CN218065455U - Novel water tank cooling device of semiconductor waste gas treatment equipment - Google Patents
Novel water tank cooling device of semiconductor waste gas treatment equipment Download PDFInfo
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- CN218065455U CN218065455U CN202123307508.0U CN202123307508U CN218065455U CN 218065455 U CN218065455 U CN 218065455U CN 202123307508 U CN202123307508 U CN 202123307508U CN 218065455 U CN218065455 U CN 218065455U
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- water tank
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- water pipe
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Abstract
The utility model discloses a novel water tank cooling device of semiconductor exhaust-gas treatment equipment, including the water tank body, the inside of water tank body is provided with cooling device one, cooling device one is including main water pipe and a plurality of vice water pipe, the inside of main water pipe is provided with the water pump, all be provided with a plurality of atomizer on the vice water pipe and on the main water pipe. The utility model discloses a cooling device one and cooling device two, the temperature that can the internal waste gas of effectual reduction basin has improved the efficiency of handling.
Description
Technical Field
The utility model relates to a waste gas treatment equipment technical field specifically is a novel water tank cooling device of semiconductor waste gas treatment equipment.
Background
During the operation of the semiconductor waste gas treatment equipment, waste gas is firstly treated at high temperature (electric heating, combustion type, plasma type), then is connected with a rear-end pipeline device through a drainage device (cooling, filtering, adsorption and other effects), and finally is discharged out of the equipment.
However, the new water tank cooling device of the existing semiconductor waste gas treatment equipment has the following problems in the use process: because the temperature of the existing waste gas treatment equipment is higher after waste gas enters the water tank, the temperature can not be reduced in time, and the treatment efficiency is lower. Therefore, a corresponding technical scheme needs to be designed to solve the existing technical problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a novel water tank cooling device of semiconductor exhaust-gas treatment equipment has solved because of current exhaust-gas treatment equipment is higher at waste gas entering into basin after-temperature, and the lower technical problem of treatment effeciency that the unable timely lowering temperature leads to has improved the treatment effeciency, satisfies the in-service use demand.
In order to achieve the above purpose, the utility model provides a following technical scheme: the water tank comprises a water tank body, the inside of the water tank body is provided with a first cooling device, the first cooling device comprises a main water pipe and a plurality of auxiliary water pipes, the inside of the main water pipe is provided with a water pump, and the auxiliary water pipes and the main water pipe are both provided with a plurality of atomization nozzles.
As an optimal implementation mode of the utility model, be provided with cooling device two between the both sides of water tank body and the one end, cooling device two includes two soaking boards and two circulating water pump, the inside of soaking board is provided with circulating water pipe, be provided with two connecting pipes between the one end of soaking board and the circulating water pump.
As an optimal implementation manner of the present invention, the inside of the water tank body is provided with a partition plate, and one end of the bottom of the water tank body is provided with a water outlet.
As a preferred embodiment of the present invention, the main water pipe is perpendicular to the inside of the water tank, and the auxiliary water pipe is located on the main water pipe.
As an optimal implementation mode of the utility model, the soaking plate is the rectangle structure and is located the both sides of water tank body, the coolant liquid all is equipped with to the inside of soaking plate and circulating pipe's inside, circulating water pump is located the both ends of water tank body, communicate with each other between connecting pipe and circulating pipe and the circulating water pump.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. through cooling device one, can get into the basin internal back at waste gas, effectual lowering temperature, inside main water pipe and the auxiliary water pipe of water tank body supplies water to a plurality of atomising heads, can be when waste gas passes through the water tank body, abundant and water smoke contact reaches the effect of handling waste gas and cooling, waste gas does not have the dead angle when the water tank body and contacts with spun water smoke, improves the treatment effeciency to the lower problem of treatment effeciency has been solved.
2. Through cooling device two, can effectual reduction water tank's temperature, the soaking plate absorbs the heat, and inside circulating pipe circulates the cooling water of inside through circulating water pump, and continuous transmits the heat and absorbs, supplementary holistic temperature that reduces water tank to the lower problem of treatment effeciency has been solved.
Drawings
Fig. 1 is an overall schematic view of the present invention;
FIG. 2 is a structural diagram of the cooling device according to the present invention;
fig. 3 is a second structure diagram of the cooling device of the present invention.
