CN218166589U

CN218166589U - Filtering system

Info

Publication number: CN218166589U
Application number: CN202222666891.7U
Authority: CN
Inventors: 王金甲; 陈甚伟; 李维; 韩雷雷; 刘宸; 陈跃
Original assignee: Fuyang Sineva Material Technology Co Ltd
Current assignee: Fuyang Sineva Material Technology Co Ltd
Priority date: 2022-10-10
Filing date: 2022-10-10
Publication date: 2022-12-30
Anticipated expiration: 2032-10-10

Abstract

The application discloses filtration system belongs to the technical field of filter. The filtration system includes a filter assembly, a mixing tank, a pressure detection device, and a controller. The mixing kettle is connected with the feed end of the filter assembly through a pipeline and is provided with an air inlet valve and an air outlet valve, a pressure detection device is arranged on the pipeline between the mixing kettle and the feed end, and the air inlet valve, the air outlet valve and the pressure detection device are respectively electrically connected with the controller. The application provides a filtration system through setting up pressure measurement device between mixed cauldron and filter assembly to obtain the conveying pressure of material, the controller is based on the material conveying pressure that pressure measurement device obtained, control admission valve and discharge valve work, thereby the pressure size in the mixed cauldron of adjustment, and then the conveying pressure of adjustment material, the conveying pressure who makes the material tends towards stably, the quality after the material filters through filter assembly is unanimous like this, the yield is also higher.

Description

Filtering system

Technical Field

The application relates to the technical field of filtration, in particular to a filtration system.

Background

The microelectronics industry has very strict requirements on the quality of materials for producing semiconductor photoresist and photoresist products, and a high-precision filter is required to be adopted to filter out foreign matters in the materials.

At present, a whole set of filtering system is designed on the market to filter materials, and the specific measure is to convey constant-pressure gas into the mixing kettle so as to convey the materials in the mixing kettle into the filter for filtering.

However, the weight of the materials in the mixing kettle can also cause pressure change, and as the materials in the mixing kettle are continuously reduced, the conveying pressure of the materials is continuously reduced, and the pressure change can cause the quality of the filtered materials to have great difference.

SUMMERY OF THE UTILITY MODEL

In view of this, the present application aims to overcome the defects in the prior art, and provides a filtering system to solve the technical problem that the quality of a filtered material has a large difference due to poor control accuracy of the filtering system in the prior art.

In order to solve the technical problem, the application provides:

a filtration system comprising:

a filter assembly having a feed end and a discharge end;

the mixing kettle is used for storing materials to be filtered and is provided with an air inlet valve and an air outlet valve, and the mixing kettle is connected with the feeding end through a pipeline;

the pressure detection device is arranged on the pipeline between the mixing kettle and the feeding end;

and the controller is respectively electrically connected with the air inlet valve, the exhaust valve and the pressure detection device.

In addition, the filtering system according to the present application may also have the following additional technical features:

in some embodiments of the present application, the apparatus further comprises a flow control device, the flow control device is disposed on the pipeline between the mixing kettle and the pressure detection device, and is electrically connected to the controller.

In some embodiments of the present application, the flow control device is a regulator valve for regulating the flow of the line.

In some embodiments of the application, the flow control device is the material pump, the material pump be used for with the material is followed suction in the mixing kettle, and will the material is carried to the feed end.

In some embodiments of the present application, the filter assembly includes a plurality of filters respectively electrically connected to the controller, each of the filters is communicated with each other through the pipeline, and the pressure detection device is respectively disposed on two sides of each of the filters.

In some embodiments of this application, a plurality of filters include respectively with controller electric connection's first filter and second filter, the one end of first filter is passed through the pipeline with mix the cauldron and connect, the other end passes through the pipeline with the second filter intercommunication, just the both sides of first filter with the both sides of second filter are provided with respectively pressure measurement, first filter is close to one side of mixing the cauldron does the feed end, one side that the second filter kept away from first filter does the discharge end.

In some embodiments of the present application, the air inlet valve and the air outlet valve are respectively disposed at a position of the mixing kettle away from the pipeline.

In some embodiments of the present application, the filtration system further comprises an alarm, the alarm being electrically connected to the controller.

In some embodiments of the present application, the controller includes a data processing unit and a control unit, the data processing unit is electrically connected with the control unit and the pressure detecting device, respectively, and the control unit is electrically connected with the intake valve and the exhaust valve, respectively.

In some embodiments of this application, the discharge end passes through the pipeline with mix the cauldron intercommunication, just the discharge end with between the mixing cauldron be provided with the circulating pump on the pipeline, the circulating pump is used for following the discharge end suction with the material, and will the material is carried extremely in the mixing cauldron.

