CN217904246U - High-voltage power supply device of electron gun - Google Patents
High-voltage power supply device of electron gun Download PDFInfo
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- CN217904246U CN217904246U CN202221838497.0U CN202221838497U CN217904246U CN 217904246 U CN217904246 U CN 217904246U CN 202221838497 U CN202221838497 U CN 202221838497U CN 217904246 U CN217904246 U CN 217904246U
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Abstract
The invention discloses a high-voltage power supply device of an electron gun, which relates to the technical field of electronics and comprises a control unit, a power supply unit and a current detection unit, wherein the input end of the power supply unit is connected with the control unit, and the output end of the power supply unit is connected with the current detection unit and used for providing various required voltages for the current detection unit; the first end and the feedback end of the current detection unit are both connected with the control unit, the second end of the current detection unit is used as the detection end of the device to be connected with the cathode filament of the electron gun, the current detection unit is used for providing heating current for the cathode filament on the side of the cathode filament with suspension high voltage, real-time detection of the heating current and the emission current is realized under the condition that the measurement operation of the device is not influenced, and a good foundation is provided for accurate regulation and control of electron beam energy.
Description
Technical Field
The invention belongs to the technical field of electronics, and particularly relates to a high-voltage power supply device of an electron gun.
Background
An electron beam scanning measuring instrument is a core measuring device in the semiconductor manufacturing industry and is used for measuring patterns on a wafer and key sizes of the patterns, high-energy electron beams emitted from an electron gun are irradiated to the surface of a sample after being deflected and converged by a coil, images of the surface of the sample are obtained by detecting excited secondary electrons, and the key sizes are measured with high precision on the basis of clear surface images. The electron gun cathode can not make free electrons escape from the surface of the metal filament at normal temperature, only the free electrons with kinetic energy larger than the work function can escape, and along with the temperature rise of the cathode filament, more and more electrons with kinetic energy larger than the work function of the free electrons in the metal filament are generated, and the emission current is increased. To obtain a large amount of electron beams, sufficient heating current needs to be provided for the filament, and the heating current needs to be stable to ensure that the emitted electron beams are stable and controllable. After the electrons escape, the electrons are led out and accelerated to obtain an accelerated electron current for bombarding a sample to be measured, so that a high-voltage power supply system of an electron gun is needed for providing a suspension high voltage and an extraction voltage of a cathode filament so as to realize an accelerating electric field and an extraction electric field.
The filament emission current affects the electron energy and current density, and thus the accuracy of the measurement result of the device. The traditional measuring method measures the size of electron current received by the anode plate as filament emission current, has slow response speed, and can cause the problem of inaccurate measurement when the electron beam is damaged in the acceleration process. Along with the improvement of a semiconductor manufacturing process, the requirement on the control precision of the electron beam energy is higher and higher, and the improvement of the control precision of the electron beam energy is greatly restricted by the existing emission current measurement precision and response speed.
Disclosure of Invention
The invention provides an electron gun high-voltage power supply device aiming at the problems and the technical requirements, which realizes high-precision real-time detection of heating current and emission current on the cathode filament side with suspension high voltage and provides a good basis for precise regulation and control of electron beam energy.
The technical scheme of the invention is as follows:
a high-voltage power supply device of an electron gun comprises a control unit, a power supply unit and a current detection unit, wherein the input end of the power supply unit is connected with the control unit, and the output end of the power supply unit is connected with the current detection unit and used for providing various required voltages for the current detection unit; the first end and the feedback end of the current detection unit are both connected with the control unit, and the second end of the current detection unit is used as the detection end of the device and is connected with a cathode filament of the electron gun;
the current detection unit comprises a second isolation transformer, a second rectifying circuit, a second filter circuit, a heating current detection circuit, an emission current detection circuit, an analog-to-digital converter and an optical coupling isolation module; a primary coil of a second isolation transformer is used as a first end of the current detection unit and is connected with the control unit positioned on the low-voltage side, a secondary coil of the second isolation transformer is sequentially connected with a second rectifying circuit and a second filter circuit positioned on the high-voltage side, the first end of the second filter circuit is used as a second end of the current detection unit and is connected with the anode of the cathode filament to provide heating current for the cathode filament, the second end of the second filter circuit is sequentially connected with the heating current detection circuit and the emission current detection circuit, the input end of the emission current detection circuit is used as the second end of the current detection unit and is connected with the cathode filament cathode, and the input end of the emission current detection circuit is also connected with the suspension high voltage; the output ends of the heating current detection circuit and the emission current detection circuit are sequentially connected with the analog-to-digital converter and the optical coupling isolation module, the output end of the optical coupling isolation module is used as the feedback end of the current detection unit and is connected with the control unit positioned on the low-voltage side, and the control unit carries out real-time calculation on the heating current and the emission current based on the feedback voltage detection signal.