In the figure, a water tank body-1, a cooling device I-2, a cooling device II-3, a main water pipe-4, an auxiliary water pipe-5, an atomizing nozzle-6, a water pump-7, a circulating water pump-8, a connecting pipe-9, a soaking plate-10 and a circulating water pipe-11.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a novel water tank cooling device of semiconductor waste gas treatment equipment comprises: the water tank body 1, the inside of water tank body 1 is provided with cooling device 2, cooling device 2 is including main water pipe 4 and a plurality of vice water pipe 5, the inside of main water pipe 4 is provided with water pump 7, all be provided with a plurality of atomizer 6 on vice water pipe 5 and the main water pipe 4, the inside of water tank body 1 is equipped with the baffle, the bottom one end of water tank body 1 is equipped with the delivery port, main water pipe 4 perpendicular and the inside of water tank body 1, vice water pipe 5 is located main water pipe 4, through cooling device 2, can effectually reduce the temperature of the internal waste gas of basin, and the efficiency of processing is improved.
In a further improvement, as shown in fig. 3: be provided with two cooling device 3 between the both sides of water tank body 1 and the one end, two cooling device 3 include two soaking boards 10 and two circulating water pump 8, the inside of soaking board 10 is provided with circulating water pipe 11, be provided with two connecting pipes 9 between the one end of soaking board 10 and the circulating water pump 8, soaking board 10 is the rectangle structure and is located the both sides of water tank body 1, the coolant liquid all is equipped with to the inside of soaking board 10 and circulating water pipe 11's inside, circulating water pump 8 is located the both ends of water tank body 1, communicate with each other between connecting pipe 9 and circulating water pipe 11 and the circulating water pump 8, through two cooling device 3, can be when cooling device 2 cools down waste gas, the supplementary problem that reduces water tank body 1, the efficiency of processing has been improved.
When in use: the utility model discloses after waste gas enters into water tank body 1, water tank body 1 inside main water pipe 4 and vice water pipe 5, supply water through water pump 7, further spout water smoke in water tank body 1 through atomizer 6, can be when waste gas passes through water tank body 1, abundant and water smoke contact, reach the effect of handling waste gas and cooling, waste gas does not have the dead angle when water tank body 1 and contacts with spun water smoke, the efficiency of treatment is improved, and simultaneously, soaking plate 10 absorbs the heat, inside circulating pipe 11 circulates the cooling water of inside through circulating water pump 8, the continuous transmits the heat and absorbs, the supplementary holistic temperature that reduces water tank body 1.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a novel water tank cooling device of semiconductor exhaust-gas treatment equipment which characterized in that: including water tank body (1), the inside of water tank body (1) is provided with cooling device (2), cooling device (2) are including main water pipe (4) and a plurality of vice water pipe (5), the inside of main water pipe (4) is provided with water pump (7), all be provided with a plurality of atomizer (6) on vice water pipe (5) and main water pipe (4).
2. The novel water tank cooling device of the semiconductor waste gas treatment equipment as claimed in claim 1, wherein: be provided with cooling device two (3) between the both sides of water tank body (1) and one end, cooling device two (3) include two soaking boards (10) and two circulating water pump (8), the inside of soaking board (10) is provided with circulating water pipe (11), be provided with two connecting pipes (9) between the one end of soaking board (10) and circulating water pump (8).
3. The novel water tank cooling device of the semiconductor exhaust gas treatment equipment according to claim 2, characterized in that: the water tank is characterized in that a partition plate is arranged inside the water tank body (1), and a water outlet is formed in one end of the bottom of the water tank body (1).
4. The novel water tank cooling device of the semiconductor exhaust gas treatment equipment according to claim 3, characterized in that: the main water pipe (4) is perpendicular to the inside of the water tank body (1), and the auxiliary water pipe (5) is located on the main water pipe (4).
5. The novel water tank cooling device of the semiconductor exhaust gas treatment equipment according to claim 4, characterized in that: the soaking plate (10) is of a rectangular structure and is located on two sides of the water tank body (1), cooling liquid is filled in the soaking plate (10) and the circulating water pipe (11), the circulating water pump (8) is located at two ends of the water tank body (1), and the connecting pipe (9) is communicated with the circulating water pipe (11) and the circulating water pump (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123307508.0U CN218065455U (en) | 2021-12-27 | 2021-12-27 | Novel water tank cooling device of semiconductor waste gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123307508.0U CN218065455U (en) | 2021-12-27 | 2021-12-27 | Novel water tank cooling device of semiconductor waste gas treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218065455U true CN218065455U (en) | 2022-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123307508.0U Active CN218065455U (en) | 2021-12-27 | 2021-12-27 | Novel water tank cooling device of semiconductor waste gas treatment equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN218065455U (en) |
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2021
- 2021-12-27 CN CN202123307508.0U patent/CN218065455U/en active Active
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