CN218107112U

CN218107112U - Efficient electronic industry exhaust gas purification system

Info

Publication number: CN218107112U
Application number: CN202222509487.9U
Authority: CN
Inventors: 蒋伟; 葛旭明; 王涛; 王翼鹏; 杨旭
Original assignee: Shenzhen Yinghe Environment Iot Technology Co ltd
Current assignee: Shenzhen Yinghe Environment Iot Technology Co ltd
Priority date: 2022-09-21
Filing date: 2022-09-21
Publication date: 2022-12-23
Anticipated expiration: 2032-09-21

Abstract

The application relates to a high-efficiency waste gas purification system in the electronic industry, which comprises a low-concentration waste gas mixing box, an oil-containing low-concentration waste gas mixing box, a high-concentration waste gas mixing box and a waste gas transmission pipeline connected with the low-concentration waste gas mixing box, wherein a filtering system, a concentration runner system and a chimney are sequentially arranged on the waste gas transmission pipeline; one end of the oil-containing low-concentration waste gas mixing box is connected with a waste gas circulation pipeline and an oil removing device arranged on the waste gas circulation pipeline, and the waste gas circulation pipeline is arranged between the low-concentration waste gas mixing box and the filtering system; one end of the high-concentration waste gas mixing box is connected with a waste gas flowing pipeline, an RTO system is arranged on the waste gas flowing pipeline, and the RTO system is connected with a chimney. This application is with the waste gas of VOCs concentration difference separately handling, alleviates the risk of blockking up active carbon in the filtration system, has reduced the change frequency of filtering the consumptive material.

Description

Efficient electronic industry exhaust gas purification system

Technical Field

The application relates to the technical field of organic waste gas treatment devices, in particular to an efficient waste gas purification system for the electronic industry.

Background

In the production processes of tape casting, end burning, glue discharging and the like in the capacitor electronics industry, high-concentration and low-concentration even oily organic waste gas can be discharged, and if the organic waste gas is not treated in time, atmospheric environmental pollution can be generated. At present, two treatments of volatile organic waste gases (VOCs) are available in a large direction, the first treatment is a destruction method, namely, a burning mode is adopted to break carbon-hydrogen bonds of organic matters, and common equipment comprises a regenerative incinerator, a catalytic combustion furnace, a direct combustion furnace and the like. The other method is a transfer method, which converts organic matters in the waste gas into a solid or liquid state by adsorption, absorption and condensation methods and then treats the organic matters.

However, for such electronic waste gas, a combined process of activated carbon adsorption-catalytic combustion is often adopted for subsequent treatment, the purification effect of the process is unstable, and the activated carbon has a risk of spontaneous combustion.

Therefore, in view of the shortcomings of the prior art, the applicant believes that there is a need for an efficient exhaust gas purification system for use in the electronics industry to address the deficiencies of the prior art.

SUMMERY OF THE UTILITY MODEL

In order to solve the deficiencies in the prior art, the application provides an efficient electronic industry exhaust gas purification system.

The application provides an efficient electronic industry exhaust gas purification system adopts following technical scheme:

a high-efficiency waste gas purification system in the electronic industry comprises a low-concentration waste gas mixing box, an oil-containing low-concentration waste gas mixing box, a high-concentration waste gas mixing box and a waste gas transmission pipeline connected with the low-concentration waste gas mixing box, wherein a filtering system, a concentration runner system and a chimney are sequentially arranged on the waste gas transmission pipeline; one end of the oil-containing low-concentration waste gas mixing box is connected with a waste gas circulation pipeline and an oil removal device arranged on the waste gas circulation pipeline, and the waste gas circulation pipeline is arranged between the low-concentration waste gas mixing box and the filtering system; one end of the high-concentration waste gas mixing box is connected with a waste gas flowing pipeline, an RTO system is arranged on the waste gas flowing pipeline, and the RTO system is connected with a chimney.

