CN217901841U - Four-wire method test platform - Google Patents

Four-wire method test platform Download PDF

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Publication number
CN217901841U
CN217901841U CN202222022612.3U CN202222022612U CN217901841U CN 217901841 U CN217901841 U CN 217901841U CN 202222022612 U CN202222022612 U CN 202222022612U CN 217901841 U CN217901841 U CN 217901841U
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sample
probe
adsorption
test platform
sample table
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墙子跃
王彩霞
高翔
王恩宇
吴瑶
赵晓霞
刘雨奇
董宁波
宗军
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State Power Investment Group Science and Technology Research Institute Co Ltd
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State Power Investment Group Science and Technology Research Institute Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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Abstract

The utility model discloses a four-line method test platform, which comprises a sample stage, an elastic probe and a first probe, wherein the sample stage is provided with a first end surface and a second end surface in the thickness direction, and the first end surface of the sample stage is used for placing a sample and is suitable for being electrically contacted with the sample; the elastic probe is arranged on the sample table and extends along the thickness direction of the sample table, the elastic probe can move along the thickness direction of the sample table relative to the sample table, and one end of the elastic probe in the thickness direction of the sample table can be suitable for being in electric contact with a sample; the first probe is located on one side of the sample table in the thickness direction of the sample table and is adjacent to the first end face of the sample table, and the first probe is suitable for being in electrical contact with the end face, away from the sample table, of the sample. The utility model provides a four-wire method test platform has the sample reliability in the testing process and the higher advantage of stability.

Description

Four-wire method test platform
Technical Field
The utility model relates to a battery four-wire test method technical field specifically, relates to a four-wire method test platform.
Background
In the related art, the measurement method of the battery resistance is commonly used in the two-wire method measurement and the four-wire method measurement, and compared with the two-wire method measurement, the four-wire method measurement eliminates the introduced error of the lead resistance, so that the four-wire method measurement has higher precision when measuring the solar battery with larger current. However, the four-wire method in the related art has a problem that the reliability and stability of the sample cell are low during the test process.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the technical problems in the related art. Therefore, the embodiment of the invention provides a four-wire method test platform which has the advantages of higher reliability and stability of a sample in a test process.
The four-wire method test platform comprises a sample stage, an elastic probe and a first probe, wherein the sample stage is provided with a first end surface and a second end surface in the thickness direction, and the first end surface of the sample stage is used for placing a sample and is suitable for being in electrical contact with the sample; the elastic probe is arranged on the sample table and extends along the thickness direction of the sample table, the elastic probe can move relative to the sample table along the thickness direction of the sample table, and one end of the elastic probe in the thickness direction of the sample table can be suitable for being in electrical contact with a sample; the first probe is located on one side of the sample table in the thickness direction of the sample table and is adjacent to a first end face of the sample table, and the first probe is suitable for being in electrical contact with an end face, away from the sample table, of the sample.
According to the utility model discloses four-wire method test platform, the sample is in the testing process, when receiving external force interference, easily takes place to rock/slide, and elastic probe can keep the electric contact state with the sample constantly under its elastic action, from this, has guaranteed the effect that elastic probe and sample electricity are connected, has avoided the interrupt of electric contact between the two to the stability and the reliability of sample in the testing process have been guaranteed, and the degree of accuracy of four-wire method test in this embodiment has been guaranteed.
In some embodiments, the sample stage is provided with a mounting hole extending along the thickness direction of the sample stage, the elastic probe comprises a spring and a second probe, the spring is arranged in the mounting hole, and a first end of the spring is connected with the sample stage; the second probe is arranged in the mounting hole, and the second end of the spring is connected with the second probe.
In some embodiments, the number of the mounting holes is multiple and is distributed along the length direction of the sample stage, the number of the elastic probes is equal to that of the mounting holes, the elastic probes correspond to the mounting holes one by one, the elastic probes are arranged in the corresponding mounting holes, and the elastic probes are arranged in parallel.
In some embodiments, the sample stage is provided with a plurality of first adsorption holes, wherein at least one first adsorption hole is adjacent to the second probe, and the rest first adsorption holes are distributed at intervals along the circumferential direction of the mounting hole; the four-wire method test platform further comprises a first adsorption device, and the first adsorption device is connected with the first adsorption holes so as to drive the first adsorption holes to adsorb the samples in a vacuum mode.
