CN218133463U

CN218133463U - Surface cleaning device of spin coater

Info

Publication number: CN218133463U
Application number: CN202222214247.6U
Authority: CN
Inventors: 刘娥慧; 刘雍文
Original assignee: Jiangxi Weiyi Semiconductor Equipment Co ltd; Jiangxi Weiyike Semiconductor Technology Co ltd
Current assignee: Jiangxi Weiyi Semiconductor Equipment Co ltd; Jiangxi Weiyike Semiconductor Technology Co ltd
Priority date: 2022-08-23
Filing date: 2022-08-23
Publication date: 2022-12-27
Anticipated expiration: 2032-08-23

Abstract

The utility model relates to an even gluey developing machine washs technical field, concretely relates to even gluey developing machine surface cleaning device. The utility model provides a spin coating developing machine surface cleaning device with wash high-efficient and that workman intensity of labour is little. The utility model provides a surface cleaning device of a spin coater developer, which comprises a developer shell, a liquid storage tank, a baffle plate and the like; the developer housing top is provided with the liquid reserve tank that is used for storing the washing liquid, and developer housing top is provided with the baffle that is used for blockking the washing liquid in the liquid reserve tank with it adaptation along its circumference. Drive the contact lever downstream through the pull rod, the contact lever extrusion connecting rod makes it keep away from and cleans the cotton, removes the limiting displacement to cleaning the cotton from this, cleans cotton one side and just slides downwards along the guide arm, realizes carrying out high-efficient washing to the developer housing surface from this.

Description

Surface cleaning device of spin coater

Technical Field

The utility model relates to an even gluey developing machine washs technical field, concretely relates to even gluey developing machine surface cleaning device.

Background

The spin coater is equipment for completing all photoetching processes except exposure, and comprises coating, baking and developing of photoetching materials, cleaning of the back of a wafer, rinsing of deionized water for the surface of the wafer in an immersion process and the like; in the developing machine for developing a resist, since a certain amount of glue, dust, and the like adhere to the surface thereof over a long period of time, the surface thereof needs to be cleaned regularly.

At present, most of the cleaning of the surface of the spin coater is to manually scrape off the dirt by using a rag or a cleaning brush and then clean the surface by using cleaning liquid, and the operation mode has the defects of lower efficiency and high labor intensity of workers.

Therefore, it is necessary to design a surface cleaning device of the spin coater having an efficient cleaning function.

SUMMERY OF THE UTILITY MODEL

The utility model discloses an overcome prior art and adopt the manual work to wash the shortcoming that there is inefficiency, workman intensity of labour big to the developing machine surface, the to-be-solved technical problem of the utility model is to provide an even gluey developing machine surface cleaning device that has the washing high efficiency and workman intensity of labour is little.

In order to solve the technical problem, the utility model provides a such even gluey developing machine surface cleaning device, including the developing machine casing, the liquid reserve tank, the baffle, first spring and pull rod, developing machine casing top is provided with the liquid reserve tank that is used for storing the washing liquid, developing machine casing top is provided with the baffle that is used for blockking the washing liquid in the liquid reserve tank with it adaptation along its circumference, the baffle bottom is connected with first spring evenly at the interval, the one end and the liquid reserve tank wall connection of baffle are kept away from to first spring, the both ends symmetry of baffle bottom are connected with the pull rod symmetrically, the pull rod runs through the liquid reserve tank and sliding connection with it, be equipped with the wiper mechanism who is used for wasing developing machine casing surface on the developing machine casing outer wall.

Preferably, wiper mechanism is including the contact lever, a slide rail, the connecting rod, clean cotton and guide arm, the both sides of the outside symmetry of developer housing are equipped with developer housing highly uniform guide arm, common slidingtype be connected with on the guide arm with the cotton of cleaning of developer housing adaptation, clean the cotton along developer housing circumference setting and with the circumference outer wall contact of developer housing, the upper portion of developer housing symmetry both sides is provided with the slide rail parallel with the guide arm, slidingtype be connected with in the slide rail be used for carrying out spacing connecting rod to cleaning the cotton, the contact lever is installed on pull rod upper portion, the contact lever is kept away from one side of pull rod and is contacted the cooperation with the connecting rod.

