CN218130122U - Gas-liquid separation device suitable for chemical supply system - Google Patents

Abstract

The utility model relates to a gas-liquid separation device suitable for chemicals supply system, include: the container is internally provided with a hollow cavity for gas-liquid two-phase flow separation; the liquid inlet pipeline extends into the hollow cavity from the bottom end of the container, and an overflow port is formed in the position, close to the top end of the hollow cavity, of the liquid inlet pipeline; the liquid outlet pipeline is communicated with the hollow cavity; wherein, the height of the liquid outlet pipe in the vertical direction is lower than the height of the overflow port of the liquid inlet pipe in the vertical direction. The overflow opening of the separation pipe is provided with the liquid discharge opening higher than the liquid outlet pipeline, and the gas-liquid separation process is carried out at the position far above the liquid discharge opening, so that after gas-liquid two-phase fluid is separated, chemical liquid medicine is precipitated and is led out from the liquid discharge opening of the liquid outlet pipeline with lower height in the vertical direction, and the gas-liquid two-phase fluid is prevented from incompletely entering the liquid discharge opening.

Description

Gas-liquid separation device suitable for chemical supply system

Technical Field

The utility model relates to a photovoltaic preparation technical field especially relates to a gas-liquid separation device suitable for chemicals supply system.

Background

In the field of photovoltaic and semiconductor preparation, operations such as cleaning and etching of silicon wafer surfaces by using strong corrosive chemical liquid are often needed. In the process of conveying the chemical liquid medicine, bubbles are doped in the chemical liquid medicine due to vibration of the conveying pump, turbulent flow of the pipeline and the like. Because some photovoltaic and semiconductor factories are not provided with large-capacity buffer tanks, chemicals containing air bubbles are directly supplied to terminal process equipment by a chemical supply system, and the air bubbles in chemical liquid medicine influence the flow measurement and the filtration efficiency of the chemical liquid medicine, so that the supply system is difficult to normally operate and use, and further influences the process equipment to play a role. In the field of photovoltaic and semiconductor preparation, processing equipment can clean and etch the surface of a silicon wafer by using a strong corrosive chemical liquid. Such as the ability to dissolve oxides with hydrofluoric acid (HF), which is commonly used in the photovoltaic, semiconductor industry to remove oxides from the surface of silicon wafers. For this reason, it is common to employ a gas-liquid separation device to eliminate harmful bubbles in the pipeline.

The inventors found the following problems in the separation work using the conventional gas-liquid separation apparatus: firstly, the gas-liquid separation device makes full use of the density difference of gas and liquid in the gas two-phase fluid, and the separated gas is accumulated on the top of the gas-liquid separation device. However, as the separation process proceeds, the amount of gas phase at the top of the gas-liquid separation device increases, which may cause an increase in the gas pressure inside the gas-liquid separation device. When the gas pressure in the gas-liquid separation device is close to the gas pressure at the liquid flooding point, the gas phase in the gas-liquid separation device presses the liquid phase in the gas-liquid separation device, and at the moment, if the gas-liquid two-phase fluid is continuously conveyed inwards, the situation that the gas phase in the gas-liquid two-phase fluid is pressed by the internal gas pressure and is directly pressed into the liquid outlet pipeline to be discharged without being separated from the gas phase is likely to occur, and the normal operation and use of a subsequent supply system are influenced.

SUMMERY OF THE UTILITY MODEL

Based on the above problem, provide a gas-liquid separation device suitable for chemical supply system, solve the insufficient problem of gas-liquid separation.

The application provides a gas-liquid separation device suitable for chemicals supply system, includes:

the container is internally provided with a hollow cavity for gas-liquid two-phase flow separation;

the liquid inlet pipeline extends into the hollow cavity from the bottom end of the container, and an overflow port is formed in the position, close to the top end of the hollow cavity, of the liquid inlet pipeline; and

the liquid outlet pipeline is communicated with the hollow cavity;

the liquid level detection component is used for detecting the liquid level position of the chemical liquid in the hollow cavity;

the exhaust component is used for exhausting gas accumulated at the top of the hollow cavity, the exhaust component is arranged at the top end of the container, and the exhaust component comprises an exhaust valve which is electrically connected with the liquid level detection component;

wherein, the height of the liquid outlet pipe in the vertical direction is lower than that of the overflow port of the liquid inlet pipe in the vertical direction;

the liquid level detection component comprises a first sensor and a second sensor, the overflow opening of the liquid inlet pipeline is positioned at a detection position lower than the first sensor, and the second sensor is arranged above the first sensor, so that the second sensor is close to the top end of the container relative to the first sensor.

In one embodiment, the level detection member is provided on a side wall of the container.