In some embodiments, the first adsorption device comprises a first pipe, a first connector, a first vacuum pump, and a first toggle switch, a first end of the first pipe being connected to each of the plurality of first adsorption holes; the first joint is arranged on the circumferential surface of the sample table and connected with the second end of the first pipeline; the first vacuum pump is connected with the first joint; the first deflector rod switch is arranged on the circumferential surface of the sample table and electrically connected with the first vacuum pump.
In some embodiments, the sample stage is provided with a plurality of second adsorption holes, the plurality of second adsorption holes are distributed at intervals along the circumferential direction of the mounting hole, the plurality of second adsorption holes and the plurality of first adsorption holes are distributed in a staggered mode, and the second adsorption holes are larger than the first adsorption holes in diameter; the four-wire method test platform further comprises a second adsorption device, and the second adsorption device is connected with the plurality of second adsorption holes so as to drive the second adsorption holes to adsorb the samples in vacuum.
In some embodiments, the second adsorption device comprises a second pipe, a second joint, a second vacuum pump and a second deflector rod switch, wherein a first end of the second pipe is connected with each of the second adsorption holes; the second joint is arranged on the circumferential surface of the sample table and connected with the second end of the second pipeline; the second vacuum pump is connected with the second joint; the second deflector rod switch is arranged on the circumferential surface of the sample table and electrically connected with the second vacuum pump.
In some embodiments, the four-wire test platform further includes two probe stations, at least a portion of the first end surface of the sample station forms an adjustment area, the two probe stations are disposed in the adjustment area and can slide in the adjustment area, the two first probes correspond to the two probe stations one to one, and the first probes are detachably connected to the corresponding probe stations.
In some embodiments, the adjustment area is made of iron, and a magnet block for magnetically adsorbing the adjustment area is provided at the bottom of the probe stage.
In some embodiments, four corners of the sample stage are provided with adjusting foot pads.
Drawings
Fig. 1 is a schematic top view of a four-wire test platform according to an embodiment of the present invention.
Fig. 2 is a schematic side view of a four-wire test platform according to an embodiment of the present invention.
Fig. 3 is another schematic diagram of a four-wire test platform according to an embodiment of the present invention.
Fig. 4 is a schematic diagram of a sample of a four-wire test platform according to an embodiment of the present invention.
Reference numerals: 1. a sample stage; 11. a first adsorption hole; 12. a second adsorption hole; 13. mounting holes; 2. an elastic probe; 3. a first probe; 4. a sample; 41. a positive electrode; 42. a back electrode; 5. a first adsorption device; 51. a first joint; 52. a first toggle lever switch; 6. a second adsorption device; 61. a second joint; 62. a second lever switch; 7. a probe station; 8. a regulatory region; 9. the foot pad is adjusted.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
A four-wire test platform according to an embodiment of the present invention is described below with reference to fig. 1 to 4.
As shown in fig. 2, the four-wire test platform according to the embodiment of the present invention includes a sample stage 1, an elastic probe 2 and a first probe, the sample stage 1 has a first end surface and a second end surface in the thickness direction thereof, and the first end surface of the sample stage 1 is used for placing a sample 4 and is suitable for being electrically contacted with the sample 4. The elastic probe 2 is arranged on the sample table 1 and extends along the thickness direction of the sample table 1, the elastic probe 2 can move along the thickness direction of the sample table 1 relative to the sample table 1, and one end of the elastic probe 2 in the thickness direction of the sample table 1 can be suitable for being in electrical contact with a sample 4. The number of the first probes is two, the first probes are positioned on one side of the sample table 1 in the thickness direction of the sample table 1 and are adjacent to the first end face of the sample table 1, and the first probes are suitable for being in electric contact with the end face, away from the sample table 1, of the sample 4.
According to the utility model discloses four-wire method test platform, sample 4 is in the testing process, when receiving external force interference, easily take place to rock/slide, and elastic probe 2 under its elastic action, can keep constantly with sample 4's electric contact state, from this, guaranteed the effect that elastic probe 2 and sample 4 electricity are connected, avoided the interrupt of electric contact between the two, thereby guaranteed sample 4 stability and reliability in the testing process, and guaranteed the degree of accuracy of four-wire method test in this embodiment.
Wherein, the sample platform 1 is a gold-plated sample platform 1.
The sample 4 is a battery, and may be a solar battery, and the sample 4 is disposed on the first end surface of the sample stage 1.
Specifically, as shown in fig. 4, the end face of the sample 4 adjacent to the sample stage 1 is provided with a back electrode 42, the end face of the sample 4 away from the sample stage 1 is provided with a positive electrode 41, and one of the back electrode 42 and the positive electrode 41 is a positive electrode, and the other is a negative electrode.
