CN218069777U - Electron excitation assembly, ionization device and ion implanter - Google Patents

Abstract

The utility model provides an electronic excitation component, a gas ionization device and an ion implanter, which comprises a first electronic excitation part and a second electronic excitation part, wherein the first electronic excitation part comprises an electrode cap and a connecting cylinder which are connected, and the electrode cap can be connected with a first power supply; the second electronic excitation part comprises a first guide rod and a second guide rod which are oppositely arranged, the first guide rod and the second guide rod can be connected with a heat source or a second power supply, a heat conduction part is arranged between the first guide rod and the second guide rod, one end of the heat conduction part is connected with the first guide rod, the other end of the heat conduction part is connected with the second guide rod, the heat conduction part is located in the connecting cylinder, and the heat conduction part is a flexible body. Because the heat conducting piece of the electronic excitation assembly is a flexible body, the self stress can be released when the second electronic excitation piece is heated and deformed, the permanent deformation and the brittle failure are prevented, and the service life is prolonged.

Description

Electron excitation assembly, ionization device and ion implanter

Technical Field

The utility model relates to a semiconductor manufacturing technology field, concretely relates to electron arouses subassembly, ionization device and ion implantation machine.

Background

In semiconductor processing, it is desirable to dissociate process gases by electron excitation to produce desired ions, such as boron trifluoride by electron excitation. The principle of electron excitation in the prior art is that an electric conduction heating rod is close to an electrode cap, hot electrons can be generated after the electric conduction heating rod is heated, meanwhile, the electrode cap is electrified to attract the hot electrons, and secondary electrons can be generated when the electrode cap is heated and excited by electrons, so that the electrode cap is used for dissociating process gas. In the prior art, since each part of the electric conduction heating rod is rigid and is in a rigid connection state in the ionization device, the electric conduction heating rod can generate stress and cannot release stress when being heated and deformed, and permanent deformation and even brittle failure are easy to generate, and the problem needs to be solved urgently.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an electron excitation subassembly, ionization device and ion implantation machine can release self stress in the thermal deformation, prevents to take place permanent deformation and brittle failure, improves life.

In order to achieve the above object, the present invention provides an electronic excitation assembly, which includes a first electronic excitation member and a second electronic excitation member, wherein the first electronic excitation member includes an electrode cap and a connecting cylinder, which are connected to each other, and the electrode cap can be connected to a first power supply; the second electronic excitation part comprises a first guide rod and a second guide rod which are oppositely arranged, the first guide rod and the second guide rod can be connected with a heat source or a second power supply, a heat conduction part is arranged between the first guide rod and the second guide rod, one end of the heat conduction part is connected with the first guide rod, the other end of the heat conduction part is connected with the second guide rod, the heat conduction part is located in the connecting cylinder, and the heat conduction part is a flexible body.

Optionally, the heat conducting member is a multi-stranded wire, one end of the multi-stranded wire is connected with the first guide rod, and the other end of the multi-stranded wire is connected with the second guide rod.

Optionally, the multiple strands are arranged in an S-shape.

Optionally, the connecting cylinder comprises a first cylinder and a second cylinder which are connected, the inner diameter of the first cylinder is smaller than that of the second cylinder, and the electrode cap is connected with the first cylinder.

Optionally, the electrode cap and the connecting cylinder are of an integrated structure.

Optionally, a heat insulation sleeve is sleeved outside the connecting cylinder.

Optionally, the periphery of one end of the electrode cap close to the connecting cylinder is provided with an edge extending outwards along the radial direction of the electrode cap, and the inner wall of one end of the heat insulation sleeve close to the electrode cap is provided with a step portion matched with the edge.

Optionally, the connecting cylinder is kept away from the periphery of the one end of electrode cap is equipped with along its radial outside first boss that extends the setting, thermal-insulated telescopic keeping away from the periphery of the one end of electrode cap is equipped with along its radial outside second boss that extends the setting, keeping away from of second boss the one end of electrode cap can be set up being close to of first boss one of electrode cap is served.

The utility model also provides an ionization device, including in a reaction chamber and a plurality of the aforesaid the electron arouse the subassembly, the electrode cap that the electron arouses the subassembly stretches into among the reaction chamber.

The utility model also provides an ion implanter, including above-mentioned gas ionization device.

