CN218110078U - Target cutting and fixing device - Google Patents
Target cutting and fixing device Download PDFInfo
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- CN218110078U CN218110078U CN202222152996.0U CN202222152996U CN218110078U CN 218110078 U CN218110078 U CN 218110078U CN 202222152996 U CN202222152996 U CN 202222152996U CN 218110078 U CN218110078 U CN 218110078U
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Abstract
The utility model relates to a target cutting and fixing device, which comprises a base, an outer frame, a material supporting plate, an upper side clamping mechanism and a side part clamping mechanism, wherein the outer frame comprises two opposite vertical plates and a top plate connected with the tops of the two vertical plates, and the opposite upper edges of the two material supporting plates are used for supporting the lower end of a target blank; the upper side clamping mechanism is arranged on the top plate and comprises an upper pressing plate and an upper piston cylinder, and a piston rod of the upper piston cylinder is used for driving the upper pressing plate to press the upper end of the target blank; the two lateral clamping mechanisms are arranged and used for being respectively arranged on two horizontal sides of the target blank and comprise lateral piston cylinders and lateral clamping plates, and the lateral clamping plates are used for being pushed by the lateral piston cylinders to rotate relative to the material supporting plates and clamp the lateral parts of the target blank. This target cutting fixing device can solve the technical problem that present target cutting device fixture dismouting speed is slow, waste time and energy, has target base and dismantles labour saving and time saving, the efficient characteristics of target cutting.
Description
Technical Field
The utility model relates to a target processing equipment technical field, more specifically say, it relates to a target cutting fixing device.
Background
The target material is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, multi-arc ion plating system or other types of film coating systems under proper process conditions. In brief, the target material is the target material bombarded by high-speed charged energy particles. In the processing and manufacturing processes of most targets, cutting operation cannot be performed, and generally a cylindrical target blank needs to be fixed and cut into a flaky circular target; the fixture that is used for fixed target base that sets up on present target cutting device is for satisfying not unidimensional target base commonality, mostly threaded adjustable structure, needs to repeat when dismouting target base or regulation centre gripping size to revolve the screw thread, and dismouting speed is slow, not only extravagant manpower, still leads to target cutting inefficiency, increase whole processing cost.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a target cutting fixing device can solve present target cutting device fixture dismouting speed slow, the technical problem that wastes time and energy.
The utility model provides a following technical scheme: a target material cutting and fixing device comprises a base, an outer frame, material supporting plates, an upper side clamping mechanism and a side part clamping mechanism, wherein the cross section of the outer frame is of a door-shaped structure and comprises two opposite vertical plates and a top plate connected with the tops of the two vertical plates, the bottoms of the vertical plates are fixed on the base, the two material supporting plates are arranged on the base and positioned in the outer frame, a gap is arranged between the two material supporting plates, and the opposite upper edges of the two material supporting plates are used for supporting the lower ends of target blanks; the upper side clamping mechanism is arranged on the top plate and comprises an upper pressure plate and an upper piston cylinder, the cylinder body of the upper piston cylinder is fixed on the top plate, and the piston rod of the upper piston cylinder extends downwards to be connected with the upper pressure plate and used for driving the upper pressure plate to jack the upper end of the target blank; lateral part fixture be equipped with two, be used for setting respectively in the horizontal both sides of target blank, including side piston cylinder, side splint downside with hold in the palm the flitch and rotate and connect, side piston cylinder body rotates and installs on the riser, the outside frame inside of side piston cylinder piston rod stretches out and rotates with the side splint upside and be connected, the side splint is used for receiving the relative flitch that holds in the palm of side piston cylinder pushing action and rotates, presss from both sides tight target blank lateral part.