In one embodiment, the first sensor and the second sensor are electrically connected with the exhaust valve to control the opening and closing of the exhaust valve;

when the first sensor detects the liquid level in the container, the first sensor controls the exhaust valve to open so that the exhaust component performs an exhaust action;

when the second sensor detects the liquid level in the container, the second sensor controls the exhaust valve to close, so that the exhaust component stops the exhaust action.

In one embodiment, the exhaust valve further comprises a controller, the first sensor, the second sensor and the exhaust valve are electrically connected through the controller, and the controller receives signals fed back by the two sensors to control the exhaust valve to open or close.

In one embodiment, the sensor of the level detection member is provided outside the container, and the container is provided with a detection window for providing detection of the sensor.

In one embodiment, the outer wall of the container is provided with a mounting part, the sensor of the liquid level detection component is mounted on the mounting part, the corresponding sensor detects the liquid level in the hollow cavity through the detection window, the outer wall of the container is circumferentially provided with a mounting groove, and the mounting part is embedded in the mounting groove.

In one embodiment, the liquid inlet pipeline comprises a separation pipe as a part of the liquid inlet pipeline, the separation pipe is positioned in the hollow cavity, and the overflow port is formed in the separation pipe;

the separation pipe is vertically arranged in the hollow cavity, and gas-liquid two-phase flow in the liquid inlet pipeline is discharged from the overflow port from bottom to top through the separation pipe.

In one embodiment, the container comprises a main body part, wherein the main body part is hollow to form a hollow cavity, and the hollow cavity extends to two ends of the main body part to form an opening;

the two ends of the main body part are respectively connected with a sealing cover and a base, and the liquid inlet pipeline and the liquid outlet pipeline are arranged on the base.

In one embodiment, the top surface of the base is provided with a connecting skirt edge of an annular bulge, the connecting skirt edge covers an opening at one end of the main body part, and the shape of the connecting skirt edge corresponds to the outer contour shape of the main body part; the base is connected with the main body part in a sealing mode through the connecting skirt.

In one embodiment, a channel serving as a liquid inlet pipeline and a liquid outlet pipeline is arranged in the base, and the channel extends to the top surface of the base to form an opening serving as a corresponding liquid inlet pipeline connecting port and a corresponding liquid outlet pipeline liquid outlet; the separation pipe is detachably connected with the main body structure of the liquid inlet pipeline; when the separating pipe is connected with the liquid inlet pipeline, the separating pipe is communicated with the connecting port.

The gas-liquid separation device realizes natural separation by utilizing different densities of gas and liquid, and is convenient for separating the chemical liquid medicine supplied by the chemical supply system into bubbles in the cavity and then supplying the bubbles to the processing equipment so as to ensure that the processing equipment plays a corresponding role. The liquid level of the container is detected through the first sensor and the second sensor so as to control the opening and closing of the exhaust valve, so that gas in the hollow cavity can be exhausted, and the phenomenon of flooding is avoided. Meanwhile, the gas accumulated in the hollow cavity can enable the gas phase and the liquid phase in the hollow cavity to be mutually extruded, so that the flow rate of the liquid and the gas is improved.

Drawings

Fig. 1 is a schematic perspective view of a gas-liquid separation apparatus according to an embodiment of the present invention;

fig. 2 is a front view of a gas-liquid separation apparatus according to an embodiment of the present invention;

fig. 3 is a schematic cross-sectional view of a gas-liquid separation apparatus according to an embodiment of the present invention;

FIG. 4 is an enlarged partial view of FIG. 3 at A;

fig. 5 is a schematic cross-sectional view of a main body portion in the gas-liquid separation apparatus according to an embodiment of the present invention;

fig. 6 is a schematic cross-sectional view of an inner base of a gas-liquid separation apparatus according to an embodiment of the present invention;

fig. 7 is a schematic sectional view of a base and a partial separation tube in a gas-liquid separation apparatus according to an embodiment of the present invention.

The attached drawings are marked as follows:

10. a container;

11. a main body part; 111. a hollow cavity; 112. mounting grooves;

12. a sealing cover;

13. an installation part;

20. a base;

21. a body; 211. connecting the skirt rims;

22. a liquid outlet pipeline; 221. a liquid outlet channel; 222. a liquid outlet; 223. an auxiliary liquid outlet; 224. a liquid discharge port;

23. a liquid inlet pipeline; 231. a liquid inlet channel; 232. a liquid inlet; 233. an auxiliary liquid inlet; 234. a connecting port;

24. a separation tube; 241. a proximal end; 242. a distal end; 243. a channel; 244. overflowing;

30. a fixed bracket; 31. a first clamping portion; 32. a second clamping portion;

40. an exhaust member;

50. a liquid level detection member; 51. a first sensor; 52. a second sensor.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

At present, chemicals are commonly used in the photovoltaic and semiconductor industries, and chemical solutions with strong corrosiveness, such as hydrofluoric acid (HF), are typical chemical solutions, and are commonly used in the photovoltaic and semiconductor industries to remove oxides on the surfaces of silicon wafers due to the capability of hydrofluoric acid to dissolve the oxides.