Preferably, still including the second spring, be connected with between connecting rod and the slide rail and be used for carrying out limiting displacement's second spring to the connecting rod.

Preferably, the cleaning device further comprises a third spring, and the third spring is connected between the wiping cotton and the bottom of the guide rod.

Preferably, the developing device further comprises a pulley and a pull rope, the pulley is arranged on the developer shell close to the sliding rail, the pull rope is connected to the wiping cotton, and the pull rope is wound on the pulley.

Preferably, the device further comprises a supporting plate, a winding wheel and a rocker, wherein the supporting plate is arranged on the lower portion of the developer shell, the winding wheel is connected to the supporting plate in a rotating mode, one end, far away from the wiping cotton, of the winding wheel is connected with the winding wheel, and the rocker used for applying rotating acting force to the winding wheel is connected to one side of the winding wheel.

Preferably, the developing device further comprises a water collecting tank, and the bottom of the developing device shell is provided with the water collecting tank for collecting cleaned liquid along the circumferential direction of the bottom.

The utility model discloses the beneficial effect who has as follows:

1. the contact rod is driven to move downwards through the pull rod, the contact rod extrudes the connecting rod to enable the connecting rod to be far away from the wiping cotton, so that the limiting effect on the wiping cotton is removed, one side of the wiping cotton slides downwards along the guide rod, one side of the wiping cotton close to the developer shell scrapes off dirt on the surface of the developer shell, and under the matching action of liquid storage tank cleaning liquid, the surface cleaning operation of the developer shell is efficiently finished, manual cleaning is replaced, the labor intensity of workers is greatly reduced, and meanwhile, the cleaning operation efficiency is greatly improved;

2. through the cooperation of reel and pulley, contract the stay cord rapidly, the stay cord shrink just drives and cleans cotton rapid rebound and reset, realizes from this that it resets to clean cotton high efficiency, has further alleviateed operating personnel's intensity of labour, has promoted the operating efficiency.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a partial sectional view of the present invention.

Fig. 3 is a schematic diagram of a first partial body structure according to the present invention.

Fig. 4 is a schematic diagram of a second partial body structure according to the present invention.

Fig. 5 is a partial enlarged view of the present invention.

Fig. 6 is a schematic diagram of a third partial three-dimensional structure of the present invention.

The symbols in the drawings are: 1-a developer shell, 2-a water collecting tank, 3-a liquid storage tank, 4-a baffle, 5-a first spring, 6-a pull rod, 7-a contact rod, 8-a slide rail, 9-a connecting rod, 10-a second spring, 11-wiping cotton, 12-a guide rod, 13-a third spring, 14-a pulley, 15-a pull rope, 16-a supporting plate, 17-a reel and 18-a rocker.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and examples.

Example 1

As shown in fig. 1, 2 and 3, a even gluey developing machine surface cleaning device, including the developing machine casing 1, liquid reserve tank 3, baffle 4, first spring 5 and

pull rod

6, 1 top of developing machine casing is provided with the liquid reserve tank 3 that is used for storing the washing liquid with 1 top adaptation of developing machine casing, the peripheral edge of liquid reserve tank 3 seals the liquid storage chamber that forms liquid reserve tank 3 with developing

machine casing

1, 1 top of developing machine casing is provided with the baffle 4 that is used for blockking the washing liquid in liquid reserve tank 3 with its adaptation along its circumference, baffle 4 bottom is connected with first spring 5 evenly at interval, the inner wall connection of first spring 5 lower extreme and liquid reserve tank 3 lower extreme, the both ends of baffle 4 bottom bilateral symmetry are connected with pull rod 6 through the mode of gluing symmetrically, pull rod 6 runs through liquid reserve tank 3 and sliding connection with it, be equipped with the wiper mechanism who is used for wasing 1 surface of developing machine casing on the developing machine casing 1 outer wall.