The power supply unit comprises a first isolation transformer, a first rectification circuit, a first filter circuit and a voltage converter, wherein a primary coil of the first isolation transformer is used as an input end of the power supply unit and is connected with a control unit positioned on a low-voltage side, a secondary coil of the first isolation transformer is sequentially connected with the first rectification circuit, the first filter circuit and the voltage converter positioned on a high-voltage side, and each output end of the voltage converter is used as an output end of the power supply unit and is connected with a power supply end of a current detection unit.
The heating current detection circuit comprises a first operational amplifier, three resistors and a first capacitor; the non-inverting input end of the first operational amplifier is connected with the second end of the first resistor, and the second end of the first resistor is also connected with the cathode filament cathode; the inverting input end of the first operational amplifier is connected with the first end of the first resistor through the second resistor, the first end of the first resistor is further connected with the second end of the second filter circuit, the inverting input end of the first operational amplifier is further connected with the output end of the first operational amplifier through the third resistor, the first capacitor is connected with the third resistor in parallel, the output end of the first operational amplifier serves as the output end of the heating current detection circuit and is connected with the input end of the first analog-to-digital converter, and the output end of the first analog-to-digital converter is connected with the optical coupling isolation module.
The emission current detection circuit comprises a second operational amplifier, a third operational amplifier, three resistors, a second capacitor and a third capacitor; the non-inverting input ends of the second operational amplifier and the third operational amplifier are used as the input ends of the emission current detection circuit and are connected with the floating high voltage; the inverting input end of the second operational amplifier is used as the input end of the emission current detection circuit and is connected between the heating current detection circuit and the cathode of the cathode filament, the inverting input end of the second operational amplifier is also connected with the output end of the second operational amplifier through a fourth resistor, and a second capacitor is connected with the fourth resistor in parallel; the output end of the second operational amplifier is connected with the inverting input end of the third operational amplifier through a fifth resistor, the inverting input end of the third operational amplifier is also connected with the output end of the third operational amplifier through a sixth resistor, and a third capacitor is connected with the sixth resistor in parallel; the output end of the third operational amplifier is used as the output end of the emission current detection circuit and is connected with the input end of the second analog-to-digital converter, and the output end of the second analog-to-digital converter is connected with the optical coupling isolation module.
The further technical scheme is that the control unit calculates the heating current in real time according to a formula I, the formula I is obtained by deducing the connection relation based on the heating current detection circuit, and the expression is as follows:
wherein If is a calculated value of the heating current, R 1 Sampling resistance, R, of a resistor for heating current 2 Is the resistance of the second resistor, R 3 Is the third resistance value, V 1 Is a voltage detection signal fed back by the first analog-to-digital converter.
The further technical scheme is that the control unit calculates the emission current in real time according to a formula II, the formula II is obtained by deducing the connection relation based on the emission current detection circuit, and the expression is as follows:
wherein Ie is a calculated value of the emission current, R 3 Is the third resistance value, R 4 Is a fourth resistance value, R 5 Is a fifth resistance value, R 6 Is a sixth resistance value, V 1 A voltage detection signal, V, fed back by the first analog-to-digital converter 2 The voltage detection signal is fed back by the second analog-to-digital converter.
The further technical scheme is that the second filter circuit is realized based on the model of HF2024-601Y3R0-T01, the analog-to-digital converter is realized based on the model of ADC10461, and the optical coupling isolation module is realized based on the model of OPI 150.
The further technical scheme is that the first operational amplifier is realized based on an OPA277 model.