It will be appreciated that the first end face of the sample stage 1 is in electrical contact with the back electrode 42 of the sample 4 and the pogo pin 2 is in electrical contact with the back electrode 42 of the sample 4.
It will be appreciated that both first probes 3 are in electrical contact with the positive electrode 41 of the sample 4.
In some embodiments, as shown in fig. 1, the sample stage 1 is provided with a mounting hole 13 extending in the thickness direction of the sample stage 1, and the elastic probe 2 includes a spring and a second probe, the spring is disposed in the mounting hole 13, and a first end of the spring is connected to the sample stage 1. The second probe is placed in the mounting hole 13 and the second end of the spring is connected to the second probe.
Thus, the elastic force of the spring maintains the abutting state of the second probe and the back electrode 42 of the sample 4, and the reliability and continuity of the electrical contact between the second probe and the back electrode 42 are ensured.
In particular, the spring is a linear spring.
It will be appreciated that the second probe is coaxially inserted within the linear spring.
In some embodiments, as shown in fig. 1 and 3, the number of the mounting holes 13 is multiple and is distributed along the length direction of the sample stage 1, the number of the elastic probes 2 is equal to that of the mounting holes 13, the elastic probes 2 correspond to the mounting holes 13 one by one, the elastic probes 2 are disposed in the corresponding mounting holes 13, and the plurality of elastic probes 2 are disposed in parallel.
When the sample 4 is large in size, the sample stage 1 may have a plurality of elastic probes 2 attached thereto. Therefore, when the sample 4 is disturbed by external force and shakes to a large extent, if one elastic probe deviates from the contact relation with the sample 4, the rest elastic probes can still keep a stable electric contact state with the sample 4, and therefore the reliability and the stability of electric contact between the sample 4 and the elastic probe 2 are further guaranteed.
In addition, when the electrical contact between one of the elastic probes and the sample 4 fails, the electrical contact between the other elastic probes and the sample 4 is not affected by the failure, so that the design of the plurality of elastic probes 2 improves the reliability and stability of the four-wire test platform.
The plurality of elastic probes 2 are arranged in parallel, that is, each of the plurality of elastic probes 2 is externally connected with the same conducting wire, so that the plurality of elastic probes 2 and the sample stage 1 form two lines corresponding to the back electrode 42 of the sample 4, and the two first probes 3 form two lines corresponding to the positive electrode 41 of the sample 4, thereby forming the four-line test in the embodiment.
For easy understanding, an arrow a in fig. 1 indicates a longitudinal direction of the sample stage 1.
In some embodiments, as shown in fig. 3, the sample stage 1 is provided with a plurality of first adsorption holes 11, wherein at least one first adsorption hole 11 is adjacent to the second probe, and the rest first adsorption holes 11 are spaced along the circumference of the mounting hole 13. The four-wire method test platform further comprises a first adsorption device 5, wherein the first adsorption device 5 is connected with the first adsorption holes 11 so as to drive the first adsorption holes 11 to vacuum adsorb the sample 4.
Therefore, after the sample 4 is placed on the sample table 1, in order to ensure the fixing effect of the sample 4 and avoid the free sliding of the sample 4, the first adsorption device 5 needs to be started, and the first adsorption device 5 generates the suction force on the sample 4 through the first adsorption hole 11, so that the effect of fixing the sample 4 is achieved.
Wherein the design of the first adsorption hole 11 adjacent to the second probe improves the adsorption effect on the sample 4.
In some embodiments, as shown in fig. 1, the first adsorption device 5 includes a first pipe, a first connector 51, a first vacuum pump, and a first lever switch 52, a first end of the first pipe being connected to each of the plurality of first adsorption holes 11. The first joint 51 is arranged on the circumferential surface of the sample stage 1 and connected with the second end of the first pipeline. The first vacuum pump is connected to the first connection 51. The first toggle lever switch 52 is arranged on the circumferential surface of the sample table 1 and electrically connected with the first vacuum pump.
The first lever switch 52 is used for controlling the opening and closing of the first vacuum pump, and when the first lever switch 52 is started, the first vacuum pump is started and adsorbs the sample 4 through the first connectors 51 and the first pipeline through the first adsorption holes 11, so that the effect of fixing the sample 4 on the sample table 1 by utilizing adsorption force is realized.