The inventor has noticed that during the process of delivering the chemical liquid, bubbles are formed due to vibration of the delivery pump and turbulence of the pipeline, and particularly for the bulk barrel type supply system, at the initial stage of chemical supply after replacing the barrel, more gas enters the pipeline, bubbles are formed in the liquid chemical, and the bubbles can affect the normal operation and use of the supply system. Such as: accurate measurement of the outlet position of the supply system by using a flowmeter is influenced, so that accurate outlet flow cannot be obtained; or the filtration efficiency of a chemical filter in a pipeline system is reduced, and if the accumulation amount of bubbles reaches a certain degree, even larger local pressure occurs to prevent liquid from entering the filter, and the phenomenon of tube explosion is caused. Meanwhile, since a large-capacity buffer tank is not provided in some photovoltaic and semiconductor factories, if a chemical supply system directly supplies chemicals containing bubbles to a terminal processing device, the processing device will be greatly influenced to play a corresponding role. In order to effectively eliminate the bubbles in the pipeline, a gas-liquid separation device is required to achieve the purpose of eliminating harmful bubbles in the pipeline.

However, the conventional gas-liquid separation apparatus is applied to high-pressure and low-surface tension piping systems. Particularly, a flooding phenomenon is more easily generated for a liquid with low surface tension (the surface tension at zero is less than the surface tension of 72.75mN/m of water at zero), and the flooding phenomenon is a phenomenon that the gas pressure in the gas-liquid separation device is increased due to the flow ratio and density difference of gas and liquid phases in the gas-liquid separation device, the structure and size of equipment, the viscosity, the surface tension, the foamability and the like of the two phases, so that the originally separated gas and liquid phases are re-doped, and the liquid level in the gas-liquid separation device is increased. Before the flooding phenomenon occurs, the gas phase presses the containing space of the liquid phase, so that the liquid level descends, and the liquid flooding point is the point when the liquid level descends to suddenly and steeply increase. The high flow of liquid doped with bubbles into the separator results in a higher liquid load in the separator. Because the pipe diameter of the downcomer of the separator is smaller, the bubbles can not be separated from the two-phase flow completely due to the increase of the air pressure before flooding occurs, and the problem that the gas-liquid mixed liquid directly enters the pipeline from the outlet is caused. Specifically, when the flow rate of the gas-liquid two-phase liquid is to be large, the discharge pressure inside the liquid-gas separation device is made to suddenly increase, the gas pressure inside the liquid-gas separation device is made to increase in the case where it is difficult to discharge the gas more quickly, and the problem of insufficient gas-liquid separation is more likely to occur.

Based on the above consideration, in order to solve the problem that the gas phase in the gas-liquid two-phase fluid is directly pressed into the liquid outlet pipe and discharged without being separated from the gas phase, and further the separation efficiency of the gas-liquid separation device is rapidly reduced. The embodiment of the application provides a gas-liquid separation device suitable for chemicals supply system.

For convenience of description, the following examples will describe a gas-liquid separation apparatus provided in an example of the present application.

According to some embodiments of the present application, the gas-liquid separation device includes a container 10, a liquid inlet pipe 23 and a liquid outlet pipe 22. A hollow chamber 111 is provided in the container 10 for separating the gas phase from the liquid phase. Referring to fig. 3 and 4, fig. 3 is a schematic sectional structure view of a gas-liquid separation device according to some embodiments of the present application, and fig. 4 is a partially enlarged view of a portion a of fig. 3. An overflow opening 244 is arranged on the liquid inlet pipeline 23 near the top end of the hollow cavity 111, and the liquid inlet pipeline 23 is communicated with the hollow cavity 111. Wherein the height of the liquid outlet 224 of the liquid outlet pipe 22 in the vertical direction is lower than the height of the overflow opening 244 in the vertical direction.

