CN217997407U

CN217997407U - Explosion-proof and drainage device of single crystal furnace lid

Info

Publication number: CN217997407U
Application number: CN202222345543.XU
Authority: CN
Inventors: 陈辉; 常晓鱼; 黄鸣
Original assignee: Beijng Naura Vacuum Technology Co Ltd
Current assignee: Beijng Naura Vacuum Technology Co Ltd
Priority date: 2022-09-03
Filing date: 2022-09-03
Publication date: 2022-12-09
Anticipated expiration: 2032-09-03

Abstract

The application discloses an explosion-proof and drainage device for a furnace cover of a single crystal furnace, which relates to the technical field of explosion prevention of single crystal furnaces and comprises a drainage cover, wherein the drainage cover is arranged on the furnace cover, an explosion-proof opening is formed in the furnace cover, and the drainage cover is used for covering the explosion-proof opening formed in the furnace cover; the turnover plate is movably arranged in the drainage cover and used for opening and closing the explosion-proof port; and one end of the drainage tube is connected with the drainage cover and is communicated with the inner cavity of the drainage cover. When the gas quantity in the single crystal furnace increases sharply due to silicon leakage, the pressure in the furnace increases and can jack the turning plate covering the explosion-proof opening to enable the gas flow to flow out of the furnace, so that the pressure is released from the interior of the furnace body, the situation that materials are sprayed out from the top and even the furnace body explodes due to instant rise of the pressure in the furnace is reduced, and the safety of the single crystal furnace in the using process is improved.

Description

Explosion-proof and drainage device of single crystal furnace lid

Technical Field

The application relates to the technical field of single crystal furnaces, in particular to an explosion-proof drainage device for a furnace cover of a single crystal furnace.

Background

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method. A common single crystal furnace body comprises a furnace cover, an upper furnace barrel and a lower furnace body. When the single crystal furnace is in a thermal field of disassembly and assembly, the upper furnace barrel can ascend from the lower furnace body and outwards rotate to the side of the furnace, and the furnace cover can also ascend and outwards rotate to the side of the furnace.

In the process of crystal pulling of the single crystal furnace, the crucible is damaged under the action of high temperature and corrosion in the furnace, the molten silicon liquid contained in the crucible leaks, and the high-temperature silicon liquid can burn the interior of the single crystal furnace body to lead cooling water in the single crystal furnace to flow into the furnace. The water is instantly gasified and expanded under the high temperature condition, and the pressure in the furnace is instantly increased because the furnace is in a closed environment, so that the material is sprayed out from the top and even the furnace body explodes, and the operators at the top are easily injured.

SUMMERY OF THE UTILITY MODEL

In order to improve the security of single crystal growing furnace when leaking silicon, the trouble of leaking appear in the operation engineering, the application provides an explosion-proof and drainage device of single crystal growing furnace bell, and the application provides an explosion-proof and drainage device of single crystal growing furnace bell, adopts following technical scheme:

an explosion-proof and drainage device for a furnace cover of a single crystal furnace comprises

The drainage cover is arranged on the furnace cover, an explosion-proof opening is formed in the furnace cover, and the drainage cover is used for covering the explosion-proof opening formed in the furnace cover;

the turnover plate is movably arranged in the drainage cover and used for opening and closing the explosion-proof port;

and one end of the drainage tube is connected with the drainage cover and is communicated with the inner cavity of the drainage cover.

By adopting the technical scheme, the furnace cover is provided with the explosion-proof port, the drainage cover is arranged on the furnace cover and covers the explosion-proof port, and the inner cavity of the drainage cover is movably connected with the turnover plate to control the opening and closing of the explosion-proof port; when the gas quantity in the single crystal furnace increases sharply due to silicon leakage, the pressure in the furnace increases and can jack the turning plate covering the explosion-proof opening to enable the gas flow to flow out of the furnace, so that the pressure is released from the interior of the furnace body, the situation that materials are sprayed out from the top and even the furnace body explodes due to instant rise of the pressure in the furnace is reduced, and the safety of the single crystal furnace in the using process is improved. When the conditions of silicon leakage and water leakage do not occur in the single crystal furnace, the turning plate covers the explosion-proof opening, so that the normal crystal pulling environment in the furnace is ensured.