By adopting the technical scheme, the low-concentration waste gas mixing box, the oil-containing low-concentration waste gas mixing box and the high-concentration waste gas mixing box are arranged, so that waste gases with different VOCs concentrations enter different mixing boxes, and different treatment methods are adopted, so that the treatment effect of the waste gases is improved; in addition, for oil-containing waste gas, oil in the waste gas is removed by using an oil removing device, and then the waste gas enters a filtering system, so that the risk of blocking active carbon in the filtering system is reduced, and the replacement frequency of filtering consumables is reduced; and finally, the traditional activated carbon adsorption process is replaced by a mode of mutually combining the concentration rotating wheel and the RTO system, so that the safety of waste gas treatment is improved, the system is kept stable in the whole treatment process, and the removal rate of organic matter particles and dust in the waste gas is high.

Optionally, the nozzle of the oil removal device is oriented opposite to the direction of the exhaust gas entering the exhaust gas flow conduit.

Through adopting above-mentioned technical scheme, deoiling device's nozzle orientation gets into the opposite direction of exhaust gas circulation pipeline with waste gas, when the nozzle sprays the department and sprays liquid, sprays liquid and can contact with waste gas completely, improves the deoiling effect of waste gas.

Optionally, a demister is arranged on the oil removing device.

Through adopting above-mentioned technical scheme, utilize the defroster entrapment from most water smoke in the waste gas that the deoiling device came out, reduce the humidity of waste gas.

Optionally, the filtering system is sequentially provided with a coarse filter, a medium filter and a high efficiency filter according to the waste gas inlet sequence, and the high efficiency filter is connected with the concentration runner system through a waste gas transmission pipeline.

Through adopting above-mentioned technical scheme, set up tertiary filter, the reinforcing is to the filter effect of the coating cloud in the waste gas, dust and moisture.

Optionally, a high-temperature filtering device is further sequentially arranged between the high-concentration exhaust gas mixing box and the RTO system.

Through adopting above-mentioned technical scheme, when exhaust gas concentration is higher, adopt the mode of high temperature, detach the partial organic matter in the waste gas fast.

Optionally, a flame arrester is further arranged between the high-temperature filtering device and the RTO system.

Through adopting above-mentioned technical scheme, when the RTO system is when the operation, flame can incessantly burn, sets up the spark arrester, avoids the flame backward flow in the RTO system, guarantees the safe operation of RTO system.

Optionally, the RTO system has set gradually combustion chamber, regenerator, purge valve and diverter valve from top to bottom, diverter valve one end is connected with the RTO fan.

Through adopting above-mentioned technical scheme, set up the purge valve and sweep the fan, the purge valve carries out the negative pressure through sweeping the pipeline and sweeps the regenerator, through the RTO fan, will keep in the part in the regenerator and remain unpurified waste gas and provide the negative pressure, and the furnace of delivering to the combustion chamber of pump carries out incineration disposal, improves the whole purifying effect of waste gas.

Optionally, the concentrated runner system includes an adsorption area, a desorption area and a cooling area, a high-temperature heat exchange pipeline is connected to an opening of the cooling area, the other end of the high-temperature heat exchange pipeline is connected with an inlet of the heat exchanger, and an outlet of the heat exchanger is connected with the desorption area.

Through adopting above-mentioned technical scheme, when gaseous follow cooling space when entering the heat exchanger along high temperature heat transfer pipeline, the heat exchanger promotes the temperature of waste gas, is convenient for waste gas and carries out the high temperature desorption in the desorption district, gets rid of the inside organic matter of waste gas.

Optionally, the other end of the desorption area is connected with a waste gas transportation pipeline, the other end of the waste gas transportation pipeline is connected with an air mixing box, and the air mixing box is arranged between the high-temperature filtering device and the flame arrester.

By adopting the technical scheme, the air mixing box is arranged, and after the waste gas is separated from the desorption area, the waste gas and the high-concentration waste gas can enter the RTO system together through the air mixing box and then be discharged from the chimney, so that on one hand, the situation that a pipeline is reset for discharging the waste gas is avoided; on the other hand, the high heat in the RTO system can convert the organic elements in the waste gas into carbon dioxide and water, so that the waste gas is harmless.

In summary, the present application includes at least one of the following beneficial technical effects:

1. different waste gas mixing boxes are arranged according to the characteristics of different waste gases, so that the treatment effect of the waste gases is improved; when the waste gas contains oil, the waste gas enters an oil-containing low-concentration waste gas mixing tank, and enters a filter after the oil is removed by an oil removing device, so that the replacement frequency of filtering consumables is reduced, and the condition that activated carbon is blocked due to the oil adsorption consumables is avoided; in addition, the traditional activated carbon adsorption process is replaced by a mode of combining the concentrated rotating wheel system and the RTO system, so that the overall safety is higher, and the removal efficiency of organic matters in waste gas is higher.