Specifically, the liquid inlet pipe 23 includes a separation pipe 24 as a part thereof, and the separation pipe 24 is located in the hollow cavity 111. The separation pipe 24 may be integrally formed on the body of the liquid inlet pipe 23, or may be communicated with the body of the liquid inlet pipe 23. The separation pipe 24 extends towards the top end direction close to the hollow cavity 111, and the gas-liquid two-phase fluid flows from bottom to top along the separation pipe 24 and enters the hollow cavity 111 through the overflow opening 244 on the separation pipe 24 close to the top end of the hollow cavity 111. The liquid outlet 224 of the liquid outlet pipe 22 extends into the hollow cavity 111 from the bottom end of the container 10, the liquid inlet 232 of the liquid inlet pipe 23 is communicated with a supply pipe (not shown), and the gas-liquid two-phase fluid from the supply pipe enters the container 10 through the liquid inlet pipe 23. Referring to fig. 6, fig. 6 is a schematic cross-sectional view of a base 20 of a gas-liquid separation apparatus according to some embodiments of the present disclosure. The separation tube 24 is provided with a vertical channel 243 inside for allowing the gas-liquid two-phase fluid to flow from bottom to top, one end of the separation tube 24 connected to the liquid inlet pipe 23 is a proximal end 241, the other end of the separation tube 24 corresponding to the proximal end 241 is a distal end 242, and the distal end 242 is closer to the top end of the hollow cavity 111. The passage 243 extends to the distal end 242 to form an overflow 244 in the wall of the separation tube 24, so that the gas-liquid two-phase fluid moving from bottom to top is discharged from the overflow 244. In the process that the gas-liquid two-phase fluid vertically rises in the channel 243 in the separation pipe 24, the flow rate of the liquid is slowed down by the influence of the self weight of the liquid, the gas and the liquid are naturally separated due to different densities, the gas is discharged from the overflow opening 244, rises and is accumulated at the top end of the hollow cavity 111, and the liquid is settled at the bottom of the hollow cavity 111, so that the separation of the gas and the liquid is realized.

Specifically, the chemical liquid contained in the hollow cavity 111 sequentially includes a basic phase separation section, a gravity settling section, and a liquid accumulation section from top to bottom, wherein the two-phase dynamic separation process of the gas-liquid phase fluid occurs in the uppermost basic phase separation section. Under normal conditions, the liquid in the liquid accumulation section is formed by the deposition of layers through the basic phase separation section and the gravity settling section, and the bubbles in the liquid are separated out in the basic phase separation section. The bubble-free chemical liquid medicine is in the gravity settling section and the liquid accumulation section, and along with the derivation of the bubble-free chemical liquid medicine in the liquid accumulation section from the liquid outlet pipe 22, the chemical liquid medicine in the gravity settling section above the liquid accumulation section is precipitated downwards to the liquid accumulation section, and then the bubble-free chemical liquid medicine is derived. And when cavity 111 internal gas pressure was too big in the middle of, the chemical liquid medicine that has the bubble in this application can only be oppressed to gravity settling section department, before the original chemical liquid medicine in the hydrops section was derived completely, still can derive the chemical liquid medicine of bubble-free in the drain pipe 22 to be convenient for reserve out the processing time, when container 10 took place unusually, avoid gas-liquid two-phase fluid to derive from drain pipe 22, guarantee to derive the quality of chemical liquid medicine.

Note that, as shown in fig. 6, in the above embodiment, the passage 243 in the separation tube 24 extends in the vertical straight line Z direction, and the gas-liquid two-phase fluid flows from bottom to top in the straight line direction defined by the passage 243. However, the passage 243 includes, but not limited to, a hollow pipe extending straight vertically, and the passage 243 may also be selected from a straight hollow pipe inclined to the vertical direction, an arc hollow pipe, and other common pipe shapes, and only the passage 243 for the fluid from bottom to top is provided to ensure that the liquid in the gas-liquid two-phase fluid undergoes a deceleration movement due to its own weight, which should be regarded as a specific embodiment of the present application.

According to some embodiments of the present application, referring to fig. 1, fig. 1 is a schematic perspective view of a gas-liquid separation device according to some embodiments of the present application. The gas-liquid separation device further comprises a liquid level detection member 50, wherein the liquid level detection member 50 is arranged on the side wall of the container 10, and the liquid level detection member 50 is used for detecting the liquid level position of the chemical liquid in the hollow cavity 111;

the top of the container 10 is provided with a vent member 40 for exhausting the gas accumulated at the top of the hollow cavity 111, and the vent member 40 is provided with a vent valve therein, and the vent valve is electrically connected to the liquid level detection member 50.

The top of the hollow cavity 111, on which the gas is accumulated, is opened with a gas discharge member 40, so that the gas is discharged from the gas discharge member 40 to reduce the gas pressure of the hollow cavity 111. On the other hand, in order to prevent the external air from entering the hollow cavity 111, the exhaust valve built in the exhaust member 40 is used to unidirectionally exhaust the air in the hollow cavity 111. Specifically, the exhaust valve is electrically connected to the liquid level detection member 50, and when the liquid level detection member 50 detects that the liquid level of the chemical liquid rises or falls to the detection position of the liquid level detection member 50, the liquid level detection member 50 feeds back a signal to control the operation of the exhaust valve.