The further technical scheme is that the second operational amplifier and the third operational amplifier are realized based on a TL081 model.
The beneficial technical effects of the invention are as follows:
compared with the prior art, the high-voltage power supply device of the electron gun detects the emission current at the filament side, does not influence the measurement operation of equipment, and has high real-time performance and simple structure; by arranging the heating current detection circuit and the emission current detection circuit between the second filter circuit and the cathode filament cathode, the control unit acquires voltage detection signals output by the two circuits in real time, and acquires the heating current and the emission current based on numerical calculation, thereby providing a good basis for accurate regulation and control of electron beam energy; an isolation circuit is further designed in the device, so that the control circuit is electrically isolated from the high-voltage circuit, and the power supply safety is ensured.
Drawings
Fig. 1 is a schematic diagram of a high-voltage power supply device of an electron gun provided by the present application.
Fig. 2 is a schematic circuit connection diagram of a current detection unit provided in the present application.
Fig. 3 is a schematic diagram of an emission current calibration unit provided in the present application.
Detailed Description
The following further describes the embodiments of the present invention with reference to the drawings.
As shown in fig. 1, a high voltage power supply device of an electron gun with functions of detecting filament heating current and emission current comprises a control unit, a power supply unit and a current detection unit, wherein the input end of the power supply unit is connected with the control unit, and the output end of the power supply unit is connected with the current detection unit and is used for providing various required voltages for the current detection unit; the first end and the feedback end of the current detection unit are both connected with the control unit, the second end of the current detection unit is used as the detection end of the device to be connected with a cathode filament of the electron gun, and the current detection unit is used for providing heating current for the cathode filament on the cathode filament side with suspension high voltage and realizing real-time detection of the heating current and the emission current.
Further, the power supply unit includes a first isolation transformer T1, a first rectification circuit, a first filter circuit and a voltage converter, a primary coil of the first isolation transformer T1 is used as an input end of the power supply unit and connected to the control unit located on the low voltage side, a secondary coil of the first isolation transformer T1 is sequentially connected to the first rectification circuit, the first filter circuit and the voltage converter located on the high voltage side, and each output end of the voltage converter is used as an output end of the power supply unit and connected to a power supply end of the current detection unit to provide voltages of +5V, +10V, + 15V, positive 24V and the like for the high voltage side.
Further, the current detection unit comprises a second isolation transformer T2, a second rectification circuit, a second filter circuit, a heating current detection circuit, an emission current detection circuit, an analog-to-digital converter and an optical coupling isolation module. The primary coil of a second isolation transformer T2 is used as the first end of a current detection unit and is connected with a control unit positioned on a low-voltage side, the secondary coil of the second isolation transformer T2 is sequentially connected with a second rectification circuit and a second filter circuit positioned on a high-voltage side, the first end of the second filter circuit is used as the second end I of the current detection unit and is connected with the anode of a cathode filament to output heating current, the second end of the second filter circuit is sequentially connected with a heating current detection circuit and an emission current detection circuit, the input end of the emission current detection circuit is used as the second end II of the current detection unit and is connected with the cathode filament cathode, and the input end of the emission current detection circuit is also connected with a suspension high voltage. The output ends of the heating current detection circuit and the emission current detection circuit are sequentially connected with the analog-to-digital converter and the optical coupling isolation module, the output end of the optical coupling isolation module is used as the feedback end of the current detection unit and is connected with the control unit positioned on the low-voltage side, and the control unit carries out real-time calculation on the heating current and the emission current based on the feedback voltage detection signal.
As shown in fig. 2, the heating current detection circuit specifically includes a first operational amplifier U1, three resistors, and a first capacitor C1. The non-inverting input end of the first operational amplifier U1 is connected with the second end of the first resistor R1, and the second end of the first resistor R1 is also connected with the cathode filament negative electrode. The inverting input end of the first operational amplifier U1 is connected with the first end of the first resistor R1 through the second resistor R2, the first end of the first resistor R1 is further connected with the second end of the second filter circuit, the inverting input end of the first operational amplifier U1 is further connected with the output end of the first operational amplifier U1 through the third resistor R3, the first capacitor C1 is connected with the third resistor R3 in parallel, the output end of the first operational amplifier U1 serves as the output end of the heating current detection circuit and is connected with the input end of the first analog-to-digital converter AD1, and the output end of the first analog-to-digital converter AD1 is connected with the optocoupler isolation module.
