CN218079438U - Split type plasma electrode - Google Patents
Split type plasma electrode Download PDFInfo
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- CN218079438U CN218079438U CN202222569017.1U CN202222569017U CN218079438U CN 218079438 U CN218079438 U CN 218079438U CN 202222569017 U CN202222569017 U CN 202222569017U CN 218079438 U CN218079438 U CN 218079438U
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Abstract
The utility model discloses a split type plasma electrode, include: the upper end of the first electrode is convexly provided with a connecting convex part, the lower end of the first electrode is provided with a first assembly hole into which the power supply line is inserted, and the peripheral side of the first electrode is provided with a second assembly hole communicated with the first assembly hole; the second electrode is provided with a third assembling hole for the connection convex part to extend into and be detachably connected with the connection convex part; and one end of the fastener extends into the first assembling hole from the second assembling hole to be connected with the first electrode, and abuts against the electric wire to limit the electric wire to move relative to the first electrode. This split type plasma electrode makes same first electrode can pair the second electrode of various not unidimensional through adopting detachable construction's first electrode and second electrode to adapt to different producers' assembly requirement, improve the suitability and the commonality of electrode, reduce cost, simultaneously, when the electrode takes place the local damage, only need change damage the part can, need not whole abandon, reduce cost of maintenance, energy-concerving and environment-protective.
Description
[ technical field ] A
The utility model relates to a plasma cleaning machine especially relates to split type plasma electrode.
[ background ] A method for producing a semiconductor device
The plasma power supply main board in the existing plasma cleaning machine needs to be matched with an electrode for use, and due to different manufacturers and different internal assembly spaces of the plasma cleaning machine, the size of the electrode matched with the plasma power supply main board for use is different, the universality of the electrode is poor, and the production cost is high.
[ Utility model ] content
In order to solve the poor technical problem of electrode commonality that traditional plasma power mainboard was used, the utility model aims to provide a split type plasma electrode.
The utility model discloses a realize through following technical scheme:
a split plasma electrode, comprising:
the upper end of the first electrode is convexly provided with a connecting convex part, the lower end of the first electrode is provided with a first assembly hole into which a power supply line is inserted, and the peripheral side of the first electrode is provided with a second assembly hole communicated with the first assembly hole;
the second electrode is provided with a third assembling hole for the connection convex part to extend into and be detachably connected with the connection convex part;
and one end of the fastener extends into the first assembling hole from the second assembling hole to be connected with the first electrode, and abuts against the electric wire to limit the electric wire to move relative to the first electrode.
Further, the connecting convex part is in threaded connection with the third assembling hole when extending into the third assembling hole.
Further, the fastener extends into the first assembly hole from the second assembly hole and is in threaded connection with the second assembly hole.
Furthermore, when one end of the fastener extends into the first assembling hole from the second assembling hole to abut against the electric wire, the other end of the first electrode is at least partially exposed out of the first electrode.
Further, the fastener is perpendicular to the axis of the first electrode when attached to the first electrode.
Further, the diameter of the first electrode gradually decreases from bottom to top.
Furthermore, the first electrode is provided with 2 first clamping planes on the outer peripheral side of the first electrode, the two first clamping planes are symmetrical about the axis of the first electrode, and the two first clamping planes are parallel to each other.
Furthermore, the second electrode is provided with 2 second clamping planes on the outer peripheral side of the second electrode, the two second clamping planes are symmetrical about the axis of the second electrode, and the two second clamping planes are parallel to each other.
Further, when the second electrode is connected to the first electrode through the third fitting hole, the second clamping plane and the first clamping plane are coplanar in a vertical direction.
Furthermore, the first electrode and the second electrode are made of red copper materials, and the surface of the second electrode is plated with chrome.
Compared with the prior art, the utility model has the advantages of as follows:
the utility model discloses an adopt detachable construction's first electrode and second electrode, make same first electrode can pair the second electrode of various not unidimensional to adapt to different producers' assembly requirement, improve the suitability and the commonality of electrode, reduce cost, simultaneously, when the electrode takes place the local damage, only need change damage parts can, need not whole abandoning, reduce cost of maintenance, energy-concerving and environment-protective.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below.
