CN217954896U - Anti-reflection backlight board for quartz boat silicon wafer visual detection - Google Patents
Anti-reflection backlight board for quartz boat silicon wafer visual detection Download PDFInfo
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- CN217954896U CN217954896U CN202221359006.4U CN202221359006U CN217954896U CN 217954896 U CN217954896 U CN 217954896U CN 202221359006 U CN202221359006 U CN 202221359006U CN 217954896 U CN217954896 U CN 217954896U
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Abstract
The utility model belongs to the field of silicon wafer detection, in particular to an anti-reflection backlight plate for quartz boat silicon wafer visual detection, which comprises a bottom plate; the bottom plate is fixedly connected with a base, a first backlight plate is arranged at the top of the base and is installed on the base through a limiting mechanism, two first positioning columns are fixedly connected to the top of the base and penetrate through the first backlight plate, two second backlight plates are arranged at the top of the bottom plate and are installed on the bottom plate through limiting components, eight second positioning columns are fixedly connected to the top of the bottom plate and penetrate through the second backlight plate, and the top of the first backlight plate and the top of the second backlight plates are both arranged to be frosted surfaces; through setting up first board and the second board top in a poor light for frosting, can prevent to take place to reflect light, the influence detects, rotates the post through the setting, can make first briquetting rotate the opposite side, can not hinder the dismantlement and the installation of first board in a poor light.
Description
Technical Field
The utility model relates to a silicon chip testing field specifically is a quartz boat silicon chip visual detection is with board in a poor light of preventing reflecting.
Background
Quartz boats are also known as quartz glass, which is a silicon dioxide containing substance, such as crystals, silica, and the like.
At present, in the production process of a silicon wafer of a quartz boat, a camera and a light source are matched with a backlight plate to detect small fragments at the top tooth part of the quartz boat according to process requirements.
However, the existing backlight plate has the problem of light reflection, so that the detection operation is inaccurate and unclear, the dismounting operation of the backlight plate is troublesome, and the backlight plate needs to be replaced for a long time when damaged; therefore, the backlight plate for preventing the reflection of the light for the visual detection of the quartz boat silicon wafer is provided for solving the problems.
SUMMERY OF THE UTILITY MODEL
In order to compensate the not enough of prior art, the problem of reflection of light appears in present board in a poor light, the comparatively trouble problem of dismouting operation of board in a poor light, the utility model provides a quartz boat silicon chip visual detection is with board in a poor light that prevents reflecting.
The utility model provides a technical scheme that its technical problem adopted is: the utility model relates to an anti-reflection backlight plate for quartz boat silicon wafer visual detection, which comprises a bottom plate; the bottom plate is fixedly connected with a base, a first backlight plate is arranged at the top of the base and is installed on the base through a limiting mechanism, two first positioning columns are fixedly connected to the top of the base and penetrate through the first backlight plate, two second backlight plates are arranged at the top of the bottom plate and are installed on the bottom plate through limiting components, eight second positioning columns are fixedly connected to the top of the bottom plate and penetrate through the second backlight plate, and the top of the first backlight plate and the top of the second backlight plates are both arranged to be frosted surfaces;
stop gear includes two fixed blocks of rigid coupling at the base top, the top of fixed block is rotated through the bearing and is connected with the rotation post, the top rigid coupling that rotates the post has the L shaped plate, threaded connection has first screw thread post on the L shaped plate, the top rigid coupling of first screw thread post has first piece soon, the bottom of first screw thread post is rotated through the bearing and is connected with first briquetting, first briquetting closely laminates with first board in a poor light, is the frosting through setting up first board in a poor light and second board top in a poor light, can prevent to take place to reflect light, and the influence detects, rotates the post through setting up, can make first briquetting rotate the opposite side, can not hinder the dismantlement and the installation of first board in a poor light.