Optionally, an explosion-proof tube covering the explosion-proof opening is fixed on the upper portion, the drainage cover is arranged outside the explosion-proof tube, a penetrating hole for the explosion-proof tube to penetrate is formed in the drainage cover, and the turning plate is used for opening and closing one end, far away from the explosion-proof opening, of the explosion-proof tube.

Through adopting above-mentioned technical scheme, the explosion-proof pipe plays the effect that reduces gas leakage through the drainage cover in getting into the drainage cover through wearing the hole, and makes to turn over the closed explosion-proof mouth that the board can be better, discharges away through the honeycomb duct after the drainage cover from explosion-proof pipe combustion gas, reduces the injury that high-temperature gas caused to lieing in single crystal growing furnace top operating personnel.

Optionally, one end of the turning plate is hinged to the inner wall of the drainage hood.

By adopting the technical scheme, the rotary connection between the turning plate and the drainage cover is realized, and when the pressure in the furnace rises, the air flow in the furnace can push the turning plate to flow out of the furnace body; after the pressure in the gas outflow furnace is reduced, the turning plate can fall back to the explosion-proof pipe by means of dead weight.

Optionally, the flap is slidably disposed in the drainage cover.

By adopting the technical scheme, the turnover plate is arranged in the inner cavity of the drainage cover in a sliding manner, and when the pressure in the furnace rises, the drainage cover can be driven to slide upwards so that the gas in the furnace is discharged out of the furnace; when the gas in the furnace is exhausted and the pressure in the furnace is reduced, the turning plate falls onto the explosion-proof pipe to cover the explosion-proof opening.

Optionally, a vertical or inclined guide rod is fixedly connected in the drainage cover, a guide hole for the guide rod to penetrate is formed in the turning plate, and a limiting block which is used for abutting against the turning plate and covering the through hole is fixedly connected to the end of the guide rod.

By adopting the technical scheme, the fixed guide rod in the drainage cover plays a role in guiding, and the turnover plate slides on the guide rod and can move towards the direction close to or far away from the pipe orifice of the explosion-proof pipe; the limiting block fixed at the end part of the guide rod limits the moving range of the turning plate, reduces the possibility that the turning plate is separated from the guide rod in the sliding process, and can reduce the leakage of gas from the guide hole when the turning plate covers one end of the explosion-proof pipe.

Optionally, the drainage tube includes an upper drainage tube and a lower drainage tube which are connected in an inserting manner, one end of the upper drainage tube is connected with the drainage cover, the upper drainage tube is used for connecting with the upper furnace tube, and the lower drainage tube is used for connecting with the lower furnace body.

By adopting the technical scheme, the upper drainage tube is connected with the upper furnace barrel, and the lower drainage tube is connected with the lower furnace body; the lower drainage tube and the upper drainage tube are in splicing and separable arrangement, and the upper drainage tube can ascend and rotate along with the upper furnace barrel, so that the single crystal furnace is convenient to disassemble and assemble; the lower drainage tube and the lower furnace body are fixed together, the upper drainage tube is connected with the lower drainage tube in an inserting way after the furnaces are closed, and the gas in the drainage hood is guided to the lower end of the single crystal furnace.

Optionally, a first supporting seat is detachably mounted outside the upper drainage pipe, and the first supporting seat is fixedly connected with the outer wall of the upper furnace tube; and a second supporting seat is detachably mounted outside the lower drainage pipe, and the second supporting seat is fixedly connected with the outer wall of the lower furnace body.

Through adopting above-mentioned technical scheme, the fixed connection between a stove section of thick bamboo and the last drainage tube has been realized to first supporting seat on the stove section of thick bamboo of going up, and the second supporting seat on the lower furnace body has realized the fixed connection between upper and lower furnace body and the lower drainage tube.