In some embodiments, as shown in fig. 3, the sample stage 1 is provided with a plurality of second adsorption holes 12, the plurality of second adsorption holes 12 are distributed at intervals along the circumferential direction of the mounting hole 13, the plurality of second adsorption holes 12 and the plurality of first adsorption holes 11 are distributed in a staggered manner, and the second adsorption holes 12 are larger than the first adsorption holes 11; the four-wire method test platform further comprises a second adsorption device 6, wherein the second adsorption device 6 is connected with the plurality of second adsorption holes 12 so as to drive the second adsorption holes 12 to vacuum adsorb the sample 4.
The design in which the second adsorption hole 12 is larger than the pore diameter of the first adsorption hole 11 makes the adsorption effect of the second adsorption hole 12 on the sample 4 higher than that of the first adsorption hole 11. When the adsorption strength of the first adsorption device 5 to the sample 4 is insufficient, the first adsorption device 5 is closed, the second adsorption device 6 is opened, and the second adsorption device 6 generates a larger suction force to the sample 4 through the plurality of second adsorption holes 12, thereby realizing the effect of fixing the sample 4.
The stepped adjustment of the first adsorption holes 11 and the second adsorption holes 12 achieves adaptive adsorption to the samples 4 having different sizes and weights, thereby ensuring the fixing effect of the samples 4. In addition, the first adsorption device 5 and the second adsorption device 6 respectively adsorb different samples 4 in an adaptive manner, so that energy consumption is saved, and energy waste is reduced.
It can be understood that the first adsorption device 5 and the second adsorption device 6 can also be simultaneously turned on, thereby further enhancing the adsorption capacity for the sample 4, and in addition, the three-stage adjustment of the four-wire test platform for the sample 4 can be realized by the operation mode, so that the four-wire test platform is convenient to adapt to different samples 4.
In some embodiments, as shown in fig. 1, the second adsorption device 6 includes a second pipe, a second joint 61, a second vacuum pump, and a second lever switch 62, and a first end of the second pipe is connected to each of the plurality of second adsorption holes 12. The second joint 61 is arranged on the circumferential surface of the sample stage 1 and connected with the second end of the second pipeline. The second vacuum pump is connected to the second connection 61. The second lever switch 62 is disposed on the circumferential surface of the sample stage 1 and electrically connected to the second vacuum pump.
The second lever switch 62 is used for controlling the opening and closing of the second vacuum pump, and when the second lever switch 62 is started, the second vacuum pump is started and adsorbs the sample 4 through the second connector 61 and the second pipeline by the plurality of second adsorption holes 12, thereby realizing the effect of fixing the sample 4 on the sample stage 1 by utilizing the adsorption force.
In some embodiments, as shown in fig. 1, the four-wire test platform further includes two probe stations 7, at least a portion of the first end surface of the sample station 1 forms an adjustment area 8, the two probe stations 7 are disposed in the adjustment area 8 and can slide in the adjustment area 8, the two first probes 3 and the two probe stations 7 are in one-to-one correspondence, and the first probes 3 and the corresponding probe stations 7 are detachably connected.
Thus, when the sample 4 is placed in a different position on the sample stage 1, the first probe 3 can be adjusted to a position corresponding to the sample 4 by sliding the respective probe stage 7, in order to contact the positive electrode 41 of the sample 4. Therefore, the flexibility of the four-wire method test platform adjustment is improved.
In particular, the first probe 3 and the corresponding probe station 7 may be clamped together, which is conventional in the art and will not be described herein.
In some embodiments, as shown in fig. 1, the conditioning zone 8 is made of iron, and the bottom of the probe station 7 is provided with a magnet block for magnetically attracting the conditioning zone 8.
Hereby, the effect is achieved that the probe station 7 is confined on the first end face of the adjustment zone 8 and that the probe station 7 is slidable on the first end face of the adjustment zone 8, thereby achieving an adjustment of the first probes 3.
In some embodiments, as shown in fig. 1, the four corners of the sample stage 1 are provided with adjusting foot pads 9.
The adjustment callus on the sole 9 is used for adjusting the levelness of sample platform 1, and in addition, a plurality of adjustment callus on the sole adjust simultaneously can also adjust the height of sample platform 1.
Specifically, the adjusting foot pads 9 are connected with the sample table 1 through threads, so that the levelness and height of the sample table 1 can be adjusted.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly, e.g., as being permanently connected, detachably connected, or integral; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the present disclosure, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" and the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although the above embodiments have been shown and described, it should be understood that they are exemplary and should not be construed as limiting the present invention, and that many changes, modifications, substitutions and alterations to the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the present invention.

