CN217957345U

CN217957345U - Heating device for be used for target processing

Info

Publication number: CN217957345U
Application number: CN202221674958.5U
Authority: CN
Inventors: 谭明强
Original assignee: Nantong Xinkairui New Material Technology Co ltd
Current assignee: Nantong Xinkairui New Material Technology Co ltd
Priority date: 2022-07-01
Filing date: 2022-07-01
Publication date: 2022-12-02
Anticipated expiration: 2032-07-01

Abstract

The utility model discloses a heating device for be used for target processing, the on-line screen storage device comprises a base, the both sides of base are equipped with the support column, two the top fixed stay of support column has the cartridge heater, is located be equipped with electric putter, both sides on the inboard base of support column electric putter's top is fixed with the closing plate, the centre of closing plate is equipped with electric lead screw, be equipped with target centre gripping subassembly on the electric lead screw, target centre gripping subassembly is just to the cartridge heater below, the utility model discloses simple structure, the modern design, the fixture that establishes specially can make things convenient for the centre gripping to the target under the cooperation of electric lead screw to workman's taking has been made things convenient for greatly.

Description

Heating device for be used for target processing

Technical Field

The utility model relates to a target processing technology field specifically is a heating device for be used for target processing.

Background

The target material mainly comprises a target blank, a back plate and the like, wherein the target blank is a sputtering source which forms various functional films on a substrate by sputtering through magnetron sputtering, multi-arc ion plating or other types of film coating systems under proper process conditions.

The stability of current target heating device in order to guarantee the target in the heating process needs a plurality of screws and fixed block cooperation to carry out the centre gripping with the target fixed, and the target temperature through the heating is higher moreover, consequently unusual workman of being inconvenient takes to the target, consequently needs to improve.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a heating device for be used for target processing to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a heating device for be used for target processing, includes the base, the both sides of base are equipped with the support column, two the top fixed stay of support column has the cartridge heater, is located be equipped with electric putter on the inboard base of support column, both sides electric putter's top is fixed with the closing plate, the centre of closing plate is equipped with electric lead screw, be equipped with target centre gripping subassembly on the electric lead screw, target centre gripping subassembly is just to the cartridge heater below.

Preferably, the target clamping assembly comprises a target seat, extension plates are arranged on two sides of the target seat, a sliding groove is formed in each extension plate, a transverse limiting column is arranged at the front end of the sliding groove, a clamping block is further arranged on the sliding groove, a limiting block extending downwards is arranged at the bottom of the clamping block, the front end of the limiting block is connected with one end of a pulling and tearing belt, the pulling and tearing belt is wound behind the limiting column, the other end of the pulling and tearing belt is connected with a rectangular block, sliding strips are arranged on two sides of the rectangular block, the sliding strips on each side are embedded in sliding rails, and the sliding rails are arranged on the inner side wall of the sliding groove;

the rear end of the limiting block is connected with one end of a spring, and the other end of the spring is connected with the rear end of the sliding groove.

Preferably, the electric screw rod is provided with a sliding block, the two sides of the sliding block are provided with lifting blocks, the two sides of each lifting block are connected with one end of a transmission rod through a pin shaft, and the other end of each transmission rod is also connected with the bottom of the rectangular block through a pin shaft.

Preferably, the bottom of the heating cylinder is designed to be an opening, a spiral heating pipe is arranged on the inner wall of the heating cylinder, and the heating pipe is connected with a heating power supply.

Preferably, the sealing plate is in a circular design, the opening size of the sealing plate is matched with that of the bottom of the heating cylinder, and a circle of sealing strip is arranged on the periphery of the sealing plate.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model has simple structure and novel design, and the special clamping mechanism can conveniently clamp the target under the coordination of the electric screw rod, thereby greatly facilitating the taking of workers;

when the sliding block moves upwards on the electric screw rod, the driving rod pulls the pulling belt to move backwards while being unfolded, so that the clamping block at the other end of the pulling belt moves forwards, and the target material is clamped; when the target material is required to be taken out from the clamping assembly, the target material can be taken out only by moving the sliding block downwards, releasing the pulling and tearing belt while the transmission rod is retracted, and rebounding the spring, thereby pulling the clamping blocks at the two sides to move backwards without clamping.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic cross-sectional view of the target clamping assembly of the present invention;

FIG. 3 is a schematic view of the connection structure of the sliding block and the rectangular block of the present invention;

fig. 4 is a schematic view of the internal structure of the heating cylinder of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, the present invention provides a technical solution: the utility model provides a heating device for be used for target processing, includes base 1, the both sides of base 1 are equipped with support 1 post 11, two the top fixed stay of support column 11 has a cartridge heater 2 that is used for the target heating, is lieing in 1 set up electric putter 12 on the base 1 of support column 11 inboard, after electric putter circular telegram, both sides the fixed closing plate 13 in top of electric putter 12 also can rise, this moment the electric lead screw 3 of closing plate 13 middle setting, and the target centre gripping subassembly 4 that sets up on the electric lead screw 3 all can rise thereupon, because target centre gripping subassembly 4 is just to cartridge heater 2 below, consequently when the opening of closing plate and cartridge heater bottom closed mutually, the target centre gripping subassembly on the electric lead screw can get into inside the cartridge heater, and the cartridge heater can heat the target of centre gripping on the target centre gripping subassembly.