Optionally, a discharge pipe communicated with the inner cavity of the drainage cover is arranged on the outer wall of the drainage cover, and the discharge pipe is connected with one end, far away from the lower drainage pipe, of the upper drainage pipe in an inserting mode.

Through adopting above-mentioned technical scheme, the setting of discharge pipe makes the drainage cover be linked together with the drainage tube on the drainage cover, and the gas can follow the drainage cover after the explosion-proof pipe flows out and flow in the drainage tube in the stove to restriction gaseous flow direction, and discharge pipe and last drainage tube are connected through the mode of pegging graft, and when opening the bell, the discharge pipe can separate with last drainage tube, is difficult for influencing the use of single crystal growing furnace.

Optionally, first supporting seat and second supporting seat all include a plurality of clamping part, the clamping part is including two grip blocks that can dismantle the connection, the grip block is used for supporting tight drainage tube outer wall.

By adopting the technical scheme, the clamping part is used for clamping the upper drainage tube and the lower drainage tube, and the clamping plate can prop against the outer wall of the drainage tube so that the upper drainage tube and the lower drainage tube are more stably fixed; and the clamping part comprises two detachable clamping plates, the detachable connection of the upper drainage tube and the upper furnace barrel is realized, the detachable connection of the lower drainage tube and the lower furnace body is realized, and the replacement is convenient when the drainage tube is damaged.

Optionally, the end face of the explosion-proof pipe far away from the explosion-proof opening inclines downwards towards the direction of the axis of the furnace cover, the sealing effect of the turnover plate is improved, oxides in the explosion-proof tank can be cleaned conveniently, and high-temperature gas can be discharged conveniently.

Through adopting above-mentioned technical scheme, the terminal surface that explosion-proof mouthful was kept away from to the explosion-proof pipe is towards keeping away from bell axis direction downward sloping is convenient for clear up the interior oxide of explosion-proof jar.

In summary, the present application includes at least one of the following advantages:

1. an explosion-proof opening is formed in the furnace cover, the drainage cover is arranged on the furnace cover and covers the explosion-proof opening, and a turning plate is movably connected to an inner cavity of the drainage cover to control the opening and closing of the explosion-proof opening; if the gas quantity in the single crystal furnace is increased sharply due to silicon leakage, water leakage and other accidents, the pressure in the furnace is increased, the turning plate covering the explosion-proof opening can be jacked up to enable the gas flow to flow out of the furnace, the pressure in the furnace is in a stable state, and the condition that materials in the single crystal furnace are sprayed out from the top or the furnace body explodes is reduced.

2. The drainage cover has honeycomb duct and drainage cover inner chamber intercommunication mutually, and the control is from the discharge high-temperature gas's in the stove flow direction for furnace body bottom is arranged to the honeycomb duct to the flow direction after high-temperature gas spills over from the explosion-proof pipe in the stove, and reduction furnace body top operating personnel is scalded.

3. The upper drainage tube is connected with the upper furnace barrel, and the lower drainage tube is connected with the lower furnace body; the lower drainage tube and the upper drainage tube are arranged in a separable mode, and the upper drainage tube can rotate along with the ascending of the upper furnace barrel, so that the single crystal furnace is convenient to disassemble and assemble.

Drawings

FIG. 1 is a schematic view of the overall structure of the application in use in embodiment 1;

FIG. 2 is a schematic cross-sectional view of embodiment 1 of the present application;

FIG. 3 is an enlarged partial schematic view at A in FIG. 2;

FIG. 4 is an enlarged partial view of FIG. 2 at B;

fig. 5 is a schematic view showing the connection structure of the flap in the drainage hood in embodiment 2 of the present application.