Has the advantages that: when the target material cutting and fixing device is used for mounting a target blank, the target blank is vertically placed between two material supporting plates along the interval between the two material supporting plates, then piston rods of an upper piston cylinder and a side piston cylinder are driven to extend out, an upper pressing plate extends out, a side clamping plate rotates towards the target blank relative to a base, the target blank is tightly pressed and clamped from the top and two sides respectively, and the target blank cannot move; similarly, the upper piston cylinder and the side piston cylinder are driven to enable piston rods of the upper piston cylinder and the side piston cylinder to be retracted, the upper pressing plate moves upwards, the side clamping plate moves away from the target blank relative to the base, the target blank is loosened by the upper side clamping mechanism and the side clamping mechanism, and an operator can directly take down or push the target blank. To sum up, the utility model has the advantages of convenient and quick disassembly, the top, the side part and the bottom of the target blank are clamped and pressed tightly after the target blank is installed, the structure is stable, and the cutting is convenient; the target blank assembling and disassembling tool is good in use applicability, can be used for target blanks with different outer diameter sizes, is few in manual operation steps in the assembling and disassembling process, can quickly complete operation through an external air source and a hydraulic source, is time-saving and labor-saving, greatly improves the assembling and disassembling efficiency, accelerates the cutting speed and simultaneously reduces the comprehensive processing cost of the target.
Furthermore, sliding protrusions are arranged on two sides of the upper pressure plate, sliding grooves used for being matched with the sliding protrusions in a sliding and guiding mode are arranged on the inner sides of the vertical plates, and the sliding grooves are closing grooves.
Has the advantages that: the upper pressure plate and the vertical plate are in vertical sliding fit, so that the upper pressure plate is guaranteed to move along a set route in the moving process, and the deviation is avoided.
Furthermore, the target cutting and fixing device further comprises an adjustable limiting part for limiting the cutting end of the target blank, the adjustable limiting part is integrally of an L-shaped structure and comprises a vertical limiting plate and a transverse plate, a mounting groove for the transverse plate to insert is formed in the base at the interval between the two material supporting plates, a stud is arranged at the bottom of the mounting groove, an elongated slot for the stud to pass through is formed in the transverse plate, the vertical limiting plate is fixed at one end of the transverse plate, and the elongated slot penetrates through the other end of the transverse plate; the transverse plate is pressed and fixed on the base through the connection of the nut and the stud, and the vertical limiting plate is used for abutting against the end face of the target blank cutting end when in use.
Has the beneficial effects that: the adjustable limiting part which limits the cutting end of the target blank and has a movable position is arranged, so that the cutting thickness of the target blank can be conveniently adjusted and determined.
Furthermore, the vertical side of the transverse plate is provided with scale marks.
Has the beneficial effects that: an operator can conveniently determine the cutting thickness of the target material according to the scale marks.
Furthermore, the opposite upper edges of the two material supporting plates are provided with arc-shaped transition surfaces.
Has the beneficial effects that: the arc transition surface protects the target blank from surface damage when the target blank is pressed.
Drawings
Fig. 1 is a schematic overall structure diagram of an embodiment 1 of a target cutting and fixing device according to the present invention;
FIG. 2 is an enlarged detail view at A in FIG. 1;
fig. 3 is a schematic view of an adjustable limiting member at an upper side viewing angle according to an embodiment 1 of the target cutting and fixing device of the present invention;
fig. 4 is a partial schematic view of an adjustable limiting member and a base in an embodiment 1 of the target cutting and fixing device of the present invention;
reference numerals are as follows: 1-a base; 2-target blank; 3-a vertical plate; 4-a top plate; 5-a material supporting plate; 6, mounting a piston cylinder; 7, pressing the upper plate; 8-sliding protrusions; 9-sliding grooves; 10-a lateral piston cylinder; 11-side clamping plate; 12-an adjustable limit; 13-mounting grooves; 14-a stud; 15-a nut; 16-a transverse plate; 17-vertical limiting plate; 18-long groove; 19-graduation mark.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
The utility model discloses a target cutting fixing device's embodiment 1:
the utility model discloses a concrete structure is shown in figure 1, mainly comprises base 1, outer frame, asks flitch 5, upside fixture, lateral part fixture, and outer frame setting is on base 1, asks flitch 5 to be located outer frame inside, and upside fixture, lateral part fixture all set up on outer frame. The cross section of the outer frame is of a door-shaped structure and mainly comprises a top plate 4 and two vertical plates 3 which are arranged oppositely, the lower ends of the vertical plates 3 are fixed on the base 1, and the upper ends of the two vertical plates 3 are connected through the top plate 4. The two material supporting plates 5 are arranged on the base 1, the interval is arranged between the two material supporting plates 5, the upper edges, corresponding to each other, of the two material supporting plates 5 are used for supporting the lower end of the target blank 2, and in order to prevent the target blank surface from being damaged in the clamping and fixing process, arc-shaped transition surfaces are arranged at the upper edges, corresponding to the two material supporting plates 5, of the two material supporting plates 5.