The second filter circuit provided by the embodiment adopts a common-mode filter and is realized based on HF2024-601Y3R0-T01 models. The first resistor R1 is a heating current sampling resistor, and the first operational amplifier U1 is used for amplifying the voltage of the sampling resistor, transmitting the voltage to the first analog-to-digital converter AD1, converting the voltage into a digital signal, and transmitting the digital signal to the control unit through optical coupling isolation.
The emission current detection circuit comprises a second operational amplifier U2, a third operational amplifier U3, three resistors, a second capacitor C2 and a third capacitor C3. The non-inverting input ends of the second operational amplifier U2 and the third operational amplifier U3 are used as the input end I of the emission current detection circuit and are connected with the floating high voltage HV. The inverting input end of the second operational amplifier U2 is used as the input end II of the emission current detection circuit and connected between the heating current detection circuit and the cathode of the cathode filament, the inverting input end of the second operational amplifier U2 is also connected with the output end of the second operational amplifier U2 through a fourth resistor R4, and the second capacitor C2 is connected with the fourth resistor R4 in parallel. The output end of the second operational amplifier U2 is connected to the inverting input end of the third operational amplifier U3 through a fifth resistor R5, the inverting input end of the third operational amplifier U3 is also connected to the output end of the third operational amplifier U3 through a sixth resistor R6, and the third capacitor C3 is connected in parallel to the sixth resistor R6. The output end of the third operational amplifier U3 is used as the output end of the emission current detection circuit and is connected with the input end of the second analog-to-digital converter AD2, and the output end of the second analog-to-digital converter AD2 is connected with the optical coupling isolation module.
The second operational amplifier U2 is used for realizing the function of converting current into voltage, and the third operational amplifier U3 is used for amplifying the converted voltage, transmitting the voltage to the second analog-to-digital converter AD2, converting the voltage into a digital signal and transmitting the digital signal to the control unit through optical coupling isolation. Meanwhile, the floating high voltage HV serves as a reference ground potential HGND of the high-voltage side and acts on the second operational amplifier U2, so that the cathode filament is at a high-voltage potential, and the detection of the heating current and the emission current of the high-voltage side is realized.
The detection principle of the heating current detection circuit and the emission current detection circuit is as follows:
(1) For the detection of the heating current If:
as shown in fig. 2, since the second filter circuit uses a common mode filter, the heating current flowing out of the first end of the second filter circuit is equal to the current flowing back to the second end of the second filter circuit, i.e. I1= I2= If (for simplicity, only the magnitude and the direction of the current are considered here), the numerical relationship of the heating current If is calculated as follows:
If＝I2＝IR2+IR1
IR1*R 1 ＝IR2*R 2
V 1 ＝IR2*R 3
then the formula one is derived:
therefore, the control unit receives the voltage detection signal fed back by the first analog-to-digital converter AD1, and calculates the heating current If in real time according to the formula i.
Wherein If is a calculated value of the heating current, R 1 Sampling resistance, R, of a resistor for heating current 2 Is the second resistance value, R 3 Is the third resistance value, V 1 Is a voltage detection signal fed back by the first analog-to-digital converter.
(2) For the detection of the emission current Ie:
as shown in fig. 2, the cathode filament emits electrons outwards, and the emission current Ie flows into the filament, i.e. Ie = I3, the numerical relationship of the emission current Ie is calculated as follows:
I4＝I3+I1＝Ie+If
I4＝IR1+IR4
IR4＝V 3 /R 4
V 3 /R 5 ＝V 2 /R 6
then the formula two is derived:
therefore, the control unit receives the voltage detection signal fed back by the first analog-to-digital converter AD1 and the second analog-to-digital converter AD2, and calculates the emission current Ie in real time according to the formula two.
Wherein Ie is the calculation of the emission currentNumerical value, R 4 Is the fourth resistance value, R 5 Is a fifth resistance value, R 6 Is a sixth resistance value, V 2 The voltage detection signal is fed back by the second analog-to-digital converter.