Description of reference numerals: 1. a furnace cover; 11. an explosion-proof port; 12. an explosion-proof tube; 13. a drainage cover; 131. turning a plate; 132. a guide hole; 133. a penetration hole; 134. a discharge pipe; 135. a guide rod; 1351. a limiting block; 2. feeding a furnace barrel; 21. a first support base; 3. a lower furnace body; 31. a second support seat; 4. a drainage tube; 41. an upper drainage tube; 411. a pipe contraction section; 412. a butting ring; 42. a lower drainage tube; 5. a clamping portion; 51. and (4) clamping the plate.

Detailed Description

The present application is described in further detail below with reference to figures 1-5.

Example 1:

referring to fig. 1 and 2, the explosion-proof and drainage device for the furnace cover 1 of the single crystal furnace comprises a drainage cover 13 fixed on the furnace cover 1 of the single crystal furnace. Referring to fig. 2 and 3, the furnace cover 1 is provided with an explosion-proof opening 11 and an explosion-proof tube 12 fixed by bolts or welding, and the explosion-proof tube 12 covers the explosion-proof opening 11. The drainage cover 13 is provided with a penetration hole 133 for the explosion-proof tube 12 to penetrate, and the explosion-proof tube 12 is inserted into the drainage cover 13, so that the inner cavity of the drainage cover 13 can be communicated with the explosion-proof tube 12. The turning plate 131 for opening and closing the explosion-proof port 11 is rotatably arranged in the inner cavity of the drainage cover 13, one end, far away from the explosion-proof port 11, of the drainage cover 13 is communicated with the drainage tube 4, when silicon leakage and water leakage occur in the operation process of the single crystal furnace, even if a large amount of gas is generated in the furnace due to high temperature, when the pressure in the furnace reaches the opening pressure of the turning plate 131, the turning plate 131 can be turned outwards, so that air flow is discharged from the drainage tube 4 along the drainage cover 13, the occurrence of the situation that the pressure in the furnace instantaneously rises when the silicon leakage and water leakage of the single crystal furnace are reduced, and the operation safety of the single crystal furnace is improved.

Referring to fig. 3, the outer wall of the draft shield 13 is provided with a discharge pipe 134 communicating with the draft shield 13. In this embodiment, the discharge pipe 134 is located at one end of the flow guide cover 13 away from the opening of the explosion-proof pipe 12 and is opened downwards, and in other embodiments, the discharge pipe 134 may be disposed on other side walls of the flow guide cover 13 away from the furnace cover 1. The end face of one end of the explosion-proof pipe 12 far away from the explosion-proof opening 11 is a tangent plane which inclines downwards towards the axial direction far away from the furnace cover 1, so that oxides or other impurities in the explosion-proof pipe 12 can be cleaned conveniently, and gas can flow towards the discharge pipe 134 conveniently.

Referring to fig. 3, one end of the turning plate 131 is hinged on the inner wall of the inner cavity of the drainage cover 13 close to the explosion-proof tube 12, and the turning plate 131 is abutted with one end of the explosion-proof tube 12 far from the explosion-proof opening 11. When the single crystal furnace normally operates, the turning plate 131 covers one end of the explosion-proof tube 12 far away from the explosion-proof opening 11, so that the crystal pulling environment in the furnace is stable. When the gas in the furnace increases, the pressure in the furnace can be abutted against the turning plate 131 on the explosion-proof tube 12 to be ejected, and the gas in the furnace can be exhausted out of the furnace from the explosion-proof tube 12, so that the condition that the pressure in the furnace changes suddenly is reduced, and the pressure in the furnace is maintained in a stable range.