The utility model provides an electron arouses subassembly has following beneficial effect:

the device comprises a first electronic excitation part and a second electronic excitation part, wherein the first electronic excitation part comprises an electrode cap and a connecting cylinder which are connected, and the electrode cap can be connected with a first power supply; the second electronic excitation part comprises a first guide rod and a second guide rod which are oppositely arranged, the first guide rod and the second guide rod can be connected with a heat source or a second power supply, a heat conduction part is arranged between the first guide rod and the second guide rod, one end of the heat conduction part is connected with the first guide rod, the other end of the heat conduction part is connected with the second guide rod, the heat conduction part is located in the connecting cylinder, and the heat conduction part is a flexible body. When the electronic excitation assembly is used, the first guide rod and the second guide rod are electrified and/or conducted, the heat conducting piece generates heat to generate hot electrons, meanwhile, the electrode cap is electrified to attract the hot electrons and is excited by the hot electrons to generate secondary electrons for dissociating process gas, the heat conducting piece of the electronic excitation assembly is a flexible body, flexible connection between the first guide rod and the second guide rod can be realized, self stress can be released when the second electronic excitation piece is heated and deformed, permanent deformation and brittle failure are prevented, and the service life is prolonged.

The utility model also provides an ionization device, including a reaction chamber and anyone in the aforesaid the electron arouses the subassembly, the electrode cap that the electron arouses the subassembly stretches into in the reaction chamber. Because the power device comprises the electronic excitation assembly, the second electronic excitation part can release self stress in thermal deformation, thereby preventing permanent deformation and brittle failure and prolonging the service life.

The utility model also provides an ion implanter, including above-mentioned ionization device. Because the ion implanter comprises the ionization device and the power device comprises the electronic excitation assembly, the second electronic excitation part can release self stress in thermal deformation, thereby preventing permanent deformation and brittle failure and prolonging the service life.

Drawings

Fig. 1 is a cross-sectional view of an electronic excitation assembly according to an embodiment of the present invention;

fig. 2 is a front view of a second electronic excitation element according to an embodiment of the present invention;

fig. 3 is a top view of a second electronic excitation component according to an embodiment of the present invention;

fig. 4 is a cross-sectional view of a first electron excitation member in an electron excitation assembly according to another embodiment of the present invention;

the reference numbers are as follows:

1-a first electron excitation member; 11-an electrode cap; 111-edges; 12-a connector barrel; 121-a first boss; 13-a heat-insulating sleeve; 131-a step portion; 132-a second boss;

2-a second electron excitation member; 21-a first guide bar; 22-a second guide bar; 23-a thermally conductive member.

Detailed Description

To make the objects, advantages and features of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. It is to be noted that the drawings are in simplified form and are not to scale, but rather are provided for the purpose of facilitating and distinctly claiming the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings are intended to show different emphasis, sometimes in different proportions.

It will be understood that when an element or layer is referred to as being "on …," connected to "another element or layer, it can be directly on the other element or layer, connected to the other element or layer, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on …" or "directly connected to" another element or layer, there are no intervening elements or layers present. Although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention. Spatial relational terms, such as "below … …," "below," "above … …," "above," and the like, may be used herein for ease of description to describe the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "under … …," "under" or "on" other elements or features would then be oriented. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

An object of the utility model is to provide an electron arouses subassembly, ionization device and ion implantation machine can release self stress among the thermal deformation, prevents to take place permanent deformation and brittle failure, improves life.

To achieve the above object, the present invention provides an electronic excitation assembly, please refer to fig. 1 and fig. 2, in which fig. 1 is a cross-sectional view of the electronic excitation assembly provided by an embodiment of the present invention, and fig. 2 is a front view of a second electronic excitation member provided by an embodiment of the present invention. As shown in fig. 1 and 2, the electronic excitation assembly comprises a first electronic excitation member 1 and a second electronic excitation member 2, wherein the first electronic excitation member 1 comprises an electrode cap 11 and a connecting cylinder 12 which are connected, and the electrode cap 11 can be connected with a first power supply; the second electronic excitation part 2 comprises a first guide rod 21 and a second guide rod 22 which are oppositely arranged, the first guide rod 21 and the second guide rod 22 can be connected with a heat source or a second power supply, a heat conduction part 23 is arranged between the first guide rod 21 and the second guide rod 22, one end of the heat conduction part 23 is connected with the first guide rod 21, the other end of the heat conduction part 23 is connected with the second guide rod 22, the heat conduction part 23 is positioned in the connecting cylinder 12, and the heat conduction part 23 is a flexible body. When the electronic excitation component is used, the first guide rod 21 and the second guide rod 22 are electrified and/or conducted, the heat conducting piece 23 generates heat to generate hot electrons, meanwhile, the electrode cap 11 is electrified to attract the hot electrons and is excited by the hot electrons to generate secondary electrons so as to dissociate process gas, the heat conducting piece 23 of the electronic excitation component is a flexible body, the flexible connection between the first guide rod 21 and the second guide rod 22 can be realized, the stress of the second electronic excitation piece 2 can be released in the thermal deformation, the permanent deformation and the brittle failure can be prevented, and the service life can be prolonged.

