CN217891582U - High-voltage protection device of film equipment and film equipment - Google Patents
High-voltage protection device of film equipment and film equipment Download PDFInfo
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- CN217891582U CN217891582U CN202221944484.1U CN202221944484U CN217891582U CN 217891582 U CN217891582 U CN 217891582U CN 202221944484 U CN202221944484 U CN 202221944484U CN 217891582 U CN217891582 U CN 217891582U
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Abstract
The application relates to the technical field of semiconductor manufacturing equipment, and provides a film equipment high-voltage protection device and film equipment, which can avoid the risk of electric shock of workers when a cabin door of the film equipment is opened. The high-voltage protection device for the thin-film equipment comprises a voltage detection alarm circuit which is used for detecting high voltage and giving an alarm, wherein the voltage detection alarm circuit is formed by electrically connecting a power supply, a current transformer, a first relay, a second relay and an alarm device. The film device comprises a machine body and a voltage detection alarm circuit arranged in the machine body.
Description
Technical Field
The application relates to the technical field of semiconductor manufacturing equipment, in particular to thin film equipment.
Background
When the existing thin film equipment works, a high-voltage discharge condition exists in a working cabin; when the cover of work cabin was opened, if still there is the high pressure in the work cabin room, then operating personnel has the risk of electrocuting.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects in the prior art, the high-voltage protection device for the film equipment and the film equipment are provided, so that the risk of electric shock of a worker when the cabin door of the film equipment is opened can be avoided.
The utility model discloses a first aspect provides a film equipment high voltage protection device, including voltage detection alarm circuit, voltage detection alarm circuit includes power, current transformer, first relay, second relay and alarm device, wherein:
a first coil of the first relay is connected with the current transformer in series to form a first assembly, a first normally open contact of the first relay is connected with a second coil of the second relay in series to form a second assembly, and a second normally open contact of the second relay is connected with the alarm device in series to form a third assembly;
the first assembly, the second assembly and the third assembly are connected in parallel to form a detection circuit;
the power supply is connected with the detection circuit in series to form the voltage detection alarm circuit.
In one possible embodiment, the alarm device comprises a warning light and an audio device.
In one possible embodiment, the power supply further comprises a circuit breaker circuit including a travel switch, a third relay, and a fourth relay;
the travel switch is connected with a third coil of the third relay in series to form a fourth assembly, a third normally closed contact of the third relay is connected with a second normally open contact of the second relay and a fourth coil of the fourth relay in series to form a fifth assembly, and a fourth normally closed contact of the fourth relay is connected with a power supply switch in series;
the fourth component and the fifth component are connected in parallel to form the circuit breaking circuit;
the power supply is connected in series with the circuit interrupting circuit.
The utility model discloses a second aspect provides a film equipment, including organism and the voltage detection warning circuit of setting in the organism, voltage detection warning circuit includes power, current transformer, first relay, second relay and alarm device, wherein:
a first coil of the first relay is connected with the current transformer in series to form a first assembly, a first normally open contact of the first relay is connected with a second coil of the second relay in series to form a second assembly, and a second normally open contact of the second relay is connected with the alarm device in series to form a third assembly;
the first assembly, the first assembly and the third assembly are connected in parallel to form a detection circuit;
the power supply is connected with the detection circuit in series to form the voltage detection alarm circuit;
the alarm device is arranged outside the machine body.
In one possible embodiment, the alarm device comprises a warning light and an audio device.
In one possible embodiment, the film device further comprises a cover and a circuit breaker, the cover being rotatably disposed on the body;
the circuit breaker circuit comprises a travel switch, a third relay and a fourth relay;
the travel switch is connected with a third coil of the third relay in series to form a fourth assembly, a third normally closed contact of the third relay is connected with a second normally open contact of the second relay and a fourth coil of the fourth relay in series to form a fifth assembly, and a fourth normally closed contact of the fourth relay is connected with a power supply switch of the machine body in series;
the fourth component and the fifth component are connected in parallel to form the circuit breaking circuit;
the power supply is connected in series with the circuit breaker, and the trigger part of the travel switch is arranged between the machine body and the machine cover.