Referring to fig. 3 and 4, the draft tube 4 includes an upper draft tube 41 and a lower draft tube 42, the upper draft tube 41 is vertically disposed at one side of the furnace body in the present embodiment, and in other embodiments, the installation direction of the upper draft tube 41 and the piping structure of the upper draft tube 41 may be determined according to the position of the discharge pipe 134. The outer diameter of the discharge pipe 134 is smaller than the inner diameter of the upper drainage tube 41, the discharge pipe 134 can be inserted into the upper drainage tube 41, and the top of the upper drainage tube 41 abuts against the bottom wall of the drainage hood 13 to reduce the leakage of gas. The upper drainage tube 41 includes a constricted section 411 at an end remote from the discharge pipe 134, and an outer diameter of the constricted section 411 is smaller than an inner diameter of the lower drainage tube 42 so that the upper drainage tube 41 can be inserted into the lower drainage tube 42. An abutting ring 412 is fixed on the outer wall of the upper drainage tube 41, the abutting ring 412 is located at one end of the upper drainage tube 41 close to the lower drainage tube 42 and can abut against the end of the lower drainage tube 42 to limit the length of the section of the upper drainage tube 41 inserted into the lower drainage tube 42 so as to prevent the section of the upper drainage tube 41 inserted into the lower drainage tube 42 from being too long and being disconnected from the discharge pipe 134 of the drainage cover 13, and the abutting ring 412 seals the lower drainage tube 42 to reduce the gas leakage through the drainage tube 4. The gas in the furnace can flow to the lower end of the single crystal furnace along with the drainage tube 4 through the drainage cover 13, so that the flow direction of the high-temperature gas in the furnace is changed, and the possibility that the operator at the top of the single crystal furnace is scalded due to the upward flow of the high-temperature gas is reduced.

Referring to fig. 1, a first support seat 21 is fixed on the upper furnace cylinder 2 by bolts or welding, and a second support seat 31 is fixed on the lower furnace body 3 by bolts or welding; all weld the clamping part 5 that a plurality of is used for the centre gripping honeycomb duct on first supporting seat 21 and the second supporting seat 31, the welding has two clamping parts 5 on first supporting seat 21 in this implementation, and the welding has a clamping part 5 on the second supporting seat 31. The clamping part 5 comprises two clamping plates 51 which are detachably connected, one end of one clamping plate 51 is welded with the support frame and is fixedly connected with the other clamping plate 51 through a bolt. The upper drainage tube 41 is clamped and fixed by the clamping part 5 on the first supporting seat 21, and the lower drainage tube 42 is clamped and fixed by the clamping part 5 on the second supporting seat 31; so that the upper draft tube 41 is fixedly connected with the upper furnace tube 2 and the lower draft tube 42 is fixedly connected with the lower furnace body 3. When the single crystal furnace is used for disassembling and assembling a thermal field, the furnace cover 1 rises and then is screwed to one side of the lower furnace body 3, and the drainage cover 13 and the upper drainage tube 41 are separated from each other and rise and rotate together with the furnace cover 1; the upper shaft 2 is then also raised and screwed out to the other side of the lower shaft 3, and the upper drainage tube is disconnected from the lower drainage tube 42 and moves together with the upper shaft 2. After the single crystal furnace is combined, the discharge pipe 134, the upper drainage pipe 41 and the lower drainage pipe 42 are sequentially connected in an inserting way.

The implementation principle of the explosion-proof and drainage device of the furnace cover 1 of the single crystal furnace in the embodiment of the application is as follows: when the single crystal furnace pulls the crystal, the air pressure in the single crystal furnace rises instantly due to accidents such as silicon leakage and water leakage, high-temperature gas can push the turning plate 131 open and push the turning plate 131 to rotate, and the high-temperature gas in the furnace can be discharged from the explosion-proof pipe 12, so that the pressure in the furnace is in a stable range; the gas discharged from the explosion-proof tube 12 flows into the drainage tube 4 through the drainage cover 13 and then stays to the bottom of the furnace body through the drainage tube 4, so that the injury of operators on the upper part of the single crystal furnace can be avoided.

