CN218146382U - Large-size high-deposition-rate optical fiber preform manufacturing device - Google Patents
Large-size high-deposition-rate optical fiber preform manufacturing device Download PDFInfo
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Abstract
A large-size high-deposition-rate optical fiber preform manufacturing device is designed, and comprises a deposition cavity, a preform clamping structure, a vapor-phase method burner, a plasma burner and a preform measuring mechanism; the manufacturing process of the device is optimized, the technical defects of low density of the loose body, poor diameter uniformity, low yield and the like in the existing optical fiber perform manufacturing process are overcome, the density of the loose body and the deposition yield in the optical fiber perform deposition process are improved, and the manufacturing device and the method can be used for manufacturing the large-size optical fiber perform with high deposition rate.
Description
Technical Field
The utility model belongs to the technical field of optical fiber perform makes, a method that optical fiber perform made device and used device is related to, concretely relates to optical fiber perform manufacturing installation of jumbo size high deposition rate.
Background
The main technical means for manufacturing the optical fiber preform at present are two steps. Firstly, producing the core rod, stretching the qualified core rod, and then coating a cladding layer outside the core rod. The core rod parameters determine the performance of the fiber and the cladding technique determines the cost of the preform. The current cladding techniques are mainly classified into four types, namely, the outside-tube method including VAD (axial vapor deposition), OVD (outside vapor deposition), the inside-tube method including PCVD (low temperature plasma vapor deposition) and MCVD (modified chemical vapor deposition), the sleeve method, and the plasma outside-spraying method. Outside Vapor Deposition (OVD) is currently the most widely used method for overcladding deposition. The Outside Vapor Deposition (OVD) is a process of reacting a silicon-containing raw material (silicon tetrachloride or octamethylcyclotetrasiloxane) in flame of combustible gas (methane natural gas or hydrogen) and combustion-supporting gas (oxygen) to produce silicon dioxide particles, agglomerating and growing up the silicon dioxide particles, and continuously depositing the silicon dioxide particles on the surface of a hard target rod under the thermophoresis effect. The combustible gas (methane natural gas or hydrogen) has a low combustion heat value, the density of a loose body formed by stacking the generated silica particles is low, and the loose body with low density is easy to crack and scrap along with the increase of the diameter of the prefabricated rod.
Current technology, such as described in chinese patent CN103848565A, can increase the density by using a conventional plasma torch. However, in this method, the plasma torch and the torch assembly of the vapor phase process are installed in parallel and spaced, which increases the interval of the vapor phase process torch and decreases the deposition rate. The plasma torch and the gas phase torch have large flame temperature difference, which results in poor diameter uniformity of deposited loose bodies and low yield.
SUMMERY OF THE UTILITY MODEL
The loose body density of prefabricated stick to current deposit is low, and diameter homogeneity is relatively poor and the lower technical defect of yield, the utility model provides a high deposition rate's of jumbo size optical fiber perform manufacturing installation and use device's method.
The purpose of the utility model is realized through the following technical scheme:
a large-size high-deposition-rate optical fiber preform manufacturing device comprises a deposition cavity, a preform clamping structure, a vapor-phase method burner, a plasma burner and a preform measuring mechanism.
Furthermore, the deposition cavity comprises an air inlet and an air outlet, wherein the air inlet and the air outlet are positioned on the middle axis of the cavity in the horizontal direction and are positioned on the same axis with the preform clamping structure and the gas phase method blast burner; the prefabricated excellent fixture install in both ends about the cavity, both ends have at least one end installation rotating electrical machines and elevator motor, guarantee the synchronous lift and the rotation in both ends about the clamping structure. The above preform measuring mechanism is used for measuring the diameter of the preform, and each vapor deposition burner corresponds to one measuring mechanism.
The filter screen is installed to the air intake of above-mentioned deposit cavity, the preferred more than or equal to 3 of air intake figure, the preferred more than or equal to 3 of air outlet figure, and the wind pressure controller is installed to every air outlet and every air outlet amount of wind can the independent control. The lower end of the preform rod clamping mechanism is provided with a weighing device for weighing the weight of the preform rod.