2. Set up purge valve and RTO fan, when the diverter valve switches into admitting air, open the purge valve, provide the negative pressure through the RTO fan, carry out the negative pressure to the regenerator and sweep, will keep in the part in the regenerator and remain unpurified waste gas, the furnace of delivering to the combustion chamber in the pump is burned and is handled, improves the whole purifying effect of waste gas.

Drawings

Fig. 1 is a schematic diagram of the overall structure of a high-efficiency energy-saving large-air-volume low-concentration organic waste gas treatment device.

Description of reference numerals: 1. a waste gas delivery pipeline; 2. a filtration system; 21. a coarse filter; 22. a medium-efficiency filter; 23. a high efficiency filter; 3. a concentration wheel system; 31. a zeolite wheel; 311. an adsorption zone; 312. a cooling zone; 313. a desorption zone; 32. a high temperature heat exchange conduit; 33. a heat exchanger; 34. an exhaust gas transport pipeline; 35. a desorption fan; 36. a heat extraction valve; 37. an adsorption fan; 38. a desorption control valve; 4. an RTO system; 41. a combustion chamber; 411. a burner; 42. a regenerator; 43. a switching valve; 44. a purge valve; 5. a chimney; 6. a low concentration exhaust gas mixing tank; 7. an oil-containing low-concentration waste gas mixing tank; 71. an oil removal device; 8. a high concentration exhaust gas mixing tank; 9. an exhaust gas circulation line; 10. an exhaust gas flow conduit; 101. a high temperature filtration device; 102. a wind mixing box; 103. a flame arrestor; 104. RTO fan.

Detailed Description

The present application is described in further detail below with reference to fig. 1.

The embodiment of the application discloses energy-efficient big amount of wind low concentration organic waste gas processing apparatus. Referring to fig. 1, the high-efficiency energy-saving large-air-volume low-concentration organic waste gas treatment device comprises a low-concentration waste gas mixing box 6, an oil-containing low-concentration waste gas mixing box 7, a waste gas transmission pipeline 1, and a filtering system 22, a concentration runner system 33 and a chimney 55 which are sequentially arranged on the waste gas transmission pipeline 1 along the flow direction of waste gas, wherein the low-concentration waste gas mixing box 6 is connected with the inlet of the waste gas transmission pipeline 1, an opening of the oil-containing low-concentration waste gas mixing box 7 is connected with an exhaust gas flow pipeline 9, the other end of the exhaust gas flow pipeline 9 is connected to the waste gas transmission pipeline 1 between the low-concentration waste gas mixing box 6 and the filtering system 2, and meanwhile, an oil removal device 71 is arranged on the exhaust gas flow pipeline 9.

Referring to fig. 1, the oil removing device 71 is made of polypropylene material, the spray liquid is clear water, and the direction of the nozzle is opposite to the direction of the waste gas entering the waste gas circulating pipeline 9, when the waste gas enters the oil removing device 71 from the oil-containing low-concentration waste gas mixing box 7, the waste gas contacts with the spray liquid in the reverse direction, and the spray liquid cools and removes oil from the waste gas, so that the temperature of the waste gas is reduced to 40 ℃ or below; meanwhile, the nozzle adopts a 120 ℃ hollow cone nozzle, so that the waste gas and the spray liquid can be contacted in a component manner, and the purification effect is improved. In addition, the bottom of the oil removing device 71 is provided with a circulating pump and a circulating pipeline, the circulating pump is connected with the packing layer through the circulating pipeline, the packing material in the packing layer adopts pall rings, and the pall rings are used for adsorbing oil in the waste gas. A demister is further disposed on the top of the oil removing device 71, and in this embodiment, the demister adopts a combination of a baffle plate and a mesh to capture most of the water mist in the exhaust gas.