Preferably, the limiting assembly comprises sixteen fixed plates fixed at the top of the bottom plate, the limiting assembly is adjacent to a guide rod fixedly connected between the fixed plates, a movable plate is slidably connected to the surface of the guide rod, a spring is fixedly connected between the movable plate and the corresponding fixed plate, the spring is sleeved on the outer side of the guide rod, a connecting plate is fixedly connected between the movable plates, a second threaded column is connected to the connecting plate in a threaded mode, a second rotating block is fixedly connected to the top end of the second threaded column, a second pressing block is rotatably connected to the bottom end of the second threaded column through a bearing, the second pressing block is tightly attached to the second backlight plate, two round holes are formed in the second pressing block, the second positioning column penetrates through the round holes, four T-shaped rods are fixedly connected to the top of the second pressing block, the T-shaped rods penetrate through the connecting plate, the second pressing block can be separated from the top of the second backlight plate through the arrangement of the spring, and the disassembly and the installation of the second backlight plate cannot be hindered.
Preferably, two first positioning holes are formed in the first backlight plate, the first positioning columns penetrate through the first positioning holes, and the first positioning columns and the first positioning holes can play a limiting role in mounting the first backlight plate.
Preferably, four second positioning holes are formed in the second backlight plate, the second positioning column penetrates through the second positioning holes, and the second positioning column and the second positioning holes can play a limiting role in mounting the second backlight plate.
Preferably, a rectangular opening is formed in the L-shaped plate, a limiting plate is fixedly connected to the first pressing block, the limiting plate slides in the rectangular opening, and the limiting plate and the rectangular opening can play a limiting role in the movement process of the first pressing block.
Preferably, the moving plate is provided with a first guide hole, the guide rod penetrates through the first guide hole, and the first guide hole can play a limiting role in the moving process of the moving plate.
Preferably, four second guide holes are formed in the connecting plate, the T-shaped rod penetrates through the second guide holes, and the second guide holes can play a limiting role in the movement process of the second pressing block.
Preferably, the surface of the first rotary block is provided with anti-slip lines, the surface of the second rotary block is provided with anti-slip lines, and the anti-slip lines can play a role in limiting when the first rotary block and the second rotary block are rotated.
The utility model discloses an useful part lies in:
1. the utility model discloses a frosted surface's structural design for first backlight and second backlight can not appear the problem of reflection of light, when needing to be changed first backlight, through rotating first spiral piece, the time first briquetting leaves first backlight, rotates L shaped plate, can take off first backlight, during the installation, places first backlight on the base through first reference column and first locating hole, rotates L shaped plate, rotates first spiral piece, makes first briquetting live first backlight spacing, has realized the function of conveniently changing first backlight fast, has improved the efficiency of device;
2. the utility model discloses a structural design of second briquetting, when the second backlight board needs to be changed, the second is rotated and is revolved the piece, it leaves the second backlight board to drive the second briquetting, make the round hole break away from the second reference column, under the effect of spring, the second briquetting leaves the top of second backlight board, can take off the second backlight board, during the installation, place the second backlight board on the bottom plate through second reference column and second locating hole, the pulling connecting plate, the second is rotated and is revolved the piece, make the second reference column insert and establish in the round hole, press the second briquetting on the second backlight board, the function of quick replacement second backlight board has been realized, the practicality of device has been improved.
Drawings
In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings used in the description of the embodiments or the prior art will be briefly introduced, obviously, the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the overall structure of the first embodiment;
FIG. 2 is an enlarged view of the point A in the first embodiment;
FIG. 3 is an enlarged view of the point B in the drawing according to the first embodiment;
FIG. 4 is a schematic diagram illustrating a first backlight structure according to a first embodiment;
FIG. 5 is a diagram illustrating a second backlight structure according to the first embodiment;
FIG. 6 is a schematic view of a first embodiment of an L-shaped plate;
FIG. 7 is a schematic view of a connecting plate according to the first embodiment;
FIG. 8 is a schematic view of a second compact according to the first embodiment;
fig. 9 is a schematic perspective view of the second embodiment.