On the basis of the technical scheme, the gas-phase-method blast lamps are blast lamps with gas combustion and are divided into deposition blast lamps and heat-preservation blast lamps, wherein the heat-preservation blast lamps at the top and the bottom are communicated with combustible gas methane natural gas or hydrogen and combustion-supporting gas oxygen, the middle deposition blast lamp is communicated with silicon-containing raw materials such as silicon tetrachloride or octamethylcyclotetrasiloxane, combustible gas methane, natural gas or hydrogen and combustion-supporting gas oxygen, and the number of the middle deposition blast lamps is preferably more than or equal to 10. The gas phase method blast lamp has a horizontal movement control function.
The plasma torch ionizes working gas by using a high-frequency electromagnetic field to generate plasma flame, the working gas of the torch is argon, helium or compressed air, the included angle theta between the plasma torch and a gas-phase method torch is preferably 5-90 degrees, the surface temperature of the plasma flame on a loose body is preferably 1200-2200 ℃, and the plasma torch is provided with an independent control platform moving up and down and horizontally.
The utility model discloses use above-mentioned optical fiber perform manufacturing installation's method, including following step:
the method comprises the following steps: preferably selecting a core rod with the core-spun ratio larger than 4.0, and butting the target rods at two ends of the core rod;
step two: calculating the diameter of the prefabricated rod corresponding to the core rod according to the optical parameters and the geometric dimension of the core rod; calculating the deposition weight of the prefabricated rod according to the diameter of the prefabricated rod;
step three: installing the core rod on a preform clamping structure, igniting a vapor deposition blowtorch and a plasma blowtorch, closing a deposition cavity, adjusting the pressure of the cavity to a target pressure and keeping the pressure stable; flame polishing is carried out on the core rod by utilizing the high temperature of a blast burner, the fact that the plasma flame is polished on the surface of the core rod for at least 3 times is determined, and in the flame polishing stage, the temperature of the plasma flame on the surface of the core rod is preferably 1700-2200 ℃;
step four: introducing a silicon-containing raw material, combustible gas and combustion-supporting gas into the vapor deposition blowtorch, and depositing loose bodies on the surface of the core rod; rotating the prefabricated rod clamping structure according to a set formula and reciprocating up and down, wherein the up-down moving distance of the clamping framework is less than 1.2 times of the vertical distance of the vapor deposition blowtorch; the plasma torch moves back and forth in the axial direction of the loose body, the stroke of the plasma torch moving up and down is larger than the effective length of the core rod, the plasma torch moves in the horizontal direction at the same time, the distance between plasma flame and the loose body is ensured to be 80-180mm, the deposition process is kept unchanged, and the temperature of the plasma flame on the surface of the loose body is preferably 1200-1900 ℃; the vapor deposition blowtorch moves left and right in the horizontal direction, the distance between the vapor deposition blowtorch and the loose body is ensured to be 180-400mm, and the deposition process is kept unchanged;
step five: and D, when the deposited loose body reaches the target weight of the loose body of the preform rod calculated in the step two, finishing deposition, taking the rod, and measuring the density of the loose body. And moving the loose body into a sintering furnace, and dehydrating and sintering the loose body to obtain the transparent optical fiber preform. And measuring the diameter of the optical fiber preform to obtain the diameter distribution.
Compared with the prior art, the utility model has the advantages of as follows and beneficial effect:
the utility model discloses a design optical fiber perform manufacturing installation to optimize the device's preparation technology, can improve loose body density and the deposit yield among the optical fiber perform deposit process, increase the deposit diameter of perform, improve the loose body diameter uniformity after the sintering of perform, the plasma flame polishing of deposit initial stage is favorable to improving the optical fiber strength of perform at the wire drawing in-process simultaneously, promotes the wire drawing qualification rate.
Drawings
FIG. 1 is a schematic structural view of an apparatus for manufacturing an optical fiber preform according to the present invention;
FIG. 2 is a schematic view of the structure of the measuring mechanism for the preform rod of the present invention;
FIG. 3 is a schematic cross-sectional view of the apparatus for manufacturing a fiber preform according to the present invention;
fig. 4 is a schematic view of the diameter distribution of the sintered preform of examples and comparative examples.
Wherein, 1 is the deposit cavity, 2 is prefabricated excellent clamping structure, 3 is rotating electrical machines and elevator motor, 4 are weighing device, 5 are vapor process blowtorch, 6 are the plasma blowtorch, 7 are the air intake, 8 are the air outlet, 9 are the wind pressure controller, 10 are the plug, 11 are prefabricated excellent measuring mechanism.
