CN217981366U

CN217981366U - Two-dimensional array transducer

Info

Publication number: CN217981366U
Application number: CN202221867376.9U
Authority: CN
Inventors: 李章剑; 崔崤峣; 李昕泽; 朱鑫乐; 吕加兵
Original assignee: Suzhou Institute of Biomedical Engineering and Technology of CAS
Current assignee: Suzhou Institute of Biomedical Engineering and Technology of CAS
Priority date: 2022-07-19
Filing date: 2022-07-19
Publication date: 2022-12-06
Anticipated expiration: 2032-07-19

Abstract

The utility model discloses a two-dimensional array transducer, belong to the acoustic microscope field, including a plurality of transducer array elements, a plurality of transducer array element fixed connection, each transducer array element includes the base plate, a housing, the lead wire, back lining piece and transducer, the casing is fixed in the base plate, the casing is hollow structure, back lining piece is installed inside the casing and is located the casing and keeps away from base plate one end, the lead wire is located the casing and is connected with back lining piece, the transducer is fixed in the tip that the base plate was kept away from to the casing, transducer and back lining piece electric connection, through the above-mentioned design, make two-dimensional array transducer carry out two-dimensional movement on a detection area of examining the sample, each transducer array element two-dimensional movement in a detection element, obtain the scanning data of corresponding point in the position of each scanning point; the scanning times are reduced, the position precision is increased, and the scanning time is reduced by a two-dimensional array method, so that high-quality large-area acoustic microscopic imaging is realized.

Description

Two-dimensional array transducer

Technical Field

The utility model belongs to the technical field of the acoustic microscope and specifically relates to a two-dimensional array transducer is related to.

Background

Scanning Acoustic Microscopy (Scanning Acoustic Microscopy) is an Acoustic Microscopy technique based on the reflection and density irregularity of Acoustic waves at medium interfaces, which utilizes the high penetration depth of Acoustic waves to image the internal structure of a sample, a non-destructive inspection technique. During detection, the piezoelectric transducer generates ultrasonic sound waves, electrical signals are converted into sound signals, the sound signals enter the detection sample and are reflected, reflected waves are received by the transducer to obtain reflected signals, and imaging is performed after the reflected signals of all points in an imaging area are obtained.

In general, the narrower the beam, the easier it is to achieve high resolution, so conventional scanning acoustic microscopes use acoustic lenses to focus the beam before probing. To achieve less focus, the volume of the lens is typically larger. However, since the lens can only focus at the focal point, and the acoustic wave beam is heavily dispersed in the region far from the focal point, only the focal point in the acquired image has a higher resolution, and the resolution of the position far from the focal point is often poor, so that the effective imaging range is very limited. In addition, the bulky acoustic lens is disadvantageous in scanning accuracy, and is liable to cause a decrease in accuracy. Especially when imaging in a large range, a large amount of time is consumed to complete the scanning of the imaging area due to the excessive number of scanning points, and the long-stroke point-by-point scanning is not beneficial to maintaining the scanning precision, which is not beneficial to practical application.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, one of the purposes of the utility model is to provide a two-dimensional array transducer with short scanning stroke, high scanning precision and rapid imaging.

The utility model discloses an one of the purpose adopts following technical scheme to realize:

the utility model provides a two-dimensional array transducer, includes a plurality of transducer array element, a plurality of transducer array element fixed connection, each transducer array element includes base plate, casing, lead wire, backing piece and transducer, the casing is fixed in the base plate, the casing is hollow structure, backing piece install in inside and being located of casing the casing is kept away from base plate one end, the lead wire is located in the casing and with backing piece is connected, the transducer is fixed in the casing is kept away from the tip of base plate, the transducer with backing piece electric connection.

Further, the shell comprises a bottom and an accommodating part, the accommodating part extends out from the bottom, the bottom is fixed with the substrate, and the backing block is accommodated in the accommodating part.

Further, the bottom is circular or square.

Further, the receiving portion is cylindrical.

Further, the diameter of the receiving portion is smaller than the diameter of the bottom portion.

Further, the bottom diameter is an integral multiple of the receiving portion diameter.

Furthermore, the substrates of a plurality of transducer array elements are fixedly connected with each other and are positioned on the same straight line.