Compared with the prior art, the beneficial effects of this application are:

the application provides a filtration system, including filter assembly, mixing kettle, pressure measurement and controller. The mixing kettle is connected with the feed end of the filter assembly through a pipeline and is provided with an air inlet valve and an air outlet valve, a pressure detection device is arranged on the pipeline between the mixing kettle and the feed end, and the air inlet valve, the air outlet valve and the pressure detection device are respectively electrically connected with the controller.

Through setting up pressure measurement device between mixing cauldron and filter assembly to acquire the conveying pressure of material, the controller is based on the material conveying pressure that pressure measurement device acquireed, control admission valve and discharge valve work, thereby the pressure size in the mixed cauldron of adjustment, and then the conveying pressure of adjustment material, makes the conveying pressure of material tend towards stably, and the quality after the material filters through filter assembly is unanimous like this, the yield is also higher.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

FIG. 1 is a schematic diagram illustrating the construction of a flow control device in a filtration system according to some embodiments of the present disclosure, using a regulator valve;

FIG. 2 is a schematic diagram illustrating the construction of a flow control device in a filtration system according to some embodiments of the present disclosure using a feed pump;

FIG. 3 is a schematic illustration of the filter assembly of some embodiments of the present application when the discharge end of the filter assembly is connected to a mixing tank;

FIG. 4 illustrates a schematic diagram of a controller in a filtration system in accordance with some embodiments of the present disclosure.

Description of the main element symbols:

100-a filtration system; 10-mixing kettle; 11-an air inlet valve; 12-a venting valve; 20-a filter assembly; 21-a first filter; 211-a feed end; 22-a second filter; 221-a discharge end; 30-a pipeline; 40-a pressure detection device; 50-a controller; 51-a data processing unit; 52-a control unit; 60-a flow control device; 60 a-regulating valve; 60 b-a material pump; 70-circulating pump.

Detailed Description

Reference will now be made in detail to the embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

In the description of the present application, it is to be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and encompass, for example, both fixed and removable connections or integral parts thereof; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

As shown in fig. 1, an embodiment of the present application provides a filtering system 100, which belongs to the field of filtering technology. The filtration system 100 may include a filter assembly 20, a mixing tank 10, a pressure detection device 40, and a controller 50.

Wherein, filter component 20 is provided with feed end 211 and discharge end 221, has deposited the material of treating the filtration in the mixing kettle 10, and is provided with admission valve 11 and discharge valve 12, and mixing kettle 10 passes through pipeline 30 to be connected with feed end 211, and pressure-detecting device 40 sets up on the pipeline 30 between mixing kettle 10 and feed end 211, and controller 50 respectively with admission valve 11, discharge valve 12 and pressure-detecting device 40 electric connection.

The filtering system 100 provided by the present application, specifically, the mixing kettle 10 is connected with the feed end 211 of the filter assembly 20 through the pipeline 30, and is provided with the air inlet valve 11 and the air outlet valve 12, the air inlet valve 11 is used for conveying gas with a certain pressure into the mixing kettle 10, the material in the mixing kettle 10 is conveyed to the filter assembly 20 by pushing the gas, and the air outlet valve 12 is used for discharging the gas in the mixing kettle 10, and the pressure inside the mixing kettle 10 is reduced.

A pressure detection device 40 is disposed on the pipeline 30 between the mixing kettle 10 and the feeding end 211 of the filter assembly 20, the pressure detection device 40 is used for acquiring the pressure of the material flowing in the pipeline 30, that is, the conveying pressure of the material, and the air inlet valve 11, the air outlet valve 12 and the pressure detection device 40 are respectively electrically connected with the controller 50.

It is understood that the controller 50 may also be electrically connected to the filter assembly 20 to control the operation of the filter assembly 20, i.e., the operation of the overall filtration system 100.

As shown in fig. 4, with respect to the controller 50, specifically, the controller 50 may include a data processing unit 51 and a control unit 52, the data processing unit 51 is electrically connected with the control unit 52 and the pressure detecting device 40, respectively, and the control unit 52 is electrically connected with the intake valve 11 and the exhaust valve 12, respectively.

It is easy to understand that the data processing unit 51 calculates the adjustment parameters of the intake valve 11 and the exhaust valve 12 according to the material conveying pressure obtained by the pressure detecting device 40, and then controls the operation of the intake valve 11 and the exhaust valve 12 through the control unit 52, so as to achieve the purpose of controlling the internal pressure of the mixing kettle 10.

In the process of using the filtering system 100, the controller 50 controls the air inlet valve 11 to deliver air into the mixing kettle 10, the air drives the material in the mixing kettle 10 to flow out into the pipeline 30, and further delivers the material to the feeding end 211 of the filter assembly 20 through the pipeline 30, the filter assembly 20 can filter the delivered material to remove the foreign matters in the material, and finally the filtered material is output from the discharging end 221.