In the figure: 1. a base plate; 2. a base; 3. a first backlight plate; 4. a second backlight plate; 5. a fixed block; 6. rotating the column; 7. an L-shaped plate; 8. a first threaded post; 9. a first rotary block; 10. a first pressing block; 11. a fixing plate; 12. a guide bar; 13. moving the plate; 14. a spring; 15. a connecting plate; 16. a second threaded post; 17. a second rotary block; 18. a second pressing block; 19. a circular hole; 20. a T-shaped rod; 21. a first positioning post; 22. a second positioning column; 23. a first positioning hole; 24. a second positioning hole; 25. a rectangular opening; 26. a first guide hole; 27. a second guide hole; 28. a limiting plate; 29. mounting holes; 30. and (4) internal threads.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Example one
Referring to fig. 1-8, a light-reflecting prevention backlight plate for visual inspection of silicon wafers in a quartz boat comprises a bottom plate 1; the bottom plate 1 is fixedly connected with a base 2, a first backlight plate 3 is arranged at the top of the base 2, the first backlight plate 3 is installed on the base 2 through a limiting mechanism, two first positioning columns 21 are fixedly connected to the top of the base 2, the first positioning columns 21 penetrate through the first backlight plate 3, two second backlight plates 4 are arranged at the top of the bottom plate 1, the second backlight plates 4 are installed on the bottom plate 1 through limiting components, eight second positioning columns 22 are fixedly connected to the top of the bottom plate 1, the second positioning columns 22 penetrate through the second backlight plates 4, and the top of the first backlight plate 3 and the top of the second backlight plates 4 are both set to be frosted surfaces;
the limiting mechanism comprises two fixing blocks 5 fixedly connected to the top of the base 2, the tops of the fixing blocks 5 are rotatably connected with a rotating column 6 through bearings, the top end of the rotating column 6 is fixedly connected with an L-shaped plate 7, a first threaded column 8 is in threaded connection with the L-shaped plate 7, the top end of the first threaded column 8 is fixedly connected with a first rotary block 9, the bottom end of the first threaded column 8 is rotatably connected with a first pressing block 10 through a bearing, and the first pressing block 10 is tightly attached to the first backlight plate 3;
the during operation, because the top of first board 3 in a poor light and second board 4 in a poor light is the frosted surface, so can not reflect light when detecting, when first board 3 in a poor light needs to be changed, rotate first revolving block 9 and drive first briquetting 10 upward movement and leave the surface of first board 3 in a poor light, rotate L shaped plate 7, make first briquetting 10 leave the top of first board 3 in a poor light, can take off first board 3 in a poor light, during the installation, place first board 3 in a poor light on base 2 through first reference column 21 and first locating hole 23, rotate L shaped plate 7, rotate first revolving block 9, make first briquetting 10 press on first board 3 in a poor light, accomplish the installation.
The limiting assembly comprises sixteen fixing plates 11 fixed at the top of the bottom plate 1, guide rods 12 are fixedly connected between every two adjacent fixing plates 11, moving plates 13 are connected to the surfaces of the guide rods 12 in a sliding mode, springs 14 are fixedly connected between the moving plates 13 and the corresponding fixing plates 11, the springs 14 are sleeved on the outer sides of the guide rods 12, connecting plates 15 are fixedly connected between the moving plates 13, second threaded columns 16 are connected to the connecting plates 15 in a threaded mode, second rotary blocks 17 are fixedly connected to the top ends of the second threaded columns 16, the bottom ends of the second threaded columns 16 are rotatably connected with second pressing blocks 18 through bearings, the second pressing blocks 18 are tightly attached to the second backlight plate 4, two circular holes 19 are formed in the second pressing blocks 18, the second positioning columns 22 penetrate through the circular holes 19, four T-shaped rods 20 are fixedly connected to the tops of the second pressing blocks 18, and the T-shaped rods 20 penetrate through the connecting plates 15;
during operation, when needing to change second board 4 in a poor light, rotate the second and revolve piece 17 and drive second briquetting 18 and upwards move and leave second board 4 in a poor light, under the effect of spring 14, second briquetting 18 leaves the top of second board 4 in a poor light, can take off second board 4 in a poor light, during the installation, place second board 4 in a poor light on a bottom plate 1 through second reference column 22 and second locating hole 24, pulling connecting plate 15 rotates second and revolves piece 17, make second reference column 22 insert and establish into round hole 19 in, make second briquetting 18 push down second board 4 in a poor light, accomplish the installation.
Two first positioning holes 23 are formed in the first backlight plate 3, and the first positioning posts 21 penetrate through the first positioning holes 23;
in operation, when the first backlight plate 3 is installed, the first positioning posts 21 are inserted into the first positioning holes 23.