The liquid level of the chemical liquid medicine is detected by the liquid level detection component 50, the work of the exhaust valve is controlled to achieve the purpose of controlling the discharge and accumulation of gas in the hollow cavity 111, and the amount of gas in the hollow cavity 111 is detected by utilizing the liquid level height of the chemical liquid medicine so as to avoid the phenomenon of flooding caused by excessive gas in the hollow cavity 111.

According to some embodiments of the present application, referring to fig. 4, the liquid level detection member 50 comprises a first sensor 51. When the liquid level in the container 10 is at the flood point, the liquid level in the container 10 is lower than the detection position of the first sensor 51. When the first sensor 51 detects the liquid level in the container 10, the first sensor 51 controls the opening of the exhaust valve, at this time, the exhaust member 40 is in a communication state, the gas is pressed out from the exhaust member 40 by the pressure of the gas in the hollow cavity 111, and the exhaust member 40 performs an exhaust action. The overflow 244 of the separation tube 24 is located lower than the detection position of the first sensor 51.

The separated gas and liquid phases do not re-blend before the vessel 10 is at the flood point; the gas phase is in an interactive, pressurized state with the liquid phase, which pressurizes the liquid phase to increase the rate of flow of liquid out of the outlet conduit 22. On the other hand, the squeezed liquid phase has a reaction force against the gas phase, so that the gas located in the gas phase region is compressed by force, and when the gas discharge valve is opened, the flow rate of the gas flow discharged from the gas discharge member 40 is faster, so that more gas is discharged from the gas discharge member 40.

If the channel 243 extends to the opening formed at the distal end 242 as the overflow 244 due to the inertia of the two-phase fluid flowing from above, the two-phase fluid moves upward from the opening and is thrown up, and since the distal end 242 approaches the top end of the hollow cavity 111, the thrown-up two-phase fluid is easily attached to the top end of the hollow cavity 111 and is thrown out of the container 10 as the gas is thrown out of the gas discharge member 40, which causes a leakage problem. In this embodiment, the overflow 244 is formed in the sidewall of the separation tube 24, and the two-phase fluid flows from the top to the distal end 242, and is blocked by the distal end 242, and finally discharged from the overflow 244 at the side, thereby preventing the liquid level in the hollow cavity 111 from being thrown up.

The overflow opening 244 of the separation tube 24 is located at a position lower than the detection position of the first sensor 51, so that the overflow opening 244 of the separation tube 24 is always located below the liquid level, and the phenomenon that the gas in the hollow cavity 111 flows back into the separation tube 24 when the air pressure is too high, and the gas flowing back into the separation tube 24 with a small inner diameter is easy to flood, even the tube burst phenomenon is caused by the too high pressure of the gas on the tube wall is avoided.

According to some embodiments of the present application, the liquid level detection member 50 further comprises a second sensor 52, the second sensor 52 being disposed above the first sensor 51 such that the second sensor 52 is proximate to the top end of the container 10 relative to the first sensor 51; when second sensor 52 detects a level of liquid in container 10, second sensor 52 controls the closure of the venting valve such that venting member 40 stops the venting action. The second sensor 52 is used to detect a high level of liquid in the container 10 to prevent the liquid level in the container 10 from rising to the top of the container 10 and overflowing the vent member 40.

Since the liquid contained in the container 10 is partially corrosive, it is necessary to avoid the leakage of the liquid. The second sensor 52 is arranged at a higher level than the first sensor 51, and when the second sensor 52 detects that the liquid level is already at a high level in the container 10, there is a risk that liquid will overflow from the venting member 40, at which time the second sensor 52 will control the venting valve to close. The risk of liquid overflowing from the gas exhaust member 40 includes not only liquid overflowing due to the liquid level clinging to the top of the hollow cavity 111, but also liquid that is originally coated outside the bubbles when the bubbles are separated from the liquid and is broken along with the rise of the liquid level in the hollow cavity 111, and liquid splashes onto the gas exhaust member 40 to avoid the liquid leaking from the gas exhaust member 40 to the outside. When the liquid level in the hollow cavity 111 rises to the detection position of the second sensor 52, the exhaust valve is controlled to be closed, and the gas accumulated by the container 10 pushes the liquid level downwards to the detection position of the first sensor 51, so that the liquid level is far away from the top end of the hollow cavity 111. At the same time, the liquid is squeezed by the pressure of the accumulated gas, so that the liquid in the liquid accumulation section is led out along the liquid outlet pipeline 22 more quickly.

According to some embodiments of the present disclosure, the gas-liquid separation apparatus further includes a controller, the first sensor 51, the second sensor 52 and the exhaust valve are electrically connected through the controller, and the controller receives signals fed back by the two sensors to control the exhaust valve to open or close.