Detailed Description
The present invention will be further described with reference to the following detailed description. It should be understood that these examples are for illustrative purposes only and do not limit the scope of the present invention. The experimental materials, reagents and the like used in the following examples can be obtained commercially or by known experimental methods.
As shown in fig. 1, 2 and 3, an apparatus for manufacturing a large-sized high deposition rate optical fiber preform includes a deposition chamber 1, a preform holding structure 2, a vapor-phase torch 5, a plasma torch 6 and a preform measuring mechanism 11. The deposition cavity 1 comprises an air inlet 7 and an air outlet 8, the air inlet 7 and the air outlet 8 are positioned on the middle axis of the cavity 1 in the horizontal direction, and are positioned on the same axis with the preform clamping structure 2 and the gas phase method blast burner 5; the prefabricated stick fixture 2 install in both ends about cavity 1, both ends have at least one end installation rotating electrical machines and elevator motor 3, guarantee that both ends lift and rotate in step about the fixture 2. The preform measuring mechanism 11 is used to measure the diameter of the preform 10, and one measuring mechanism 11 corresponds to each vapor deposition burner 5.
The filter screen is installed to the air intake 7 of deposit cavity 1, 7 figure more than or equal to 3 of air intake, 8 figure more than or equal to 3 of air outlet, every air outlet 8 is installed wind pressure controller 9 and every air outlet amount of wind can be controlled alone. The lower end of the preform holding means 2 is provided with a weighing device 4 for weighing the preform 10.
The gas phase method blowtorch 5 for having the blowtorch of gaseous burning, divide into deposit blowtorch and heat preservation blowtorch, wherein the heat preservation blowtorch of top and bottom leads to combustible gas methane natural gas or hydrogen to and combustion-supporting gas oxygen, middle deposit blowtorch leads to and has silicon-containing raw materials silicon tetrachloride or octamethylcyclotetrasiloxane, combustible gas methane, natural gas or hydrogen, and combustion-supporting gas oxygen, and middle deposit blowtorch figure more than or equal to 10, the gas phase method blowtorch have the horizontal migration control function. The plasma torch 6 ionizes working gas by using a high-frequency electromagnetic field to generate plasma flame, the torch working gas is argon, helium or compressed air, the included angle theta between the plasma torch 6 and the gas-phase method torch 5 is 5-90 degrees, the surface temperature of the plasma flame on the loose body 10 is 1200-2200 ℃, and the plasma torch is provided with an independent control platform which moves up and down and horizontally.
The method for manufacturing the optical fiber preform includes the following steps:
the method comprises the following steps: preferably, a core rod with the core-spun ratio larger than 4.0 is adopted, and the two ends of the core rod are butted with a target rod;
step two: calculating the diameter of the prefabricated rod corresponding to the core rod according to the optical parameters and the geometric dimension of the core rod; calculating the deposition weight of the prefabricated rod according to the diameter of the prefabricated rod;
step three: installing the core rod on the preform clamping structure 2, igniting the vapor deposition blowtorch 5 and the plasma blowtorch 6, closing the deposition cavity 1, adjusting the cavity pressure to the target pressure and keeping the pressure stable; flame polishing is carried out on the core rod 10 by utilizing the high temperature of the blast burner, the plasma flame is determined to be polished on the surface of the core rod 10 for at least 3 times, and the temperature of the plasma flame on the surface of the core rod is 1700-2200 ℃.
Step four: the vapor deposition blowtorch 5 is fed with a silicon-containing raw material, combustible gas and combustion-supporting gas, and deposits a loose body on the core rod 10; rotating the prefabricated rod clamping structure 2 according to a set formula and reciprocating up and down, wherein the up-down moving distance of the clamping structure 2 is less than 1.2 times of the vertical distance of the vapor deposition blowtorch 5; the plasma torch moves back and forth in the axial direction of the loose body, the stroke of the plasma torch moving up and down is larger than the effective length of the core rod, the plasma torch moves in the horizontal direction at the same time, the distance between plasma flame and the loose body is ensured to be 80-180mm, the deposition process is kept unchanged, and the temperature of the plasma flame on the surface of the loose body is 1200-1900 ℃; the vapor deposition blowtorch moves left and right in the horizontal direction, the distance between the vapor deposition blowtorch and the loose body is ensured to be 180-400mm, and the deposition process is kept unchanged.