In the above-described use, when the material conveying pressure acquired by the pressure detecting device 40 is higher than the preset pressure, the controller 50 may control the intake valve 11 to be closed or the opening degree of the intake valve 11 to be decreased, may control the exhaust valve 12 to be opened alone, and may exhaust the high-pressure gas in the mixing kettle 10, or may control the intake valve 11 and the exhaust valve 12 simultaneously, so that the intake valve 11 is closed (or the opening degree of the intake valve 11 is decreased) and the exhaust valve 12 is opened, and may accelerate the exhaust of the excess gas in the mixing kettle 10.

The three control modes exemplified above can all reduce the gas pressure in the mixing kettle 10, thereby reducing the material conveying pressure and gradually reducing the material conveying pressure to the preset pressure.

On the contrary, when the delivery pressure is lower than the preset pressure, the controller 50 controls the air inlet valve 11 to open (or controls the opening of the air inlet valve 11 to increase), and controls the air outlet valve 12 to close, so as to increase the gas pressure in the mixing kettle 10, and gradually increase the output pressure of the material to the preset pressure.

It is easy to understand that, through the above control mode, that is, the controller 50 controls the operation of the air intake valve 11 and the air exhaust valve 12 based on the material conveying pressure obtained by the pressure detection device 40, so as to adjust the pressure inside the mixing kettle 10, and further adjust the conveying pressure of the material, so that the conveying pressure of the material tends to be stable (basically kept at the preset pressure), and thus the quality of the material filtered by the filter assembly 20 is consistent, the filtering effect is better, and the yield is higher.

Optionally, the filtering system 100 may further include an alarm electrically connected to the controller 50. Through setting up the alarm, when pressure detection device 40 detected the conveying pressure of material unusual, the steerable alarm of controller 50 sent the police dispatch newspaper, reminded the staff in time to handle, improved filtration system 100's security.

As shown in fig. 1 and fig. 2, in some embodiments of the present application, a flow control device 60 is optionally disposed between the mixing kettle 10 and the pressure detecting device 40, and the flow control device 60 is disposed on the pipeline 30 and electrically connected to the controller 50.

In this embodiment, the controller 50 may control the flow control device 60, the intake valve 11 and the exhaust valve 12 to work according to the material conveying pressure obtained by the pressure detection device 40, so that the conveying pressure of the material tends to be stable, the control precision of the filtering system 100 is improved, and a better filtering effect is achieved.

As shown in fig. 1, the flow control device 60 may be a regulating valve 60a, and the regulating valve 60a is used for regulating the flow of the material in the pipeline 30 and works in cooperation with the intake valve 11 and the exhaust valve 12 under the control of the controller 50, so as to improve the control accuracy of the filtering system 100 and ensure stable conveying pressure of the material.

Of course, the flow control device 60 may also be a material pump 60b, as shown in FIG. 2, the material pump 60b being used to suck material out of the mixing still 10 and to deliver the material through the conduit 30 to the feed end 211 of the filter assembly 20.

It is easy to understand that, when the material pump 60b is used as the main driving force of the material, negative pressure will be generated in the mixing kettle 10, and the air inlet valve 11 plays a role in air supplement, so as to ensure normal transportation of the material, the controller 50 can control the air inlet valve 11 and the air outlet valve 12 to work according to the transportation pressure of the material obtained by the pressure detection device 40, and control the power of the material pump 60b to meet the requirements, so as to ensure that the transportation pressure of the material tends to be stable, and improve the control precision of the filtering system 100, so as to ensure that the quality of the material filtered by the filter assembly 20 is consistent, and the yield is higher.

As shown in fig. 1 and 2, in some embodiments of the present application, the filter assembly 20 includes a plurality of filters respectively electrically connected to the controller 50, each filter is communicated with each other through the pipeline 30, and the pressure detection device 40 is respectively disposed at both sides of each filter.

In this embodiment, specifically, each pressure detecting device 40 is electrically connected to the controller 50, the pressure detecting devices 40 disposed on two sides of the filter can detect the feeding pressure and the discharging pressure of the filter, and in the design stage, the allowable range of the difference between the feeding pressure and the discharging pressure, that is, the preset range of the pressure difference, or the preset values of the feeding pressure and the discharging pressure can be preset.

The controller 50 determines whether the pressure difference is within a preset range by calculation according to the pressure value obtained by each pressure detection device 40, and sends an electric signal to control the operation of the intake valve 11 and the exhaust valve 12, so as to control the material conveying pressure, ensure that the material conveying pressure tends to be stable, and improve the control accuracy and the filtering effect of the filtering system 100.