Fig. 1 is a perspective view of a split type plasma electrode according to an embodiment of the present invention;
fig. 2 is an exploded view of a split plasma electrode according to an embodiment of the present invention.
[ detailed description ] A
In order to make the technical problem, technical solution and advantageous effects solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to further explain the present invention in detail. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example (b): as shown in fig. 1-2, the split plasma electrode includes:
the upper end of the first electrode 1 is convexly provided with a connecting convex part 11, the lower end of the first electrode is provided with a first assembly hole 12 into which a power supply line is inserted, and the peripheral side of the first electrode is provided with a second assembly hole 13 communicated with the first assembly hole 12;
a second electrode 2 having a third fitting hole 21 into which the connection projection 11 extends and which is detachably connected to the connection projection 11;
and one end of the fastening piece 3 extends into the first assembling hole 12 from the second assembling hole 13 to be connected with the first electrode 1, and abuts against the electric wire to limit the electric wire to move relative to the first electrode 1.
The split plasma electrode is applied to a plasma cleaning machine and assembled in a spray gun when being matched with a plasma power supply main board for use, the first electrode 1 is connected with a ceramic connecting piece in the spray gun, and after the split plasma electrode is electrified, the first electrode 1 and the second electrode 2 discharge to puncture air to generate plasma. The first assembly space in the spray gun into which the first electrode 1 is inserted is of conventional general size, i.e. the manufacturers are the same, while the second assembly space into which the second electrode 2 is inserted is different. This split type plasma electrode is through adopting detachable construction first electrode 1 with second electrode 2 makes same first electrode 1 can mate various not unidimensional second electrode 2 to adapt to different producers' assembly requirement, improve the suitability and the commonality of electrode, reduce cost, simultaneously, when the electrode takes place local damage, only need change damage part can, need not whole abandon, reduce cost of maintenance, energy-concerving and environment-protective.
In one embodiment, the connecting protrusion 11 is screwed into the third mounting hole 21 when extending into the third mounting hole 21, and the total length of the first electrode 1 is 39mm.
In one embodiment, in order to simplify the structure and facilitate the implementation, the fastening member 3 is screwed into the second assembly hole 13 when extending into the first assembly hole 12 from the second assembly hole 13, specifically, the fastening member 3 is a screw, and the second assembly hole 13 is an M4 hole.
In one embodiment, when one end of the fastening member 3 extends into the first assembling hole 12 from the second assembling hole 13 to abut against the electric wire, the other end thereof is at least partially exposed out of the first electrode 1. When the split plasma electrode is assembled in the spray gun, the split plasma electrode is connected with the spray gun through the fastener 3, and particularly, the fastener 3 is movably connected with a spray gun shell. The gap between the first electrode 1 and the spray gun housing is a discharge gap, and the gap is too narrow and is easy to short circuit, and the discharge efficiency is reduced if the gap is too wide. The structure realizes the adjustment of the gap between the first electrode 1 and the spray gun shell by adjusting the retraction amount of the fastening piece 3, thereby optimizing the discharge gap and improving the discharge effect.
In one embodiment, the fastening member 3 is attached to the first electrode 1 so as to be perpendicular to the axis of the first electrode 1, for the sake of simple structure and convenience of implementation.
In one embodiment, the diameter of the first electrode 1 is gradually reduced from bottom to top in order to increase the spraying force and to make the air flow in the spray gun smoother and more concentrated.
In one embodiment, in order to clamp the first electrode more stably and avoid sliding during the assembly and disassembly of the wrench, the first electrode 1 is provided with 2 first clamping planes 14 on the outer peripheral side thereof, the two first clamping planes 14 are symmetrical with respect to the axis of the first electrode 1, and the two first clamping planes 14 are parallel to each other.
In one embodiment, in order to stably clamp the second electrode and avoid sliding when the wrench is disassembled and assembled, the second electrode 2 is provided with 2 second clamping planes 22 on the outer circumference side thereof, the two second clamping planes 22 are symmetrical with respect to the axis of the second electrode 2, and the two second clamping planes 22 are parallel to each other.
