CN218137753U - Device for rapidly removing quartz crucible for single crystal - Google Patents

Abstract

The utility model discloses a single crystal is with device of demolising quartz crucible fast, include: the device comprises an isolation room, a coolant storage tank, an injection mechanism and a pipeline; the isolation room is used for placing a quartz crucible adhered with a carbon crucible bond; the spraying mechanism is arranged in the isolation room and is used for spraying coolant to the inner wall of the quartz crucible; one end of the pipeline is connected with an outlet of the coolant storage tank, and the other end of the pipeline penetrates into the isolation room to be connected with an inlet of the injection mechanism. In this scheme, make breakthrough change to quartz crucible's separation mode, strike broken separation mode with original simple physics and change into the broken separation mode of cold and hot internal stress, make quartz crucible produce great internal stress through the principle of the shrinkage that rises with heat promptly, and then make quartz crucible can split by oneself fast, reach the purpose with carbon crucible nation separation to help reducing the loss of carbon crucible nation, reduction in production cost.

Description

Device for rapidly dismounting quartz crucible for single crystal

Technical Field

The utility model relates to a technical field is made to the single crystal, in particular to single crystal is with device of demolising quartz crucible fast.

Background

In the RCZ Czochralski single crystal technology, a quartz crucible is used as a silicon melting container, the function is very important, the components are changed from one furnace to another, the quartz crucible can be softened at high temperature, the support strength at high temperature is far insufficient, and the use requirement cannot be met independently. Therefore, in the Czochralski single crystal process, the quartz crucible is nested in the carbon crucible bond with the same shape, and the quartz crucible is matched with the carbon crucible bond with better strength and toughness so as to meet the use requirement. Meanwhile, the problem is also brought, namely the quartz crucible is softened and then can be tightly adhered to the carbon crucible bond, the quartz crucible can only be separated by knocking the broken quartz crucible, time and labor are wasted, the damage to the carbon crucible bond can be caused, the price of the carbon crucible bond is very high, and the mode for taking the quartz crucible is an important factor for damaging the carbon crucible bond.

That is to say, among the current quartz crucible and the separation mode of carbon crucible bound, strike broken quartz crucible and accomplish by the manpower basically, this not only wastes time and energy, still can harm very big to outside carbon crucible bound, reduces the life of carbon crucible bound, increase cost.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides a single crystal is with device of demolising quartz crucible fast makes breakthrough change to quartz crucible's separation mode, strikes broken separation mode with original simple physics and changes into the broken separation mode of cold and hot internal stress, makes quartz crucible produce great internal stress through the principle of the shrinkage that rises with heat promptly, and then makes quartz crucible can split by oneself fast, reaches the purpose with carbon crucible nation separation, thereby help reducing the loss of carbon crucible nation, reduction in production cost.

In order to achieve the above object, the utility model provides a following technical scheme:

an apparatus for rapidly removing a quartz crucible for single crystal, comprising: the device comprises an isolation room, a coolant storage tank, an injection mechanism and a pipeline;

the isolation room is used for placing a quartz crucible adhered with a carbon crucible bond;

the spraying mechanism is arranged in the isolation space and is used for spraying coolant to the inner wall of the quartz crucible;

one end of the pipeline is connected with an outlet of the coolant storage tank, and the other end of the pipeline penetrates into the isolation room and is connected with an inlet of the injection mechanism.

Preferably, the method further comprises the following steps:

and the driving mechanism is used for driving the injection mechanism to extend downwards into the cavity of the quartz crucible and driving the injection mechanism to withdraw upwards from the cavity of the quartz crucible.

Preferably, the duct comprises: the device comprises a first pipeline, a telescopic hose and a second pipeline;

the telescopic hose and the second pipeline are arranged in the vertical direction; one end of the first pipeline is connected with an outlet of the coolant storage tank, and the other end of the first pipeline is connected with the top end of the telescopic hose; the top end of the second pipeline is connected with the bottom end of the telescopic hose, and the bottom end of the second pipeline penetrates into the isolation room from the top of the isolation room and is connected with the inlet of the spraying mechanism;

the driving mechanism comprises a lifting mechanism;

the lifting mechanism is arranged at the top of the isolation room, and the movable end of the lifting mechanism is connected with the middle part of the second pipeline, which is positioned at the top of the isolation room.