Referring to fig. 1, when the exhaust gas contains oil, the exhaust gas enters the oil-containing low-concentration exhaust gas mixing tank 7 and then enters the oil removing device 71, the oil in the exhaust gas is adsorbed into the pall ring under the spraying of the spraying liquid, the water mist in the exhaust gas is absorbed by the demister, and then the exhaust gas enters the exhaust gas transmission pipeline 1 along the exhaust gas flow pipeline 9, is mixed with the low-concentration VOCs exhaust gas flowing in the low-concentration exhaust gas mixing tank 6 and enters the filtering system 2.

Referring to fig. 1, the filtering system 2 includes a three-stage filter, which includes a coarse filter 21, a middle filter 22 and a high efficiency filter 23 in sequence along the entering direction of the exhaust gas, and the concentration of particulate matters in the exhaust gas entering the zeolite adsorption rotating wheel system 3 is ensured to be reduced below 1 μm by the three-stage filter, especially the high efficiency filter 23, and at the same time, the filtering system 2 can filter a small amount of moisture in the exhaust gas. Be connected with first pressure differential table between coarse filter 21's the entrance and the exit, be provided with the second pressure differential table between the entrance of medium efficiency filter 22 and the exit, be provided with the third pressure differential table between high efficiency filter 23's the entrance and the exit, whether the consumptive material that utilizes the pressure differential table in time to inquire the filter needs to be changed to reduce and filter the consumptive material and change the frequency. More, the bottom of each stage of filter is provided with a certain gradient, a water outlet is arranged at the lowest point, and the filtered water of each filter is uniformly discharged through the water outlet.

Referring to fig. 1, after the exhaust gas enters the exhaust gas transmission pipeline 1, the exhaust gas passes through the coarse filter 21, the medium filter 22 and the high efficiency filter 23 along the exhaust gas transmission pipeline 1 in sequence, so as to remove paint mist, particles and a small amount of moisture in the exhaust gas, and then the exhaust gas flows out from the outlet of the high efficiency filter 23 and passes through the concentration runner system 3.

Referring to fig. 1, the concentration wheel system 3 includes a zeolite wheel 31 interconnected with the filtration system 2, the zeolite wheel 31 includes an adsorption zone 311, a desorption zone 313 and a cooling zone 312, and an adsorption fan 37 is connected to a side of the adsorption zone 311 away from the filtration system 2. The waste gas filtered by the high-efficiency filter 23 enters the adsorption region 311 along the waste gas transmission pipeline 1, part of the waste gas passing through the adsorption region 311 enters the adsorption fan 37 along the waste gas transmission pipeline 1, and the waste gas enters the chimney 5 under the adsorption of the adsorption fan 37 and is discharged from the chimney 5.

Referring to fig. 1, the cooling zone 312 is connected to the high temperature heat exchange pipe 32, the other end of the high temperature heat exchange pipe 32 is connected to the inlet of the heat exchanger 33, when the zeolite wheel 31 rotates to the desorption zone 313 without stopping, part of the exhaust gas passing through the cooling zone 312 is heated from 110 ℃ to approximately 200 ℃ by the heat exchanger 33 through the high temperature heat exchange pipe 32, and then a part of the exhaust gas is introduced into the desorption zone 313 to perform high temperature desorption on the organic matters adsorbed in the zeolite module.

Importantly, the desorption control valve 38 is arranged on the high-temperature heat exchange pipeline 32, and the desorption temperature of the waste gas is controlled by the desorption control valve 38, so that the desorption temperature of the waste gas is kept within 180-220 ℃.

Referring to fig. 1, the desorption outlet is connected with a flue gas transport pipe 34, and a desorption fan 35 and a mixing box 102 along the flue gas transport pipe 34. After the exhaust gas is desorbed from the desorption outlet of the desorption region 313, the exhaust gas enters the air mixing box 102 along the exhaust gas transport pipe 34 under the power of the desorption fan 35.

Referring to fig. 1, the high-efficiency energy-saving large-air-volume low-concentration organic waste gas treatment device further comprises a high-concentration waste gas mixing box 8 for receiving high-concentration waste gas, an outlet of the high-concentration waste gas mixing box 8 is connected with a waste gas flowing pipeline 10, and a high-temperature filtering device 101, an RTO fan 104 and an RTO system 4 which are arranged on the waste gas flowing pipeline 10 along the waste gas flowing direction, the other end of the RTO system 4 is connected with a chimney 5, and a wind mixing box 102 is arranged between the high-temperature filtering device 101 and the RTO fan 104.