Example 2:

the present embodiment is different from embodiment 1 in that: referring to fig. 1 and 5, a plurality of guide rods 135 are fixedly installed in the drainage cover 13, in the present embodiment, four guide rods 135 are vertically arranged, and in other embodiments, the guide rods 135 can also be obliquely arranged; four guide holes 132 for the guide rod 135 to pass through are formed in the turning plate 131, so that the guide rod 135 passes through the turning plate 131, and the turning plate 131 can slide on the guide rod 135; a limiting block 1351 is further fixed to the fixed end, far away from the guide rod 135 and the drainage cover 13, of the guide rod, the limiting block 1351 limits the sliding range of the flap 131, and the possibility that the flap 131 is separated from the guide rod 135 in the sliding process is reduced; and when the flap 131 covers one end of the explosion proof tube 12, the stopper 1351 can reduce gas leakage from the guide hole 132.

When silicon leaks from the single crystal furnace, the pressure in the furnace is increased due to the increase of the gas amount in the furnace, the turning plate 131 can be pushed to slide, the turning plate 131 moves towards the direction far away from the explosion-proof tube 12, the gas in the furnace is discharged out of the furnace along the explosion-proof tube 12, and then flows to the bottom of the single crystal furnace under the flow guide effect of the drainage tube 4 through the drainage cover 13.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides an explosion-proof and drainage device of single crystal growing furnace bell which characterized in that: comprises that

The furnace cover (1) is provided with an explosion-proof opening (11), and the drainage cover (13) is used for covering the explosion-proof opening (11) arranged on the furnace cover (1);

the turning plate (131), the turning plate (131) is movably arranged in the drainage cover (13) and is used for opening and closing the explosion-proof port (11); and one end of the drainage tube (4) is connected with the drainage cover (13) and is communicated with the inner cavity of the drainage cover (13).

2. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 1, wherein: be fixed with on bell (1) and cover explosion-proof pipe (12) of explosion-proof mouth (11), drainage cover (13) cover is located outside explosion-proof pipe (12), penetration hole (133) that supply explosion-proof pipe (12) to penetrate are seted up in drainage cover (13), turn over board (131) and be used for opening, close the one end that explosion-proof mouth (11) were kept away from in explosion-proof pipe (12).

3. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 2, wherein: one end of the turning plate (131) is hinged with the inner wall of the drainage cover (13).

4. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 2, wherein: the turning plate (131) is arranged in the drainage cover (13) in a sliding mode.

5. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 4, wherein: fixedly connected with vertical or inclined guide bar (135) in drainage cover (13), set up guiding hole (132) that supply guide bar (135) to wear to establish on turning over board (131), guide bar (135) tip fixedly connected with is used for and turns over board (131) butt and cover fenestrate stopper (1351).

6. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 1, wherein: the drainage tube (4) comprises an upper drainage tube (41) and a lower drainage tube (42) which are connected in an inserting mode, one end of the upper drainage tube (41) is connected with the drainage cover (13), the upper drainage tube (41) is used for being connected with the upper furnace barrel (2), and the lower drainage tube (42) is used for being connected with the lower furnace body (3).

7. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 6, wherein: a first supporting seat (21) is detachably mounted outside the upper drainage tube (41), and the first supporting seat (21) is fixedly connected with the outer wall of the upper furnace barrel (2); the outer demountable installation of lower drainage tube (42) has second supporting seat (31), second supporting seat (31) and lower furnace body (3) outer wall are fixed to be continuous.

8. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 7, wherein: the outer wall of the drainage cover (13) is provided with a discharge pipe (134) communicated with the inner cavity of the drainage cover (13), and the discharge pipe (134) is connected with one end, far away from the lower drainage pipe (42), of the upper drainage pipe (41) in an inserting mode.

9. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 8, wherein: first supporting seat (21) and second supporting seat (31) all include a plurality of clamping part (5), clamping part (5) are including two grip blocks (51) that can dismantle the connection, grip block (51) are used for supporting tight drainage tube (4) outer wall.

10. The explosion-proof and drainage device for the furnace cover of the single crystal furnace as claimed in claim 2, wherein: the end face, far away from the explosion-proof opening (11), of the explosion-proof pipe (12) is a tangent plane which inclines downwards towards the direction far away from the axis of the furnace cover (1).