Compared with the prior art, the utility model discloses two-dimensional array transducer includes a plurality of transducer array elements, a plurality of transducer array element fixed connection, each transducer array element includes the base plate, a housing, the lead wire, back lining piece and transducer, the casing is fixed in the base plate, the casing is hollow structure, back lining piece is installed inside the casing and is located the casing and keeps away from base plate one end, the lead wire is located the casing and is connected with back lining piece, the transducer is fixed in the tip that the base plate was kept away from to the casing, transducer and back lining piece electric connection, through the above-mentioned design, make two-dimensional array transducer carry out two-dimensional movement on the detection area of examining the sample, each transducer array element two-dimensional movement in a detecting element, the scanning data of corresponding point is obtained in the position of each scanning point; the scanning times are reduced, the position precision is increased, and the scanning time is reduced by a two-dimensional array method, so that high-quality large-area acoustic microscopic imaging is realized.

Drawings

Fig. 1 is a perspective view of a two-dimensional array transducer of the present invention;

FIG. 2 is a schematic diagram of a structure of a transducer element of the two-dimensional array transducer of FIG. 1;

FIG. 3 is a schematic diagram of the use of a single transducer element of FIG. 2;

FIG. 4 is a schematic view of a sample to be examined;

FIG. 5 is a schematic diagram of the trace of a single transducer element within the detection cell of a sample to be examined;

FIG. 6 is an echo signal resulting from type A imaging of a two-dimensional array transducer;

FIG. 7 is a schematic diagram of two-dimensional array transducer B-mode imaging;

fig. 8 is a schematic diagram of two-dimensional array transducer C-mode imaging.

In the figure: 10. a transducer array element; 11. a substrate; 12. a housing; 120. a bottom portion; 121. a housing part; 13. a lead wire; 14. a backing block; 15. a transducer; 20. a sample to be detected; 21. a detection unit.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present, secured by intervening elements. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly disposed on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Fig. 1 to fig. 2 are the utility model discloses two-dimensional array transducer, two-dimensional array transducer are used for detecting the inner structure of examining sample 20, and two-dimensional array transducer produces the supersound sound wave, and the sound wave signal gets into to examine sample 20 inside and take place the reflection, and the back wave is received by transducer 15 and obtains the reflected signal.

A two-dimensional array transducer comprises a number of transducer elements 10. Several transducer elements 10 are fixedly connected to each other to form a two-dimensional array transducer. In this embodiment, the two-dimensional array transducer is rectangular in shape as a whole.

Each transducer element 10 includes a substrate 11, a case 12, leads 13, a backing block 14, and a transducer 15.

The substrate 11 is square and has a side length D. A through hole for passing the lead 13 is provided in the middle of the substrate 11.

The housing 12 includes a bottom 120 and a receiving portion 121. The receiving portion 121 extends from the bottom portion 120, and the bottom portion 120 and the receiving portion 121 are integrally formed. The bottom 120 is square or circular. When the bottom 120 is square, the side length of the square is D. When the bottom 120 is circular, the diameter of the circle is D. The receiving portion 121 has a cylindrical hollow structure. The diameter of the receiving portion 121 is D, and the diameter D of the bottom portion 120 is an integral multiple of the diameter D of the receiving portion 121, i.e., D = nd. The bottom 120 of the case 12 is bonded to the substrate 11 and fixed to the substrate 11. The housing portion 121 houses the lead 13 and the backing block 14.

The lead 13 is attached to the housing portion 121 of the case 12 and connected to an external power source and an apparatus through a through hole of the substrate 11.

The backing block 14 is accommodated in the accommodating portion 121 of the housing 12, and the backing block 14 is electrically connected to the lead 13.

Transducer 15 is fixed to the end of housing 121 away from bottom 120, and transducer 15 is exposed to housing 121. The transducer 15 is connected to the backing mass 14. The transducer 15 is circular, and the diameter of the transducer 15 is d, which is the same as the diameter of the housing 121. With continued reference to fig. 3, the transducer 15 generates ultrasonic sound waves, the sound wave signal enters the interior of the sample 20 to be inspected and is reflected, and the reflected wave is received by the transducer 15 and a reflected signal is obtained.