Referring to fig. 1, after the high-concentration exhaust gas enters the high-concentration exhaust gas mixing box 8, the high-concentration exhaust gas sequentially enters the high-temperature filtering device 101 and the air mixing box 102 along the exhaust gas flow pipeline 10, is mixed with the exhaust gas flowing out of the desorption area 313 at the air mixing box 102, then enters the RTO system 4 for high-temperature oxidative decomposition under the adsorption of the RTO fan 104, and the incinerated gas is discharged from the chimney 5.

Referring to fig. 1, the rto system 4 is sequentially provided with a combustion chamber 41, a regenerator 42, a purge valve 44 and a switching valve 43 from top to bottom, the rto system 4 controls the inlet and outlet processes of the exhaust gas through the switching valve 43, in this embodiment, 6 sets of the switching valve 43 are provided, 3 sets of the switching valve are used for controlling inlet air, 3 sets of the switching valve are used for controlling outlet air, and the switching valve 43 is provided with an automatic limit switch for feeding back a signal to the system.

Referring to fig. 1, a burner 411 for providing heat is arranged in the combustion chamber 41, the outside of the burner 411 is connected with the heat exchanger 33 through a pipeline, a heat extraction valve 36 is arranged on the pipeline, and heat is extracted from the combustion chamber 41 by using the heat extraction valve 36 and supplied to the heat exchanger 33, so that a heat source is saved, and the desorption temperature of the concentration rotating wheel system 3 is controlled within a reasonable range. More, combustor 411 adopts the low-nitrogen burner, and the low-nitrogen burner can reduce secondary pollutant NOx's production volume, and for rotation type RTO system 4 supplementary fuel after filtering and decompression, supporting combustion-supporting fan provides the air and supports combustion, and when the gas turndown ratio of combustor 411 and air set up to 1.

Referring to fig. 1, the regenerator 42 is mainly composed of an outer frame and heat storage ceramics, and the heat storage ceramics stores part of heat of the exhaust gas so as to preheat the exhaust gas, and ensure that the temperature difference of the exhaust gas entering and exiting the regenerator 42 is controlled within 40 ℃, thereby improving the energy-saving effect of the regenerator 42. In addition, the heat storage ceramic adopts plate-type honeycomb ceramic, so that the heat storage ceramic has strong thermal shock resistance and thermal stress resistance, is not easy to damage, and has heat recovery efficiency of over 95 percent.

After the exhaust gas is collected from the mixing tank, the switching valve 43 is switched to the air inlet direction under the driving of the RTO fan 104, the exhaust gas enters the regenerator 42 for preheating, and then enters the combustion chamber 41, the organic matters in the exhaust gas are converted into carbon dioxide and water vapor under the heat of the burner 411, when the residence time of the exhaust gas in the combustion chamber 41 exceeds 1s, the organic matters in the exhaust gas are sufficiently oxidized and decomposed, then the switching valve 43 is switched to the outlet, and the exhaust gas flows out from the outlets of the combustion chamber 41, the regenerator 42 and the switching valve 43 in sequence and is discharged from the chimney 5 along the exhaust gas flow pipeline 10.

More, set up purge valve 44 between diverter valve 43 and regenerator 42, under the promotion of RTO fan 104, utilize purge valve 44 to carry out the negative pressure to regenerator 42 and sweep, will store in some residual unpurified waste gas in regenerator 42 temporarily provides the negative pressure through RTO fan 104, pumps to the combustion chamber 41 furnace and carries out incineration disposal, improves the whole purifying effect of waste gas.