In one possible embodiment, the travel switch comprises a microswitch.
In a possible embodiment, a sealing means is provided between the cover and the body.
In a possible embodiment, the sealing means comprise a sealing rubber strip.
Compared with the prior art, the method has the following beneficial effects: the high-voltage protection device for the thin film equipment is provided with a voltage detection alarm circuit, after a cover of the thin film equipment is opened, if high voltage exists in a working cabin of the thin film equipment, the high voltage in the working cabin can be detected through a current transformer in the voltage detection alarm circuit, so that a signal is given to a first coil of a first relay, a first normally open contact of the first relay is closed, a second coil of a second relay connected in series with the first normally open contact of the first relay is electrified, a second normally open contact of the second relay is closed, an alarm device connected in series with the normally open contact of the second relay works, and an operator is prompted to pay attention to safety through sound and/or light of the alarm device; the power supply of the machine body can be further cut off through a circuit breaking circuit connected with the voltage detection alarm circuit in series, so that the aim of eliminating high voltage is fulfilled. The utility model discloses the risk that the operating personnel that can effectively avoid the film equipment electrocuted.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a circuit diagram of a thin film device high voltage protection device of the present application;
FIG. 2 is a front view of the thin film apparatus of the present application;
FIG. 3 is a left side view of the structure of the thin film apparatus of the present application;
an icon: the system comprises a 1-travel switch, a 2-current transformer, a 3-alarm device, a 4-power supply switch, a 5-thin film machine, a 51-machine cover, a 52-machine body, a K1-first relay, a K11-first coil, a K12-first normally open contact, a K2-second relay, a K21-second coil, a K122-second normally open contact, a K3-third relay, a K31-third coil, a K32-third normally closed contact, a K4-fourth relay, a K41-fourth coil and a K42-fourth normally closed contact.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience of describing the present application and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "suspended" and the like do not imply that the components are absolutely horizontal or suspended, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present application, it is further noted that, unless expressly stated or limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
The following describes in detail embodiments of the present invention with reference to the accompanying drawings.
In order to solve the technical problem in the foregoing background art, referring to fig. 1, fig. 2 and fig. 3, an embodiment of the present application provides a thin film device high voltage protection apparatus, including a voltage detection alarm circuit, where the voltage detection alarm circuit includes a power supply, a current transformer 2, a first relay K1, a second relay K2 and an alarm device 3, where:
the first coil K11 of the first relay K1 is connected with the current transformer 2 in series to form a first assembly, and the first detection assembly is a signal input end of the device. The current transformer 2 is arranged in a working cabin of the film machine 5, when the current transformer 2 detects that high voltage exists in the working cabin, the current transformer 2 forms a passage, so that the first coil K11 of the first relay K1 is electrified, and the first normally open contact K12 of the first relay K1 is closed.
First normally open contact K12 of first relay K1 with second relay K2's second coil K21 series connection forms the second subassembly, and after above-mentioned first normally open contact K12 of first relay K1 was closed, second relay K2's second coil K21 who establishes ties with first normally open contact K12 of first relay K1 got electric to make second relay K2's second normally open contact K22 closed.
The second normally open contact K22 of the second relay K2 is connected with the alarm device 3 in series to form a third assembly, and after the second normally open contact K22 of the second relay K2 is closed, the alarm device 3 connected with the second normally open contact K22 of the second relay K2 in series is electrified, so that the alarm device 3 works. The alarm device is used for warning the attention of operators, and the alarm device can include, but is not limited to, a visual warning device, such as a warning light sign, a flashing light or an LED light; the alarm device may also include, but is not limited to, an audible warning device, such as a buzzer, a speaker, or other audio device.
The first assembly, the second assembly and the third assembly are connected in parallel to form a detection circuit for detecting whether high pressure exists in a working cabin of the film machine.
The power supply and the detection circuit are connected in series to form the voltage detection alarm circuit, and the voltage detection alarm circuit is used for alarming when the working cabin of the film machine has high voltage.