The Controller may be an embedded Digital Signal Processor (DSP), a Microprocessor (MPU), an Application Specific Integrated Circuit (ASIC), a Programmable Logic Device (PLC), a Programmable Logic Device (SOC), a System on a Chip (SOC), a Central Processing Unit (CPU), or a Programmable Logic Controller (PLC). It is to be understood that the present embodiment is not limited to a particular type of controller.

Specifically, in the scheme, the controller can control the work of the exhaust valve according to a preset program or a received instruction. When the second sensor 52 detects the liquid level, the controller controls the vent valve to close, with the vent member 40 in a closed state where gas is difficult to pass therethrough. When the first sensor 51 detects the liquid level, the controller controls the exhaust valve to open, so that a passage is formed in the exhaust member 40 and the gas is exhausted to the external environment along the exhaust member 40.

Wherein, as the gas accumulates at the top of the container 10, the gas pressure increases and squeezes the liquid in the container 10, so that the liquid level in the container 10 drops, when the liquid level drops to a level where the first sensor 51 detects a second liquid level signal, the first sensor 51 feeds the second liquid level signal back to the controller, and the controller controls the exhaust valve to open and exhaust the gas through the exhaust member 40. As gas is vented, the liquid level in the gas pressure reduction vessel 10 rises, and when the liquid level rises to a level where the second sensor 52 detects the first liquid level signal, the second sensor 52 feeds the first liquid level signal back to the controller, the controller controls the vent valve to close, and the vent member 40 stops venting outwardly, so that gas is again accumulated in the vessel 10.

Further, the liquid level detection member 50 further includes a third sensor positioned lower than the first sensor 51, and particularly, disposed at a position near the bottom of the container 10. When the liquid level in the container 10 is lower than the liquid level corresponding to the third sensor, the third sensor feeds back a signal indicating that the container 10 is empty to the controller, so that the controller reminds an operator of charging according to the signal fed back by the third sensor.

According to some embodiments of the present application, the sensor of the liquid level detection member 50 is provided outside the container 10, the container 10 being provided with a detection window providing detection of the sensor; the outer wall of the container 10 is provided with a mounting portion 13, the sensor of the liquid level detection member 50 is mounted on the mounting portion 13, and the corresponding sensor detects the liquid level in the hollow cavity 111 through the detection window.

The mounting portion 13 is fixedly attached to the outer wall of the container 10 or the mounting portion 13 is mounted to an external mounting assembly that remains stationary relative to the container 10 to provide a mounting location for the sensor. The sensor detects the interior of the container 10 from the outer wall. Preferably, the sensor is optionally a photoelectric sensor, provided with a transparent window at least at the location of the container 10 corresponding to the sensor, so that the sensor detects the liquid level inside the container 10 without contact.

In another embodiment, the sensor passes through the detection window, and the sensing unit on the sensor extends into the hollow cavity 111, and directly contacts with the liquid through the sensing unit, so as to determine the liquid level. In contrast to the above-mentioned non-contact detection sensor, since the pressure inside the hollow cavity 111 is greater than the atmospheric pressure, the space between the sensor and the detection window is sealed, and it is ensured that gas and/or liquid hardly overflows from the connection gap between the sensor and the detection window.

Referring to fig. 2, and further to fig. 5, according to some embodiments of the present application, fig. 2 is a front view of a gas-liquid separation device according to some embodiments of the present application, and fig. 5 is a cross-sectional structural schematic view of a body portion 11 within a vessel 10 according to some embodiments of the present application. The container 10 comprises a main body 11, wherein the main body 11 is hollow to form a hollow cavity 111, and the hollow cavity 111 extends to two ends of the main body 11 to form an opening; the two ends of the main body 11 are connected with a sealing cover 12 and a base 20 respectively, and a liquid inlet pipeline 23 and a liquid outlet pipeline 22 are arranged on the base 20.

The hollow cavity 111 extends along the linear direction Z, so that an opening is formed at the top end and the bottom end of the main body portion 11, and the hollow cavity 111 is connected to two openings of the main body portion 11 through the sealing cover 12 and the base 20, so that the hollow cavity 111 is closed, and the hollow cavity 111 is used as a cavity for accommodating the container 10 and realizing gas-liquid separation. The sealing cover 12 is coupled to the top end of the main body 11, and the venting member 40 is mounted on the sealing cover 12. The base 20 is connected to the bottom end of the main body 11; the base 20 also serves as a mounting seat for the liquid inlet pipe 23 and the liquid outlet pipe 22, and the liquid inlet pipe 23 and the liquid outlet pipe 22 are arranged on the base 20.

The container 10 is provided with the main body 11, the seal cap 12, and the base 20, which are detachable, so that the respective members constituting the container 10 can be easily molded. At the same time, the removable container 10 also facilitates the transfer.

According to some embodiments of the present application, as shown in fig. 5, an installation groove 112 is circumferentially opened on an outer wall of the container 10, and the installation portion 13 is embedded on the installation groove 112 to limit the installation portion 13 on the container 10.