Preferably, the conduit further comprises a T-shaped conduit;

the T-shaped pipeline is arranged in the isolation room, and the vertical end of the T-shaped pipeline is connected with the bottom end of the second pipeline;

the number of the injection mechanisms is two, and inlets of the two injection mechanisms are correspondingly connected with the two horizontal ends of the T-shaped pipeline one by one.

Preferably, the injection mechanism is a spray head.

Preferably, the spray head comprises: a cylindrical portion and a semi-spherical portion;

the inner wall of the first end of the cylindrical part is in threaded connection with the outer wall of the horizontal end of the T-shaped pipeline, and the second end of the cylindrical part is connected with the end face of the semi-spherical part; the top of the semi-spherical part is provided with a rectangular nozzle communicated with the inner cavity of the cylindrical part.

Preferably, the lifting mechanism comprises a chain lifting mechanism.

Preferably, the coolant storage tank comprises a liquid nitrogen storage tank.

Preferably, the isolation space is provided with an exhaust port.

Preferably, the method further comprises the following steps:

and the base is arranged at the bottom of the isolation room.

According to the technical scheme, the utility model provides a single crystal is with device of demolising quartz crucible fast, make breakthrough change to quartz crucible's separation mode, strike broken separation mode with original simple physics and change into the broken separation mode of cold and hot internal stress, the principle through the shrinkage that rises with heat makes quartz crucible produce great internal stress promptly, and then makes quartz crucible can split by oneself fast, reach the purpose with carbon crucible nation separation, thereby help reducing the loss of carbon crucible nation, and the reduction in production cost.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of an apparatus for rapidly removing a quartz crucible for single crystals according to an embodiment of the present invention;

FIG. 2 is a front view of the apparatus for rapidly removing a quartz crucible for single crystal according to an embodiment of the present invention;

fig. 3 is a front view of a spray head according to an embodiment of the present invention;

fig. 4 is a structural side view of a nozzle provided in an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a spray head provided by an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a lifting mechanism according to an embodiment of the present invention;

fig. 7 is a top view of a lifting mechanism according to an embodiment of the present invention;

fig. 8 is a front view of a lifting mechanism according to an embodiment of the present invention.

The device comprises a separation chamber 10, an exhaust port 11, a pipeline 20, a first pipeline 21, a telescopic hose 22, a second pipeline 23, a T-shaped pipeline 24, a lifting mechanism 30, a base 31, a main support frame 32, a driving motor 33, a lifting platform 34, a counterweight device 35, a chain 36, a sprocket 37, a guide column 38, a belt 39, a liquid nitrogen storage tank 40, a spray head 50, a cylindrical part 51, an internal thread 511, a semi-spherical part 52, a rectangular nozzle 521 and a base 60.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The embodiment of the utility model provides a device that quartz crucible was demolishd with quick for single crystal, as shown in fig. 1 and fig. 2, include: isolation room 10, coolant storage tank, injection mechanism and piping 20;

the isolation space 10 is used for placing a quartz crucible adhered with a carbon crucible bond;

the spraying mechanism is arranged in the isolation room 10 and is used for spraying coolant to the inner wall of the quartz crucible;

one end of the pipe 20 is connected to an outlet of the coolant storage tank, and the other end thereof penetrates into the compartment 10 to be connected to an inlet of the injection mechanism.