Upside fixture is used for compressing tightly, setting up on roof 4 the upper end of target blank 2, including last piston cylinder 6 and top board 7, and 6 cylinders of last piston cylinder are fixed on roof 4 with the downward gesture that stretches out of piston rod, and top board 7 is located between roof 4 and the target blank 2, fixes at 6 piston rod lower extremes of last piston cylinder, can drive top board 7 up-and-down motion through driving upper piston cylinder 6. In order to keep the upper press plate 7 moving stably along the set route, the two sides of the upper press plate 7 are provided with sliding protrusions 8 extending outwards, correspondingly, the inner sides of the vertical plates 3 are provided with sliding grooves 9 matched with the upper press plate 7 in a sliding guiding mode through the sliding protrusions 8, and the sliding grooves 9 are closing grooves to prevent the upper press plate 7 from being separated from the sliding grooves.
The two side clamping mechanisms are used for clamping two horizontal sides of the target blank 2 and are respectively arranged on two vertical plates 3 and comprise side piston cylinders 10 and side clamping plates 11, the cylinder bodies of the side piston cylinders 10 are rotatably assembled on the vertical plates in the direction in which the piston rods extend out of the outer frame, the lower ends of the side clamping plates 11 are rotatably connected with the retainer plates 5, and the upper sides of the side clamping mechanisms are rotatably connected with the outer ends of the piston rods of the side piston cylinders 10. In the process of extending and retracting the lateral piston cylinder 10, the lateral clamping plates 11 are driven to rotate relative to the retainer plate and are far away from/close to the target blank 2, and the clamping plates 11 on the two sides are synchronously matched for use, so that the two sides of the target blank can be clamped and loosened simultaneously.
The utility model discloses still including the adjustable locating part 12 that is used for 2 cutting ends of spacing target blank, confirms target cutting thickness, adjustable locating part 12 structure is shown in fig. 1-4, installs on base 1 during the use, and the interval department between two support flitchs 5 on base 1 is equipped with the mounting groove 13 that is used for installing adjustable locating part 12, and the tank bottom of mounting groove 13 is fixed with double-screw bolt 14. The locating part 12 is wholly L type, including vertical limiting plate 17 and transverse plate 16, vertical limiting plate 17 is fixed in transverse plate 16 one end, it passes through to set up on the transverse plate 16 and supplies the double-screw bolt 14, link up the fluting 18 that transverse plate 16 kept away from vertical limiting plate 17 one end, when installing adjustable locating part 12, make fluting 18 opening aim at the double-screw bolt and slowly push in mounting groove 13, compress tightly adjustable locating part 12 with nut 15 and double-screw bolt 14 threaded connection and install inside mounting groove 13, the terminal surface of 2 cutting ends of target blank is used for offsetting with vertical limiting plate 17 during the use, can change adjustable locating part 12 relative base 1 position through adjusting the double-screw bolt 14 and slotted 18 relative position, then adjust the cutting thickness of target. In order to facilitate accurate observation of the target cutting thickness, the vertical side of the transverse plate 16 is provided with scale marks 19.
This target material cutting fixing device cooperates with cutting device during the use, cuts into circular slice target with target blank 2: firstly, placing the target blank 2 between two material supporting plates 5, driving an upper piston cylinder 6 and a side piston cylinder 10 to extend out, so that an upper pressure plate 7 descends, two side clamp plates 11 rotate towards the target blank 2 until the upper pressure plate 7 tightly presses the top of the target blank 2, and the two side clamp plates 11 tightly clamp two sides of the target blank 2, and fixing the target blank; when the device is disassembled, piston rods of the upper piston cylinder 6 and the side piston cylinder 10 are contracted, and the target blank is loosened from the upper pressure plate 7 and the side clamping plate 11. Synthesize above process, the utility model discloses a target cutting fixing device not only is applicable to multiple external diameter size's target base, has certain commonality, still has installation fastening, easy dismounting, labour saving and time saving's advantage, can promote dismouting efficiency, accelerate cutting speed.