The implementation principle of the high-efficiency waste gas purification system in the electronic industry is as follows: the low-concentration waste gas enters the waste gas transmission pipeline 1 from the low-concentration waste gas mixing box 6, meanwhile, the waste gas containing oil enters the oil removing device 71 from the oil-containing low-concentration waste gas mixing box 7 along the waste gas circulating pipeline 9 to remove the oil, then enters the waste gas transmission pipeline 1 to be merged with the low-concentration waste gas, then the two waste gases enter the filtering system 2 together, paint mist, dust and a small amount of moisture in the waste gas are filtered by the three-stage filter with the help of the three-stage filter, then the waste gas enters the adsorption area 311 along the waste gas transmission pipeline 1, part of the waste gas flows through the adsorption fan 37 from the adsorption area 311 along the waste gas transmission pipeline 1, and is discharged from the chimney 5 under the pushing of the adsorption fan 37; the other part of the waste gas enters the heat exchanger 33 from the cooling area 312 to increase the temperature, and after the temperature is increased, the waste gas is introduced into the desorption area 313 to desorb the organic matters in the waste gas at high temperature, and then enters the air mixing box 102; high concentration waste gas gets into high concentration waste gas mixing box 8, get into high temperature filter device 101 and mixed wind case 102 along waste gas flow pipeline 10 in proper order, and the waste gas set after the desorption, then pass through spark arrester 103 in proper order, RTO fan 104 and RTO system 4, under RTO fan 104's promotion, waste gas is earlier through regenerator 42 accumulational heat accumulation volume, waste gas burns in combustion chamber 41 after that, detach remaining harmful gas and organic matter in the waste gas, treat to burn the end back, waste gas is along waste gas flow pipeline 10 discharge chimney 5.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. An efficient electronic industry exhaust gas purification system which characterized in that: the device comprises a low-concentration waste gas mixing box (6), an oil-containing low-concentration waste gas mixing box (7), a high-concentration waste gas mixing box (8) and a waste gas transmission pipeline (1) connected with the low-concentration waste gas mixing box (6), wherein a filtering system (2), a concentration runner system (3) and a chimney (5) are sequentially arranged on the waste gas transmission pipeline (1); one end of the oil-containing low-concentration waste gas mixing box (7) is connected with a waste gas circulation pipeline (9) and an oil removal device (71) arranged on the waste gas circulation pipeline (9), and the waste gas circulation pipeline (9) is arranged between the low-concentration waste gas mixing box (6) and the filtering system (2); high concentration waste gas mixing box (8) one end is connected with waste gas flow pipeline (10), set up RTO system (4) on waste gas flow pipeline (10), RTO system (4) and chimney (5) interconnect.

2. The high efficiency electronic industry exhaust gas purification system of claim 1, wherein: the nozzles on the oil removal device (71) are oriented in the opposite direction to the direction of the exhaust gas entering the exhaust gas flow duct (9).

3. The high efficiency electronic industry exhaust gas purification system of claim 2, wherein: a demister is arranged on the oil removing device (71).

4. The high efficiency electronic industry exhaust gas purification system of claim 1, wherein: the filtering system (2) is sequentially provided with a coarse filter (21), a medium-efficiency filter (22) and a high-efficiency filter (23) according to the waste gas inlet sequence, and the high-efficiency filter (23) is connected with the concentration rotating wheel system (3) through a waste gas transmission pipeline (1).

5. The high efficiency electronic industry exhaust gas purification system of claim 1, wherein: and a high-temperature filtering device (101) is sequentially arranged between the high-concentration waste gas mixing box (8) and the RTO system (4).

6. The high efficiency electronic industry exhaust gas purification system of claim 5, wherein: and a flame arrester (103) is also arranged between the high-temperature filtering device (101) and the RTO system (4).

7. The high efficiency electronic industry exhaust gas purification system of claim 1, wherein: RTO system (4) from top to bottom sets gradually combustion chamber (41), regenerator (42), purge valve (44) and diverter valve (43), diverter valve (43) one end is connected with RTO fan (104).

8. The high efficiency electronic industry exhaust gas purification system of claim 1, wherein: concentrated runner system (3) are including adsorption zone (311), desorption district (313) and cooling zone (312), cooling zone (312) opening part is connected with high temperature heat transfer pipeline (32), the entry interconnect of the high temperature heat transfer pipeline (32) other end and heat exchanger (33), the export and the desorption district (313) interconnect of heat exchanger (33).

9. The high efficiency electronic industry exhaust gas purification system of claim 8, wherein: the other end of the desorption area (313) is connected with a waste gas conveying pipeline (34), the other end of the waste gas conveying pipeline (34) is connected with a wind mixing box (102), and the wind mixing box (102) is arranged between the high-temperature filtering device (101) and the flame arrester (103).