It should be noted that, as shown in fig. 1, the isolation room 10 of the present embodiment is an independent closed isolation room, which is used as a separation operation space between the quartz crucible and the carbon crucible, and prevents the quartz crucible from being shot to the outside when being exploded, so as to protect and isolate the quartz crucible; the coolant storage tank is used for providing a coolant source for the injection mechanism; the injection mechanism is used for spraying the coolant to the inner wall of putting into the quartz crucible in the isolation room 10 (the adhesion has carbon crucible to bind and have the aftertemperature) for quartz crucible produces very big cold and hot internal stress under huge temperature difference, and then makes quartz crucible explode rapidly by oneself and drop, thereby realizes the autosegregation that quartz crucible and carbon crucible bound, reaches the effect that quick separation just do not harm carbon crucible bound promptly. In addition, the present embodiment further includes a delivery pump (not shown) for supplying power to the coolant, the delivery pump is connected between one end of the pipe 20 and an outlet of the coolant storage tank, and the outlet of the coolant storage tank is provided with a switch valve (not shown).

That is to say, this scheme makes breakthrough change to quartz crucible's separation mode, beats broken separation mode with original simple physics and changes into the broken separation mode of cold and hot internal stress, makes quartz crucible produce great internal stress through the principle of the shrinkage that rises with heat promptly, and then makes quartz crucible can split by oneself fast, reaches the purpose with carbon crucible nation separation to help reducing the loss of carbon crucible nation, reduction in production cost. In addition, in order to better understand the device for rapidly dismantling the quartz crucible for the single crystal, the use process is introduced as follows:

firstly, a quartz crucible (which is tightly adhered to a carbon crucible bond) taken out of a furnace is placed on a transfer trolley (such as a special trolley), the temperature of the quartz crucible which is just taken out is obviously high and is basically over 300 ℃, then the quartz crucible is pushed into an isolation room 10 through the transfer trolley, an injection mechanism is aligned to the inner wall of the quartz crucible, then an outlet switch of a coolant storage tank is opened, the injection mechanism starts to inject coolant to the inner wall of the quartz crucible, and during the period, the quartz crucible generates extremely large cold and hot stress under a large temperature difference, so that the quartz crucible is quickly exploded and falls off, the separation of the quartz crucible and the carbon crucible bond is quickly and efficiently finished, and the risk of damage of the carbon crucible bond is reduced.

According to the technical scheme, the embodiment of the utility model provides a device for rapidly removing quartz crucible for single crystal, it has following beneficial effect:

1. the separation mode of physically knocking and crushing the quartz crucible is abandoned, and the quartz crucible generates larger internal stress through the principle of thermal expansion and cold contraction, so that the quartz crucible can rapidly and automatically crack, and the purpose of separating from a carbon crucible is achieved;

2. the degree of automation that quartz crucible and carbon crucible bound the separation is high, has avoided the manual mode of knocking broken quartz crucible of personnel, and labour saving and time saving avoids carbon crucible to bind impaired, reduction in production cost.

In this scheme, the utility model provides a single crystal is with device of demolising quartz crucible fast still includes:

the driving mechanism is used for driving the injection mechanism to extend downwards into the cavity of the quartz crucible and driving the injection mechanism to withdraw upwards from the cavity of the quartz crucible. That is to say, this scheme drives injection mechanism up-and-down motion through actuating mechanism to injection mechanism can visit down to quartz crucible's cavity in, shortens injection mechanism's injection distance with this, makes quartz crucible obtain the cooling effect better, and then can make quartz crucible produce bigger internal stress, thereby helps making quartz crucible split by oneself sooner. Of course, the driving mechanism in the scheme can be a mechanical arm or a lifting mechanism.

As shown in fig. 2, the duct 20 includes: a first duct 21, a bellows 22 and a second duct 23;

the flexible hose 22 and the second pipeline 23 are both arranged in the vertical direction; one end of the first pipeline 21 is connected with an outlet of the coolant storage tank, and the other end is connected with the top end of the flexible hose 22; the top end of the second pipeline 23 is connected with the bottom end of the telescopic hose 22, and the bottom end of the second pipeline penetrates into the isolation room 10 from the top thereof to be connected with the inlet of the injection mechanism; of course, the top of the isolation room 10 is provided with a through hole for matching with the second pipeline 23;

the driving mechanism includes a lifting mechanism 30;

the elevating mechanism 30 is disposed at the top of the compartment 10, and its movable end is connected to the middle portion of the second duct 23 at the top of the compartment 10. That is to say, this scheme drives the upper portion of second pipeline 23 through elevating system 30 and makes elevating movement to indirectly realize injection mechanism's elevating movement, moreover based on the flexible effect of bellows 22, so that first pipeline 21 and second pipeline 23 form good linking.

