CN217888865U - Target cleaning device - Google Patents

Target cleaning device Download PDF

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Publication number
CN217888865U
CN217888865U CN202221843204.8U CN202221843204U CN217888865U CN 217888865 U CN217888865 U CN 217888865U CN 202221843204 U CN202221843204 U CN 202221843204U CN 217888865 U CN217888865 U CN 217888865U
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CN
China
Prior art keywords
cleaning
washing
connecting rod
tank
washing tank
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Active
Application number
CN202221843204.8U
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Chinese (zh)
Inventor
常代展
王雷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Haitai Optoelectronic Materials Technology Co.,Ltd.
Original Assignee
Jiangsu Haitai Photoelectric Material Technology Co ltd
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Priority to CN202221843204.8U priority Critical patent/CN217888865U/en
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Publication of CN217888865U publication Critical patent/CN217888865U/en
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Abstract

The utility model discloses a target cleaning device, including the washing tank, be equipped with a plurality of wiper mechanisms in the washing tank, the wiper mechanism includes the connecting rod, the both sides swing joint of connecting rod has the bending connecting rod, bending connecting rod end connection has the cleaning brush, the pivot of cleaning brush is connected to the rotating electrical machines, can place a plurality of cleaning boxes in the washing tank, the cleaning box is placed between two wiper mechanisms, the periphery and the bottom of cleaning box are latticed, top opening, and each cleaning box's both sides all are equipped with the hangers, the hangers are placed in the washing tank both sides; the utility model discloses simple structure, the modern design carries out the degree of depth to the target and washs, and a plurality of targets can be once washd to this device, and the cleaning efficiency is high, and the effect is good.

Description

Target cleaning device
Technical Field
The utility model relates to a target washs technical field, specifically is a target belt cleaning device.
Background
The target material is used as a target material for high-speed charged particle bombardment, if oil stains, dust and other impurities are attached to the surface of the target material, the film forming efficiency and the quality of a formed coating film can be influenced, so that wafers are scrapped, when foreign matters such as powder and granular impurities are attached to the surface of the target material, arc discharge can be generated, the quality of the formed coating film is reduced, the qualified rate of products is reduced, the production cost is increased, the existing target material cleaning device is mostly a single target material cleaning device, the cleaning efficiency is low, and the requirement on the production efficiency of the target material at the present stage can not be met.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a target belt cleaning device to solve the problem that proposes among the above-mentioned background art. In order to achieve the above purpose, the utility model provides a following technical scheme: a target cleaning device comprises a cleaning tank, wherein a plurality of cleaning mechanisms are arranged in the cleaning tank, each cleaning mechanism comprises a connecting rod, two sides of each connecting rod are movably connected with a bending connecting rod, the end part of each bending connecting rod is connected with a cleaning brush, and a rotating shaft of each cleaning brush is connected to a rotating motor; the cleaning tank is characterized in that a plurality of cleaning boxes can be placed in the cleaning tank, the cleaning boxes are placed between two cleaning mechanisms, the periphery and the bottom of each cleaning box are latticed and are provided with top openings, and each cleaning box is provided with hanging lugs on two sides, and the hanging lugs are placed on two sides of the cleaning tank.
Preferably, be equipped with water inlet and outlet on the washing tank, be connected with the inlet tube on the water inlet, be equipped with the control valve on the inlet tube, advance water piping connection in water tank, be connected with the drain pipe on the outlet, drain piping connection is in the suction pump.
Preferably, a washing mouth is arranged on the washing tank, a plurality of washing pipes are connected to the washing mouth, and each washing pipe extends into the washing tank.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses simple structure, the modern design utilizes reasonable mechanical structure, the inherent potentiality of each key element of ingenious performance, this device has set up a plurality of washing boxes of placing the target, the connecting rod of buckling in the wiper mechanism is mobilizable, make the cleaning brush stretch into in the washing box, drive the high-speed rotation of cleaning brush through the rotating electrical machines, carry out the physics to the surface of the target placed in the washing box and clean, and the cooperation of cleaner is added, carry out the deep washing to the target, this device can wash a plurality of targets once, and the cleaning efficiency is high, and the effect is good;
the cleaning box is placed in the cleaning tank through the hangers at two sides, can be conveniently taken out of the cleaning tank, and the grid design at the periphery can ensure that no water is accumulated when the cleaning box is taken out of the cleaning tank, so that the target material is conveniently taken;
the water in the cleaning tank can be replaced in time through the water tank connected with the water inlet pipe and the water suction pump connected with the water outlet pipe, so that sewage can be discharged in time, and the cleaning effect is guaranteed.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a top view of the main structure of the present invention;
FIG. 3 is a schematic view of the structure of the cleaning box of the present invention;
fig. 4 is a schematic view of the cleaning mechanism of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Referring to fig. 1, the present invention provides a technical solution: a target cleaning device comprises a cleaning tank 1, wherein a plurality of cleaning mechanisms 2 are arranged in the cleaning tank 1, each cleaning mechanism 2 comprises a connecting rod 21, two sides of each connecting rod 21 are movably connected with a bending connecting rod 22, the end part of each bending connecting rod 22 is connected with a cleaning brush 23, the rotating shaft of each cleaning brush 23 is connected to a rotating motor 24, and after the rotating motor 24 is started, the cleaning brushes 23 can rotate; can place a plurality of washing boxes 3 in the washing tank 1, washing box 3 places between two wiper mechanism 2, be latticed, open-top all around and the bottom of washing box 3, put into washing box 3 with the target, washing brush 23 can stretch into washing box 3, cleans the target, every the both sides of washing box 3 all are equipped with hangers 31, hangers 31 place in washing tank 1 both sides, conveniently take and wash box 3, can filter out the water in the washing tank 2 when taking out washing box 3 to be ready for subsequent operation.
In this embodiment, be equipped with water inlet 4 and outlet 5 on the washing tank 1, be connected with inlet tube 41 on the water inlet 4, be equipped with control valve 42 on the inlet tube 41, inlet tube 41 is connected in water tank 43, extracts the water that washs the target needs from water tank 43, be connected with drain pipe 51 on the outlet 5, drain pipe 51 is connected in suction pump 52, and the sewage that finishes of cleaning is discharged from outlet 5 through drain pipe 51.
In this embodiment, a washing mouth 6 is arranged on the washing tank 1, the washing mouth 6 is connected with a plurality of washing tubes 61, and each washing tube 61 extends into the washing tank 1 to complete deep cleaning of the target material by chemical washing and physical washing.
The working principle is as follows: firstly, lifting a bending connecting rod, putting a target material to be cleaned into a cleaning box, putting the cleaning box between cleaning mechanisms, putting lugs at two sides of the cleaning box above a cleaning tank shell, pressing down the bending connecting rod, extending the cleaning brush into the cleaning box to be contacted with the surface of the target material, pouring a cleaning agent into a cleaning agent port, allowing the cleaning agent to enter the cleaning tank through a cleaning agent pipe, opening a control valve, allowing water in a water tank to enter the cleaning tank through a water inlet pipe, starting a rotating motor to operate to drive the cleaning brush to rotate, simultaneously mixing the cleaning agent with the water, deeply cleaning the surface of the target material, after cleaning is finished, opening a water suction pump, discharging sewage from a drain pipe, and repeatedly performing water inlet and pumping operation to wash away cleaning agent residues on the surface of the target material; and after the cleaning is finished, taking the cleaning box out of the cleaning tank for draining for subsequent treatment.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (3)