Step five: and D, when the deposited loose body reaches the target weight of the loose body of the prefabricated rod calculated in the step two, finishing deposition, taking the rod, and measuring the density of the loose body. And moving the loose body into a sintering furnace, and dehydrating and sintering the loose body to obtain the transparent optical fiber preform. And measuring the diameter of the optical fiber preform to obtain the diameter distribution.
In the second step, the core diameter d of the core rod and the refractive index difference Δ between the core and the cladding are measured by PK 2600. Normalized frequency parameters through fiber:
V＝2Π*a*n1*(2*Δ)^0.5/λ
v =2.405, the fiber cutoff wavelength is 1.26, n1 is the refractive index parameter of the fiber core, which is approximately the parameter of a pure silicon core of PK2600, 1.4580.
The value a can be obtained through the equation; and then calculating the diameter of the prefabricated rod corresponding to the core rod:
J＝K1*125*D/2a
wherein K1 is a correction parameter and can be adjusted according to the actual condition.
And then according to the diameter J of the prefabricated rod and the length L of the core rod, calculating the deposition weight of the prefabricated rod:
W＝2.2*Π*J^2/4*(L+K2)/1000/1000；
wherein K2 is a correction parameter and can be adjusted according to actual experience.
Examples
A large-size high-deposition-rate optical fiber preform manufacturing device comprises a deposition cavity 1, a preform clamping structure 2, a vapor-phase method burner 5, a plasma burner 6 and a preform measuring mechanism 11. The deposition cavity 1 comprises an air inlet 7 and an air outlet 8, the air inlet 7 and the air outlet 8 are positioned on the middle axis of the cavity 1 in the horizontal direction, and are positioned on the same axis with the preform clamping structure 2 and the gas phase method blast burner 5; the prefabricated stick fixture 2 install in both ends about the cavity 1, the upper end installation rotating electrical machines and elevator motor 3 guarantee that both ends go up and down and rotate in step about the fixture 2. The preform measuring mechanism 11 is used to measure the diameter of the preform 10, and one measuring mechanism 11 corresponds to each vapor deposition burner 5.
The filter screen is installed to the air intake 7 of deposit cavity 1, 7 figure of air intake are 6, 8 figure of air outlet be 3, every air outlet 8 is installed wind pressure controller 9 and every air outlet amount of wind can be controlled alone. The lower end of the preform holding means 2 is provided with a weighing device 4 for weighing the preform 10.
The gas phase method blowtorch 5 for having the blowtorch of gaseous burning, divide into deposit blowtorch and heat preservation blowtorch, wherein the heat preservation blowtorch of top and bottom leads to combustible gas natural gas to and combustion-supporting gas oxygen, middle deposit blowtorch leads to and has silicon-containing raw materials silicon tetrachloride combustible gas natural gas, and combustion-supporting gas oxygen, and middle deposit blowtorch figure is 16, the gas phase method blowtorch have horizontal migration control function. The plasma torch 6 ionizes working gas by using a high-frequency electromagnetic field to generate plasma flame, the torch working gas is argon, the included angle theta between the plasma torch 6 and the gas-phase method torch 5 is 45 degrees, the surface temperature of the plasma flame on the loose body 10 is 1200-2200 ℃, and the plasma torch is provided with an independent control platform moving up and down and horizontally.
Preparing a core rod by adopting a VAD method, and testing parameters such as refractive index, core diameter, cladding diameter and the like after extending the core rod, wherein the core-spun ratio D/D is 62/13.55=4.58. Two ends of the core rod are butted with the auxiliary target rod. The diameter of the preform rod corresponding to the core rod is calculated, and the corresponding weight of the whole preform rod is calculated according to the diameter, as shown in the table I
Installing the core rod on the preform clamping structure 2, igniting the vapor deposition blowtorch 5 and the plasma blowtorch 6, closing the deposition cavity 1, adjusting the cavity pressure to the target pressure and keeping the pressure stable; flame polishing is carried out on the core rod 10 by utilizing the high temperature of the blast burner, the plasma flame is determined to be polished on the surface of the core rod 10 for 5 times, and the temperature of the plasma flame on the surface of the core rod in the polishing stage is 1750-1800 ℃.