In one embodiment, when the second electrode 2 is connected to the first electrode 1 through the third assembling hole 21, the second clamping plane 22 and the first clamping plane 14 are coplanar in a vertical direction for easy assembly and disassembly.
In one embodiment, in order to improve the connection stability, a mounting ring 15 which is communicated with the second mounting hole 13 is convexly arranged at the lower end of the first electrode 1, and a mounting groove (not shown) is concavely arranged on the outer side wall of the end part of the mounting ring 15, which is close to the first electrode 1.
In one embodiment, in order to improve the conductivity of the electrodes, the first electrode 1 and the second electrode 2 are made of red copper materials.
In one embodiment, the second electrode 2 is chrome plated to improve the smoothness of the electrode surface, as well as to improve the wear resistance, corrosion resistance, and life of the electrode.
It should be understood that the terms "first", "second", etc. are used herein to describe various information, but the information should not be limited to these terms, and these terms are only used to distinguish one type of information from another. For example, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information, without departing from the scope of the present invention. Furthermore, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
The foregoing is illustrative of one or more embodiments provided in connection with the detailed description and is not to be construed as limiting the invention to the precise embodiments disclosed herein. All with the utility model discloses a method, structure etc. are similar, the same, or to the utility model discloses make a plurality of technological deductions under the design prerequisite, or the replacement should all regard as the utility model discloses a protection scope.
Claims (10)
1. Split type plasma electrode, its characterized in that includes:
the upper end of the first electrode is convexly provided with a connecting convex part, the lower end of the first electrode is provided with a first assembly hole into which a power supply line is inserted, and the peripheral side of the first electrode is provided with a second assembly hole communicated with the first assembly hole;
the second electrode is provided with a third assembling hole for the connection convex part to extend into and be detachably connected with the connection convex part;
and one end of the fastener extends into the first assembling hole from the second assembling hole to be connected with the first electrode, and abuts against the electric wire to limit the electric wire to move relative to the first electrode.
2. The split plasma electrode of claim 1, wherein the connection protrusion is threaded with the third assembly hole when protruding into the third assembly hole.
3. The split plasma electrode of claim 1, wherein the fastener is threaded into the second mounting hole when extending from the second mounting hole into the first mounting hole.
4. The split plasma electrode according to claim 1, wherein when one end of the fastening member extends into the first assembling hole from the second assembling hole and abuts against the electric wire, the other end of the fastening member is at least partially exposed out of the first electrode.
5. The split plasma electrode of claim 1, wherein the fastener is perpendicular to the axis of the first electrode when attached to the first electrode.
6. The split plasma electrode according to claim 1, wherein the diameter of the first electrode is gradually reduced from bottom to top.
7. The split plasma electrode according to claim 1, wherein the first electrode has 2 first clamping planes formed on an outer peripheral side thereof, the two first clamping planes are symmetrical with respect to an axis of the first electrode, and the two first clamping planes are parallel to each other.
8. The split plasma electrode according to claim 7, wherein the second electrode has 2 second clamping planes formed on an outer peripheral side thereof, the two second clamping planes are symmetrical with respect to an axis of the second electrode, and the two second clamping planes are parallel to each other.
9. The split plasma electrode of claim 8, wherein the second clamping plane and the first clamping plane are coplanar in a vertical direction when the second electrode is connected to the first electrode through the third mounting hole.
10. The split plasma electrode according to claim 1, wherein the first electrode and the second electrode are made of red copper material, and the second electrode is chrome-plated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222569017.1U CN218079438U (en) | 2022-09-26 | 2022-09-26 | Split type plasma electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222569017.1U CN218079438U (en) | 2022-09-26 | 2022-09-26 | Split type plasma electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218079438U true CN218079438U (en) | 2022-12-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222569017.1U Active CN218079438U (en) | 2022-09-26 | 2022-09-26 | Split type plasma electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218079438U (en) |
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2022
- 2022-09-26 CN CN202222569017.1U patent/CN218079438U/en active Active
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