In this embodiment, an annular mounting groove 112 is formed in the outer wall of the container 10, and the mounting portion 13 corresponding to the mounting groove 112 is also formed in an annular structure. When the mounting portion 13 is embedded in the mounting groove 112, a portion of the mounting portion 13 protrudes from the outer wall of the container 10, so that an annular boss is formed on the outer wall of the container 10. The mounting portion 13 is mounted on the boss. Since the mounting portion 13 is embedded in the mounting groove 112 such that the mounting groove 112 restricts the position of the mounting portion 13, the position of the mounting portion 13 is fixed with respect to the container 10.

Specifically, two mounting grooves 112 are vertically distributed along the Z direction, and a mounting portion 13 is correspondingly embedded in each mounting groove 112 so as to receive two sensors.

According to some embodiments of the present application, referring to fig. 6, channels are provided in body 21 of base 20 as inlet channels 23 and outlet channels 22, and the channels extend to the top surface of base 20 to form openings corresponding to connecting ports 234 of inlet channels 23 and outlet channels 22 and liquid outlet port 224 of outlet channel 22.

Referring to fig. 7, fig. 7 is a schematic cross-sectional view of a part of a base 20 and a separating tube 24 in a gas-liquid separating apparatus according to some embodiments of the present disclosure, a liquid outlet channel 221 and a liquid inlet channel 231 are respectively formed in a body 21 of the base, and the liquid outlet channel 221 and the liquid inlet channel 231 are formed with openings on a top surface of the body 21 to serve as a connecting port 234 of a liquid inlet pipeline 23 and a liquid outlet port 224 of a liquid outlet pipeline 22. The separation tube 24 is attached to the connection port 234 of the liquid inlet line 23. The separation pipe 24 is connected to an opening of the base 20 corresponding to the liquid inlet channel 231. The liquid outlet channel 221 and the liquid inlet channel 231 are provided with another opening on another side surface different from the top surface for respectively connecting to a supply pipeline for providing liquid guide pipeline and gas-liquid two-phase fluid. Specifically, the liquid outlet channel 221 and the liquid inlet channel 231 have another opening on the other side surface different from the top surface, and a liquid outlet 222 and a liquid inlet 232 are installed as connectors. The liquid outlet channel 221 and the liquid inlet channel 231 are further provided with branch channels on the main channel, and the openings of the corresponding branch channels are connected with an auxiliary liquid outlet 223 and an auxiliary liquid inlet 233. Under normal conditions, the auxiliary liquid outlet 223 and the auxiliary liquid inlet 233 are in a closed state; in special cases, only the liquid in the container 10, the liquid outlet channel 221 and the liquid inlet channel 231 is discharged by opening the auxiliary liquid outlet 223 and the auxiliary liquid inlet 233. Particular situations include, but are not limited to, situations where the denaturation of the liquid in the container 10 affects the use or where the container 10 no longer needs to sort the type of liquid. The opening heights of the auxiliary liquid outlet 223 and the auxiliary liquid inlet 233 are lower than the vertical heights of the other openings or channel openings of the container 10, the liquid outlet channel 221 and the liquid inlet channel 231, so that the liquid is completely guided out of the auxiliary liquid outlet 223 and the auxiliary liquid inlet 233 under the action of gravity. Preferably, the auxiliary liquid outlet 223 and the auxiliary liquid inlet 233 are disposed on the bottom surface of the base 20.

According to some embodiments of the present application, as shown in the drawings, a connecting skirt 211 protruding annularly is disposed on the top surface of the base body 21, and the connecting skirt 211 is disposed on the same surface as the connecting port 234 and the liquid discharge port 224, so that the connecting port 234 and the liquid discharge port 224 communicate with the hollow cavity 111 after the main body portion 11 is connected to the base 20. One end of the main body 11 is embedded in the connecting skirt 211.

The connecting skirt 211 covers the opening at one end of the main body 11, and the annular protrusion corresponds to the outer contour of the main body 11. An open sealed connection to one end of the body portion 11 is provided by a connecting skirt 211. Because one end of the main body part 11 is embedded in the connecting skirt 211, the inner wall of the connecting skirt 211 acts on the outer wall of the main body part 11, and the connecting skirt 211 clamps the main body part 11, so that a gap between the connecting skirt 211 and the main body part 11 is avoided, and the sealing performance of the connecting skirt 211 for connecting one end of the main body part 11 is ensured.

According to some embodiments of the present application, a pump body is provided between the supply pipeline and the liquid inlet pipeline 23 for pumping the liquid of the supply pipeline into the liquid inlet pipeline 23, and a defoaming device is provided between the pump body and the liquid inlet pipeline 23.