Introducing a silicon tetrachloride raw material, combustible gas natural gas and combustion-supporting gas oxygen into the vapor deposition blowtorch 5, and depositing a loose body on the core rod 10; the preform holding structure 2 is rotated and reciprocated up and down according to a set recipe, the vertical interval of the vapor deposition torches 5 is 200mm, and the number is 16. The up-down movement distance of the clamping framework 2 is 205mm; the plasma torch 6 moves up and down in the axial direction of the core rod 10, the effective length of the core rod 10 is 2800mm, the stroke of the plasma torch 6 moving up and down is 3000mm, the plasma torch moves in the horizontal direction at the same time, the distance between plasma flame and a loose body is ensured to be 150mm, the deposition process is kept unchanged, and the temperature of the plasma flame on the surface of the loose body is 1350-1400 ℃; the vapor deposition blowtorch 5 moves left and right in the horizontal direction, the distance between the vapor deposition blowtorch and the loose body is ensured to be 230mm, and the deposition process is kept unchanged.
And (3) when the deposited loose body reaches the target weight of the prefabricated rod loose body calculated in the step (II), finishing deposition, taking a rod, measuring the average diameter of the loose body to be 385mm, and enabling the density to be 0.63g/cm ^3. And moving the loose body into a sintering furnace, and dehydrating and sintering the loose body to obtain the transparent optical fiber preform. And measuring the diameter of the optical fiber preform to obtain the diameter distribution.
As shown in table two.
| Position of | 100 | 200 | 300 | 400 | 500 | 600 | 700 | 800 | 900 |
| Diameter of | 210.4 | 210.8 | 210.3 | 209.7 | 209.2 | 208.4 | 208 | 207.1 | 206.3 |
| Position of | 1000 | 1100 | 1200 | 1300 | 1400 | 1500 | 1600 | 1700 | 1800 |
| Diameter of | 206.5 | 206.7 | 207.2 | 207.8 | 208.3 | 208.9 | 209.5 | 210.1 | 210.9 |
| Position of | 1900 | 2000 | 2100 | 2200 | 2300 | 2400 | 2500 | 2600 | 2700 |
| Diameter of | 211.5 | 211.8 | 212.3 | 213 | 213.7 | 215.4 | 214.7 | 213.1 | 209.8 |
In the present experimental example, in the second step, the core diameter d of the core rod was measured to be 13.55 and the refractive index difference Δ between the core and the cladding was measured by PK 2600. Normalized frequency parameters through fiber:
V＝2Π*a*n1*(2*Δ)^0.5/λ
v =2.405 is taken, the fiber cutoff wavelength is 1.26, n1 is the index parameter of the fiber core which is 0.345%, and the approximate value is the parameter of a pure silicon core of PK2600, 1.4580.
The value of a is 3.98, and the diameter of the preform corresponding to the diameter d of the core rod is 13.55 is calculated by the equation: j = K1 × 125 × d/2a, in use K1 is taken as 0.97, which is a systematic deviation and a fixed value. The preform diameter J was calculated to be 206.2.
And calculating the integral weight of the loose body of the prefabricated rod according to the diameter J of the prefabricated rod of 206.2 and the length 2800 of the core rod:
W＝2.2*Π*J^2/4*(L+K2)/1000/1000
wherein K2 is a correction parameter, the value in the experimental example is 350mm, and the calculated W is 231.4kg. Can be adjusted according to actual experience.
Comparative example (conventional vertical multi-burner OVD equipment)
The core rod is prepared by VAD method, the core rod is extended and then parameters such as refractive index, core diameter, cladding diameter and the like are tested, the core-spun ratio is 52/10.65=4.88, and two ends of the core rod are butted with the auxiliary target rods. The diameter of the preform corresponding to the core rod was calculated to be 164.4mm, the weight of the preform as a whole was calculated to be 147.1kg based on the diameter, and the weight of the deposited preform was inputted at the apparatus end. As shown in Table three
And D, when the deposited loose body reaches the target weight of the preform loose body calculated in the step two of 147.1kg, finishing deposition, taking a rod, and measuring the average diameter of the loose body by 380mm, wherein the density is 0.412g/cm ^3. And moving the loose body into a sintering furnace, and dehydrating and sintering the loose body to obtain the transparent optical fiber preform. The diameter of the optical fiber preform was measured to obtain a diameter distribution as shown in table four.