Four second positioning holes 24 are formed in the second backlight board 4, and the second positioning columns 22 penetrate through the second positioning holes 24;
during operation, when the second backlight plate 4 is installed, the second positioning posts 22 are inserted into the second positioning holes 24.
The L-shaped plate 7 is provided with a rectangular opening 25, the first pressing block 10 is fixedly connected with a limiting plate 28, and the limiting plate 28 slides in the rectangular opening 25;
in operation, during the movement of the first press block 10, the limit plate 28 slides in the rectangular opening 25.
A first guide hole 26 is formed in the moving plate 13, and the guide rod 12 penetrates through the first guide hole 26;
in operation, the guide bar 12 slides within the first guide hole 26 during movement of the moving plate 13.
Four second guide holes 27 are formed in the connecting plate 15, and the T-shaped rod 20 penetrates through the second guide holes 27;
in operation, during movement of second press block 18, T-bar 20 slides within second guide hole 27.
The surface of the first rotary block 9 is provided with anti-skid grains, and the surface of the second rotary block 17 is provided with anti-skid grains;
in operation, the anti-slip threads prevent slippage during rotation of the first and second knobs 9, 17.
Example two
Referring to fig. 9, in a first comparative example, as another implementation manner of the present invention, mounting holes 29 are formed at four corners of the bottom plate 1, and internal threads 30 are formed in the mounting holes 29; in operation, when the base plate 1 is installed for the first time, the base plate can be fixedly installed at a certain position through the bolts and the internal threads 30.
The working principle is as follows: in the use process, the top parts of the first backlight plate 3 and the second backlight plate 4 are frosted surfaces, so the light can not be reflected when in detection, the detection can not be interfered, when the first backlight plate 3 needs to be replaced, the first rotary block 9 is rotated, the first rotary block 9 drives the first threaded column 8 to rotate, the first threaded column 8 drives the first pressing block 10 to move upwards to leave the surface of the first backlight plate 3, the L-shaped plate 7 is rotated, the first pressing block 10 leaves the upper part of the first backlight plate 3, the first backlight plate 3 can be taken down, when in installation, the first backlight plate 3 is placed on the base 2 through the first positioning column 21 and the first positioning hole 23, the L-shaped plate 7 is rotated, the first rotary block 9 is rotated, the first pressing block 10 is pressed on the first backlight plate 3, the installation is completed, when the second backlight plate 4 needs to be replaced, the second rotary block 17 is rotated, the second rotary block 17 drives the second threaded column 16 to rotate, the second threaded column 16 drives the second pressing block 18 to move upwards to leave the second backlight plate 4, when the round hole 19 leaves the second positioning column 22, under the action of the spring 14, the second pressing block 18 leaves the upper part of the second backlight plate 4, namely, the second backlight plate 4 can be taken down, during the installation, the second backlight plate 4 is placed on the bottom plate 1 through the second positioning column 22 and the second positioning hole 24, the connecting plate 15 is pulled, the second rotary block 17 is rotated, the second positioning column 22 is inserted into the round hole 19, and the second pressing block 18 presses the second backlight plate 4, so that the installation is completed.
In the description of the present specification, reference to the description of "one embodiment," "an example," "a specific example," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the basic principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention.
Claims (8)
1. The utility model provides a quartz boat silicon chip visual inspection is with board that is shaded which prevents reflection which characterized in that: comprises a bottom plate (1); the bottom plate (1) is fixedly connected with a base (2), the top of the base (2) is provided with a first backlight plate (3), the first backlight plate (3) is installed on the base (2) through a limiting mechanism, the top of the base (2) is fixedly connected with two first positioning columns (21), the first positioning columns (21) penetrate through the first backlight plate (3), the top of the bottom plate (1) is provided with two second backlight plates (4), the second backlight plates (4) are installed on the bottom plate (1) through limiting components, the top of the bottom plate (1) is fixedly connected with eight second positioning columns (22), the second positioning columns (22) penetrate through the second backlight plates (4), and the top of the first backlight plate (3) and the top of the second backlight plates (4) are both arranged to be frosted surfaces;
stop gear includes two fixed blocks (5) of rigid coupling at base (2) top, the top of fixed block (5) is rotated through the bearing and is connected with rotation post (6), the top rigid coupling that rotates post (6) has L shaped plate (7), threaded connection has first screw thread post (8) on L shaped plate (7), the top rigid coupling of first screw thread post (8) has first piece (9) of revolving, the bottom of first screw thread post (8) is rotated through the bearing and is connected with first briquetting (10), first briquetting (10) and first board (3) of being shaded are closely laminated.