Claims (10)

1. A four-wire test platform, comprising:
the sample stage is provided with a first end face and a second end face in the thickness direction, and the first end face of the sample stage is used for placing a sample and is suitable for being in electric contact with the sample;
the elastic probe is arranged on the sample table and extends along the thickness direction of the sample table, the elastic probe can move relative to the sample table along the thickness direction of the sample table, and one end of the elastic probe in the thickness direction of the sample table can be suitable for being in electrical contact with the sample; and
the first probe is located on one side, in the thickness direction of the sample table, of the sample table and is adjacent to a first end face of the sample table, and the first probe is suitable for being in electrical contact with an end face, away from the sample table, of the sample.
2. The four-wire test platform according to claim 1, wherein the sample stage is provided with a mounting hole extending in a thickness direction of the sample stage, and the elastic probe comprises:
the spring is arranged in the mounting hole, and a first end of the spring is connected with the sample table; and
and the second probe is arranged in the mounting hole, and the second end of the spring is connected with the second probe.
3. The four-wire test platform according to claim 2, wherein the number of the mounting holes is plural and is distributed along the length direction of the sample stage, the number of the elastic probes is equal to that of the mounting holes, the elastic probes are in one-to-one correspondence with the mounting holes, the elastic probes are arranged in the corresponding mounting holes, and the elastic probes are arranged in parallel.
4. The four-wire test platform according to claim 2, wherein the sample stage is provided with a plurality of first adsorption holes, at least one of the first adsorption holes is adjacent to the second probe, and the rest first adsorption holes are distributed at intervals along the circumferential direction of the mounting hole; the four-wire method test platform further comprises a first adsorption device, and the first adsorption device is connected with the first adsorption holes so as to drive the first adsorption holes to adsorb the samples in a vacuum mode.
5. The four-wire test platform of claim 4, wherein the first suction device comprises:
a first pipe having a first end connected to each of the plurality of first adsorption holes;
the first joint is arranged on the circumferential surface of the sample table and connected with the second end of the first pipeline;
the first vacuum pump is connected with the first joint; and
the first driving lever switch is arranged on the circumferential surface of the sample table and electrically connected with the first vacuum pump.
6. The four-wire test platform according to claim 4, wherein the sample stage is provided with a plurality of second adsorption holes, the plurality of second adsorption holes are distributed at intervals along the circumferential direction of the mounting hole, the plurality of second adsorption holes and the plurality of first adsorption holes are distributed in a staggered manner, and the diameter of each second adsorption hole is larger than that of each first adsorption hole; the four-wire method test platform further comprises a second adsorption device, and the second adsorption device is connected with the plurality of second adsorption holes so as to drive the second adsorption holes to adsorb the samples in vacuum.
7. The four-wire test platform of claim 6, wherein the second adsorption device comprises:
a second pipe having a first end connected to each of the plurality of second adsorption holes;
the second joint is arranged on the circumferential surface of the sample table and is connected with the second end of the second pipeline;
the second vacuum pump is connected with the second joint; and
and the second driving lever switch is arranged on the circumferential surface of the sample table and is electrically connected with the second vacuum pump.
8. The four-wire test platform according to any one of claims 1-7, further comprising two probe stations, wherein at least a portion of the first end surface of the sample station forms an adjustment area, wherein the two probe stations are disposed in the adjustment area and are slidable therein, wherein the two first probes and the two probe stations are in one-to-one correspondence, and wherein the first probes and the corresponding probe stations are detachably connected.
9. The four-wire test platform of claim 8, wherein the adjustment area is made of iron, and a magnet block for magnetically attracting the adjustment area is disposed at the bottom of the probe stage.
10. The four-wire test platform according to any one of claims 1 to 7, wherein four corners of the sample stage are provided with adjusting foot pads.
CN202222022612.3U 2022-08-02 2022-08-02 Four-wire method test platform Active CN217901841U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116165413A (en) * 2023-03-06 2023-05-26 镭神技术(西安)有限公司 Four-wire system probe testing device and method for semiconductor refrigeration piece detection equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116165413A (en) * 2023-03-06 2023-05-26 镭神技术(西安)有限公司 Four-wire system probe testing device and method for semiconductor refrigeration piece detection equipment
CN116165413B (en) * 2023-03-06 2023-08-04 镭神技术(西安)有限公司 Four-wire system probe testing device and method for semiconductor refrigeration piece detection equipment

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