CN218039125U

CN218039125U - Wafer cassette convenient for sampling and inspecting wafers

Info

Publication number: CN218039125U
Application number: CN202221481382.0U
Authority: CN
Inventors: 段克波
Original assignee: Beaufort Xiamen New Materials Co ltd
Current assignee: Beaufort Xiamen New Materials Co ltd
Priority date: 2022-06-15
Filing date: 2022-06-15
Publication date: 2022-12-13
Anticipated expiration: 2032-06-15

Abstract

The utility model relates to a crystal boat box convenient to selective examination wafer, including the box body, be open cavity about having in the box body, the inner wall symmetric distribution has a plurality of wafer grooves about this box body, erects between the inner wall around the box body and installs the guide bar, and the slidable cover in the guide bar outside is equipped with the driving arm, and outside the driving arm extended to the box body, the inner rigid coupling of driving arm had the arc part. The utility model discloses a lower extreme inner wall of crystal boat box erects and installs the guide bar, and the slidable cover in the guide bar outside is equipped with the drive arm, and the inner rigid coupling of drive arm has arc part, and linear arrangement is provided with the scale on the drive arm, and the workman can correspond the wafer groove number according to the scale, and the wafer that needs the spot check is looked for fast, and easy operation is convenient, and detection efficiency is high.

Description

Wafer boat box convenient for sampling and inspecting wafers

Technical Field

The utility model relates to a wafer carrier field especially indicates a wafer boat box convenient to selective examination wafer.

Background

Wafer boats are used for storing wafers during the chip manufacturing process, and the wafer boat typically can carry 25 wafers. The wafer boat boxes are classified into various types according to purposes, wafers are frequently converted in the wafer boat boxes in the whole manufacturing process, potential hazards of collision and damage exist in wafer conversion, whether the wafers need to be detected completely or not often, the difficulty in taking out single wafers is high due to the fact that the wafers are arranged in the wafer boat boxes at small intervals, tools need to be used, time and labor are wasted in searching the tools, and operation is quite troublesome. In view of this, it is generally popularized to research a wafer cassette for conveniently inspecting wafers.

Disclosure of Invention

The utility model provides a wafer boat box convenient to selective examination wafer to overcome current wafer boat box and exist to take out monolithic wafer detection and have inconvenient problem.

The utility model adopts the following technical scheme:

wafer boat box convenient to spot check wafer, comprises a box bod, be open cavity about having in the box body, the inner wall symmetric distribution has a plurality of wafer grooves about this box body, erect between the inner wall around the above-mentioned box body and install the guide bar, the slidable cover in the guide bar outside is equipped with the driving arm, the driving arm extends to outside the box body, the inner rigid coupling of driving arm has arc part, the thickness of arc part is less than the inslot width in above-mentioned wafer groove, the sign has the scale on the driving arm, every scale interval of scale is equal to the distance between the adjacent wafer groove.

In a further improvement, the arc-shaped part is an arc-shaped rubber block.

In a further improvement, a handle is arranged at the outer end of the transmission arm.

From the above description of the structure of the present invention, compared with the prior art, the present invention has the following advantages: the utility model discloses a lower extreme inner wall of crystal boat box erects and installs the guide bar, and the slidable cover in the guide bar outside is equipped with the drive arm, and the inner rigid coupling of drive arm has arc part, and linear arrangement is provided with the scale on the drive arm, and the workman can correspond the wafer groove number according to the scale, and the wafer that needs the spot check is looked for fast, and easy operation is convenient, and detection efficiency is high.

Drawings

Fig. 1 is a schematic perspective view of a wafer cassette according to the present invention.

Fig. 2 is a schematic structural view of a wafer cassette and a wafer according to the present invention.

Fig. 3 is a schematic cross-sectional view of the wafer cassette according to the present invention.

Fig. 4 is a schematic structural view of the guide rod and the transmission arm of the present invention.

Detailed Description

The following describes embodiments of the present invention with reference to the drawings.

Referring to fig. 1 to 4, wafer boat box convenient to selective examination wafer, including box body 1, be open cavity 10 from top to bottom in the box body 1, inner wall symmetric distribution has a plurality of wafer grooves 11 about this box body 1, wafer 3 inserts respectively in the

wafer groove

11, 3 unsettled erects between the inner wall about box body 1 of wafer, erect between the front and back inner wall of above-mentioned box body 1 and install guide bar 12, the cover that can slide in the guide bar 12 outside is equipped with transmission arm 2, transmission arm 2 extends to outside the box body 1, the inner rigid coupling of transmission arm 2 has arc part 22, arc part 22's thickness is less than the inslot width of above-mentioned wafer groove 11, arc part 22 can pass above-mentioned wafer groove 11, above-mentioned arc part 22 is the arc rubber block, be difficult for damaging wafer 3 when arc pole jack-up wafer 3. When the arc-shaped part 22 rotates to the vertical direction, the upper end of the arc-shaped part 22 exceeds the bottom of the wafer groove 11, the dividing ruler 20 is marked on the transmission arm 2, the distance between every two adjacent wafer grooves 11 is equal to that between every two adjacent wafer grooves 20, namely, every wafer groove 11 corresponds to one dividing number, and a worker can quickly find the wafer 3 needing selective inspection according to the number. A handle 21 is installed at the outer end of the driving arm 2, and the handle 21 is conveniently pulled and rotated to the driving arm 2.

Referring to fig. 1 and 2, when checking the wafer 3, outwards take out the transmission arm 2, according to the scale number find the wafer 3 of examining of alignment, rotate above-mentioned transmission arm 2 through handle 21, arc part 22 jack-up wafer 3 makes things convenient for the workman to take out this wafer 3, and can not collide with all the other wafers 3, easy operation safety, work efficiency is high.

The utility model discloses a lower extreme inner wall of crystal boat box erects and installs guide bar 12, and the slidable cover in the guide bar 12 outside is equipped with driving arm 2, and the inner rigid coupling of driving arm 2 has arc part 22, and linear arrangement is provided with the scale on the driving arm 2, and the workman can correspond 11 serial numbers in the wafer groove according to the scale, and quick alignment needs the wafer 3 of spot check, and easy operation is convenient, and detection efficiency is high.

The aforesaid is only the embodiment of the present invention, but the design concept of the present invention is not limited to this, and it is right to utilize this concept the present invention to perform insubstantial modification, and all belong to infringement the protection scope of the present invention.

Claims

1. Wafer boat box convenient to selective examination wafer, including the box body, be open cavity about having in the box body, the inner wall symmetric distribution has a plurality of wafer grooves, its characterized in that about this box body: erect between the front and back inner wall of box body and install the guide bar, but guide bar outside slidable cover is equipped with the transmission arm, and outside the transmission arm extended to the box body, the inner rigid coupling of transmission arm had arc part, and arc part's thickness was less than the inslot width in wafer groove has marked the scale on the transmission arm, and every scale interval of scale is equal to the distance between the adjacent wafer groove.

2. The wafer boat for facilitating the selective inspection of wafers as claimed in claim 1, wherein: the arc-shaped part is an arc-shaped rubber block.

3. The wafer boat for facilitating the selective inspection of wafers as claimed in claim 1, wherein: and a handle is arranged at the outer end of the transmission arm.