2. The anti-reflection backlight board for the visual inspection of the quartz boat silicon wafer as claimed in claim 1, wherein: the limiting component comprises sixteen fixing plates (11) fixed at the top of a bottom plate (1), and is adjacent to guide rods (12) fixedly connected between the fixing plates (11), movable plates (13) are slidably connected to the surfaces of the guide rods (12), springs (14) are fixedly connected between the movable plates (13) and corresponding fixing plates (11), the outer sides of the guide rods (12) are sleeved with the springs (14), connecting plates (15) are fixedly connected between the movable plates (13), second threaded columns (16) are in threaded connection with the connecting plates (15), the top ends of the second threaded columns (16) are fixedly connected with second pressing blocks (18) in a rotating mode through bearings, the second pressing blocks (18) are tightly attached to a second backlight plate (4), two round holes (19) are formed in the second pressing blocks (18), round holes (19) are penetrated through by the second positioning columns (22), four T-shaped rods (20) are fixedly connected to the tops of the second pressing blocks (18), and the T-shaped rods (20) penetrate through the connecting plates (15).
3. The backlight plate for preventing reflection in visual inspection of quartz boat silicon wafer as claimed in claim 2, wherein: two first locating holes (23) are formed in the first backlight plate (3), and the first locating columns (21) penetrate through the first locating holes (23).
4. The backlight plate for preventing reflection in visual inspection of quartz boat silicon wafer as claimed in claim 3, wherein: four second positioning holes (24) are formed in the second backlight plate (4), and the second positioning columns (22) penetrate through the second positioning holes (24).
5. The backlight plate for preventing reflection in visual inspection of quartz boat silicon wafer as claimed in claim 4, wherein: the L-shaped plate (7) is provided with a rectangular opening (25), the first pressing block (10) is fixedly connected with a limiting plate (28), and the limiting plate (28) slides in the rectangular opening (25).
6. The backlight plate for preventing reflection in visual inspection of quartz boat silicon wafer as claimed in claim 5, wherein: the moving plate (13) is provided with a first guide hole (26), and the guide rod (12) penetrates through the first guide hole (26).
7. The backlight plate for preventing reflection in visual inspection of quartz boat silicon wafer as claimed in claim 6, wherein: four second guide holes (27) are formed in the connecting plate (15), and the T-shaped rod (20) penetrates through the second guide holes (27).
8. The anti-reflection backlight board for the visual inspection of the quartz boat silicon wafer as claimed in claim 7, wherein: the surface of the first rotary block (9) is provided with anti-skid grains, and the surface of the second rotary block (17) is provided with anti-skid grains.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221359006.4U CN217954896U (en) | 2022-06-01 | 2022-06-01 | Anti-reflection backlight board for quartz boat silicon wafer visual detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221359006.4U CN217954896U (en) | 2022-06-01 | 2022-06-01 | Anti-reflection backlight board for quartz boat silicon wafer visual detection |
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| Publication Number | Publication Date |
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| CN217954896U true CN217954896U (en) | 2022-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221359006.4U Active CN217954896U (en) | 2022-06-01 | 2022-06-01 | Anti-reflection backlight board for quartz boat silicon wafer visual detection |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116773522A (en) * | 2023-08-17 | 2023-09-19 | 辽宁拓邦鸿基半导体材料有限公司 | Quartz product visual detection equipment and detection method thereof |
-
2022
- 2022-06-01 CN CN202221359006.4U patent/CN217954896U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116773522A (en) * | 2023-08-17 | 2023-09-19 | 辽宁拓邦鸿基半导体材料有限公司 | Quartz product visual detection equipment and detection method thereof |
| CN116773522B (en) * | 2023-08-17 | 2023-10-27 | 辽宁拓邦鸿基半导体材料有限公司 | Quartz product visual detection equipment and detection method thereof |
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