As shown in fig. 4 and 5, the cleaning mechanism includes a contact rod 7, a slide rail 8, a connecting rod 9, a wiping cotton 11 and a guide rod 12, the two sides of the outside bilateral symmetry of the developer housing 1 are provided with the guide rod 12 which is in accordance with the height of the developer housing 1, the guide rod 12 is connected with the wiping cotton 11 which is matched with the developer housing 1 in a common sliding manner, the peripheral inner sides of the wiping cotton 11 are in contact with the peripheral outer wall of the developer housing 1, the upper parts of the two sides of the bilateral symmetry of the developer housing 1 are provided with the slide rail 8 which is parallel to the guide rod 12, the sliding connection in the slide rail 8 is provided with the connecting rod 9 which is used for limiting the wiping cotton 11 and has a figure 7 shape, the contact rod 7 is installed on the upper part of the pull rod 6, one side of the contact rod 7, which is far away from the pull rod 6, is in contact fit with the connecting rod 9.

As shown in fig. 5, the device further comprises a second spring 10, and the second spring 10 for limiting the connecting rod 9 is connected between the connecting rod 9 and the slide rail 8.

As shown in fig. 4 and 5, a third spring 13 is further included, and the third spring 13 is connected between the wiping cotton 11 and the bottom of the guide rod 12.

When the surface of the spin coater is required to be cleaned, a worker firstly pours cleaning liquid into the liquid storage tank 3, the worker pulls the pull rod 6 downwards, the pull rod 6 drives the baffle 4 connected with the pull rod to be far away from a circular groove at the top of the developer shell 1, the cleaning liquid flows to the surface of the peripheral outer wall of the developer shell 1 through the circular groove at the top of the developer shell 1, when the pull rod 6 moves downwards, the pull rod 6 drives the contact rod 7 to move downwards, the contact rod 7 moves downwards to extrude one side of the connecting rod 9, which is far away from the guide rod 12, the connecting rod 9 moves rightwards along the slide rail 8, the second spring 10 is compressed, one end, which is close to the guide rod 12, of the connecting rod 9 is gradually far away from the wiping cotton 11, so that the limiting effect on the wiping cotton 11 is relieved, the outward side of the wiping cotton 11 slides downwards along the guide rod 12, the side, the wiping cotton 11, which is close to the developer shell 1, dirty on the surface of the developer shell 1 is scraped, the third spring 13 is reset to accelerate the sliding speed of the wiping cotton 11 under the action of the spring, so that the cleaning of the cleaning cotton can be completed from top of the developing shell 1 from top, the second spring 6 stops exerting an acting force on the reset spring, and drives the reset spring to reset baffle 4, and the reset spring to drive the reset spring, thereby, the reset spring, and the reset spring 9, and the reset spring drives the reset spring to reset baffle 4, and the reset spring to drive the top of the reset baffle 4.

Example 2

As shown in fig. 4 and 5, in addition to embodiment 1, a pulley 14 and a rope 15 are further included, the developer housing 1 is provided with the pulley 14 near the slide rail 8, the wiping cotton 11 is connected with the rope 15, and the rope 15 is wound around the pulley 14.

As shown in fig. 4 and 6, the device further comprises a support plate 16, a reel 17 and a rocker 18, wherein the support plate 16 is arranged at the lower part of the developer housing 1, the reel 17 is rotatably connected to the support plate 16, one end of the reel 17 far away from the wiping cotton 11 is connected with the reel 17, and the rocker 18 for applying rotating force to the reel 17 is connected to one side of the reel 17.

When wiping cotton 11 from top to bottom moves to developer housing 1 lower part, stay cord 15 is stretched, the staff is through applying the rotational force for rocker 18, rocker 18 just drives reel 17 and rotates, reel 17 just drives stay cord 15 shrink, tensile shrink just drives wiping cotton 11 through pulley 14 and moves up, wiping cotton 11 upward movement drives the tensile deformation of third spring 13, wiping cotton 11 moves up to the realization of developer housing 1 top after reseing, connecting rod 9 is spacing wiping cotton 11, no longer for rocker 18 to apply the rotational force this moment, reel 17 stall, realize wiping cotton 11 high-efficient reseing.