Specifically, the heat conducting member 23 is a multi-stranded wire, one end of the multi-stranded wire is connected to the first guide rod 21, and the other end of the multi-stranded wire is connected to the second guide rod 22. In an exemplary embodiment, the multi-stranded wires are made of metal tungsten, and the multi-stranded wires can realize flexible connection between the first guide rod 21 and the second guide rod 22, so that self stress can be released when the second electronic excitation member 2 is deformed by heat, permanent deformation and brittle failure are prevented, and the service life is prolonged.

Further, referring to fig. 3, fig. 3 is a top view of the second electronic excitation element 2 according to an embodiment of the present invention. As shown in fig. 3, the shape of the multi-stranded wire is S-shaped, and the plane of the S-shaped multi-stranded wire is parallel to the end surface of the electrode cap 11. This arrangement makes it possible to increase the heat generating area of the heat-conducting member 23, and to cause the thermal electrons discharged from the heat-conducting member 23 to act more efficiently on the electrode cap 11.

It should be understood that the thermal electron emission of the thermal conduction member 23 is generated by heat, and therefore, the heat generation manner includes, but is not limited to, electricity heat generation and heat conduction heat generation, and the first guide rod 21 and the second guide rod 22 can conduct electricity and/or heat. When the first guide rod 21 and the second guide rod 22 make the heat conducting member 23 generate heat through a heat conducting manner, the first guide rod 21 and/or the second guide rod 22 may be connected to a heat source to conduct heat. When the first guide rod 21 and the second guide rod 22 are powered to generate heat to the heat conducting member 23, the electronic excitation assembly further includes a second power source, one pole of the second power source is electrically connected to the first guide rod 21, and the other pole of the second power source is electrically connected to the second guide rod 22, so that after power is supplied, the first guide rod 21, the second guide rod 22 and the heat conducting member 23 enter the same electrical circuit, and the heat conducting member 23 is powered to generate heat to release thermal electrons. In an exemplary embodiment, the first and second guide rods 21 and 22 may be clamped by an electrically conductive positive and negative electrode clamp, but not limited thereto.

Preferably, the connecting cylinder 12 comprises a first cylinder and a second cylinder which are connected, the inner diameter of the first cylinder is smaller than that of the second cylinder, and the electrode cap 11 is connected with the first cylinder. So set up, can further guide the hot electron to arouse the electrode cap improves secondary electron and arouses the effect.

Further, as shown in fig. 1, the side surfaces of the electrode cap 11 and the connecting cylinder 12 are sleeved with a heat insulation sleeve 13. Thermal-insulated sleeve 13 is in electrode cap 11 with can compromise under the condition that connecting cylinder 12 is not the integral type foundry goods and play the connection effect, thermal-insulated sleeve 13 can play thermal-insulated and insulating effect, make the hot electron more effective with electrode cap 11, and make the secondary electron of release follow more effectively electrode cap 11's axial release.

With continued reference to fig. 1, as shown in fig. 1, in an exemplary embodiment, an outer circumference of an end of the electrode cap 11 close to the connecting cylinder 12 is provided with a rim 111 extending radially outward therefrom, and an inner wall of an end of the heat insulation sleeve 13 close to the electrode cap 11 is provided with a step 131 matching with the rim. The heat insulation sleeve 13 can be used as a connecting piece for the connecting cylinder 12 and the electrode cap 11, so that the first electronic excitation assembly 1 is convenient to assemble.

Preferably, as shown in fig. 1, the outer periphery of one end of the electrode cap 11, which is far away from the connecting cylinder 12, is provided with a first boss 121 which extends radially outward, the outer periphery of one end of the electrode cap, which is far away from the heat insulation sleeve 13, is provided with a second boss 132 which extends radially outward, and one end of the electrode cap 11, which is far away from the second boss 132, can be lapped on one end of the electrode cap 11, which is close to the first boss 121. With such an arrangement, when the first electronic excitation component 1 extends into a reaction chamber, a mounting hole adapted to the first electronic excitation component 1 may be formed in the reaction chamber, and the first electronic excitation component 1 may be fixed to the mounting hole by using the first boss 121 and the second boss 132.