Further, in order to solve the problem of measurement errors of the emission current caused by resistance accuracy, chip aging, current loss of the detection circuit and the like in an actual circuit, the device further comprises an emission current calibration unit, as shown in fig. 3, including a high-voltage module, a seventh resistor R7, a switch SW1 and an isolation module. The input end of the high-voltage module is connected with the control unit positioned on the low-voltage side, the first output end of the high-voltage module is connected with the input end I of the emission current detection circuit, the second output end of the high-voltage module is connected with one end of the switch SW1 through the seventh resistor R7, and the high-voltage module outputs suspended high voltage HV. The other end of the switch SW1 is connected between the emission current detection circuit and the cathode of the cathode filament, and the control end of the switch SW1 is connected with the control unit positioned on the low-voltage side through the isolation module.
The method for realizing the automatic calibration of the emission current specifically comprises the following steps:
when the emission current needs to be calibrated, the connection between the input end of the emission current detection circuit and the cathode of the cathode filament is disconnected, the switch SW1 is controlled to be closed, and the current passing through the seventh resistor R7 is I due to the existence of the suspended high voltage HV 7 ＝HV/R 7 The measured value Ie of the emission current (i.e. the calculated value of formula two) should theoretically correspond to I 7 The same is true. The seventh resistor R7 selected for use in the application adopts a precision resistor, has the characteristics of high precision, low temperature drift and high stability, and the HV voltage value is obtained through precision measurement, so that I 7 Can be used as a measurement standard value of the emission current.
The control unit controls the high-voltage module to change the output value of the suspended high voltage HV, thereby changing the measurement standard value I 7 And the calculated value Ie of the emission current (due to V) 2 Change), the measurement standard value I at each change is obtained 7 Deviation Δ I from the calculated value Ie of the emission current, e.g. Δ I = I 7 And Ie, and further acquiring a corresponding relation curve of the calculated value Ie of the emission current and the deviation delta I.
When the device is working normally, the control unit is based on the curveSearching the calculated value Ie of the current transmitting current 1 Corresponding deviation Delta I 1 And compensating for deviations in the calculated value of the emission current, e.g. Ie 1 ＝Ie 1 +α*△I 1 And alpha is a compensation coefficient, and is more than or equal to 0 and less than or equal to 1), the automatic calibration of the emission current is realized, the measurement precision of the emission current of the filament is effectively improved, and the working state of the emission current detection circuit is automatically detected, for example, when the deviation exceeds a set threshold value, a certain component in the emission current detection circuit is considered to be damaged, and the circuit can be disconnected for one-by-one examination.
Optionally, the optical coupling isolation module adopted in the present application is implemented based on an OPI150 model; the first analog-to-digital converter and the second analog-to-digital converter are both realized based on the ADC10461 model; the first operational amplifier is realized based on an OPA277 model, and the second operational amplifier and the third operational amplifier are realized based on a TL081 model.
What has been described above is only a preferred embodiment of the present application, and the present invention is not limited to the above examples. It is to be understood that other modifications and variations directly derived or suggested to those skilled in the art without departing from the spirit and scope of the present invention are to be considered as included within the scope of the present invention.
Claims (7)
1. The high-voltage power supply device of the electron gun is characterized by comprising a control unit, a power supply unit and a current detection unit, wherein the input end of the power supply unit is connected with the control unit, and the output end of the power supply unit is connected with the current detection unit and is used for providing various required voltages for the current detection unit; the first end and the feedback end of the current detection unit are both connected with the control unit, and the second end of the current detection unit is used as the detection end of the device and is connected with a cathode filament of an electron gun;
the current detection unit comprises a second isolation transformer, a second rectifying circuit, a second filter circuit, a heating current detection circuit, an emission current detection circuit, an analog-to-digital converter and an optical coupling isolation module; a primary coil of the second isolation transformer is used as a first end of the current detection unit and is connected with the control unit positioned on a low-voltage side, a secondary coil of the second isolation transformer is sequentially connected with the second rectifying circuit and the second filter circuit positioned on a high-voltage side, the first end of the second filter circuit is used as a second end of the current detection unit and is connected with a cathode filament anode to provide the heating current for the cathode filament, the second end of the second filter circuit is sequentially connected with the heating current detection circuit and the emission current detection circuit, the input end of the emission current detection circuit is used as the second end of the current detection unit and is connected with a cathode filament cathode, and the input end of the emission current detection circuit is also connected with a suspension high voltage; the output ends of the heating current detection circuit and the emission current detection circuit are sequentially connected with the analog-to-digital converter and the optical coupling isolation module, the output end of the optical coupling isolation module serves as the feedback end of the current detection unit, the feedback end of the current detection unit is connected with the control unit located on the low-voltage side, and the control unit carries out real-time calculation on the heating current and the emission current based on the feedback voltage detection signal.