1. A target cleaning device comprises a cleaning tank (1), and is characterized in that: a plurality of cleaning mechanisms (2) are arranged in the cleaning tank (1), each cleaning mechanism (2) comprises a connecting rod (21), two sides of each connecting rod (21) are movably connected with a bent connecting rod (22), the end part of each bent connecting rod (22) is connected with a cleaning brush (23), and the rotating shaft of each cleaning brush (23) is connected to a rotating motor (24); can place a plurality of washing boxes (3) in washing tank (1), place washing box (3) between two wiper mechanism (2), be latticed, open-top all around washing box (3) with the bottom, every the both sides of washing box (3) all are equipped with hangers (31), hangers (31) are placed in washing tank (1) both sides.
2. A target cleaning apparatus according to claim 1, wherein: be equipped with water inlet (4) and outlet (5) on washing tank (1), be connected with inlet tube (41) on water inlet (4), be equipped with control valve (42) on inlet tube (41), inlet tube (41) are connected in water tank (43), be connected with drain pipe (51) on outlet (5), drain pipe (51) are connected in suction pump (52).
3. The target cleaning apparatus according to claim 1, wherein: be equipped with lotion mouth (6) on washing tank (1), be connected with a plurality of lotion pipes (61) on lotion mouth (6), every lotion pipe (61) all stretch into in washing tank (1).
CN202221843204.8U 2022-07-18 2022-07-18 Target cleaning device Active CN217888865U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221843204.8U CN217888865U (en) 2022-07-18 2022-07-18 Target cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221843204.8U CN217888865U (en) 2022-07-18 2022-07-18 Target cleaning device

Publications (1)

Publication Number Publication Date
CN217888865U true CN217888865U (en) 2022-11-25

Family

ID=84134948

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221843204.8U Active CN217888865U (en) 2022-07-18 2022-07-18 Target cleaning device

Country Status (1)

Country Link
CN (1) CN217888865U (en)

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Address after: No. 88, Yanghai Line, Shizong Town, Tongzhou District, Nantong City, Jiangsu Province, 226000

Patentee after: Jiangsu Haitai Optoelectronic Materials Technology Co.,Ltd.

Country or region after: China

Address before: No. 88, Yanghai Line, Shizong Town, Tongzhou District, Nantong City, Jiangsu Province, 226000

Patentee before: Jiangsu Haitai photoelectric material technology Co.,Ltd.

Country or region before: China