In order to further optimize the above technical solution, as shown in fig. 2, the pipe 20 further comprises a T-shaped pipe 24;

the T-shaped pipeline 24 is arranged in the isolation room 10, and the vertical end of the T-shaped pipeline is connected with the bottom end of the second pipeline 23;

the number of the injection mechanisms is two, and inlets of the two injection mechanisms are correspondingly connected with two horizontal ends of the T-shaped pipeline 24 one by one. The scheme is designed in such a way, so that the cold cutting agent is horizontally sprayed to two opposite positions of the inner wall of the quartz crucible, and the quartz crucible can be automatically cracked more quickly. Of course, in order to achieve the above effect, the horizontal span of the two injection mechanisms should not be larger than the inner diameter of the quartz crucible, so as to ensure that the two injection mechanisms can smoothly extend into the quartz crucible. In addition, the first pipeline 21, the second pipeline 23 and the T-shaped pipeline 24 in the scheme are all hard plastic pipes.

Specifically, as shown in fig. 2, the injection mechanism is a nozzle 50, and the structure thereof can be seen in fig. 3 to 5.

In this embodiment, as shown in fig. 3 to 5, the head 50 includes: a cylindrical portion 51 and a hemispherical portion 52;

the inner wall of the first end of the cylindrical part 51 is in threaded connection with the outer wall of the horizontal end of the T-shaped pipeline 24, and the second end of the cylindrical part is connected with the end face of the semi-spherical part 52; namely, the inlet of the spray head 50 is in threaded connection with the horizontal end of the T-shaped pipeline 24, and the mode has the characteristics of simple connection structure, convenient and reliable connection and the like; correspondingly, the inner wall of the first end of the cylindrical part 51 is provided with an internal thread 511, and the outer wall of the horizontal end of the T-shaped pipeline 24 is provided with an external thread matched with the internal thread; the dome of the hemispherical portion 52 is opened with a rectangular nozzle 521 communicating with the inner cavity of the cylindrical portion 51. Wherein the rectangular nozzle 521 is arranged along the transverse direction, which can help to increase the cooling area of the inner wall of the quartz crucible, thereby enabling the quartz crucible to further rapidly crack by itself.

Specifically, as shown in fig. 6, the lifting mechanism 30 includes a chain lifting mechanism. Wherein, chain elevating system has characteristics such as lift safety, stability and reliable. More specifically, as shown in fig. 6 to 8, the chain lifting mechanism includes a base 31, a main support frame 32, a driving motor 33, a lifting platform 34, a counterweight device 35, a chain 36, a sprocket 37, a guide post 38, a belt 39, and the like; the main support frame 32 and the driving motor 33 are respectively arranged at the top of the base 31, the chain wheel 37 is arranged at the top of the main support frame 32, the output end of the driving motor 33 is in transmission connection with the chain wheel 37 through a belt 39, the middle part of the chain 36 is arranged on the chain wheel 37, one end of the chain is connected with the lifting platform 34, the other end of the chain is connected with the counterweight device 35, the guide post 38 is arranged in the main support frame 32 in the vertical direction, the lifting platform 34 can slide up and down along the guide post 38, the lifting platform 34 is provided with a plurality of through holes, the middle part of the second pipeline 23, which is positioned at the top of the separation space 10, penetrates through one of the through holes, and the fixing of the second pipeline 23 and the through hole of the lifting platform 34 is realized through a shaft sleeve. Of course, other lifting mechanisms 30, such as a screw lifting mechanism, may also be adopted in the present solution, and are not described herein again.

Further, as shown in fig. 1, the coolant storage tank includes a liquid nitrogen storage tank 40. That is to say, this scheme adopts liquid nitrogen as the coolant, has characteristics such as cooling effect splendid, chemical stability, and also easily obtains. Wherein, the temperature of the liquid nitrogen is about-196 ℃.