2. The high voltage power supply apparatus for electron gun according to claim 1, wherein said power supply unit includes a first isolation transformer, a first rectifying circuit, a first filter circuit and a voltage converter, a primary coil of said first isolation transformer being an input terminal of said power supply unit and being connected to said control unit on a low voltage side, a secondary coil of said first isolation transformer being connected to said first rectifying circuit, said first filter circuit and said voltage converter on a high voltage side in this order, respective output terminals of said voltage converter being output terminals of said power supply unit and being connected to power supply terminals of said current detection unit.
3. The electron gun high voltage power supply apparatus according to claim 1, wherein said heating current detection circuit includes a first operational amplifier, three resistors and a first capacitor; the non-inverting input end of the first operational amplifier is connected with the second end of the first resistor, and the second end of the first resistor is also connected with the cathode filament cathode; the inverting input end of the first operational amplifier is connected with the first end of the first resistor through a second resistor, the first end of the first resistor is further connected with the second end of the second filter circuit, the inverting input end of the first operational amplifier is further connected with the output end of the first operational amplifier through a third resistor, the first capacitor is connected with the third resistor in parallel, the output end of the first operational amplifier serves as the output end of the heating current detection circuit and is connected with the input end of the first analog-to-digital converter, and the output end of the first analog-to-digital converter is connected with the optical coupling isolation module.
4. The electron gun high voltage power supply apparatus according to claim 1, wherein said emission current detection circuit includes a second operational amplifier, a third operational amplifier, three resistors, a second capacitor, and a third capacitor; the non-inverting input ends of the second operational amplifier and the third operational amplifier are used as the input ends of the emission current detection circuit and are connected with the floating high voltage; the inverting input end of the second operational amplifier is used as the input end of the emission current detection circuit and is connected between the heating current detection circuit and the cathode filament cathode, the inverting input end of the second operational amplifier is also connected with the output end of the second operational amplifier through a fourth resistor, and the second capacitor is connected with the fourth resistor in parallel; the output end of the second operational amplifier is connected with the inverting input end of the third operational amplifier through a fifth resistor, the inverting input end of the third operational amplifier is also connected with the output end of the third operational amplifier through a sixth resistor, and the third capacitor is connected with the sixth resistor in parallel; the output end of the third operational amplifier is used as the output end of the emission current detection circuit and is connected with the input end of a second analog-to-digital converter, and the output end of the second analog-to-digital converter is connected with the optical coupling isolation module.
5. The electron gun high voltage power supply device according to claim 1, wherein the second filter circuit is implemented based on HF2024-601Y3R0-T01 model, the analog-to-digital converter is implemented based on ADC10461 model, and the optical coupling isolation module is implemented based on OPI150 model.
6. The electron gun high voltage power supply apparatus according to claim 3, wherein said first operational amplifier is implemented based on an OPA277 model.
7. The electron gun high voltage power supply apparatus according to claim 4, wherein the second operational amplifier and the third operational amplifier are both implemented based on model TL 081.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115220511A (en) * | 2022-07-14 | 2022-10-21 | 无锡卓海科技股份有限公司 | High-voltage power supply device of electron gun capable of detecting heating current and emission current of filament |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115220511A (en) * | 2022-07-14 | 2022-10-21 | 无锡卓海科技股份有限公司 | High-voltage power supply device of electron gun capable of detecting heating current and emission current of filament |
| CN115220511B (en) * | 2022-07-14 | 2023-10-31 | 无锡卓海科技股份有限公司 | High-voltage power supply device of electron gun for detecting filament heating current and emission current |
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