In one possible embodiment, the high-voltage protection device for the thin-film device further comprises a circuit breaker, wherein the circuit breaker comprises a travel switch 1, a third relay K3 and a fourth relay K4;
the travel switch 1 is connected in series with the third coil K31 of the third relay K3 to form a fourth component, the travel switch 1 is used for detecting whether the cover 51 of the film machine 5 is opened, and the travel switch 1 may include, but is not limited to, a micro switch.
A third normally closed contact K32 of the third relay K3 is connected with a second normally open contact K22 of the second relay K2 and a coil of the fourth relay K4 in series to form a fifth assembly, and a normally closed contact of the fourth relay K4 is connected with a power supply switch 4 in series;
the fourth component and the fifth component are connected in parallel to form the circuit breaking circuit;
the power supply is connected in series with the circuit interrupting circuit.
When high voltage exists in the working chamber of the film machine 5, in the process of opening the cover 51, the travel switch 1 is opened, so that the third coil K31 of the third relay K3 connected with the travel switch 1 in series is not electrified, and the third normally closed contact K32 of the third relay K3 is closed; under the highly compressed condition exists in the work cabin of film machine 5, second relay K2's second normally open contact K22 is closed, thereby make third relay K3's third normally closed contact K32 and fourth relay K4's coil pass through second relay K2's second normally open contact K22 and form the route, and then make fourth relay K4's fourth coil K41 to get electric, and then make the fourth normally closed contact K42 disconnection with fourth relay K4, make the power supply circuit of film machine 5 who establishes ties with fourth relay K4's fourth normally closed contact K42 open circuit, film machine 5 loses electric stop work.
The circuit breaker can cut off the power supply circuit of the film machine 5 in time under the condition that the cover 51 of the film machine 5 is opened and when high voltage exists in the working chamber of the film machine 5, the life safety of an operator is guaranteed, and the power supply of the film machine 5 can also be cut off forcibly through the power supply switch 4 of the film machine 5.
When the circuit breaker is connected with the voltage detection alarm circuit in parallel, the high-voltage protection device for the film equipment has the functions of cutting off the high voltage of the film machine 5 under the condition that the machine cover 51 is opened and giving an alarm under the condition that the machine cover 51 is closed.
In embodiment 2 of the present application, referring to fig. 1 to 3, there is provided a film device 5 including a body 52 and a voltage detection alarm circuit provided in the body 52, the voltage detection alarm circuit including a power supply, a current transformer 2, a first relay K1, a second relay K2, and an alarm device 3, wherein:
the first coil K11 of the first relay K1 is connected with the current transformer 2 in series to form a first assembly, and the first detection assembly is a signal input end of the device. The current transformer 2 is arranged in a working cabin of the film machine 5, when the current transformer 2 detects that high voltage exists in the working cabin, the current transformer 2 forms a passage, so that the first coil K11 of the first relay K1 is electrified, and the first normally open contact K12 of the first relay K1 is closed.
First normally open contact K12 of first relay K1 with second relay K2's second coil K21 series connection forms the second subassembly, and after above-mentioned first normally open contact K12 of first relay K1 was closed, second relay K2's second coil K21 who establishes ties with first normally open contact K12 of first relay K1 got electric to make second relay K2's second normally open contact K22 closed.
The second normally open contact K22 of the second relay K2 is connected with the alarm device 3 in series to form a third assembly, and after the second normally open contact K22 of the second relay K2 is closed, the alarm device 3 connected with the second normally open contact K22 of the second relay K2 in series is electrified, so that the alarm device 3 works. The alarm device is used for warning the attention safety of operators, and the alarm device can include, but is not limited to, a visual warning device, such as a warning light sign, a flashing light or an LED light; the alarm device may also include, but is not limited to, an audible warning device, such as a buzzer, a speaker, or other audio device.
The first assembly, the second assembly and the third assembly are connected in parallel to form a detection circuit for detecting whether high pressure exists in a working cabin of the film machine.
The power supply and the detection circuit are connected in series to form the voltage detection alarm circuit, and the voltage detection alarm circuit is used for alarming when the working cabin of the film machine has high voltage. The alarm device is disposed outside the body 52.