The substrates 11 of the transducer elements 10 are connected to each other, and the transducer elements 10 are fixed to each other to form a two-dimensional array transducer. The substrates 11 of several transducer elements 10 are now located on the same plane. In this embodiment, the number of transducer elements 10 is N × M, and N, M is an integer. The two-dimensional array transducer covers an imaging area of N M D ² . The working frequency of the transducer 15 is Fc =20MHz or more, which satisfies different imaging requirements, and generally, the larger the thickness value of the sample 20 to be detected is, the lower the working frequency should be.

With continued reference to fig. 4-8, when using a two-dimensional array transducer, the sample 20 to be examined is divided into a number of square regions of N × M blocks, each of which has an area D ² As shown in fig. 4; during scanning, the whole two-dimensional array transducer is driven by an external mechanical structure to move in two dimensions, each transducer array element 10 completes point-by-point scanning of a small area at a corresponding position, the scanning travel track of the array element is shown in fig. 5, and echo information of a corresponding point is acquired at the position of each scanning point. And moving the two-dimensional array transducer to the rest detection area for detection.

At each point location, the echo information acquired by the transducer elements 10 is shown in fig. 6, and the acoustic wave generally has a stronger echo signal at locations where the structure or material density is discontinuous. The signal processing has two modes, one mode is that only the envelope of the signal is recorded as an effective signal; when the phase information needs to be acquired, the amplitude of the signal and the positive and negative information need to be recorded at the same time. After the scanning is finished, the three-dimensional volume data containing the position information is finally obtained.

After the scanning data is acquired, the image display method is as follows:

1.A type display, i.e. display of single scan point data, as shown in fig. 6, can display the echo condition of a point of interest, including its echo waveform, amplitude, envelope, etc.;

2.B imaging display, that is, two-dimensional image display of a specific vertical slice, as shown in fig. 7, an echo envelope of a scanning point included in an imaging slice is taken, quantized, converted into a gray image, and displayed.

5363 and 5363 a model 3.C, which is a two-dimensional image display of a horizontal section with a specific depth, as shown in fig. 8, the echo amplitude and phase at a specific depth of each scanning point are quantized, mapped and colored, and then converted into a color image and displayed. And C-type three-dimensional display, namely displaying the quantized data in a height form according to the amplitude of the quantized data on the C-type imaging data so as to acquire the three-dimensional display of the C-type image. And (3) three-dimensional display, namely, displaying the obtained three-dimensional volume data according to a three-dimensional volume Rendering (3D Rendering) technology after three-dimensional filtering, planar reconstruction, edge enhancement, coloring and Rendering.

The two-dimensional array transducer is enabled to move two-dimensionally on a detection area of a sample 20 to be detected, each transducer element 10 moves two-dimensionally in a detection unit 21, and scanning data of a corresponding point is acquired at the position of each scanning point; the scanning times are reduced, the position precision is increased, and the scanning time is reduced by a two-dimensional array method, so that high-quality large-area acoustic microscopic imaging is realized.

The above examples only represent some embodiments of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the concept of the present invention, several modifications and improvements can be made, all according to the equivalent modifications and evolutions of the present invention, which are made to the above embodiments by the essential technology, and all belong to the protection scope of the present invention.

Claims

1.A two-dimensional array transducer, characterized by: including a plurality of transducer array units, it is a plurality of transducer array unit fixed connection, each transducer array unit includes base plate, casing, lead wire, back lining piece and transducer, the casing is fixed in the base plate, the casing is hollow structure, back lining piece install in inside and being located of casing the casing is kept away from base plate one end, the lead wire be located in the casing and with back lining piece is connected, the transducer is fixed in the casing is kept away from the tip of base plate, the transducer with back lining piece electric connection.

2. The two-dimensional array transducer of claim 1, wherein: the casing includes bottom and portion of accomodating, the portion of accomodating follows the bottom extends out, the bottom with the base plate is fixed, the backing piece accept in the portion of accomodating.

3. A two dimensional array transducer according to claim 2, wherein: the bottom is round or square.

4. A two dimensional array transducer according to claim 2, wherein: the accommodating part is cylindrical.

5. The two-dimensional array transducer of claim 2, wherein: the receiving portion has a diameter smaller than the bottom portion.

6. A two dimensional array transducer according to claim 5, wherein: the bottom diameter is an integral multiple of the receiving portion diameter.

7. The two-dimensional array transducer of claim 1, wherein: the substrates of the transducer array elements are fixedly connected with each other and are positioned on the same straight line.