As shown in fig. 1, the developing device further includes a collecting tank 2, and the collecting tank 2 for collecting the cleaned liquid is disposed at the bottom of the developing device housing 1 along the circumferential direction thereof.

The collecting tank 2 can collect the waste liquid after cleaning the developer housing 1 in a centralized manner, and the collected waste liquid is discharged to a designated place, so that environmental pollution is avoided.

The above-mentioned embodiments only express the preferred embodiments of the present invention, and the description thereof is more specific and detailed, but not to be understood as the limitation of the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several changes, modifications and substitutions can be made, which are all within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. The utility model provides an even gluey developing machine surface cleaning device, including developing machine casing (1) and liquid reserve tank (3), developing machine casing (1) top is provided with liquid reserve tank (3) that are used for storing the washing liquid, a serial communication port, still including baffle (4), first spring (5), pull rod (6) and wiper mechanism, developing machine casing (1) top is provided with baffle (4) that are used for blockking the washing liquid in liquid reserve tank (3) of adaptation along its circumference, baffle (4) bottom is connected with first spring (5) evenly at intervals, the one end and liquid reserve tank (3) inner wall connection of baffle (4) are kept away from in first spring (5), the both ends symmetry of baffle (4) bottom are connected with pull rod (6) symmetrically, pull rod (6) run through liquid reserve tank (3) and sliding connection with it, be equipped with the wiper mechanism that is used for rinsing developing machine casing (1) surface on developing machine casing (1) outer wall.

2. The surface cleaning device for the spin coater developer according to claim 1, wherein the cleaning mechanism comprises a contact rod (7), a sliding rail (8), a connecting rod (9), a wiping cotton (11) and a guide rod (12), the guide rod (12) is arranged on two sides of the developer housing (1) in an external symmetry manner and is in height consistency with the developer housing (1), the wiping cotton (11) matched with the developer housing (1) is connected on the guide rod (12) in a sliding manner, the wiping cotton (11) is arranged along the circumferential direction of the developer housing (1) and is in contact with the circumferential outer wall of the developer housing (1), the sliding rail (8) parallel to the guide rod (12) is arranged on the upper portions of two sides of the developer housing (1) in a sliding manner, the connecting rod (9) used for limiting the wiping cotton (11) is connected in the sliding manner, the contact rod (7) is installed on the upper portion of the pull rod (6), and one side, far away from the pull rod (6), of the contact rod (7), is in contact fit with the connecting rod (9).

3. The surface cleaning device of the spin coater according to claim 2, further comprising a second spring (10), wherein the second spring (10) is connected between the connecting rod (9) and the sliding rail (8) and used for limiting the connecting rod (9).

4. The surface cleaning device of the spin coater according to claim 3, further comprising a third spring (13), wherein the third spring (13) is connected between the wiping cotton (11) and the bottom of the guide rod (12).

5. The surface cleaning device of the spin coater according to claim 4, further comprising a pulley (14) and a pull rope (15), wherein the pulley (14) is arranged on the developer housing (1) close to the slide rail (8), the pull rope (15) is connected to the wiping cotton (11), and the pull rope (15) is wound on the pulley (14).

6. The surface cleaning device of the spin coater according to claim 5, further comprising a support plate (16), a reel (17) and a rocker (18), wherein the support plate (16) is arranged at the lower part of the developer housing (1), the reel (17) is rotatably connected to the support plate (16), one end of the reel (17) far away from the wiping cotton (11) is connected with the reel (17), and the rocker (18) for applying a rotating action force to the reel (17) is connected to one side of the reel (17).

7. The surface cleaning device of the spin coater according to claim 6, further comprising a water collecting tank (2), wherein the water collecting tank (2) for collecting the cleaned liquid is arranged at the bottom of the developer housing (1) along the circumferential direction.