drawing

Fig. 2 is rake shape chip architecture of the spring figure

Fig. 3 is epoxy locating ring structure figure

Fig. 4 is existing probe structural drawing

See Fig. 1, the utility model by nut (1), loam cake (2), sleeve (3), tapered sleeve (4), jewel bearing (5), probe (6), rake shape spring leaf (7), jewel sheet (9), Voltage regulation screw (10), epoxy locating ring (11), inside conductor (12), reach the compositions such as shielding line (8), loam cake (2) and sleeve (3) and tapered sleeve (4) and sleeve (3) are all with being threaded, they are circle, so that machining, the endoporus of tapered sleeve (4) is equipped with probe (6), probe (6) is installed on the jewel bearing (5) of epoxy casting location, epoxy locating ring (11) and rake shape spring leaf (7) be installed in the sleeve (3) and tapered sleeve (4) on, rake shape spring leaf (7) is fixed on three locating holes of epoxy locating ring (11), the rake bar end of rake shape spring leaf (7), suppress in probe (6) upper end by jewel sheet (9), voltage regulation screw (10) can be adjusted the elastic pressure of rake shape spring leaf (7), probe (6) upper end is welded inside conductor (12) and is linked to each other with shielding line (8), and probe (6) lower end is measuring junction. Rake shape spring leaf (7) structure is shown in figure (2), it be one by prolonging rolling of same spring foil metal on the face vertical direction with the rake shape spring leaf of line cutting by the mould punching moulding, the stiff end of rake bar is an integral body and is fixed on the epoxy locating ring (11), the rake bar other end is pressed on the probe (6), every rake bar width is 0.6 millimeter, rake bar quantity is identical with number of probes, because the plane length that rake shape spring leaf (7) takies is shorter, so it is circular that sleeve (3) can be done, so that machining is easy to manufacture. Epoxy locating ring (11) is shown in figure (3), it specially fixes and harrows the usefulness of shape spring leaf (7), in order to make (7) every rake of the rake shape spring leaf bar can be accurate with every probe contraposition of probe (6), epoxy location (11) be to water epoxy and make by joining at probe base with high-precision mold.

The utility model has the advantage of; every spring uniform elastic of rake shape spring leaf; location by the epoxy locating ring so that every rake bar all can with the probe accurate contraposition; the probe constant voltage accurately and reliably; thereby improved the probe certainty of measurement and protected not easy damaged of testee surface; for different measuring objects; select the metal probe of certain material and shape, so that probe has for the several functions such as resistivity, surface resistance, model and breakdown voltage of measuring semi-conducting material, functional material, conductive film. The utility model precise structure, processing and manufacturing is easy, and volume is few, certainty of measurement is high, cost is low. Be applicable to the resistivity to various materials, the measurement of surface resistance, model, breakdown voltage.

Among Fig. 4,1 is the bar-spring sheet, and 2 is probe, and 3 is shell.

Claims

1, a kind of multi-functional probe syringe needle, form by loam cake (2), sleeve (3), tapered sleeve (4), probe (6), spring leaf (7), epoxy locating ring (11) and lead (12) etc., it is characterized in that spring leaf (7) is a rake shape spring leaf, rake shape spring leaf (7) is fixed on the epoxy locating ring (11), its rake bar end suppresses on probe (6), reaches the accurate contraposition of rake shape spring leaf (7) and probe (6).

2, multiprobe head according to claim 1, it is characterized in that harrowing shape spring leaf (7) is by prolonging rolling of same spring foil metal on the face vertical direction with line cutting and mould impact briquetting, the stiff end of rake bar is an integral body, and every rake bar width is 0.6 millimeter.