| Position of | 100 | 200 | 300 | 400 | 500 | 600 | 700 | 800 | 900 |
| Diameter of | 165.3 | 167.6 | 170.1 | 169.3 | 166.6 | 164.4 | 162.1 | 163.4 | 166.7 |
| Position of | 1000 | 1100 | 1200 | 1300 | 1400 | 1500 | 1600 | 1700 | 1800 |
| Diameter of | 169 | 171.5 | 172.4 | 171.9 | 168.7 | 165.3 | 163.5 | 165.1 | 168.4 |
| Position of | 1900 | 2000 | 2100 | 2200 | 2300 | 2400 | 2500 | 2600 | 2700 |
| Diameter of | 171.6 | 174.8 | 175.2 | 173.9 | 170.7 | 167.5 | 165.4 | 163.1 | 160.9 |
The target preform diameter of this example reached 206.2mm and the bulk density reached 0.63g/cm 3, while in the comparative example, the target preform diameter was 164.4mm, with the comparative example having a density of 0.412g/cm 3. In the sampling of the comparative example, when the preform target diameter exceeded 170mm, several deposition failed and a complete loose body could not be obtained. The bulk density in the examples is significantly greater than that in the comparative examples. The diameter distributions of the sintered preforms in the examples and comparative examples are shown in FIG. 4. As can be seen from fig. 4, the diameter distribution curves for the examples are smooth with a maximum and minimum difference of 9.1mm. In the comparative example, however, the diameter curve appeared wavy and the difference between the maximum value and the minimum value reached 14.3mm.
Consequently, this application can obviously improve the density of the loose body among the optical fiber perform deposit process, improves finished product perform's diameter homogeneity and yield to and improve perform's diameter, promote enterprise's productivity, reduce enterprise manufacturing cost.
The applicant states that on the basis of the above-mentioned embodiments, the specific content point values of certain components in the above-mentioned embodiments are combined with the technical solutions in the content part of the present invention, so as to generate a new numerical range, which is also one of the recorded ranges of the present invention, and the present application does not list these numerical ranges again for the sake of brevity.
Claims (5)
1. A large-size high-deposition-rate optical fiber preform manufacturing device is characterized in that: the device comprises a deposition cavity, a preform clamping structure, a gas phase method blast lamp, a plasma blast lamp and a preform measuring mechanism;
the deposition cavity comprises an air inlet and an air outlet, and the air inlet and the air outlet are positioned on the middle axis of the cavity in the horizontal direction and are positioned on the same axis with the preform clamping structure and the vapor-phase method blowtorch; the prefabricated rod clamping mechanism is arranged at the upper end and the lower end of the cavity, at least one of the two ends is provided with a rotating motor and a lifting motor, and the upper end and the lower end of the clamping mechanism are ensured to be synchronously lifted and rotated;
the prefabricated stick measuring mechanism is used for measuring the diameter of the prefabricated core rod, and each vapor deposition blowtorch corresponds to one measuring mechanism.
2. An apparatus for fabricating a large-sized high deposition rate optical fiber preform according to claim 1, wherein: the filter screen is installed to the air intake of deposit cavity, air intake figure more than or equal to 3, and every air outlet installs the wind pressure controller, and the amount of wind of every air outlet can the independent control.
3. An apparatus for fabricating a large-sized high deposition rate optical fiber preform according to claim 2, wherein: and a weighing device for weighing the weight of the prefabricated core rod is arranged at the lower end of the prefabricated rod clamping mechanism.
4. A large-sized high deposition rate optical fiber preform fabricating apparatus according to claim 3, wherein: the gas phase method blowtorch is a blowtorch with gas combustion and is divided into a deposition blowtorch and a heat preservation blowtorch, wherein the heat preservation blowtorch at the top and the bottom is communicated with combustible gas methane natural gas or hydrogen and combustion-supporting gas oxygen, the middle deposition blowtorch is communicated with silicon-containing raw material silicon tetrachloride or octamethylcyclotetrasiloxane, combustible gas methane, natural gas or hydrogen and combustion-supporting gas oxygen, and the number of the middle deposition blowtorch is more than or equal to 10.
5. An apparatus for fabricating a large-sized high deposition rate optical fiber preform according to claim 4, wherein: the plasma torch is characterized in that a working gas is ionized by a high-frequency electromagnetic field to generate plasma flame, the working gas of the torch is argon gas, helium gas or compressed air, the included angle theta between the plasma torch and a gas-phase method torch is 5-90 degrees, the plasma torch further comprises a loose body, the surface temperature of the plasma flame on the loose body is 1200-2200 ℃, and the plasma torch is provided with an independent control platform which moves up and down.
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