In a possible embodiment, the thin film device further comprises a cover 51 and a breaking circuit, the cover 51 being rotatably disposed on the body 52;
the circuit breaking circuit comprises a travel switch 1, a third relay K3 and a fourth relay K4;
the travel switch 1 is connected in series with a third coil K31 of the third relay K3 to form a fourth component, the travel switch 1 is used for detecting whether a cover 51 of the film machine 5 is opened, and the travel switch 1 can include, but is not limited to, a micro switch; the trigger part of the travel switch 1 is provided between the body 52 and the cover 51.
A third normally closed contact K32 of the third relay K3 is connected in series with a second normally open contact K22 of the second relay K2 and a fourth coil K41 of the fourth relay K4 to form a fifth assembly, and a normally closed contact K42 of the fourth relay K4 is connected in series with a power supply switch 4 of the machine body 52;
the fourth component and the fifth component are connected in parallel to form the circuit breaking circuit;
the power supply is connected in series with the circuit breaking circuit to supply power to the circuit breaking circuit.
When high voltage exists in the working chamber of the film machine 5, in the process of opening the cover 51, the travel switch 1 is opened, so that a third coil K31 of a third relay K3 connected with the travel switch 1 in series is not electrified, and a third normally closed contact K32 of the third relay K3 is closed; under the circumstances that there is the hyperbaric in the work cabin of film machine 5, second relay K2's second normally open contact K22 is closed, thereby make third relay K3's third normally closed contact K32 and fourth relay K4's fourth coil K41 pass through second relay K2's second normally open contact K22 and form the route, and then make fourth relay K4's fourth coil K41 electrified, and then make and fourth relay K4's normally closed contact K42 disconnection, make the power supply circuit of film machine 5 who establishes ties with fourth relay K4's normally closed contact K42 open circuit, film machine 5 loses the electricity stop work.
The circuit breaker can cut off the power supply circuit of the film machine 5 in time when high voltage exists in the working cabin of the film machine 5 under the condition of opening the cover 51 of the film machine 5, so that the life safety of an operator is guaranteed, and the power supply of the film machine 5 can also be cut off forcibly through the power supply switch 4 of the film machine 5.
When the circuit breaker is connected with the voltage detection alarm circuit in parallel, the high-voltage protection device for the film equipment has the functions of cutting off the high voltage of the film machine 5 under the condition that the machine cover 51 is opened and giving an alarm under the condition that the machine cover 51 is closed.
Since the trigger of the travel switch 1 is arranged between the cover 51 and the body 52, the presence of the trigger results in a gap between the cover 51 and the body 52, and in order to improve the tightness of the film device 5, in a possible embodiment, a sealing means is arranged between the cover 51 and the body 52. The sealing means may include, but is not limited to, a sealing rubber strip, a sponge strip, a sealing curtain, or the like.
To sum up, the high-voltage protection device for the thin-film equipment has the voltage detection alarm circuit, after the cover of the thin-film equipment is opened, if high voltage exists in the working cabin of the thin-film equipment, the high voltage in the working cabin can be detected through the current transformer in the voltage detection alarm circuit, so that a signal is given to the first coil of the first relay, the first normally open contact of the first relay is closed, the second coil of the second relay connected in series with the first normally open contact of the first relay is electrified, the second normally open contact of the second relay is closed, the alarm device connected in series with the normally open contact of the second relay works, and operators are prompted to pay attention to safety through sound and/or light of the alarm device; the power supply of the machine body can be further cut off through a circuit breaking circuit connected with the voltage detection alarm circuit in series, so that the aim of eliminating high voltage is fulfilled. The utility model discloses the risk that the operating personnel that can effectively avoid the film equipment electrocuted.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising one of 8230; \8230;" 8230; "does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
The above description is only for various embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present application, and all such changes or substitutions are included in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a film equipment high voltage protection device which characterized in that, includes voltage detection alarm circuit, voltage detection alarm circuit includes power, current transformer (2), first relay (K1), second relay (K2) and alarm device (3), wherein:
a first coil (K11) of the first relay (K1) is connected with the current transformer (2) in series to form a first assembly, a first normally open contact (K12) of the first relay (K1) is connected with a second coil (K21) of the second relay (K2) in series to form a second assembly, and a second normally open contact (K22) of the second relay (K2) is connected with the alarm device (3) in series to form a third assembly;
the first assembly, the second assembly and the third assembly are connected in parallel to form a detection circuit;
the power supply is connected with the detection circuit in series to form the voltage detection alarm circuit.