As shown in fig. 1, for example, the plurality of filters include a first filter 21 and a second filter 22 electrically connected to the controller 50, respectively, the first filter 21 is connected to the mixing kettle 10 through a pipeline 30, and is communicated with the second filter 22 through a pipeline 30, two sides of the first filter 21 are provided with a pressure detection device 40, two sides of the second filter 22 are also provided with a pressure detection device 40, one side of the first filter 21 close to the mixing kettle is a feeding end 211, and one side of the second filter 22 far away from the first filter 21 is a discharging end 221.

During use, the controller 50 determines whether the pressure difference is within a preset range by calculation according to the pressure value obtained by each pressure detection device 40, and sends an electrical signal to control the intake valve 11 and the exhaust valve 12 so as to control the material conveying pressure and ensure that the material conveying pressure tends to be stable.

As shown in fig. 1 and 2, in some embodiments of the present application, optionally, the gas inlet valve 11 and the gas outlet valve 12 are respectively disposed at a position of the mixing kettle 10 away from the pipeline 30.

It can be understood that the material conveying pressure is mainly related to the self weight and the intake pressure of the intake valve 11, and the intake valve 11 and the exhaust valve 12 are respectively disposed at the positions of the mixing kettle 10 far away from the pipeline 30, so that the material can be conveyed to the filter assembly 20 under the driving of the intake pressure of the intake valve 11 and the self weight, the energy consumption of the filtering system 100 is reduced, and the material conveying efficiency is improved.

In some embodiments of the present application, optionally, a transparent viewing window may be disposed on the mixing kettle 10, the transparent viewing window is hermetically connected to the mixing kettle 10, so as to ensure the sealing performance of the mixing kettle 10, and the transparent viewing window is disposed to enable the mixing kettle 10 to have visibility, so that the staff can observe the internal conditions of the mixing kettle 10, thereby improving the safety of the filtering system 100.

As shown in fig. 3, in some embodiments of the present application, optionally, the discharge end 221 of the filter assembly 20 is communicated with the mixing tank 10 through a pipeline 30, and a circulation pump 70 is disposed on the pipeline 30 between the discharge end 221 and the mixing tank 10.

When using filtration system 100, the material in mixing kettle 10 passes through pipeline 30 and carries to the feed end 211 of filter, and filter assembly 20 carries out abundant filtration back to the material, from discharge end 221 output material, and in circulating pump 70 carried the filtered material of discharge end 221 output again mixing kettle 10, continued filtering, repeated above action, just realized the loop filter of material, loop filter's number of times can set up as required.

Further, the circulating pump 70 can also be electrically connected with the controller 50, and the controller 50 can control the power of the circulating pump 70 according to the conveying pressure of the material obtained by the pressure detection device 40, and further control the flow rate of the material conveyed by the discharge end 221 to the mixing kettle 10, so that the control precision of the filtering system 100 is higher, and the filtering effect of the filtering system 100 is improved.

In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.

Claims

1. A filtration system, comprising:

a filter assembly having a feed end and a discharge end;

the mixing kettle is used for storing materials to be filtered and is provided with an air inlet valve and an air outlet valve, and the mixing kettle is connected with the feed end through a pipeline;

2. The filtration system of claim 1, further comprising a flow control device disposed on the line between the mixing tank and the pressure detection device and electrically connected to the controller.

3. The filtration system of claim 2, wherein the flow control device is a regulator valve for regulating the flow of the line.

4. The filtration system of claim 2, wherein the flow control device is a feed pump for drawing the material out of the mixing still and delivering the material to the feed end.

5. The filtration system of any one of claims 1 to 4, wherein the filter assembly comprises a plurality of filters electrically connected to the controller, the filters are communicated with each other through the pipeline, and the pressure detection devices are disposed on two sides of each filter.

6. The filtration system according to claim 5, wherein the plurality of filters include a first filter and a second filter electrically connected to the controller, respectively, one end of the first filter is connected to the mixing tank through the pipeline, the other end of the first filter is communicated with the second filter through the pipeline, the pressure detection devices are disposed on two sides of the first filter and two sides of the second filter, respectively, one side of the first filter close to the mixing tank is the feeding end, and one side of the second filter far from the first filter is the discharging end.

7. The filtration system of claim 1, wherein the air inlet valve and the air outlet valve are each disposed at a location of the mixing kettle remote from the conduit.

8. The filtration system of claim 1, further comprising an alarm electrically connected to the controller.

9. The filtration system of claim 1, wherein the controller comprises a data processing unit and a control unit, the data processing unit being electrically connected to the control unit and the pressure sensing device, respectively, and the control unit being electrically connected to the intake valve and the exhaust valve, respectively.

10. The filtration system of claim 1, wherein the discharge end is in communication with the mixing tank via the pipeline, and a circulation pump is disposed on the pipeline between the discharge end and the mixing tank, the circulation pump being configured to suck material out of the discharge end and convey the material into the mixing tank.