In order to further optimize the above technical solution, as shown in fig. 2, the isolation room 10 is provided with an exhaust port 11, so that the isolation room 10 is connected to a ventilation system inside the workshop, an effect of ventilating the isolation room 10 is achieved, and the safety of the isolation room 10 is ensured.

In this scheme, as shown in fig. 1, the apparatus for rapidly removing a quartz crucible for a single crystal provided by an embodiment of the present invention further includes:

a base 60 disposed at the bottom of the isolation room 10. This helps to improve the stability of the isolation chamber 10.

In the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. An apparatus for rapidly removing a quartz crucible for a single crystal, comprising: -an isolation compartment (10), a coolant tank, a spray mechanism and a conduit (20);

the separation chamber (10) is used for placing a quartz crucible adhered with a carbon-carbon crucible bond;

the spraying mechanism is arranged in the isolation room (10) and is used for spraying coolant to the inner wall of the quartz crucible;

one end of the pipeline (20) is connected with an outlet of the coolant storage tank, and the other end of the pipeline penetrates into the isolation room (10) to be connected with an inlet of the injection mechanism.

2. An apparatus for rapidly removing a quartz crucible for a single crystal according to claim 1, further comprising:

and the driving mechanism is used for driving the injection mechanism to extend downwards into the cavity of the quartz crucible and driving the injection mechanism to withdraw upwards from the cavity of the quartz crucible.

3. An apparatus for rapidly removing a quartz crucible for single crystal according to claim 2, wherein the pipe (20) comprises: a first duct (21), a telescopic hose (22) and a second duct (23);

the telescopic hose (22) and the second pipeline (23) are arranged along the vertical direction; one end of the first pipeline (21) is connected with an outlet of the coolant storage tank, and the other end of the first pipeline is connected with the top end of the telescopic hose (22); the top end of the second pipeline (23) is connected with the bottom end of the telescopic hose (22), and the bottom end of the second pipeline penetrates into the isolation room (10) from the top of the isolation room and is connected with the inlet of the spraying mechanism;

the driving mechanism comprises a lifting mechanism (30);

the lifting mechanism (30) is arranged at the top of the isolation room (10), and the movable end of the lifting mechanism is connected with the middle part of the second pipeline (23) at the top of the isolation room (10).

4. A device for rapidly removing a quartz crucible for single crystals according to claim 3, characterized in that the tube (20) further comprises a T-shaped tube (24);

the T-shaped pipeline (24) is arranged in the isolation room (10), and the vertical end of the T-shaped pipeline is connected with the bottom end of the second pipeline (23);

the number of the injection mechanisms is two, and inlets of the two injection mechanisms are correspondingly connected with two horizontal ends of the T-shaped pipeline (24) one by one.

5. A device for quickly removing a quartz crucible for a single crystal according to claim 4, characterized in that the spraying mechanism is a shower head (50).

6. An apparatus for rapidly removing a quartz crucible for single crystal according to claim 5, wherein the shower head (50) comprises: a cylindrical portion (51) and a semi-spherical portion (52);

the inner wall of the first end of the cylindrical part (51) is in threaded connection with the outer wall of the horizontal end of the T-shaped pipeline (24), and the second end of the cylindrical part is connected with the end face of the semi-spherical part (52); the dome of the semi-spherical part (52) is provided with a rectangular nozzle (521) communicated with the inner cavity of the cylindrical part (51).

7. A device for quickly removing a quartz crucible for a single crystal according to claim 3, characterized in that the lifting mechanism (30) comprises a chain lifting mechanism.

8. An apparatus for rapidly removing a quartz crucible for single crystal according to claim 1, wherein the coolant storage tank comprises a liquid nitrogen storage tank (40).

9. A device for rapidly removing a quartz crucible for single crystals according to claim 1, characterized in that the separation chamber (10) is provided with a gas exhaust (11).

10. An apparatus for quickly removing a quartz crucible for a single crystal according to claim 1, further comprising:

a base (60) disposed at the bottom of the isolation compartment (10).

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