2. The thin-film device high-voltage protection device as claimed in claim 1, wherein the alarm device (3) comprises a warning light and an audio device.
3. The thin film equipment high voltage protection device according to claim 1, further comprising a circuit breaker circuit comprising a travel switch (1), a third relay (K3) and a fourth relay (K4);
the travel switch (1) is connected with a third coil (K31) of a third relay (K3) in series to form a fourth assembly, a third normally closed contact (K32) of the third relay (K3) is connected with a second normally open contact (K22) of the second relay (K2) and a fourth coil (K41) of a fourth relay (K4) in series to form a fifth assembly, and a fourth normally closed contact (K42) of the fourth relay (K4) is connected with a power supply switch (4) in series;
the fourth component and the fifth component are connected in parallel to form the circuit breaking circuit;
the power supply is connected in series with the circuit interrupting circuit.
4. The thin film device high voltage protection arrangement according to claim 3, characterized in that the travel switch (1) comprises a micro switch.
5. A film device (5) comprising a body (52) and a voltage detection alarm circuit disposed in the body (52), the voltage detection alarm circuit comprising a power supply, a current transformer (2), a first relay (K1), a second relay (K2) and an alarm means (3), wherein:
a first coil (K11) of the first relay (K1) is connected with the current transformer (2) in series to form a first assembly, a first normally open contact (K12) of the first relay (K1) is connected with a second coil (K21) of the second relay (K2) in series to form a second assembly, and a second normally open contact (K22) of the second relay (K2) is connected with the alarm device (3) in series to form a third assembly;
the first assembly, the first assembly and the third assembly are connected in parallel to form a detection circuit;
the power supply is connected with the detection circuit in series to form the voltage detection alarm circuit;
the alarm device is arranged outside the machine body (52).
6. The film apparatus according to claim 5, wherein the alarm device (3) comprises a warning light and an audio device.
7. The film apparatus according to claim 5, further comprising a cover (51) and a circuit breaking circuit, the cover (51) being rotatably disposed on the body (52);
the circuit breaking circuit comprises a travel switch (1), a third relay (K3) and a fourth relay (K4);
the travel switch (1) is connected with a third coil (K31) of a third relay (K3) in series to form a fourth assembly, a third normally closed contact (K32) of the third relay (K3) is connected with a second normally open contact (K22) of the second relay (K2) and a fourth coil (K41) of a fourth relay (K4) in series to form a fifth assembly, and a fourth normally closed contact (K42) of the fourth relay (K4) is connected with a power supply switch (4) of a machine body (52) in series;
the fourth component and the fifth component are connected in parallel to form the circuit breaking circuit;
the power supply is connected in series with the circuit breaker, and the trigger part of the travel switch (1) is arranged between the machine body (52) and the machine cover (51).
8. A membrane device according to claim 7, characterized in that the travel switch (1) comprises a microswitch.
9. Film apparatus according to claim 7, characterized in that sealing means are provided between said cover (51) and said body (52).
10. The film apparatus of claim 9, wherein said sealing means comprises a sealing rubber strip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221944484.1U CN217891582U (en) | 2022-07-26 | 2022-07-26 | High-voltage protection device of film equipment and film equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221944484.1U CN217891582U (en) | 2022-07-26 | 2022-07-26 | High-voltage protection device of film equipment and film equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217891582U true CN217891582U (en) | 2022-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221944484.1U Active CN217891582U (en) | 2022-07-26 | 2022-07-26 | High-voltage protection device of film equipment and film equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217891582U (en) |
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2022
- 2022-07-26 CN CN202221944484.1U patent/CN217891582U/en active Active
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