Because the use of the pump body can increase the content of bubbles in the liquid, the bubble content in the liquid entering the container 10 is reduced through the defoaming device arranged between the pump body and the liquid inlet pipeline 23, and the burden of the gas-liquid separation device is reduced.

According to some embodiments of the present application, the gas-liquid separation device further includes a fixing bracket 30, and the fixing bracket 30 is used for fixing the container 10 for stabilizing.

In this embodiment, the fixing bracket 30 includes a first clamping portion 31 and a second clamping portion 32, and the first clamping portion 31 and the second clamping portion 32 are located on two corresponding sides of the container 10. The first and second clamping portions 31 and 32 are folded toward the container 10. The container 10 is clamped by the first and second clamping portions 31 and 32, thereby fixing the container 10.

All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent several embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, without departing from the concept of the present invention, several variations and modifications can be made, which all fall within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. A gas-liquid separation device suitable for use in a chemical supply system, comprising:

the container is internally provided with a hollow cavity for gas-liquid two-phase flow separation;

the liquid inlet pipeline extends into the hollow cavity from the bottom end of the container, and an overflow port is formed in the position, close to the top end of the hollow cavity, of the liquid inlet pipeline; and

the liquid outlet pipeline is communicated with the hollow cavity;

the liquid level detection component is used for detecting the liquid level position of the chemical liquid in the hollow cavity;

the exhaust component is used for exhausting gas accumulated at the top of the hollow cavity and arranged at the top end of the container, and comprises an exhaust valve which is electrically connected with the liquid level detection component;

wherein the height of the liquid outlet pipeline in the vertical direction is lower than the height of the overflow port of the liquid inlet pipeline in the vertical direction;

the liquid level detection component comprises a first sensor and a second sensor, an overflow port of the liquid inlet pipeline is positioned at a detection position lower than the first sensor, and the second sensor is arranged above the first sensor, so that the second sensor is close to the top end of the container relative to the first sensor.

2. The gas-liquid separation device according to claim 1, wherein the liquid level detection member is provided on a side wall of the container.

3. The gas-liquid separation device according to claim 2, wherein the first sensor and the second sensor are electrically connected to the exhaust valve to control the opening and closing of the exhaust valve; when the first sensor detects the liquid level in the container, the first sensor controls the exhaust valve to open so that the exhaust component performs an exhaust action;

when the second sensor detects the liquid level in the container, the second sensor controls the air outlet valve to close, so that the air outlet component stops air outlet action.

4. The gas-liquid separation device according to claim 3, further comprising a controller, wherein the first sensor, the second sensor and the exhaust valve are electrically connected through the controller, and the controller receives signals fed back by the two sensors to control the exhaust valve to open or close.

5. The gas-liquid separation device according to any one of claims 2 to 4, wherein the sensor of the liquid level detection member is provided outside the container, and the container is provided with a detection window that provides detection of the sensor.

6. The gas-liquid separation device according to claim 5, wherein an installation portion is provided on an outer wall of the container, the sensor of the liquid level detection member is installed on the installation portion, the corresponding sensor detects the liquid level in the hollow cavity through the detection window, an installation groove is circumferentially provided on the outer wall of the container, and the installation portion is embedded in the installation groove.

7. The gas-liquid separation device according to any one of claims 1 to 4, wherein the liquid inlet line includes a separation pipe as a part thereof, the separation pipe is located in the hollow cavity, and the overflow port is opened on a side wall of the separation pipe;

the separation pipe is vertically arranged in the hollow cavity, and gas-liquid two-phase flow in the liquid inlet pipeline is discharged from the overflow port from bottom to top through the separation pipe.

8. The gas-liquid separation device according to claim 7, wherein the container includes a main body portion, the main body portion is hollow to form the hollow cavity, and the hollow cavity extends to two ends of the main body portion to form an opening;

the two ends of the main body part are respectively connected with a sealing cover and a base, and the liquid inlet pipeline and the liquid outlet pipeline are arranged on the base.

9. The gas-liquid separation device according to claim 8, wherein an annular raised connecting skirt is provided on the top surface of the base, the connecting skirt covers an opening at one end of the main body, and the shape of the connecting skirt corresponds to the outer contour shape of the main body; the base is connected with the main body part in a sealing mode through the connecting skirt edge.

10. The gas-liquid separation device according to claim 8, wherein a passage serving as the liquid inlet pipe and the liquid outlet pipe is provided in the base, and the passage extends to a top surface of the base to form an opening serving as a corresponding liquid inlet pipe connection port and a corresponding liquid outlet pipe liquid discharge port;

the separation pipe is detachably connected with the main body structure of the liquid inlet pipeline; when the separation pipe is connected with the liquid inlet pipeline, the separation pipe is communicated with the connecting port.

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