Referring to fig. 4, fig. 4 is a cross-sectional view of a first electronic excitation part in an electronic excitation assembly according to another embodiment of the present invention. As shown in fig. 4, the electronic excitation assembly provided in this embodiment is different from the electronic excitation assembly provided in the previous embodiment in that, in this embodiment, the electrode cap 11 and the connecting cylinder 22 are of an integrated structure. The arrangement can increase the stability of the first electronic excitation part 1 and prolong the service life.

The utility model also provides an ionization device, including a reaction chamber and anyone in the aforesaid the electron arouses the subassembly, the electrode cap that the electron arouses the subassembly stretches into in the reaction chamber. Because the power device comprises the electronic excitation assembly, the second electronic excitation part can release self stress in thermal deformation, thereby preventing permanent deformation and brittle failure and prolonging the service life.

The utility model also provides an ion implanter, including above-mentioned ionization device. Because the ion implanter comprises the ionization device and the power device comprises the electronic excitation assembly, the second electronic excitation part can release self stress in thermal deformation, thereby preventing permanent deformation and brittle failure, prolonging the service life

It should be noted that, in the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.

It should also be noted that, although the present invention has been described with reference to the preferred embodiments, the above-mentioned embodiments are not intended to limit the present invention. To anyone skilled in the art, without departing from the scope of the present invention, the technical solution disclosed above can be used to make many possible variations and modifications to the technical solution of the present invention, or to modify equivalent embodiments with equivalent variations. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention all still belong to the protection scope of the technical solution of the present invention.

It should also be understood that the terms "first," "second," "third," and the like in the description are used for distinguishing between various components, elements, steps, and the like, and not for describing a sequential or logical relationship between various components, elements, steps, or the like, unless otherwise specified or indicated.

It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to limit the scope of the present invention. It must be noted that, as used herein and in the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. For example, reference to "a step" or "an apparatus" means a reference to one or more steps or apparatuses and may include sub-steps as well as sub-apparatuses. All conjunctions used should be understood in the broadest sense. And, the word "or" should be understood to have the definition of a logical "or" rather than the definition of a logical "exclusive or" unless the context clearly dictates otherwise. Further, implementations of embodiments of the invention may include performing selected tasks manually, automatically, or in combination.

Claims (10)

1. An electronic excitation assembly, comprising a first electronic excitation member and a second electronic excitation member, wherein the first electronic excitation member comprises an electrode cap and a connecting cylinder which are connected, and the electrode cap can be connected with a first power supply;

the second electronic excitation part comprises a first guide rod and a second guide rod which are oppositely arranged, the first guide rod and the second guide rod can be connected with a heat source or a second power supply, a heat conduction part is arranged between the first guide rod and the second guide rod, one end of the heat conduction part is connected with the first guide rod, the other end of the heat conduction part is connected with the second guide rod, the heat conduction part is located in the connecting cylinder, and the heat conduction part is a flexible body.

2. The electronic excitation assembly of claim 1, wherein the heat conducting member is a plurality of strands, one end of the plurality of strands being connected to the first guide bar and the other end of the plurality of strands being connected to the second guide bar.

3. The electronic excitation assembly of claim 2, wherein the plurality of strands are arranged in an S-shape.

4. The electronic ignition assembly of claim 1 wherein the connector barrel comprises a first barrel and a second barrel connected together, the first barrel having an inner diameter smaller than an inner diameter of the second barrel, the electrode cap being connected to the first barrel.

5. The electronic ignition assembly of claim 1 wherein the electrode cap and the connector barrel are of a unitary construction.

6. The electronic actuating assembly of claim 1 wherein an insulating sleeve is externally sleeved on said connector barrel.

7. The electronic excitation assembly as claimed in claim 6, wherein the outer periphery of the end of said electrode cap adjacent to said connector barrel is provided with a rim extending radially outwardly therefrom, and the inner wall of the end of said heat insulating sleeve adjacent to said electrode cap is provided with a step portion cooperating with said rim.

8. The electronic excitation assembly as claimed in claim 6, wherein the outer periphery of the end of the connecting cylinder away from the electrode cap is provided with a first boss extending radially outwardly therefrom, the outer periphery of the end of the heat insulation sleeve away from the electrode cap is provided with a second boss extending radially outwardly therefrom, and the end of the second boss away from the electrode cap can be overlapped on the end of the first boss close to the electrode cap.

9. An ionization device comprising a reaction chamber and a plurality of electron flood assemblies according to any of claims 1 to 8, wherein the electrode caps of said electron flood assemblies extend into said reaction chamber.

10. An ion implanter comprising the ionization apparatus of claim 9.

Images