In this embodiment, the target clamping assembly 4 is made of a high temperature resistant material, and includes a target base 41, extension plates 42 are disposed on two sides of the target base 41, a sliding slot 421 is disposed on each extension plate 42, a transverse limiting post 43 is disposed at a front end of the sliding slot 421, a clamping block 44 is further disposed on the sliding slot 421, the clamping block can move above the sliding slot, a limiting block 441 extending downward is disposed at a bottom of the clamping block 44, the limiting block and the limiting post are located on a same horizontal line, a front end of the limiting block 441 is connected to one end of the pulling belt 45, the pulling belt 45 is wound around the limiting post 43, and then the other end of the pulling belt 45 is connected to the rectangular block 46, since sliding strips 461 are disposed on two sides of the rectangular block 46, and the sliding strips 461 on each side are embedded in the sliding rail 422, the sliding rail 422 is disposed on an inner side wall of the sliding slot 421, so that the rectangular block can slide below the sliding slot, and when the rectangular block slides backward, the pulling belt pulls the clamping block moves forward, thereby achieving clamping;

when the rectangular block slides forwards, the pulling belt pulling the clamping block is also loosened, at this time, the rear end of the limiting block 441 is connected with one end of the spring 47, the other end of the spring 47 is connected with the rear end of the sliding groove 421, the spring rebounds, the clamping block is driven to move backwards, and the clamping blocks on the two sides are not clamped any more.

In this embodiment, the electric screw rod 3 is provided with the sliding block 31, after the electric screw rod is powered on, the sliding block moves up and down along with the rotation of the electric screw rod, so that the lifting blocks 31 arranged on both sides of the sliding block 31 can lift or lower along with the electric screw rod, because both sides of the lifting block 311 are connected with one end of the transmission rod 32 through the pin shaft, and the other end of the transmission rod 32 is connected with the bottom of the rectangular block 46 through the pin shaft, when the sliding block moves upwards at the electric screw rod, the transmission rod stretches out and pulls the rectangular block to slide backwards, and when the sliding block moves downwards at the electric screw rod, the transmission rod pulls the rectangular block to slide forwards while retracting.

In this embodiment, the bottom of the heating cylinder 2 is designed to be an opening, and after the target clamping assembly enters the heating cylinder, the target clamping assembly is surrounded by the spiral heating tube 21 arranged inside the heating cylinder 2, and since the heating tube 21 is connected to the heating power supply 22, the heating tube can be heated after the heating power supply is turned on, so as to heat the inside of the heating cylinder.

In this embodiment, the sealing plate 13 is designed in a circular shape, the sealing plate 13 is matched with the opening at the bottom of the heating cylinder 2 in size, and a circle of sealing strip is arranged on the periphery of the sealing plate 13, so that the heating cylinder can be sealed when the sealing plate is closed with the opening at the bottom of the heating cylinder 2.

The working principle is as follows: the target is placed on the target clamping assembly, the sliding block on the electric screw rod is used for moving upwards to clamp the target clamping assembly by starting the electric screw rod, the electric push rod is started after the target is clamped, the sealing plate is pushed to move upwards until the target clamping assembly enters the heating cylinder, the sealing plate and the opening at the bottom of the heating cylinder are closed and sealed, and then a heating power supply can be started to heat the target in the heating cylinder.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A heating device for target processing, includes base 1, its characterized in that: the two sides of the base 1 are provided with support columns 11, the two support columns 11 are fixedly supported by a heating cylinder 2, the base 1 positioned on the inner side of the support columns 11 is provided with electric push rods 12, the two sides of the base 12 are fixedly provided with sealing plates 13, electric lead screws 3 are arranged in the middles of the sealing plates 13, target clamping assemblies 4 are arranged on the electric lead screws 3, and the target clamping assemblies 4 are opposite to the lower portions of the heating cylinder 2.

2. The heating device for target processing according to claim 1, wherein: the target clamping assembly 4 includes a target holder 41, extension plates 42 are disposed on two sides of the target holder 41, a sliding groove 421 is disposed on each extension plate 42, a transverse limiting post 43 is disposed at the front end of the sliding groove 421, a clamping block 44 is further disposed on the sliding groove 421, a limiting block 441 extending downward is disposed at the bottom of the clamping block 44, the front end of the limiting block 441 is connected to one end of a pulling and tearing belt 45, the pulling and tearing belt 45 is wound behind the limiting post 43, the other end of the pulling and tearing belt 45 is connected to a rectangular block 46, sliding strips 461 are disposed on two sides of the rectangular block 46, the sliding strips 461 on each side are all embedded in sliding rails 422, and the sliding rails 422 are disposed on the inner side walls of the sliding grooves 421;

the rear end of the stopper 441 is connected to one end of a spring 47, and the other end of the spring 47 is connected to the rear end of the sliding groove 421.

3. The heating device for target processing according to claim 1, wherein: the electric screw rod 3 is provided with a sliding block 31, the two sides of the sliding block 31 are provided with lifting blocks 311, the two sides of each lifting block 311 are connected with one end of a transmission rod 32 through a pin shaft, and the other end of the transmission rod 32 is also connected with the bottom of a rectangular block 46 through a pin shaft.

4. The heating device for target processing according to claim 1, wherein: the bottom of the heating cylinder 2 is designed to be an opening, the inner wall of the heating cylinder 2 is provided with a spiral heating pipe 21, and the heating pipe 21 is connected with a heating power supply 22.

5. The heating device for target processing according to claim 1, wherein: the sealing plate 13 is of a circular design, the sealing plate 13 is matched with the opening at the bottom of the heating cylinder 2 in size, and a circle of sealing strip 131 is arranged on the periphery of the sealing plate 13.