Above only the utility model discloses a preferred embodiment, the utility model discloses a scope not only limits in above-mentioned embodiment, and the fan belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope. It should be noted that modifications and embellishments within the scope of the present disclosure may be made by those skilled in the art without departing from the principles of the present disclosure.
Claims (5)
1. A target cutting and fixing device is characterized by comprising a base, an outer frame, material supporting plates, an upper side clamping mechanism and a side part clamping mechanism, wherein the cross section of the outer frame is of a door-shaped structure and comprises two opposite vertical plates and a top plate connected with the tops of the two vertical plates, the bottoms of the vertical plates are fixed on the base, the two material supporting plates are arranged on the base and positioned inside the outer frame, a space is arranged between the two material supporting plates, and the opposite upper edges of the two material supporting plates are used for supporting the lower ends of target blanks; the upper side clamping mechanism is arranged on the top plate and comprises an upper pressing plate and an upper piston cylinder, the cylinder body of the upper piston cylinder is fixed on the top plate, and the piston rod of the upper piston cylinder extends downwards to be connected with the upper pressing plate and used for driving the upper pressing plate to press the upper end of the target blank; the two lateral clamping mechanisms are used for being arranged on two horizontal sides of the target blank respectively and comprise lateral piston cylinders and lateral clamping plates, the lower sides of the lateral clamping plates are rotatably connected with the retainer plate, cylinder bodies of the lateral piston cylinders are rotatably installed on the vertical plates, piston rods of the lateral piston cylinders extend out of the outer frame and are rotatably connected with the upper sides of the lateral clamping plates, and the lateral clamping plates are used for supporting the retainer plate to rotate relatively under the pushing action of the lateral piston cylinders and clamping the lateral portions of the target blank.
2. The target material cutting and fixing device according to claim 1, wherein the upper pressing plate has sliding protrusions on both sides thereof, and the vertical plate has sliding grooves on inner sides thereof for sliding guiding engagement with the sliding protrusions, the sliding grooves being closed grooves.
3. The target material cutting and fixing device according to claim 1 or 2, further comprising an adjustable limiting member for limiting the cutting end of the target blank, wherein the adjustable limiting member is integrally L-shaped and comprises a vertical limiting plate and a transverse plate, a mounting groove for the transverse plate to be inserted into is formed in the base at a position spaced between the two material supporting plates, a stud is arranged at the bottom of the mounting groove, a long groove for the stud to pass through is formed in the transverse plate, the vertical limiting plate is fixed at one end of the transverse plate, and the long groove penetrates through the other end of the transverse plate; the transverse plate is pressed and fixed on the base through the connection of the nut and the stud, and the vertical limiting plate is used for abutting against the end face of the target blank cutting end when in use.
4. The target cutting fixture of claim 3, wherein the vertical side of the transverse plate is provided with graduation marks.
5. The target material cutting and fixing device as claimed in claim 1, 2 or 4, wherein the two material supporting plates are provided with arc-shaped transition surfaces at the opposite upper edges.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222152996.0U CN218110078U (en) | 2022-08-16 | 2022-08-16 | Target cutting and fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222152996.0U CN218110078U (en) | 2022-08-16 | 2022-08-16 | Target cutting and fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218110078U true CN218110078U (en) | 2022-12-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222152996.0U Active CN218110078U (en) | 2022-08-16 | 2022-08-16 | Target cutting and fixing device |
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| CN (1) | CN218110078U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116460138A (en) * | 2023-04-20 | 2023-07-21 | 山东格美钨钼材料股份有限公司 | Consumption-reducing type high-density molybdenum-titanium target processing method and device |
-
2022
- 2022-08-16 CN CN202222152996.0U patent/CN218110078U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116460138A (en) * | 2023-04-20 | 2023-07-21 | 山东格美钨钼材料股份有限公司 | Consumption-reducing type high-density molybdenum-titanium target processing method and device |
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